COMPACT FLOW RATE CONTROLLER FCM SERIES CC-793A 7

Transcription

1 COMPACT FLOW RATE CONTROLLER FCM SERIES CC-793A 7

2 Micro processed sensor chip for quick response is equipped High accuracy and multi-function are achieved by mounting microcomputer Stainless steel body Applicable fluid and flow rate to 50 l/min to 50 l/min to 10 l/min 0.06 to 20 l/min Weight: approx. 480 g Rectification structure with improved low pressure loss and reproducibility Resin body Applicable fluid and flow rate to 100 l/min Weight: approx. 200 g Compact flow rate controller FCM Series

3 Compact flow rate sensor FSM, gathered technologies of compact solenoid valve. High performance and economic efficiency for all of sensor function, proportional control function, valve function, to satisfy various purposes Compact flow rate controller FCM Series. Compatible with different fluids Applicable fluid: various gas including air, nitrogen, argon, oxygen, methane, propane. Now hydrogen and helium are added to the applicable fluid. This controller can be used with a diverse range of applications. Low differential pressure models are added Flow rate control for combustion gas whose supplying pressure is low (for example,fire control of burner) is now possible. Compact and light weight Dimensions: (depth lateral width). It can be installed in narrow space or moving section, and helps to make equipments more compact and light. Volume Approx. 30% compared to conventional model Weight Approx. 20% compared to conventional model 0.5 s high-speed control High-speed control of 0.5sec is possible with adopting platinum sensor chip on which silicon micro machining is applied. Various purposes will be fulfilled. Input signal Analog output (%FS) Time (sec) Dedicated electric power is not required Power supply voltage is 24 VDC. It operates with general single electric power. Highly trusted flow rate control Reproducibility, which impacts on flow rate control is improved by our unique rectification structure. RoHS compliant Repeatability ±1% F.S. Accuracy ±3% F.S. Harmful substances such as lead and hexavalent chrome that adversely affect the global environment are never used in the materials. Mounted digital display, which allows us to see control status at a glance Flow rate value is digital displayed in 3 digits As well as error display, output status (switch output ON-OFF) is displayed. Output display 3-digit number LED display Flip vertical display is selectable according to installed direction (optional) Parallel input type is available as standard Controllable with parallel input (ON/OFF signal of PLC etc., 10bit resolution 1024). Analog input/output device including D/A converter etc. is not necessary. Microcomputer realizes multi-function Error display function Notifies error events with display and electric signal. Zero/span adjustment function Zero span of input signal can be adjusted as you like. Preset input function When four random flow rate points are set, the flow rate is controlled by inputting a 2-bit signal from an external source (signals from PLC, etc.). Direct memory function Even if input signals from an external source are not used, control flow rate is freely adjusted with controller operation keys. Switch output function Switch output function with setting upper/lower limitations of flow rate is equipped. (over current protect is built-in) Flow rate integration function Flow rate integration display (up to 6 digits) and pulse output for integration are available. Auto shutdown function Valves are shutdown automatically at the time of error or emergency. Specifications 1 Explanation Dimensions 7 Operation of functions 12 method 25

4 Examples of applications Useful in different fields This compact flow rate controller is used for different applications including machinery, automobile, and precision device fields, advanced fields such as semiconductors and biotechnology, medicine and food. Applicable fluid Flow rate (l/min) Semiconductor Wire bonding Appropriate for wire bonding tension control requiring high accuracy. Dry air Liquid crystal Glass floating transport Appropriate for floating (non-contact) transport of large FPD glass, etc. N2 Liquid crystal Ionizer purge gas flow rate control Compatibility with different flow rate ranges enables air flow rates to be controlled. Food Adding and packaging Ideal for adding inert gas for food packages, etc. N2 gas control for laser oscillator and semiconductor manufacturing equipment. Semiconductor Purge gas flow rate control Compatibility with different flow rate ranges. The flow rate of purge gas, etc., is controlled. Ar O2 Combustion gas Automobile, etc. Glass processing Burner flame control The low-pressure gas supply enables burner flame, etc., to be controlled. Control of argon gas flow rate for welding This controller can handle a variety of flow ranges enabling the flow rate of argon gas for welding to be controlled. H2

5 FCM Series Applicable fluid and flow rate control ranges Gas type Gas type Gas type Air type Model No. FCM-9500 AI FCM-0001 AI FCM-0002 AI FCM-0005 AI FCM-0010 AI FCM-0020 AI FCM-0050 AI FCM-0100 AI (only resin type) FCM-9500 AR FCM-0001 AR FCM-0002 AR FCM-0005 AR FCM-0010 AR FCM-0020 AR FCM-0050 AR FCM-9500 O2/LN/C1/C3 FCM-0001 O2/LN/C1/C3 FCM-0002 O2/LN/C1/C3 FCM-0005 O2/LN/C1/C3 FCM-0010 O2/LN/C1/C3 FCM-0002 H2/HE FCM-0005 H2/HE FCM-0010 H2/HE FCM-0020 H2/HE Applicable fluid AIR Air N2 Nitrogen Ar Argon O2 Oxygen 13A City gas CH4 Methane C3H8 Propane Hydrogen Helium Flow rate control range ( /min) to to to to to to to 50 3 to to to to to to to to to to to to to to to to to 20 Body material Resin SUS SUS SUS SUS Port size Resin ø6 push in ø8 push in SUS Rc1/4 9/16-18 UNF Rc1/4 9/16-18 UNF Rc1/4 9/16-18 UNF Rc1/4 9/16-18 UNF 1/4" double barbed joint 1/4" JXR male joint Input/output specifications bit bit bit bit Input Input signal: Specifications Analog: 0 to 10 V Pre-set: 4 points (2bit) (Note) Analog: 0 to 5 V Pre-set: 4 points (2bit) (Note) Analog: 4 to 20 ma Pre-set: 4 points (2bit) (Note) Parallel: 10bit Model No. FCM-*-*0AN FCM-*-*0AP FCM-*-*0SN FCM-*-*0SP FCM-*-*1AN FCM-*-*1AP FCM-*-*1SN FCM-*-*1SP FCM-*-*2AN FCM-*-*2AP FCM-*-*2SN FCM-*-*2SP FCM-*-*PAN FCM-*-*PAP FCM-*-*PSN FCM-*-*PSP Output type NPN PNP NPN PNP NPN PNP NPN PNP Analog Switch Analog Switch Analog Switch Analog Switch Output Specifications 1 to 5 V NPN PNP 1 to 5 V NPN PNP 1 to 5 V NPN PNP 1 to 5 V Note: Preset 8-point (3-bit) input is used customized. The external integration reset signal input cannot be used. Contact your CKD Sales Office for details. NPN PNP Error output NPN PNP NPN PNP NPN PNP NPN PNP NPN PNP NPN PNP NPN PNP NPN PNP

6 Compact flow rate controller FCM Series For air, nitrogen, argon, oxygen, city gas, methane, propane (flow rate range: 0.5 to 100l/min) For hydrogen, helium (flow rate range: 0 to 20l/min) 1 For air, nitrogen, argon, oxygen, city gas, methane, propane FCM series Specifications Descriptions FCM-[*1] [*2]-[*3] [*4] [*5] Valve drive type Proportional solenoid valve When not energized: Closed Flow rate range AI (air, nitrogen) AR (argon) O2 (oxygen) LN (city gas) C1 (methane) C3 (propane) to 500ml/min to 1l/min to 2l/min to 5l/min to 10l/min Full scale flow rate to 20l/min * to 50l/min Note to 100 l/min (only resin type) L to 500ml/min L to 1l/min L to 2l/min L to 5l/min L to 10l/min AI Compressed air, nitrogen AR Argon Applicable fluid O2 Oxygen (oil-prohibit specifications) *2 Note 2 LN City gas (13A) Note 3 C1 Methane (CH4 100%) C3 Propane (C3H8 100%) Standard model Low differential press. (only stainless steel) H6 ø6 push in, resin (excluding 50, 100l/min) Port size, H8 ø8 push in, resin *3 Body material 8A Rc1/4, stainless steel UF 9/16-18UNF, stainless steel Precision scope of guarantee 3 to 100% F.S. Response time * to 0020, L9500 to L0010 Within 0.5 sec at setting ±5%F.S. (TYP) 0050 to 0100 Within 1 sec at setting ±5%F.S. (TYP) Control Accuracy ±3% F.S. or less Repeatability ±1% F.S. or less Temperature characteristics ±0.1% F.S./ C or less (25 C standard) Pressure characteristics ±1%F.S. or less per 98kPa (standard differential pressure reference) Standard differential pressure Note 4 Refer to separate table. Operation differential rated pressure Note 5 Refer to separate table. Pressure H6/H8 (resin body) 490 kpa Proof pressure *3 8A/UF (SUS body) 980 kpa Ambient temperature and humidity 0 to 50 C, 90% RH or less (with no dew condensation) 0 0 to 10 VDC (6.7kΩ)/4 points (2bit) Input signal/ 1 0 to 5 VDC (10kΩ)/4 points (2bit) *4 Pre-set input 2 4 to 20 ma DC (250 Ω)/4 points (2bit) P Parallel 10bit/none Analog output: 1-5V (connected load impedance 500kΩ and over) AN Error output: NPN open collector output, 50mA or less, voltage drop 2.4V or less Input/output Analog output: 1-5V (connected load impedance 500kΩ and over) AP Error output: PNP open collector output, 50mA or less, voltage drop 2.4V or less Output signal *5 Switch output: NPN open collector output, 50mA or less voltage drop 2.4V or less SN Error output: NPN open collector output, 50mA or less, voltage drop 2.4V or less SP Switch output: PNP open collector output, 50mA or less, voltage drop 2.4V or less Error output: PNP open collector output, 50mA or less, voltage drop 2.4V or less Display method 3-digit 7-segment LED, display accuracy: control accuracy ± 1 digit Flow rate display Display range and resolution Refer to separate table. Integrating function Refer to separate table. Power supply Power supply voltage 24VDC±10% (stabilized power with ripple rate 2% or less) voltage Current consumption Note ma or less Mounting orientation Free Wetted area material *3 H6/H8 (resin body) Polyamide resin, fluoro rubber, stainless steel, alumina, silicon, solder 8A/UF (SUS body) Stainless steel, fluoro rubber, alumina, silicon, solder Weight *3 H6/H8 (resin body) Approx. 200g 8A/UF (SUS body) Approx. 480g Degree of protection IEC standards IP40 Protective circuit Note 6 Power reverse connection protection, switch output reverse connection protection, switch output load short-circuit protection EMC Directive EN55011, EN , EN /3/4/6/8

7 Pressure Standard differential pressure and operation differential pressure Note 4, 5 (Standard model) Applicable fluid *2 AI AR O2 LN/C1 C3 (Low differential pressure model) Applicable fluid *2 AI/O2 LN/C1 C3 Note 7 Display and integrating function Flow rate display Flow rate range *1 FCM Series Specifications Standard differential pressure (kpa) Operation differential pressure (kpa) 20 to to to to to to to to 350 Standard differential pressure (kpa) Operation differential pressure (kpa) 20 to to to to to to to 300 Standard differential pressure (kpa) Operation differential pressure (kpa) 20 to to to to to 250 Standard differential pressure (kpa) Operation differential pressure (kpa) 20 to to to to to 150 Standard differential pressure (kpa) Operation differential pressure (kpa) 20 to to to to to 150 Standard differential pressure (kpa) Operation differential pressure (kpa) Flow rate range *1 L9500 L0001 L0002 L0005 L L to 50 5 to 50 5 to 50 5 to to L L0002 Flow rate range * L L Display range 0 to 500ml/min 0.00 to 1.00l/min 0.00 to 2.00l/min 0.00 to 5.00l/min 0.0 to 10.0l/min 0.0 to 20.0l/min 0.0 to 50.0l/min 0 to 100l/min Display resolution 1ml/min 0.01l/min 0.01l/min 0.01l/min 0.1l/min 0.1l/min 0.1l/min 1l/min Integrating Display range ml l l l l l l l function Display resolution 1ml 0.01l 0.01l 0.01l 0.1l 0.1l 0.1l 1l Note 10 Pulse output rate 5ml 0.01l 0.02l 0.05l 0.1l 0.2l 0.5l 1l Note 1: Converted to volumetric flow rate at 20 C 1 barometric pressure (101 kpa). Also, full scale means the maximum flow rate within flow rate range. Note 2: When using for other than compressed air, use dry gas that does not contain corrosive elements such as chlorine, sulfur, or acids, and clean gas that does not contain dust or oil mist. When using compressed air, use clean air that complies to JIS B8392-1: 2012 (ISO : 2010) [1.1.1 to 1.6.2]. Compressed air from the compressor contains drainage (water, oxidized oil, foreign matter, etc.). Install a filter, air dryer (minimum pressure dew point: 10 C or less), and oil mist filter (maximum oil concentration: 0.1 mg/m 3 ) on the primary side of this product to maintain product functions. <Recommended circuit> Filter Oil mist filter (micro alescer) Pneumatics Air dryer Regulator pressure source <Recommended components> Air filter: F series Oil mist filter: M series FCM Series Note 3: City gas 13A is a value for methane (CH4) 88% gas. Note 4: Standard differential pressure is one at the product's calibration. (secondary side atmospheric release) Note 5: Operation differential pressure is necessary differential pressure for the product's normal actuation. It differs depending on flow rate range or applicable fluid. Also, the minimum value of operation differential pressure is necessary differential pressure, to flow full scale flow rate at secondary side atmospheric release. Note 6: This product s protective circuit is effective only against specific incorrect connections and load short circuits. It does not necessarily provide protection against all incorrect connections. Note 7: It is out of operation differential rated pressure, at low pressure line (1 to 2.5 kpa) of city gas. Note 8: Valve inside of this product cannot be used as a stop valve that has no leakage. Specifications allow leakage to a certain degree. Note 9: Output impedance for the analog output voltage is approximately 1KΩ. If the impedance of the connecting load is low, the margin of error and the output value will increase. Make sure to check the errors on connecting load impedance before use. Note 10: Integrated flow rate is a reference value. Also, it will be reset if power is turned off. Note 11: Current at 24 VDC, load not-connected, full scale flow rate. Current consumption varies with the load status. 2

8 FCM Series Hydrogen and helium FCM Series Specifications Descriptions Valve drive type FCM-[*1][*2]-[*3][*4][*5] Proportional solenoid valve When not energized: Closed Flow rate range H2 (Hydrogen) HE (helium) to 2 l/min Full scale flow to 5 l/min rate * to 10 l/min Note to 20 l/min Applicable fluid H2 Hydrogen *2 Note 2 HE Helium 8A Rc1/4 Port size *3 UF 9/16-18UNF 4S 1/4" double barbed joint 4RM 1/4" JXR male joint Precision scope of guarantee 3 to 100%F.S. Response time *1 Within 0.5 sec at setting ±5%F.S. (TYP) Control Accuracy ±3% F.S. or less Reproducibility ±1% F.S. or less Temperature characteristics ±0.2% F.S./ C or less (25 C standard) Pressure characteristics ±1%F.S. or less per 98kPa (standard differential pressure reference) Standard differential pressure Note 3 Refer to separate table. Pressure Operation differential rated pressure Note 4 Refer to separate table. Proof pressure 980kPa Ambient temperature and humidity 0 to 50 C, 90% RH or less (with no dew condensation) External leakage less than Pa m 3 /s (helium leak rate) 0 0 to 10 VDC (6.7kΩ)/4 point (2bit) Input signal/ 1 0 to 5 VDC (10kΩ)/4 point (2bit) *4 pre-set input 2 4 to 20 madc (250Ω)/4 point (2bit) P Parallel 10 bit/none Analog output: 1 to 5 V (connected load impedance 500 kω and over) AN Input/ Error output: NPN open collector output, 50 ma or less, voltage drop 2.4 V or less output Analog output: 1 to 5 V (connected load impedance 500 kω and over) AP Error output: PNP open collector output, 50 ma or less, voltage drop 2.4 V or less Output signal *5 Switch output: NPN open collector output, 50 ma or less voltage drop 2.4 V or less SN Error output: NPN open collector output, 50 ma or less, voltage drop 2.4 V or less SP Switch output: PNP open collector output, 50 ma or less, voltage drop 2.4 V or less Error output: PNP open collector output, 50 ma or less, voltage drop 2.4 V or less Flow rate Display method 3-digit 7-segment LED, display accuracy: control accuracy ±1 digit display Display range and resolution Refer to separate table. Integrating function Refer to separate table. Power supply Power supply voltage 24 VDC±10% (stabilized power with ripple rate 1% or less) voltage Current consumption Note 9 270mA or less Mounting orientation Free Wetted area material Stainless steel, fluoro rubber, alumina, silicon, solder Weight *3 8A/UF Approx. 480g 4S/4RM Approx. 560g Protection structure IEC standards IP40 Protection circuit Note 5 Power reverse connection protection, switch output reverse connection protection, switch output load short-circuit protection EMC Directive EN55011, EN , EN /3/4/6/8 3

9 Pressure Standard differential pressure and operation differential pressure Flow rate range *1 Applicable fluid *2 H2 HE Standard differential pressure (kpa) Operation differential pressure (kpa) Standard differential pressure (kpa) Operation differential pressure (kpa) Display and integrating function Flow rate display FCM Series Specifications to to to to to to to to 150 Flow rate range * Display range 0.00 to 2.00l/min 0.00 to 5.00l/min 0.0 to 10.0l/min 0.0 to 20.0l/min Display resolution 0.01l/min 0.01l/min 0.1l/min 0.1l/min Integrating Display range l l l l function Display resolution 0.01l 0.01l 0.1l 0.1l Note 8 Pulse output rate 0.02l 0.05l 0.1l 0.2l Note 1: Converted to volumetric flow rate at 20 C 1 barometric pressure (101 kpa). Also, full scale indicates the maximum flow rate within flow rate range. Note 2: When using for other than compressed air, use dry gas that does not contain corrosive elements such as chlorine, sulfur, or acids, and clean gas that does not contain dust or oil mist. Note 3: Standard differential pressure is one at the product's calibration. (secondary side atmospheric release) Note 4: Operation differential pressure is necessary differential pressure for the product's normal actuation. It differs depending on flow rate range or applicable fluid. Also, the minimum value of operation differential pressure is necessary differential pressure, to flow full scale flow rate at secondary side atmospheric release. Note 5: This product s protective circuit is effective only against specific incorrect connections and load short circuits. It does not necessarily provide protection against all incorrect connections. Note 6: Valve inside of this product cannot be used as a stop valve that has no leakage. Specifications allow leakage to a certain degree. Note 7: Output impedance for the analog output voltage is approximately 1KΩ. If the impedance of the connecting load is low, the margin of error and the output value will increase. Make sure to check the errors on connecting load impedance before use. Note 8: Integrated flow rate is a reference value. Also, it will be reset if power is turned off. Note 9: Current at 24 VDC, load not-connected, full scale flow rate. Current consumption varies with the load status. 4

10 FCM Series For air, nitrogen, argon, oxygen, city gas, methane, propane How to order FCM 9500 AI H6 0 AN R 1 B T Model No. I Traceability H Bracket 5 FCM AC1 A Flow rate range <Example of model No.> FCM-0001AI-H81ANR1BK Discrete option model B Applicable fluid C Port/body material Model: Small size flow rate controller FCM series A Flow rate range : 0 to 1 l/min B Applicable fluid : Compressed air, nitrogen C Port/body material : Push in (ø8), resin body D Input specifications : Analog 0 to 5 VDC E Output specifications : 1 to 5 V analog, error (NPN) F Display direction : Reverse direction G Cable : 1 m H Bracket : With bracket I Traceability : Inspection results included Note on model No. selection Note 1: Refer to the dimensions on page 7 for the 9/16-18UNF screw shape. Symbol AC1 AC3 PC1 PC3 LB1 D Input specifications Descriptions 9-conductor analog cable 1m 9-conductor analog cable 3m 15-conductor parallel cable 1m 15-conductor parallel cable 3m Bracket E Output specifications F Display direction G Cable Symbol A Flow rate range Applicable fluid L9500 L0001 L0002 L0005 L0010 B AI AR O2 LN C1 C3 Standard model Low differential press. (Only stainless steel) Applicable fluid AN AP SN SP F Blank R Cable G Blank 1 3 I Blank T K 0 to 0.5 l/min 0 to 1 l/min 0 to 2 l/min 0 to 5 l/min 0 to 10 l/min 0 to 20 l/min 0 to 50 l/min 0 to 100 l/min (only resin body) 0 to 0.5 l/min 0 to 1 l/min 0 to 2 l/min 0 to 5 l/min 0 to 10 l/min Descriptions AI AR Compressed air, nitrogen gas Argon Oxygen (oil-prohibit specifications) City gas (13A) Methane (CH4) Propane (C3H8) C Port/body material Applicable fluid AI Push in (ø6), resin body H6 (Excluding flow rate ranges 0050 and 0100) H8 Push in (ø8), resin body 8A Rc1/4, stainless steel body UF Note 1 9/16-18 UNF, stainless steel body D Input specifications 0 Analog 0 to 10 VDC 1 Analog 0 to 5 VDC 2 Analog 4 to 20 madc P Parallel 10bit E Output specifications 1 to 5 V analog error (NPN) 1 to 5 V analog error (PNP) Switch (NPN), error (NPN) Switch (PNP), error (PNP) Display direction Bracket H Blank B Positive direction Reverse direction None 1 m 3 m None With bracket Traceability AR None Traceability certificate, system diagram, inspection results included Inspection results included O2 O2 LN LN C1 C1 C3 C3

11 FCM Series How to order Hydrogen and helium How to order FCM 0002 H2 8A 0 AN R 1 B T Model no. <Example of model number> FCM-0002H2-8A1ANR1BK A Flow rate range : 0 to 2l/min B Applicable fluid : Hydrogen C Port : Rc1/4 D Input specification : Analogue 0-5 VDC E Output specification : 1 to 5 analogue, error (NPN) F Display direction : Reverse G Cable : 1m H Bracket : Bracket attached I Traceability : Certificate Discrete option model FCM AC1 A Flow rate range Symbol AC1 AC3 PC1 PC3 LB1 B Applicable fluid Descriptions 9-conductor analog cable 1m 9-conductor analog cable 3m 15-conductor parallel cable 1m 15-conductor parallel cable 3m Bracket C Port D Input specification E Output specifications F Display direction I Traceability H Bracket G Cable Symbol Descriptions A Flow rate range Applicable fluid H2 HE to 2 l/min to 5 l/min to 10 l/min to 20 l/min B Applicable fluid H2 Hydrogen HE Helium C Port Applicable fluid H2 HE 8A Rc1/4 UF 9/16-18UNF 4S 1/4" double barbed joint 4RM 1/4" JXR male joint D Input specification 0 Analog 0 to 10 VDC 1 Analog 0 to 5 VDC 2 Analog 4 to 20 madc P Parallel 10bit E Output specifications AN 1 to 5 V analog error (NPN) AP 1 to 5 V analog error (PNP) SN Switch (NPN), error (NPN) SP Switch (PNP), error (PNP) F Display direction Blank Positive direction R Reverse direction G Cable Blank None 1 1m 3 3m H Bracket Blank None B With bracket I Traceability Blank None T Traceability certificate, system diagram, inspection results included K Inspection results included 6

12 FCM Series Dimensions Body material: Resin, port size: ø6, ø8 FCM-*-H8/H6* The display direction is reverse for the FCM-*-*R*. 2-# 4-40UNC 16 D sub-connector 15 pin/plug Port size ø6 push-in joint or ø8 push-in joint 30 2-M3 depth 5 Body material: Stainless steel, port size: Rc1/4, 9/16-18UNF FCM-*-8A/UF The display direction is reverse for the FCM-*-*R*. 2-# 4-40UNC 16 D sub-connector 15 pin/plug /16-18UNF 2.5 Port size Rc1/4 or 9/16-18UNF ø15.6 Mesh filter Seal surface 12 9/16-18UNF Effective length of threaded part M3 depth 5 7

13 Dimensions FCM Series Dimensions Port size: 1/4" double barbed joint FCM-*-4S 2-#4-40UNC The display direction is reverse for the FCM-*-*R*. 16 D sub-connector 15 pin/plug 2-M3 depth 5 Port size: 1/4" JXR male joint FCM-*-4RM 2-#4-40UNC The display direction is reverse for the FCM-*-*R*. 16 D sub-connector 15 pin/plug (117.8) 30 Port size 1/4" JXR male joint (121.4) 30 Port size 1/4" double barbed joint 15 2-M3 depth 5 8

14 FCM Series Dedicated bracket (Floor installation type) Discrete model: FCM-LB1 4-R Weight: 28g Cable option dimension drawing 9-conductor cable for analog input type Discrete option model: FCM-AC1, AC3 Shield cable * Connect the shield cable to the power supply voltage- (0 V) φ R (φ10) (φ6) AWG Cable Weight g FCM-AC1 68 FCM-AC3 166 D sub socket pin no Insulator color Brown Orange Yellow - Red Gray White - Green Blue Black Name Pre-set input signal Type of input Bit 1 Bit 2 Integration reset signal Not used Power supply voltage+ +24 VDC Not used Not used Not used Not used Common 0 to 10 VDC Note: The No. 10 pin common is common for the preset input and integration reset signal (No. 1 to 3 pins). Input signal 0 to 5 VDC 4 to 20 madc Not used Not used Analog output 1 to 5 VDC Switch output NPN or PNP output Error output NPN or PNP output Power supply voltage- (0 V) 15-conductor cable for parallel input type Discrete option model: FCM-PC1, PC Shield cable * Connect the shield cable to the power supply voltage- (0 V) (φ10) (φ6.5) AWG Cable Weight g FCM-PC1 82 FCM-PC3 205 D sub socket pin no Insulator color Brown Orange Yellow Purple Name Parallel input signal Type of input Bit 1 Bit 2 Bit 3 Bit 4 Light Red blue Power supply voltage+ +24 VDC Pink White Red (with (with black line) black line) Parallel input signal Gray White Green (with black line) Parallel input signal Analog output Common Bit 5 Bit 6 Bit 7 Bit 8 Bit 9 Bit 10 1 to 5 VDC Note: The No. 10 pin common is common for the parallel input signal (No. 1 to 4, 6 to 9, 11, 12 pins). Green Blue Black Switch output Error output NPN or NPN or PNP PNP output output Power supply voltage- (0 V) 9

15 - Wiring method FCM-*-*0/1/2 AN* (Analog input, analog output + error output type NPN output) FCM-*-*0/1/2 AP* (Analog input, analog output + error output type PNP output) 5 pin (power supply voltage+) 5 pin (power supply voltage+) 11 pin (analog input) Signal generator 13 pin (monitor output) 1 pin (pre-set bit 1) 2 pin (pre-set bit 2) 14 pin (error output) Max. 50 ma Main circuit 3 pin (integrating reset) 10 pin (common) + Main circuit 11 pin (analog input) 1 pin (pre-set bit 1) Signal generator FCM Series Technical data Example of internal circuit and load connection, parallel input type Caution Care must be taken for mis-connection. Output short-circuit protection 13 pin (switch output) 2 pin (pre-set bit 2) Load Load Output short-circuit protection 14 pin (error output) 15 pin (power supply voltage -) Load Max. 50 ma Load 3 pin (integrating reset) 10 pin (common) 15 pin (power supply voltage -) FCM-*-*0/1/2 SN* (Analog input, switch output + error output type NPN output) FCM-*-*0/1/2 SP* (Analog input, switch output + error output type PNP output) 5 pin (power supply voltage+) 5 pin (power supply voltage +) 11 pin (analog input) 1 pin (pre-set bit 1) 2 pin (pre-set bit 2) Signal generator Output short-circuit protection 13 pin (switch output) 14 pin (error output) Max. 50 ma Max. 50 ma Main circuit 3 pin (integrating reset) 10 pin (common) + Main circuit 11 pin (analog input) 1 pin (pre-set bit 1) Signal generator + Output short-circuit protection 13 pin (switch output) 14 pin (error output) 15 pin (power supply voltage -) Load Load Max. 50 ma Max. 50 ma 2 pin (pre-set bit 2) 3 pin (integrating reset) 10 pin (common) 15 pin (power supply voltage -) Load Load Connector pin layout (body side) [Analog input type] The analog input type does not have the 4, 6, 7, 8, 9 or 12 pins. 10

16 FCM Series Example of internal circuit and load connection, parallel input type Caution Care must be taken for mis-connection. FCM-*-*PAN* (Parallel input, analog output + error output type NPN output) FCM-*-*PAP* (Parallel input, analog output + error output type PNP output) 5 pin (power supply voltage+) 5 pin (power supply voltage+) 12 pin (MSB bit 10) 11 pin (bit 9) 9 pin (bit 8) 8 pin (bit 7) 7 pin (bit 6) 6 pin (bit 5) 4 pin (bit 4) 3 pin (bit 3) 2 pin (bit 2) 1 pin (LSB bit 1) Output short-circuit protection 13 pin (monitor output) 14 pin (error output) Max. 50 ma Main circuit 10 pin (common) 13 pin (monitor output) + Main circuit 12 pin (MSB bit 10) 11 pin (bit 9) 9 pin (bit 8) 8 pin (bit 7) 7 pin (bit 6) 6 pin (bit 5) 4 pin (bit 4) 3 pin (bit 3) 2 pin (bit 2) 1 pin (LSB bit 1) Load Load + Output short-circuit protection 14 pin (error output) 15 pin (power supply voltage -) Load Max. 50 ma Load 10 pin (common) 15 pin (power supply voltage -) FCM-*-*PSN* (Parallel input, switch output + error output type NPN output) FCM-*-*PSP* (Parallel input, switch output + error output type PNP output) 5 pin (power supply voltage+) 5 pin (power supply voltage+) Main circuit Output short-circuit protection 12 pin (MSB bit 10) 11 pin (bit 9) 9 pin (bit 8) 8 pin (bit 7) 7 pin (bit 6) 6 pin (bit 5) 4 pin (bit 4) 3 pin (bit 3) 2 pin (bit 2) 1 pin (LSB bit 1) 10 pin (common) 13 pin (switch output) 14 pin (error output) 15 pin (power supply voltage -) Load Load Max. 50 ma Max. 50 ma + Main circuit Output short-circuit protection 13 pin (switch output) 14 pin (error output) 12 pin (MSB bit 10) 11 pin (bit 9) 9 pin (bit 8) 8 pin (bit 7) 7 pin (bit 6) 6 pin (bit 5) 4 pin (bit 4) 3 pin (bit 3) 2 pin (bit 2) 1 pin (LSB bit 1) 10 pin (common) 15 pin (power supply voltage -) Max. 50 ma Max. 50 ma Load Load + Connector pin layout (body side) [Parallel input type] 11

17 Compact flow rate controller Functions of FCM Series FCM Series Technical data Functional explanation Function Direct memory function Preset input function Analog input function Parallel input function Integrating function Descriptions Key input is available for target value. Even if input signals from an external source are not used, control flow rate is freely adjusted with controller operation keys. When four random flow rate points are set, the flow rate is controlled by inputting a 2-bit signal from an external source (signals from PLC, etc.). Flow rate control is available with analogue input signal. Flow rate control is available with parallel 10-bit (signal from PLC etc.). Expensive input/output device including D/A converter etc. is not necessary. Integrates flow rate. Other than integrating flow rate display, functions below are available. Close and stop solenoid valve at set integrating flow rate Integration pulse function (switch output type only) Note 1 Switch ON the switch at set integrating flow rate (switch output type only) Note 1 How to reset the integrating value Analogue input type: external input, button operation Parallel input type: button operation only Compatible models Analog input Parallel input Operation Analog output Switch output Analog output Switch output P14, 15 P25 P16 P25 P18 P25 P19 P24 (Note 1) (Note 1) P20 P21 P24 P26 P27 Switch output function The following switch functions are selected. (1) Tolerance mode: The switch turns ON when the level is within the tolerance (random set) of control target. (2) Range designation mode: The switch turns ON when the level is not within the designated flow rate range. (3) Integrated pulse: The integrated pulse is output during integration. (4) ON when higher than set integration: The switch turns ON at the set integrated flow. <Mode 1: Tolerance mode> <Mode 2: Range designation mode> H (+ allowance side) H (upper limit side) Input signal set point L (- allowance side) L (lower limit side) ON Output OFF ON Output OFF P21 P22 P23 P26 <Mode 3: Integrated pulse> ON Approx. 50 msec <Mode 4: ON when higher than set integration> ON OFF Refer to page 20 and 21 for pulse output rate. OFF Set integration value Zero point and span point of input signal can be changed <When invalid> <When valid> Input signal zero/span adjustment function Control flow rate 100% 0% 100% Input signal 100% Zero point (L) setting range 0 to 50% 0% 100% Input signal Span point (H) setting range 10 to 100% P26 Zero point adjustment Automatic power off Error display function Error automatic shutoff Adjusts the zero point of flow rate output The flow rate display turns OFF if there are no operations for one minute (Control does not stop when the auto power OFF function activates). Power is saved since the display is turned OFF when not needed. Enables displaying error status. Other than error display, functions below are available Error output is turned ON if an error occurs. Control automatically stops if an error occurs. Stops control and fully opens or fully closes valve, and enables the error output, at the time of error P27 P26 P13 P27 P27 Key lock Disables setting changes to prevent mis-operation P24 Setting reset Settings are returned to defaults ( Input signal selection, switch output, input signal zero span adjustment, auto power off only ) P24 12

18 FCM Series Display/operating section names and functions Output display (red) "F" is displayed at the time of function setting confirmation. "-" is displayed when the switch output ON. (Switch output type only) * Flashes when an over current is detected. * It doesn't flick on integration pulse output. "E" is displayed when the error output is ON. * Flashes when an over current is detected. 3 digit numeric LED display (green) The instantaneous flow rate display and function setting details are displayed in the RUN mode (instantaneous flow rate). * When the function setting configuration is displayed, it displays setting mode number and setting configuration. It displays values, etc., when setting data. It displays error code No. at the time of error display. <Instantaneous flow rate display> <Setting details display> <Error output> <Invalid display> * In case upper/lower limitation is set for function settings, or integrating flow rate display indicates higher/lower-order digit, Setting details Setting mode no. Code no. Setting details Setting mode no. It displays or. UP key (MODE key) Use to count up the value, etc. Use to change the setting mode. Use to change the setting items. key Use to confirm the setting mode. Use to confirm the setting items. Use to switch to integration display. Shift key (OFF key) Use to select digit of numeric value, etc. Use to return from forcible OFF at the time of forcible OFF (stopping control). + key (ENT key) Use to confirm the numeric value. Use to unlock the key. Use to reset the integration. + key (DOWN key) Use to count down the value, etc. Use to lock the key. + key Use to initialize. Error code list Error display Cause Countermeasures Error automatic shutoff Applicable error (Note 1) Power supply voltage is supplied outside of rated voltage. (detected under 19.5 VDC, detection accuracy ±10%F.S.) The input signal exceeded the rated range. (detected over input 110%F.S., detection accuracy ±1% F.S.) An error occurred during EEPROM reading or writing. Check controller power specifications, set power supply voltage within the rated range, and turn power ON again. Check the controller input signal type, set the input signal within the rated range, and turn power ON again. Contact your nearest CKD sales office or dealer. An error occurred during memory reading or writing. Contact your nearest CKD sales office or dealer. The flow rate did not reach the setting for five or more consecutive seconds. (In case the difference between set value and control value is over ±20%, detection accuracy ±6% F.S.) Output abnormalities are occurred for sensor. Check the primary pressure, supply pressure within the rated operating pressure differential range, and turn power ON again. Check that there are no leaks from piping, fittings, or other devices, correct connect pipes, and turn power ON again. Contact your nearest CKD sales office or dealer. Stop the supply of fluids to the controller, set the flow rate to zero, and turn the controller power ON again. If this error occurs again, contact your nearest CKD Sales Office or dealer. (Note 2) Over current protection circuit is actuating for switch output. Check whether load current exceeds the rating, correctly connect the controller, and turn power ON again. Errors are basically automatically reset. However, if the error is not reset, turn power OFF, check the cause and correct the error. Then, turn power ON again. Note 1: Automatic error shutdown is set to OFF (valve fully closed if an error occurs) at the default setting. Refer to page 27 for details. Note 2: It will be turned OFF (valve fully closed if an error occurs), regardless of setting of automatic error shutdown. 13

19 Controlling the flow rate FCM Series How to operate (1) Controlling the flow rate with direct memory The target is input with keys. Even if input signals from an external source are not used, control flow rate is freely adjusted with controller operation keys. Direct memory has two operation modes. Direct memory (1): Settings are applied when the value is changed.(even if the value is not set, the flow rate is adjusted by changing the value. This is handy for finely adjusting the flow rate. Set the setting once the flow rate is determined.) Direct memory (2): Changes are applied when the value is set. (The flow rate does not change unless the value is set.) <Direct memory (1) operation> (1) Turn power ON. The instantaneous flow rate is displayed. The instantaneous flow rate display is (2)When the key is pressed, the <F1: Input signal confirmation> redisplayed after 3 s. screen is displayed. The current input signal setting state is displayed. The current input signal type and input are alternately displayed. <F1: Input signal confirmation> <Input display> (The instantaneous flow rate display is displayed if 3 seconds pass without Alternate display a button being pressed.) <Input signal type > Direct memory input : dr (3)"F1.dr" blinks when the key is held down for 2 Analog input 0 to 10V : A0 seconds. Analog input 0 to 5V : A1 Analog input 4 to 20 ma : A2 Parallel input : PA Pre-set input : P1 (4)Hold down the key for 2 seconds and open the <Direct Memory 1 Setting screen>. (5) The flow rate changes when the value is changed. The flow rate is adjusted by changing the value even if the value is not set. <Flow rate setting range> Full-scale flow rate <Target setting> key : Moves the digit key : Counts up the value key : Count down the value Flow rate: zero Valve fully opened Set flow rate (6)Hold down the and keys together for 2 seconds, and set the value. The <F1: input signal confirmation> screen is displayed. <F1: Input signal confirmation> <Input display> Alternate display (7) The instantaneous flow rate display is redisplayed after 3 seconds. Forced OFF (flow rate zero) The controller is forcibly stopped (flow rate zero) by holding down the key for 2 seconds in the flow rate control state (instantaneous flow rate display). The flow rate control state is entered again by holding down the key for 2 seconds in the flow rate control stopped state (forced OFF). <Instantaneous flow rate display> Flow rate control state <Forced OFF display> Flow rate control stopped state The solenoid valve forced OFF state is displayed. Control is forcibly stopped even the input signal is input. 14

20 FCM Series Controlling the flow rate <Direct memory (2) operation> (1) Turn power ON. The instantaneous flow rate is displayed. (2) When the key is pressed, the <F1: Input signal confirmation> screen is displayed. The current input signal setting state is displayed. The current input signal type and input are alternately displayed. (The instantaneous flow rate display is displayed if 3 seconds pass without a button being pressed.) (3)"F1.dr" blinks when the key is held down for 2 seconds. <F1: Input signal confirmation> Alternate display The instantaneous flow rate display is redisplayed after 3 s. <Input display> <Input signal type > Direct memory input : dr Analog input 0 to 10V : A0 Analog input 0 to 5V : A1 Analog input 4 to 20 ma : A2 Parallel input : PA Pre-set input : P1 (4) Hold down the and keys for 2 seconds, and open the <direct memory (2) setting screen>. <Target setting> key : Moves the digit key : Counts up the value (5) Change the value. (The flow rate does not change unless the value is set.) key : Count down the value (6) Hold down the and keys together for 2 seconds, and set the value. The <F1: input signal confirmation> screen is displayed. <F1: Input signal confirmation> Alternate display <Input display> (7) The instantaneous flow rate display is redisplayed after 3 seconds. Forced OFF (flow rate zero) The controller is forcibly stopped (flow rate zero) by holding down the key for 2 seconds in the flow rate control state (instantaneous flow rate display). The flow rate control state is entered again by holding down the key for 2 seconds in the flow rate control stopped state (forced OFF). Flow rate control state <Forced OFF display> Flow rate control stopped state The solenoid valve forced OFF state is displayed. Control is forcibly stopped even the input signal is input. Note: Control does not stop while setting direct memory. Take safety into consideration, and stop control (forced stop) if necessary. The flow rate control/forced OFF state (setting) is held even if power is turned OFF. 15

21 Controlling the flow rate FCM Series How to operate (2) Controlling the flow rate with preset input (only analog input) When four random flow rate points are set, the flow rate is controlled by inputting a 2-bit signal from an external source. Example: To control 0, 1, 2, and 5l/min with preset input, select Preset Input for the input setting mode, and set each of the following: P1: 0l/min P2: 1l/min P3: 2l/min P4: 5l/min When signals are input from a PLC, etc., as indicated in the table at right, the flow rate is controlled to each preset flow rate. D-sub socket pin No. 2 Cable option insulator color Type of input Input signal Orange 1 Brown Pre-set memory No. Bit 2 Bit 1 OFF OFF P1 OFF ON P2 ON OFF P3 ON ON P4 <Controlling with the preset input signal> (1) Turn power ON. The instantaneous flow rate is displayed. (2) When the key is pressed, the <F1: Input signal confirmation> screen is displayed. The current input signal setting state is displayed. The current input signal type and input are alternately displayed. (The instantaneous flow rate display is displayed if 3 seconds pass without a button being pressed.) (3)"F1.dr" blinks when the key is held down for 2 seconds. (4) When the key is pressed twice, "F1.P1" will blink. <F1: Input signal confirmation> Alternate display The instantaneous flow rate display is redisplayed after 3 s. <Input display> <Input signal type > Direct memory input : dr Analog input 0 to 10V : A0 Analog input 0 to 5V : A1 Analog input 4 to 20 ma : A2 Parallel input : PA Pre-set input : P1 (5) Hold down the key for 2 seconds, and open the P1 setting confirmation screen. <Confirming P1 setting> <Input display> Alternate display (6) Hold down the target input screen. Input the target. key for 2 seconds, and open the (7) When the and keys are held down for 2 seconds, the target is set in memory, and the P2 setting confirmation screen is displayed. Set all of the targets up to P4 with this. (8) The instantaneous flow rate display is redisplayed after 3 seconds. The flow rate is controlled with preset input. <Confirming P2 setting> <Input display> Alternate display Repeat to P4 <Target setting> key : Moves the digit key : Counts up the value key : Count down the value 16

22 FCM Series Controlling the flow rate (3) Changing settings with shortcut keys (only when using direct memory and preset input) When controlling the flow rate using direct memory or preset input, the setting change screen is opened with a single key operation. Note: The input signal setting change screen opens the instant that the shortcut key is pressed. (Example: The P2 setting change screen opens when controlling the flow rate with the preset input P2.) This cannot be used when controlling the flow rate with analog input or parallel input. <Changing the setting with a shortcut> (1) Turn power ON. The instantaneous flow rate is displayed. (This is used only when controlling with direct memory or preset input.) (2) When the key is held down for 3 seconds, and the key is pressed, the input signal setting change screen is displayed. (3) The flow rate changes when the value is changed. The flow rate is adjusted by changing the value even if the value is not set. (4) Hold down the and keys together for 2 seconds, and set the value. The <F1: input signal confirmation> screen is displayed. <F1: Input signal confirmation> Control when flowing with preset memory P2 Hold down for 3 s. <F1: input signal confirmation> and <input display> are alternately displayed during this time. <Target setting> Alternate display key : Moves the digit key : Counts up the value key : Count down the value <Input display> (5) The instantaneous flow rate display is redisplayed after 3 seconds. Note: Do not change the preset external input while changing the setting with the shortcut key. The setting could be set into an incorrect preset No. Data is not saved in memory if power is turned OFF before setting the value. Set the value before turning power OFF. 17

23 Controlling the flow rate FCM Series How to operate (4) Controlling the flow rate with analog input (Only analog input) The flow rate is controlled with analog input signals. <Controlling with analog input signals> (1) Turn power ON. The instantaneous flow rate is displayed. (2) When the key is pressed, the <F1: Input signal confirmation> screen is displayed. The current input signal setting state is displayed. The current input signal type and input value are alternately displayed. (The instantaneous flow rate display is displayed if 3 seconds pass without a button being pressed.) (3) "F1.dr" blinks when the key is held down for 2 seconds. (4) When the key is pressed once, "F1.A 0 " will blink. (The number shown in differs based on the model.) <F1: Input signal confirmation> Alternate display The instantaneous flow rate display is redisplayed after 3 s. <Input display> <Input signal type > Direct memory input : dr Analog input 0 to 10V : A0 Analog input 0 to 5V : A1 Analog input 4 to 20 ma : A2 Parallel input : PA Pre-set input : P1 (5) Hold down the key for 2 seconds and set the value. The <F1: input signal confirmation> screen is displayed. <F1: Input signal confirmation> Alternate display <Input display> (6) The instantaneous flow rate display is redisplayed after 3 seconds. The flow rate is controlled with analog input. Note: Fully open (FUL) cannot be set with analog input. 18

24 FCM Series Controlling the flow rate (5) Controlling the flow rate with parallel input (Only parallel input) The flow rate is controlled with a parallel 10-bit (signal from PLC, etc.) Expensive input/output devices, such as a D/A converter, are not required. The parallel input signal is a 10-point signal so when converted to a decimal, it becomes A 0.1% resolution is attained. Input signal = Set flow/full-scale flow rate x 1023 Example: To set 300 ml/min with a full-scale flow rate 500 ml/min 300 (ml/min)/500 (ml/min) x 1023 = > 614 When 614 (decimal) is converted to binary, it becomes sets the input signal ON, and 0 sets the input signal OFF. (Refer to following table.) D-sub socket pin No. Cable option insulator color 12 Green (Black line) 11 White 9 Red (Black line) 8 White (Black line) 7 Pink 6 Light blue 4 Purple 3 Yellow 2 Orange 1 Brown Type of input Bit 10 MSB Bit 9 Bit 8 Bit 7 Bit 6 Bit 5 Bit 4 Bit 3 Bit 2 Bit 1 LSB Binary [For 614 (decimal)] Input signal ON OFF OFF ON ON OFF OFF ON ON OFF <Controlling with parallel input signals> (1) Turn power ON. The instantaneous flow rate is displayed. (2) When the key is pressed, the <F1: Input signal confirmation> screen is displayed. The current input signal setting state is displayed. The current input signal type and input are alternately displayed. (The instantaneous flow rate display is displayed if 3 seconds pass without a button being pressed.) (3)"F1.dr" blinks when the key is held down for 2 seconds. (4) When the key is pressed once, "F1.PA" will blink. <F1: Input signal confirmation> Alternate display The instantaneous flow rate display is redisplayed after 3 s. <Input display> <Input signal type > Direct memory input : dr Analog input 0 to 10V : A0 Analog input 0 to 5V : A1 Analog input 4 to 20 ma : A2 Parallel input : PA Pre-set input : P1 (5) Hold down the key for 2 seconds and set the value. The <F1: input signal confirmation> screen is displayed. <F1: Input signal confirmation> Alternate display <Input display> (6) The instantaneous flow rate display is redisplayed after 3 seconds. The flow rate is controlled with parallel input. Note: Fully open (FUL) cannot be set with parallel input. <Reference> If a high resolution is not required, the number of input points is reduced. Example: If 2% resolution is acceptable, operate with a 6-point input (0-63 when converted to decimal). Bits 5 to 1 in the above table are shorted in a bundle. When turned ON and OFF as one bit (LSB), control is executed with 6 points. 19

25 Integrating the flow rate FCM Series How to operate (1) Displaying the integrated flow rate The flow rate is integrated and displayed. The display range is shown below. Integrated flow rate is a calculated (reference) value. Model No. FCM- Flow rate display Display range 9500 L to 500 ml/min 0001 L to 1.00 l/min 0002 L to 2.00 l/min 0005 L to 5.00 l/min 0010 L to 10.0 l/min to 20.0 l/min to 50.0 l/min to 100 l/min Integrating function Display range Display resolution Pulse output rate ml 1 ml 5 ml l 0.01l 0.01l l 0.01l 0.02l l 0.01l 0.05l l 0.1l 0.1l l 0.1l 0.2l l 0.1l 0.5l l 1l 1l <Integrated display> (1) Instantaneous flow rate display The integration starts when power is turned ON. (The integrated value is reset when power is turned OFF.) (2) The integrated display screen opens when the key is held down for 2 seconds. Press the key for 2 seconds to return to the instantaneous flow rate display. The display digit changes when the key is pressed. <Integrated flow rate display> High-order 3-digit display Low-order 3-digit display (3) Integration is reset when the and keys are held down for 2 seconds. With analog, integration is reset with the external input (No. 3 pin). Integration is also reset when power is turned OFF. Integration reset (2) Closing and stopping the solenoid valve with set integrated flow rate The solenoid valve is closed and stopped when the set integrated flow rate is attained. This is suitable for processes in which a set amount is supplied, etc. <Operation> (1) Instantaneous flow rate display (2) Press the key five times and open the <F5: integration automatic shutoff setting screen>. If integration automatic shutoff is valid, "F5.on" and the current setting are alternately displayed. (The instantaneous flow rate display is displayed if 3 seconds pass without a button being pressed.) (3) When the key is held down for 2 seconds, "F5.--" blinks. When not using integration automatic shutoff, hold down the key for 2 seconds. The <F5 screen> is redisplayed, and after 3 seconds, the instantaneous flow rate screen is displayed. Press five times <F5: Integrated automatic shutoff setting screen> <When not using instantaneous automatic shutoff> The instantaneous flow rate display is redisplayed after 3 seconds. <Target setting> <When using instantaneous automatic shutoff> <High-order digit setting> key : Moves the digit key : Counts up the value key : Count down the value After setting, the <F5 screen> is redisplayed, and after 3 s, the instantaneous flow rate screen is displayed. (4) To use integration automatic shutoff, press the key so that "F5.on" blinks. Then, hold down the key for 2 seconds. <Low-order digit setting> After setting the high-order digit, hold down the key and key for 2 seconds. After setting, the <F5 screen> is redisplayed, and after 3 s, After setting the low-order digit, hold down the key and key for 2 seconds. the instantaneous flow rate screen is displayed. The <F5 screen> is displayed, and after 3 seconds, the instantaneous flow rate screen is displayed. * Only in this mode, the integrated value is reset when the input signal reaches zero. (Valid only after automatic shutoff.) * The solenoid valve is automatically shut off and the switch functions when the set integrated flow rate is reached. * If the display for automatic shutoff is "OFF", the switch output lamp does not turn ON. The flow rate display is redisplayed when the integrated value is reset (button operation or external input). * Even if automatic shutoff is invalidated during automatic shutoff, it does not function until the integrated value is reset. * The integrated value is reset when automatic shutoff is set to "on" and the value is set. 20

26 FCM Series Integrating the flow rate (3) Outputting the integrated pulse (Only switch output) The integrated pulse is output. Refer to the table on page 20 for the pulse rate. Refer to the connection (page 9), examples of internal circuit and load connection (pages 10 and 11) for details on connecting switch output. <Operation > (1) Instantaneous flow rate display (2) Press the key four times and open the <F4: switch output setting screen>. If switch output setting is valid, "F4. " and the current setting are alternately displayed. (The instantaneous flow rate display is displayed if 3 seconds pass without a button being pressed.) Press four times <F4: switch output setting screen> The instantaneous flow rate display is redisplayed after 3 s. (3) Hold down the key for 2 seconds, and enter switch output setting mode. Press three times (4) When the key is pressed three times, "F4.3" blinks. <Integrated pulse setting screen > When the key is held down for 2 seconds, the After setting, the <F4 screen> is redisplayed, and integrated pulse output is set. The <F4 screen> is after 3 s, the instantaneous flow rate screen is displayed. redisplayed, and after 3 seconds, the instantaneous flow rate screen is displayed. (4) Turning the set integrated flow rate ON with a switch (Only switch output) Switch output is turned ON at the set integrated flow rate. See the connection (page 9), examples of internal circuit and load connection (pages 10 and 11) for details on connecting switch output. <Operation > (1) Instantaneous flow rate display (2) Press the key four times and open the <F4: switch output setting screen>. If switch output setting is valid, "F4. " and the current setting are alternately displayed. (The instantaneous flow rate display is displayed if 3 seconds pass without a button being pressed.) Press four times <F4: switch output setting screen> The instantaneous flow rate display is redisplayed after 3 s. (3) Hold down the key for 2 seconds, and enter switch output setting mode. Press four times (4) When the key is pressed four times, "F4.4" blinks. Hold down the key for 2 seconds, and open the target setting screen. After setting the high-order 3 digits of the target, hold down the and keys for 2 seconds. After setting the low-order 3 digits of the target, hold down the and keys for 2 seconds. The integrated value is reset after the target is set. (5) The <F4 screen> is displayed, and after 3 seconds, the instantaneous flow rate screen is displayed. <High-order digit setting> <Low-order digit setting> <Target setting> key : Moves the digit key : Counts up the value key : Count down the value After setting, the <F4 screen> is redisplayed, and after 3 s, the instantaneous flow rate screen is displayed. 21

27 FCM Series How to operate Using switch output (Only switch output) (1) Using the tolerance mode Switch output turns ON when the level is within the tolerance of the input signal setting. The tolerance is set for both the plus side and minus side as a %FS (full-scale) See the connection (page 9), examples of internal circuit and load connection (pages 10 and 11) for details on connecting switch output. H (+ tolerance) Input signal setting L (- tolerance) ON Output OFF <Operation > (1) Instantaneous flow rate display (2) Press the key four times and open the <F4: switch output setting screen>. If switch output setting is valid, "F4. " and the current setting are alternately displayed. (The instantaneous flow rate display is displayed if 3 seconds pass without a button being pressed.) Press four times <F4: switch output setting screen > The instantaneous flow rate display is redisplayed after 3 s. (3) Hold down the key for 2 seconds, and enter switch output setting mode. (4) When the key is pressed once, "F4.1" blinks. Hold down the key for 2 seconds, and open the target setting screen. Press once <Target setting> key : Moves the digit key : Counts up the value (5) After setting the tolerance (minus side), hold down the and keys for 2 seconds. <- tolerance setting (%)> key : Count down the value Minus side setting range: -50 to 0% FS (6) After setting the tolerance (plus side), hold down the and keys for 2 seconds. Plus side setting range: 0 to 50% FS <+ tolerance setting (%)> (7) The <F4 screen> is redisplayed, and after 3 seconds, the instantaneous flow rate screen is displayed. After setting, the <F4 screen> is redisplayed, and after 3 seconds, the instantaneous flow rate screen is displayed. 22

28 FCM Series Using switch output (Only switch output) (2) Using the range designation mode The switch turns ON when the level is not within the designated flow rate range. The upper and lower limit values are set regardless of the input signal setting (control target). Both the upper limit and lower limit are set as % FS (full-scale). Refer to the connection (page 9), examples of internal circuit and load connection (pages 10 and 11) for details on connecting switch output. H (upper limit side) L (lower limit side) Output ON OFF <Operation > (1) Instantaneous flow rate display (2) Press the key four times and open the <F4: switch output setting screen>. If switch output setting is valid, "F4. " and the current setting are alternately displayed. (The instantaneous flow rate display is displayed if 3 seconds pass without a button being pressed.) Press four times <F4: switch output setting screen > The instantaneous flow rate display is redisplayed after 3 s. (3) Hold down the key for 2 seconds, and enter switch output setting mode. (4) When the down the setting screen. key is pressed twice, "F4.2" blinks. Hold key for 2 seconds, and open the target Press twice <Target setting> key : Moves the digit key : Counts up the value (5) After setting the lower limit value, hold down the and keys for 2 seconds. <Lower limit setting (%)> key : Count down the value Lower limit value setting range: 0 to 90% FS (6) After setting the upper limit value, hold down the and keys for 2 seconds. Upper limit value setting range: 10 to 100% FS Note that the gap between the upper and lower limits must be 10% FS and over. (7) The <F4 screen> is redisplayed, and after 3 seconds, the instantaneous flow rate screen is displayed. <Upper limit setting (%)> After setting, the <F4 screen> is redisplayed, and after 3 s, the instantaneous flow rate screen is displayed. 23

29 Operation (List) FCM Series How to operate Note: Keys are unlocked when the controller is shipped. Lock keys if necessary. The key lock/unlock state is held even if power is turned OFF. Control does not stop during the F1: input signal selection or F2: input signal zero/span setting. Take safety into consideration and stop control (forced stop) if necessary. The flow rate control/forced OFF state is held even if power is turned OFF. <Normal display> Flow control state <Key lock> The current instantaneous flow rate is displayed. Hold down together for 2 s. The instantaneous flow rate display is displayed after 2 s. <Key unlock> <Forced OFF display> Flow control stopped state Hold down together for 5 s. The instantaneous flow rate display is displayed after 2 s. The solenoid valve forced OFF state is displayed. Control is forcibly stopped even when the input signal is input. Hold down together for 3 s. <Initialization> The instantaneous flow rate display is displayed after 2 s. Function settings below will return to the default status. Input signal selection Switch output Input signal zero span adjustment Automatic power off <Automatic shutoff display> Flow control stopped state Note: The flow rate control/forced OFF state is held even if power is turned OFF. The integration automatic shutoff state is displayed. <Integrated flow rate display> High-order 3-digit display Low-order 3-digit display Hold down together for 2 s. Integration reset <F1: input signal selection > The current integrated flow rate is displayed. Integration starts when power is turned ON. Integration is reset when the and keys are held down. With analog, integration is reset with the external input. Integration is also reset when power is turned OFF. 24

30 FCM Series Operation (List) After 3 seconds <Instantaneous flow rate display> <F1 screen > Alternate display Input display <F1: input signal selection > Select which input style to use for control. Input signal type <Direct memory input setting> Direct memory (1): The setting is applied when the value is changed. Hold down together for 2 s. Direct memory (2): The setting is applied after it is set. Hold down together for 2 s. Hold down together for 2 s. After setting, the setting mode is exited, and the <F1 screen> is displayed. After setting, the setting mode is exited, and the <F1 screen> is displayed. <Analog input (parallel input) setting> After setting to the analog input (parallel input) mode, the <F1 screen> is displayed. <Preset input setting> (Not used for parallel input) P1 target display <Target setting> key : Moves the digit key : Counts up the value key : Count down the value <Input signal type > Direct memory input : dr Analog input 0 to 10V : A0 Analog input 0 to 5V : A1 Analog input 4 to 20 ma : A2 Parallel input : PA Pre-set input : P1 Target setting Alternate display P2 target display Hold down together for 2 s. Target setting Alternate display Setting mode is exited, and the <F1 screen> is displayed. Hold down together for 2 s. Set P3 target in same manner P4 target display Target setting Alternate display <Flow rate setting range> Full scale flow rate Hold down together for 2 s. Flow rate: zero Set flow rate Valve fully open After setting, the setting mode is exited, and the <F1 screen> is displayed. <F2: input signal zero span adjustment > Note: Integration automatic shutdown (F5.on) does not function while the input signal is set. However, once the setting is set, the integrated automatic shutdown is applied. If the integrated flow rate is higher than the set value at this time, automatic shutdown will occur. 25

31 Operation (List) FCM Series How to operate After 3 s <Instantaneous flow rate display> <F2 screen > <F2: input signal zero span adjustment > When using with full-scale After setting, the setting mode is exited, and the <F2 screen> is displayed. <Target setting> key : Moves the digit key : Counts up the value When using with zero span adjusted <Zero point adjustment (%)> <Span point adjustment (%)> Hold down together for 2 s. key : Count down the value Hold down together for 2 s. After setting, the setting mode is exited, and the <F2 screen> is displayed. Note: If the preset memory input or direct memory input is selected with F1 (input signal selection function), this function cannot be used. Full-scale applies. If the zero point is changed, the integration automatic shutoff cannot be reset (reset by zero input signal). After 3 s <Instantaneous flow rate display> <F3 screen > <F3: Automatic power off setting > When not using auto power OFF function After setting, the setting mode is exited, and the <F3 screen> is displayed. * If any key is pressed during auto power OFF, the display turns ON. * The auto power OFF setting time is one minute. This time cannot be changed. * Control does not stop during auto power OFF. When using auto power OFF function After setting, the setting mode is exited, and the <F3 screen> is displayed. After 3 s <Instantaneous flow rate display> <F4 screen > <F4: switch output setting > When not using switch output After setting, the setting mode is exited, and the <F4 screen> is displayed. <Target setting> key : Moves the digit key : Counts up the value When using mode 1 (tolerance mode) <- tolerance setting (%)> <+ tolerance setting (%)> When using mode 2 (range designation mode) <Lower limit setting (%)> <Upper limit setting (%)> When using mode 3 (integrated pulse) When using mode 4 (ON when above integration) <High-order digit setting> <Low-order digit setting> Note: Switch output setting mode cannot be entered with the analog output. <F5: Integrated automatic shutoff setting screen> Hold down together for 2 s. Hold down together for 2 s. key : Count down the value - tolerance setting range: -50 to 0% FS + tolerance setting range: 0 to 50% FS Hold down together for 2 s. Hold down together for 2 s. Lower limit setting range: 0 to 90% FS Upper limit setting range: 10 to 100% FS Note that the gap between the upper and lower limits must be 10% FS and over. After setting, the setting mode is exited, and the <F4 screen> is displayed. Hold down together for 2 s. Hold down together for 2 s. After setting, the setting mode is exited, and the <F4 screen> is displayed. After setting, the setting mode is exited, and the <F4 screen> is displayed. * Refer to 1.1 Specifications for details on the integrated pulse rate. * If reset is executed with external input, the integration is reset, so pulses are not output. * The OUT light does not turn ON while integrated pulses are output. After setting, the setting mode is exited, and the <F4 screen> is displayed. * The integrated value is cleared immediately after mode 4 is set. 26

32 FCM Series Operation (List) After 3 s <Instantaneous flow rate display> <F5 screen > <F5: Integrated automatic shutoff setting screen> When not using integrated flow rate automatic shutoff After setting, the setting mode is exited, and the <F5 screen> is displayed. When using integrated flow rate automatic shutoff <High-order digit setting> <Low-order digit setting> Hold down together for 2 s. Hold down together for 2 s. After setting, the setting mode is exited, and the <F5 screen> is displayed. * Only in this mode, the integrated value is reset when the input signal reaches zero. (Valid only after automatic shutoff.) * The solenoid valve is automatically shut off and the switch functions when the set integrated flow rate is reached. * If the display for automatic shutoff is "OFF", the switch output light does not turn ON. The flow rate display is redisplayed when the integrated value is reset (button operation or external input). * Even if automatic shutoff is invalidated during automatic shutoff, it does not function until the integrated value is reset. * The integrated value is reset when automatic shutoff is set to "on" and the value is set. After 3 s <Instantaneous flow rate display> <F6 screen > <F6: Error automatic shutoff setting> When not using error automatic shutoff When using error automatic shutoff (Valve fully closed at error) After setting, the setting mode is exited, and the <F6 screen> is displayed. After setting, the setting mode is exited, and the <F6 screen> is displayed. * Errors causing error automatic shutoff Sensor error: State when sensor signal error or input signal error has occurred, or when power voltage is not within range. Control error: State when flow rate cannot be controlled to set value. When using error automatic shutoff (Valve fully opened at error) After setting, the setting mode is exited, and the <F6 screen> is displayed. After 3 s <Instantaneous flow rate display> <F7 screen > Alternate display Current adjust value <F7: Zero adjust (flow rate output)> New adjust value 2 s. after new adjust value is displayed, <F7 screen> is displayed. Note: Execute forced OFF (stop control) before adjusting the zero point. To prevent malfunctions, the zero point cannot be adjusted unless forced OFF is executed. is displayed when forced OFF is not executed. Purge to working gas before adjusting the zero point. 27

33 Safety Precautions Always read before starting use. When designing and manufacturing a device using CKD products, the manufacturer is obligated to check that device safety mechanism, pneumatic control circuit, or water control circuit and the system operated by electrical control that controls the devices is secured. It is important to select, use, handle, and maintain the product appropriately to ensure that the CKD product is used safely. Observe warnings and precautions to ensure device safety. Check that device safety is ensured, and manufacture a safe device. WARNING 1 This product is designed and manufactured as a general industrial machine part. It must be handled by an operator having sufficient knowledge and experience in handling. 2 Use this product in accordance with specifications. This product must be used within its stated specifications. It must not be modified or machined. This product is intended for use as a general-purpose industrial device or part. It is not intended for use outdoors or for use under the following conditions or environment. (If you consult CKD upon adoption and consent to CKD product specification, it will be applicable, however, safeguards should be adopted that will circumvent dangers in the event of failure.) 1 Use for special applications including nuclear energy, railway, aircraft, marine vessel, vehicle, medicinal devices, devices or applications coming into contact with beverages or foodstuffs, amusement devices, emergency shutoff circuits, press machine, brake circuits, or for safeguard. 2 Use for applications where life or assets could be adversely affected, and special safety measures are required. 3 Observe corporate standards and regulations, etc., related to the safety of device design and control, etc. ISO 4414, JIS B 8370 (pneumatic system rules) JFPS2008 (principles for pneumatic cylinder selection and use) Including High Pressure Gas Maintenance Law, Occupational Safety and Sanitation Laws, other safety rules, body standards and regulations, etc. 4 Do not handle, pipe, or remove devices before confirming safety. 1 Inspect and service the machine and devices after confirming safety of the entire system related to this product. 2 Note that there may be hot or charged sections even after operation is stopped. 3 When inspecting or servicing the device, turn off the energy source (air supply or water supply), and turn off power to the facility. Discharge any compressed air from the system, and pay attention to possible water leakage and leakage of electricity. 4 When starting or restarting a machine or device that incorporates pneumatic components, make sure that the system safety, such as pop-out prevention measures, is secured. 5 Observe warnings and cautions on the pages below to prevent accidents. JJThe safety cautions are ranked as "DANGER", "WARNING" and "CAUTION" in this section. DANGER:When a dangerous situation may occur if handling is mistaken leading to fatal or serious injuries, or when there is a high degree of emergency to a warning. WARNING:When a dangerous situation may occur if handling is mistaken leading to fatal or serious injuries. CAUTION:When a dangerous situation may occur if handling is mistaken leading to minor injuries or physical damage. Note that some items described as "CAUTION" may lead to serious results depending on the situation. In any case, important information that must be observed is explained. Disclaimer 1 Warranty period "Warranty Period" is one (1) year from the first delivery to the customer. 2 Scope of warranty In case any defect attributable to CKD is found during the term of warranty, CKD shall, at its own discretion repair the defect or replace the relevant product in whole or in part, according to its judgement. Note that the following faults are excluded from the warranty term: (1) Product abuse/misuse contrary to conditions/environment recommended in its catalogs/specifications (2) Failure caused by other than the delivered product (3) Use other than original design purposes (4) Third-party repair/modification (5) Faults caused by reason that is unforeseeable with technology put into practical use at the time of delivery (6) Failure attributable to force majeure The warranty mentioned here covers the discrete delivered product. Only the scope of warranty shall not cover losses induced by the failure of the delivered product. 3 Compatibility confirmation In no event shall CKD be liable for merchantability or fitness for a particular purpose, notwithstanding any disclosure to CKD of the use to which the product is to be put. 28

34 Flow rate controller Safety precautions Always read this section before starting use. Individual precautions: compact flow rate controller FCM Series Design & Selection 1. Applicable fluid DANGER Do not feed gas which is inside of explosive limit range. It may lead to an explosion accident. Before using for hydrogen, be sure to purge piping with inert gas such as nitrogen or argon. Using without purge by inert gas may lead to an explosion accident. Do not feed oxygen gas to wetted sections that are not oil-treated. There is a risk of fire. Even if the product has oil treatment, if gas other than oxygen gas has passed even once, do not use the product for oxygen gas. WARNING This product cannot be used as a business meter. This product does not comply with Measurement Laws, and cannot be used for commercial business. This product is dedicated to gas listed on the model No. Use of noncompatible fluids lowers product accuracy and controllability. If hydrogen or helium gas is passed to a series not designated for these, the sensor safety circuit may prevent operation. (If the safety circuit operates, the flow rate cannot be measured or controlled until power is turned off.) Prevent gas from flowing in reverse, in case where mixing hydrogen or helium gas with other gas. If hydrogen or helium is passed to a series not designated for these, the sensor safety circuit may prevent operation. (If the safety circuit operates, the flow rate cannot be measured or controlled until power is turned off.) When shutting off gas, provide shutoff valves and shut off each gas separately as shown below to prevent gas from flowing in reverse. Source of gas supply Source of gas supply FCM Series (For hydrogen and helium) FCM Series (For other than hydrogen and helium) Shut-off valve Shut-off valve Pay attention not to let foreign particles into the product. If foreign matter gets into this product (dirt, water, or oil mist into pipes), accuracy and controllability could drop or the product could fail. If foreign matter could enter the product, install a filter, dryer, or oil mist filter upstream from the product. The mesh provided in this product is used to rectify the flow rate in pipes. It is not a filter for removing foreign matter. Compressed air from the compressor contains drainage (water, oxidized oil, foreign matter, etc.), so install a filter, air dryer, and oil mist filter (microalescer) on the primary side (upstream) from the product. When using compressed air, use clean air that complies to JIS B8392-1: 2012 (ISO : 2010) [1.1.1 to 1.6.2]. <Recommended circuit> Pneumatics Air dryer pressure source Filter Regulator Oil mist filter FCM Series When using a valve on the primary side of this product, only use an oil-prohibit specification valve. This controller could malfunction or fail if subject to splattering grease or oil, etc. Use dry gas that does not contain corrosive elements such as chlorine, sulfur, or acids, and clean gas that does not contain dust or oil mist. Some fluid may impact negatively against the performance, if the fluid remained for a long time because of its quality. Do not seal fluid inside of pipes for a long time. When using this controller for liquefied gas such as propane gas, evaporate the gas. Flow rate of liquefied gas into this product will cause failure. When using this product to control burner air-fuel ratio, take measures in the design stages to prevent backfire, and to prevent adverse effect to this product even if a backfire should occur. Rising pressure or fire inside of the pipe because of a backfire of burner will be a cause of malfunction. Before the use, make sure that the pressure on the fluid supply line is within the using differential rated pressure. Fluid will not flow rate, if the original pressure was low or pressure on the secondary side became high, as those situation don't generate differential pressure. 29

35 Design & Selection FCM Series Individual precautions 2. Working environment WARNING Corrosive environment Do not use this product in an environment containing corrosive gases such as sulfurous acid. Ambient temperature, fluid temperature Keep the ambient temperature and fluid temperature within 0 to 50 C. Even if the temperature is within the specified range, do not use it if the ambient temperature and fluid temperature could suddenly change and cause dew to condense. Proof pressure, actuation differential rated pressure Using this product at a level exceeding the guaranteed proof pressure and operating pressure difference could cause damage. Follow the specified range. Fluid will not flow, if the original pressure was low or pressure on the secondary side became high, as those situation lowers the differential pressure. Drip-proof environment This product's degree of protection is IP40 or equivalent. Do not install it where it could be exposed to water, salt, dust, or cutting chips, or a compressed or decompressed environment. This product cannot be used where the temperature changes sharply or in a highly humid environment where internal damage could be caused by dew condensation. Proportional electromagnetic valves inside of the product don't have perfect close-stop function. If the perfect close-stop is required, please apply shut off valves out side separately. When the external shutoff valve is closed, wait with this product's valve fully closed (set flow rate: zero). If this product is left in normal control while this external shutoff valve is closed, an instant overflow could occur when the external shutoff valve is opened. When using for applications that turn ON/OFF at a high frequency, the life of the proportional valve may be shortened depending on use. Due to wiring, the current input power ground and signal common are the same. When driving several of these products with one PLC and D/A unit, depending on the D/A unit's circuit, the correct signal may not be input because of wiring problems. Consult with the PLC maker before using. Current input is used with input signal 1-5 V, but unlike other rated voltage input, the input impedance is small at 250 Ω, so a signal generator that matches this impedance must be used. Pay attention on pressure loss of piping. When piping this product, check that the differential pressure between the upstream side and downstream side is within the operating pressure difference range (refer to pages 2, 4). Controller may not operate properly if used outside of the operating pressure difference range. Especially, if there is orifice size or restrictor on the secondary side (down stream side), the product may not operate normally. Care must be taken. It also may lead to a situation to generate pressure fluctuation at primary or secondary side repeatedly, or flow rate control become unstable because of insufficient control of the product. Using conditions to comply with CE This is CE marked products complied with EMC Directive. EN ; regulation matched to immunity applies to this product. Conditions below are necessary to comply with these standards. Conditions This product is assessed as signal line, with using cable with a pair of signal lines. It doesn't have resistance against serge immunity. So provide serge countermeasures at the equipment side. 3. Flow rate unit CAUTION This product's flow rate is measured at a mass flow unaffected by temperature or pressure. The unit is l/min, but this is the display when the mass flow is converted to volumetric flow rate at 20 C 1 barometric pressure (101 kpa). Do not install this product on moving part or location with vibration resistance. It may act wrongly by vibration resistance or impact. CAUTION Check the leak current to prevent malfunction caused by current leaking from other controllers. When using a PLC, etc., the leak current could cause this product to malfunction. 30

36 FCM Series Installation & Adjustment 1. Wiring DANGER Use power supply voltage and output within the specified rated voltage. If rated voltage exceeding the specified rated voltage is applied, the sensor could malfunction or be damaged, or electrical shock or fire could occur. Do not use a load exceeding the output rating. Failure to observe this could result in damage to the output or fire. WARNING Check the connector pin and cable core wire color when wiring. Incorrect connections could result in sensor damage, problems, and malfunctions, so check the wire color against the instruction manual before wiring. Check wiring insulation. Check that wires do not contact other circuits and that there are no ground faults or insulation faults across terminals. An overcurrent could flow to the product, and result in damage. Use a DC stabilized power supply voltage, within the specified rating, insulated from the AC power supply voltage. Failure to insulate the power supply voltage could result in electrical shock. If power is not stabilized, the peak value could be exceeded in hot summer. This could damage the product or impair accuracy. Stop the control device and machine devices, and turn the power off before wiring. Starting operation suddenly could result in unpredictable operation and hazards. Conduct an energized test with controllers and devices stopped, and set target switch data. Discharge electrostatic accumulated in personnel or tools before and during work. Connect and wire bend-resistant material, such as robot wire material, for movable sections. Do not use this product at levels exceeding the power supply voltage range. If rated voltage exceeding the specified range or AC power (100 VAC) is applied, the controller could break or burn. Separate this product and its wiring as far away as possible from sources of noise such as high-rated voltage lines. Provide separate measures for surge applied to the power cable. Do not short-circuit the load. This product could rupture or burn. Use stabilized DC power completely separated from the AC primary side for stainless steel construction. Connect either the plus or minus side of the power supply voltage to the F.G. A varistor (limit rated voltage. 40 V) is connected between the stainless steel internal power circuit and stainless steel device to prevent dielectric breakdown of the sensor. Do not conduct a withstand rated voltage test or withstand voltage test between the internal power circuit and stainless steel device. Disconnect wiring if this testing is required. An excessive potential difference between power and stainless body will burn internal parts. After installing, connecting, and wiring the stainless steel device, electrical welding of the device or frame or short-circuit accidents, etc., could cause the welding current, the excessive high rated voltage caused by welding, or a surge rated voltage, etc., to run through wiring or ground wire connected between the above devices. This could result in damage to wires or devices. Conduct work such as electrical welding after removing this device and disconnecting all electric lines connected to the F.G. CAUTION The optional shield cable connector is a shielded wire. Insulate wires that are not being used so that they do not contact other wires, including shielded wires. Unintended connection to the ground, etc., could cause malfunction or damage the product. Check the direction and fit the D-sub connector into the back. Lock the D-sub connector so that it does not dislocate. Before loosening the lock, fix the fixing block with a tool, etc. DIGITAL MASS FLOW CONTROLLER Extending cable The cable longer than 3m may lead to larger difference between analog output and analog input signals due to wiring resistance, or unstable control. CKD recommend to use cable shorter than 3m. MADE IN JAPAN 31

37 Installation & Adjustment FCM Series Individual precautions 2. Piping CAUTION Check that the fluid direction and the direction indicated on the body are the same when piping. Torque of fitting for 4S, 4RS connection diameter type (hydrogen, helium models) (1) Joint tightening method 4RM (1/4 inch JXR male fitting) gasket material is nickel SUS316 Tighten the nut by hand until the gasket contacts the bead, then tighten 1/8 of a turn using a tool. Nut Gasket 4S (double-barbed fitting)... Confirm that the front ferrule, back ferrule, and nut are correctly attached, and insert tube until it contacts the back of the main body. Tighten the nut by hand as far as possible, then tighten 1 1/4 of a turn using a tool. Front ferrule Back ferrule Holder Bead Before piping, clean pipes with compressed air to remove any foreign matter of cutting chips, etc. The rectifying unit or platinum sensor could be damaged if foreign matter or cutting chips get in. When attaching piping to this product, use the following torques as reference so that excessive screwing torque or load torque is not applied to the connection port. Port thread Tightening torque N m Rc1/4 6 to 8 9/16-18UNF 6 to 8 Attach a wrench to stainless body when tightening pipes so that pressure is not applied to the resin section. Nut Tube When connecting pipes, wrap sealing tape in the opposite direction from threads starting 2mm inside from the end of piping threads. If sealing tape protrudes from pipe thread part, it could be cut when screwed in. This could cause the tape to enter the solenoid valve and lead to faults. Solid liquid sealant Solid liquid sealant When using a liquid sealing agent, check that it does not get on resin parts. Otherwise resin could be damaged. Sealant may stick to thread part when piping is removed. Be sure to remove sealant before repiping. Connect a fitting even when using the stainless steel device with the OUT side opened. The port filter could come off. When using resin construction, do not bend the tube near the push-in fitting. When this product is used for vacuum applications such as air supply, do not bend the tube near the push in fitting. When using resin construction, accurately insert the tube and confirm that it does not dislocate even when pulled. Cut tube at a right angle with a dedicated cutter before use. After piping, confirm that no gas is leaking. When using this product for oxygen gas, monitor the following points. Piping should be performed by operator with professional knowledge about dealing with oxygen gas. Use pipes with oil-prohibit processed. Remove any dirt or burrs from piping before attaching to this product. Attach a filter at the primary side of this product. Do not install a regulator or solenoid valves before the product. Incorrect flow rate could cause errors. If necessary, adopt direct piping section. While mounting orientation is indicated as "Vertical or lateral as desired", the flow rate is subject to difference between mounting orientation or piping condition. Check that sealing tape or adhesive does not get inside during piping. Do not install with contacting bodies closely. Self generation of heat rise temperature of the product bodies each other, and facilitates changes on characteristic or resin. Keep more than 10mm blank space in between, if use products next to each other. 32

38 FCM Series During Use & Maintenance WARNING Output accuracy is also affected by self generation of heat cause by energizing in addition to temperature characteristics. Provide a standby time (10 minutes or more after turning power ON) when using. CAUTION Use this product at the place without adopting dropping impact or vibration resistance, as it uses micro sensor chip. Also it requires being handled as precision component while installation or transportation. If a problem occurs during operation, immediately turn power off, stop use, and contact your dealer. (1) Separate the power supply voltage for output comprising the inductive load, such as the solenoid valve and relay, and input, such as the flow rate controller. (2) If separate power supplies cannot be used, directly install a surge absorption element for all inductive loads.remember that the surge absorption element connected to the PLC, etc. protects only that device. (3) Connect a surge absorption element to the following places on the power wiring as shown below as a measure against disconnections in unspecific areas. After power is turned ON, this product does not operate flow rate control for two seconds to complete selfdiagnosis. Provide a control circuit and program that ignore signals for two seconds after power is turned on. Inputdevice Inputdevice Inputdevice Keep this product's flow rate within the rated flow rate range. Use this product within the operating pressure differential range. When the set value is changed, control devices could operate unintentionally. Stop devices before changing settings. Do not disassemble or modify this product. Doing so could result in faults. The case is made of resin. Do not use solvent, alcohol or detergent in cleaning, or resin could absorb it. Wipe off dirt with a rag soaked in a diluted neutral detergent solution and wrung out well. When the devices are connected to a connector, the output circuit could be damaged by the above phenomenon if the connector is disconnected while the power is ON. Turn the power OFF before connecting or disconnecting the connector. A degree of precision may change from the initial period, due to the using environment or condition. CKD recommends to check actuation in regular basis. Sensor chip will deteriorate after a long time use and it will be a cause of change of detected flow rate. Please perform regular check. Pay attention to leading of surge current. When controller power is shared with an inductive load that generates a surge, such as a solenoid valve or relay, if the circuit is cut off while the inductive load is functioning, the surge current could enter the switch output circuit and cause damage depending on where the surge absorption element is installed. Circuit cutoff with disconnection Surge absorbingelement or emergency stop Surge absorbingelement (installed later) (built-in) Flow rate controller Relay Solenoid valve Main circuit ON Surge current PLC PLC output Take countermeasures as indicated to the right to prevent damage caused by surge current leading. 33

39 FCM terminologies FCM Series FCM terminologies, relative products Apply for compact flow rate controller FCM. Terms Precision scope of guarantee Calibration range of this product. Accuracy Reproducibility (repeatability) Temperature characteristics Pressure characteristics Explanation Calibration difference from CKD basic device. (Condition: temperature 25±3 C, power supply voltage 24 VDC ±0.01 V, standard differential pressure, secondary side atmospheric release) Calculate from differences (D = max - min), at the time when 0%F.S. and 50%F.S. flow rate control is repeated 20 times continuously, in cycle where the control is stable enough. (reproducibility) = controlled flow rate of ±D/2/FS 100[%] It indicates fluctuation of flow rate value due to the change of ambient temperature or fluid temperature (standard temperature 25 C) with converting to per 1 C. Calibration is performed at 25 C. It indicates fluctuation of flow rate value due to the change of working pressure. Calibration is performed at standard differential pressure. Standard differential pressure This is a differential pressure at calibration of this product. (secondary side is atmospheric release) Operation differential pressure This is necessary differential pressure for the product's normal actuation. Proof pressure Display resolution This is a pressure which doesn't damage this product. This is a minimum step to change the display. (Integrated) Pulse output rate Integrating flow rate per pulse, at the time of outputting integrated pulse. LSB MSB digit AWG It indicates the minimum digit of parallel input. It indicates the maximum digit of parallel input. Digit. The minimum value of digital display with decimal point ignored. Abbreviation of America Wire Gauge. Standards of cable. Related Products Inline Clean Filter FCS500/FCS1000 Series Catalog no. CB-024SA Ideal as the final filter in different clean applications (For air and inert gas) 0.01 μm high filtration, 99.99% removal efficiency Long life Compact, lightweight, large flow rate Oil-prohibition specifications Easy maintenance Ample variations Compact flow rate sensor RAPIFLOW FSM2 Series Catalog no. CB-024SA High precision, fast response, large flow rate and compact Ample functions in pursuit of options and operatability Needle valve integrated type Separate display device Clean specification (page 70, 80) Panel mounting is possible Twin display/dual color display function Bar display function Miniature flow rate switch RAPIFLOW FSM-X Series Catalog no. CB-024SA Miniature, light weight Separated sensor head furthers space-saving. The weight of 4g and the thinnest width of 8mm are achieved Both direction flow rate measurement is possible One-way direction flow rate detection is also added. Both direction type enables adsorption-desorption confirmation Wide flow rate range Both direction flow rate; ±0.5, ±1, ±5, ±10 L/min Single direction flow rate; 0.5, 1, 5, 10 L/min A total of eight types are available. Miniature shape but usable up to a large flow rate (10 L/min) 34