Fiber-Optic System for Sensing Under Vacuum. Vacuum chamber E39-F1V Lens Unit

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1 R Fiber-Optic System for Sensing Under Vacuum Omron s First Complete System for Sensing Under Vacuum H Vacuumratedto1x Pa S m /s max. (.5 x torr S l/s) H The industry s First -Channel Snap-On Fiber Mounting Feature allows ease of use and implementation H A Single-Channel Flange with screw-mounting is also available H Increases process productivity by performing operations inside vacuum chambers H The external fiber can be cut on both ends, allowing customized lengths H Stainless steel and fluoro-resin fiber cables are available for vacuum processes H CE approval Ordering Information J CONFIGURATION EXAMPLE (TYPICAL) To Order a Complete Fiber-Optic System for Sensing Under Vacuum Select: D A Flange D Vacuum Fibers D External Fiber Cable D A Lens Unit (if necessary) D The Appropriate Fiber-Optic Amplifier J FLANGES Item Four channel One-channel Vacuum chamber E9-F1V Lens Unit Inside vacuum chamber Outside A pair of E2-T10V A combination of Fibers for outside, E2-T5V, and E2-TSV Vacuum Fibers F Four-Channel Flange or F1 One-Channel Flange Part number F F1 EX-NMVV or EX-NH11 Amplifier Unit J VACUUM FIBERS Item Through-beam, straight model Through-beam, 90 model Through-beam, heat-resistant model Part number 1M E2-T5V 1M E2-TSV 1M 0.5M E2-T5V 0.5M - -

2 J FIBERS FOR OUTSIDE Item External Fiber Cable Part number E2-T10V 2M J LENS UNIT Item Long distance lens Part number E9-F1V J AMPLIFIER UNIT W/HIGH-PRECISION SENSING AND TEACH FUNCTION (SOLD SEPARATELY) Item NPN output PNP output Part number EX-NH11 EX-NH1 Appearance Light source Power supply voltage Current consumption Response time Red LED (λ = 0 nm) 12 to 2 VDC ±10%, ripple (p-p) 10% max. 5 ma max. 1 ms max. (see note) Output Control output NPN open collector, load current: Alarm output 50 ma max., residual voltage: 1 V max. Sensitivity setting Fine sensitivity adjustment Note: Teaching method Automatic or manual fine threshold adjustment (1 levels) The EX-NH adopts a new digital sensing algorithm and has the same capacity for detecting minute objects as the conventional EX-NTj1 (response time of 0.5 ms). J FOUR-CHANNEL AMPLIFIER UNIT WITH TEACH FUNCTION (SOLD SEPARATELY) Item Part number Appearance Four-channel EX-NM11 (NPN output) EX-NM1 (PNP output) Light source Power supply voltage Current consumption Response time Control output Timer function (see note) Teaching confirmation function Red LED (λ = 0 nm) 12 to 2 VDC ±10%, ripple (p-p) 10% max. 150 ma max. 500 µs max. at rated sensing distance PNP or NPN open collector, load current: 100 ma, residual voltage: 1 V max. OFF-delay timer (fixed to 0 ms) (independent channel) Indicator (red/green LEDs) and buzzer Remote teaching input Pink and blue (0 V) wires are short-circuited when remote input is ON. (0 V short-circuit current: 1 ma max.) Pink and blue (0 V) wires are not short-circuited when remote input is OFF. (Open or 9 V min.; max. input voltage: 2 V) Response time is 0.5 ms max. when remote input is OFF. Mode Light-ON and Dark-ON switch-selectable Note: It is possible to disable the OFF-delay timer function by using the switch setting. 2

3 J DIGITAL FIBER AMPLIFIER UNIT (SOLD SEPARATELY) Item NPN output PNP output NPN output PNP output Part number EX-DAN11 EX-DAN1 EX-DAN21 EX-DAN51 Appearance Light source (wavelength) Supply voltage Current consumption Response time Red LED (0 nm) 12 to 2 VDC ± 10%, ripple (p-p) 10% max. 5 ma max. Control output ON/OFF output NPN open collector Load current: 50 ma max. Residual voltage: 1Vmax. Sensitivity setting Timer function High-speed mode: 250 ms for operation and reset Standard mode: 1 ms for operation and reset Long-distance mode: ms for operation and reset PNP open collector Load current: 50 ma max. Residual voltage: 2Vmax. NPN open collector Load current: 50 ma max. Residual voltage: 1Vmax. PNP open collector Load current: 50 ma max. Residual voltage: 2Vmax. Monitor output -- Load1to5VDC,10kΩmin. Load resistance 10 kω min. Teaching or manual method OFF-delay timer, range: 0 to 200 ms (5 ms increment)

4 Specifications J RATINGS/CHARACTERISTICS Flanges Item F F1 Number of channels Four-channel One-channel Vacuum ratings Ambient operating temperature 1x10-10 Pa S m /s max. (.5 x torr S l/s) - 25 C to55 C (- 1 F to 11 F) withnoicing Material Aluminum (A505) Stainless steel (SS 0) Flange seal material Fluoro rubber Weight Approx. 250 g Approx. 220 g Fiber Unit for Outside Item Standard length Ambient operating temperature Permissible bending radius E2-T10V 2 m (cut freely) - 25 C to0 C (- 1 F to 15 F) withnoicing 25 mm max. Material Core Acrylic resin Vacuum Fibers Sheath Protection tube Fluoro-resin Black polyethylene Item E2-T5V E2-TSV Sensing method Standard length Through-beam 1 m (not cut freely) Sensing distance EX-NM11/NM1 0 mm 0 mm 150 mm EX-NH mm 100 mm 00 mm Ambient operating temperature - 25 C to 120 C (-1 F to 2 F)withnoicing - 25 C to 200 C Permissible bending radius 0 mm max. 25 mm max. Material Core Quartz Optical glass Sheath Fluoro-resin Optical glass Protection tube Fluoro-resin Stainless steel (SS 0) Fiber head/ Aluminum (A505), Stainless steel (SS 0) Connection tube Lens Unit Item E9-F1V Applicable fiber E2-T5V Sensing distance EX-NM11/NM1 0 mm 20 mm EX-NH11 00 mm 00 mm Ambient operating temperature - 25 C to 120 C (- 1 F to 2 F) withnoicing Material Housing Aluminum (A505) Lens Optical glass

5 Dimensions Unit: mm (inch) J FLANGES F (1.2) dia. 9 (1.9) 2 (0.9) (1.) dia. (0.1) Flange (vacuum side) Oring Flange (outside) Mounting hole: ±0.5 (1.50 ±0.02) dia. F1 22 (0.) 2 (0.90) 22 (0.) 19 (0.5) Two, Nut M1 Washer Oring Connector Mounting hole: 1.5±0.2 (0.5 ±0.01) dia. 5

6 J VACUUM FIBERS 1.15 (0.05) Mx0. dia. M2.x0.5 Nut Washer (0.1) dia. -(0.12) dia. optical fiber (0.1) dia. 2.2 (0.09) dia. (0.1) -(0.12) Connects to Flange (vacuum side). 20 (0.9) 2 (1.02) 0 (1.1) 1,000 or 500 (9. or 19.9) E2-T5V 1.15 (0.05) dia. (0.1) 1 (0.1) M2.x (0.59) (0.) 1,000 or 500 (9. or 19.9) (0.12) dia. 5dia. R9 (0.1) dia. (0.12) dia. (0.1) dia. 2.2 (0.09) dia. (0.12) 2 (1.02) Connects to Flange (vacuum side). E2-TSV 2-dia. lens (0.12)-dia. sensing head (stainless steel) 12 (0.) 1.2 (0.5) 12 (0.).5 dia. standard length:1,000 (9.) 0 (1.1) (0.2) R dia. 90 dia. 2.9-(0.11) dia. flexible tube (stainless steel) (0.1) dia. 2.2-(0.09) dia. sleeve 2 (1.02) J MOUNTING BRACKET E9-L5V Mounting Bracket (Sold Separately).5 (0.1) (0.1) (0.1) 2 (0.90) 15 (0.59).1 (0.1) Material: SS (0.02).1 (0.1)

7 Unit: mm (inch) J EXTERNAL FIBER CABLE E2-T10V 2000 (.) * 2.2 (0.09)-dia. optical fiber * * Freely cut and connected to the outside Flange or Amplifier Unit. J LENS UNIT E2-F1V 0.5-dia. (0.02) hole.9 (0.5) (0.1) dia. (0.2) M2. x 0.5 Effective depth:. (0.15) Spot facing depth: 0.9 (0.0) J AMPLIFIER (SOLD SEPARATELY) EX-NH11 Note: The mounting bracket can be attached to side A. Operation indicator Threshold indicators (Side A - see note) (0.2) 10 (0.9) 9. (0.9) Incident level indicators (0.2) 5 (2.2) Two, 2. dia. (0.1) (1.0) 2.5 (1.2) Cable: Polyvinyl chloride covered cable -mm dia. (1/0.12 dia), cores Standard length: 2 m 10. (0.2).1 (0.1) 22. (0.) 1 (0.). (1.) 1 (0.51) Two,.2- (0.1) dia. holes Mounting bracket 2. (0.09) (0.1) Weight: Approx. 100 g. (0.1) (1.) 22. (0.) 1 (0.) Two, mounting holes

8 J AMPLIFIER UNIT (SOLD SEPARATELY) EX-NM11 EX-NM1 Operationindicator Stability indicator Note: The mounting bracket can be attached to this side. (0.2). (0.) 10 (0.9) (0.2) 10. (0.) 2.2 (1.2) 21. (0.).5 (0.1) 59 (2.2).2 (0.2) Eight, 2. dia. (0.1) (1.0) 2.5 (1.2) 10. (0.2).1 (0.1). (0.15) (0.2). (0.) (0.2) (0.) (0.) Two,.2-dia. holes Two, mounting holes Mounting bracket.1 (0.2) (0.21) Cable: Polyvinyl chloride-covered cable -mm dia. (0/0.0 dia), cores Standard length: 2 m Weight: Approx. 200 g 22. (0.) 1 (0.)

9 J AMPLIFIER EX-DAj1 Operation indicator (orange) Incident level display Threshold level display The mounting bracket can be attached to this side. Two, 2. mm-dia. 10 (0.9) 1 (2.0). (0.1) Mounting Holes Two, M (1.2) Two,.2-mm-dia. holes 1. Mounting bracket SUS0 stainless steel 2. mm-dia. vinyl-insulated round cable with / conductors (0/0.12 mm-dia) Standard length: 2 m Two, mounting holes 9

10 Engineering Data (with EX-NM11/NM1 Amplifier Unit) J EXCESS GAIN RATIO VS. DISTANCE CHARACTERISTICS (TYPICAL) E2-T5V E2-TSV Sensing distance Sensing distance Sensing distance with E9-F1V E2-T5V E2-T5V with E9-F1V Sensing distance (cm) Sensing distance (cm) Sensing distance (cm) J PARALLEL OPERATING RANGE (TYPICAL) E2-T5V Parallel operating range Y (mm) with E9-F1V Parallel operating range Y (mm) E2-T5V E2-T5V with E9-F1V Sensing distance X (cm) E2-TSV Parallel operating range Y (mm) Sensing distance X (cm) Sensing distance X (cm) 10

11 Engineering Data (with EX-NH11 Amplifier Unit) J EXCESS GAIN RATIO VS. DISTANCE CHARACTERISTICS (TYPICAL) E2-T5V E9-F1V E2-T5V - E9-F1V

12 J PARALLEL OPERATING RANGE (TYPICAL) + E9-F1V 150 Parallel operating range (mm) 100 Fiber Fiber with lens E2-T5V E2-T5V + E9-F1V Parallel operating range (mm) Fiber Fiber with lens E2-TSV Parallel operating range (mm)

13 Precautions J APPLICATIONS The Vacuum Fiber Unit is used to detect a variety of objects located in high-vacuum chambers heated up to 120 C (some chambers operate at a maximum temperature of 200 C). J CLEANING Although Flanges, Vacuum Fibers, and Lens Units are cleaned before shipping, clean them with alcohol before use in high-vacuum chambers to make sure there is no foreign matter on them. J ORGANIC SOLVENTS Keep organic solvents away from the Vacuum Sensor. J FOR CONDITIONS OR ENVIRONMENTS NOT SPECIFIED FOR THIS PRODUCT Consult your OMRON representative before attempting an application for: conditions or environments not specified in instruction manuals, and applications insuring safety, including nuclear reactor control, train facilities, aviation facilities, motorized vehicles, furnaces, medical equipment, amusement equipment, and safety equipment. Note: You must allow a sufficient margin between ratings and required performance in addition to providing appropriate fail-safe measures and other safety measures when using the in applications such as mentioned above. J EXCESSIVE FORCE The Vacuum Fiber Unit can resist a maximum force of 29. N ( kgf). Do not impose extreme force, such as pulling force or pressure, on the Fibers. 1

14 NOTE: DIMENSIONS SHOWN ARE IN MILLIMETERS. To convert millimeters to inches divide by 25.. R OMRON ELECTRONICS LLC One East Commerce Drive Schaumburg, IL OMRON OMRON ON -LINE Global -- USA -- Canada -- OMRON CANADA, INC. 5 Milner Avenue Scarborough, Ontario M1B 5V Cat. No. CEDSAX 11/01 Specifications subject to change without notice. Printed in U.S.A.

15 Mouser Electronics Authorized Distributor Click to View Pricing, Inventory, Delivery & Lifecycle Information: Omron: E2-L2S E2-A0 2M E2-D11 10M E2-D2L M E2-D M E2-DC9G E2-S M E2-S15-2 1M E2-S15L-1 0.5M E2-S15L-2 1M E2-T1 5M E2-T1 5M E2-T22R 2M E2-TC2000 F1 F E2-D15YR 2M E2-D15Z 2M E2-T15ZR 2M