VACUUM TECHNIQUE. Atlas Copco Capital Markets Day Geert Follens Business Area President

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1 VACUUM TECHNIQUE Atlas Copco Capital Markets Day 2016 Geert Follens Business Area President

2 AGENDA 2 1. Facts in Brief 2. Way forward 3. Semiconductor industry 4. General industry 5. Sustainable vacuum solutions 6. Service offer 7. Summary

3 3 FACTS IN BRIEF

4 4 TIME LINE 2010 Atlas Copco s Compressor Technique business area has a smaller industrial vacuum business, including a part from the Quincy acquisition The Edwards Group, with revenues of MSEK 6 950, is acquired. The Vacuum Solutions division is created within the Compressor Technique business area Exhaust gas management producer Applied Plasma Systems, South Korea, is acquired. Vacuum pump service business Innovative Vacuum Solutions, USA, is acquired Vacuum parts and service business Capitol, USA, is acquired. Leybold, with revenues of MSEK 3 150, is acquired. CSK, South Korea, with revenues of MSEK 870 is acquired enters into 2017 with approximately employees and SEK 14 billion in revenues (pro-forma).

5 FACTS IN BRIEF Edwards / Vacuum solutions division Headquarters: Burgess-Hill - UK Employees: (2015) add. workforce Revenue: (2015) MSEK Business description A leading developer and manufacturer of vacuum products, exhaust management systems and related services Strong presence in the semiconductor industry

6 FACTS IN BRIEF Leybold overview 6 Headquarters: Cologne, Germany Employees: (2015) Revenue: (2015) > MCHF 360 (MSEK 3 150) TRIVAC Rotary Vane Vacuum Pumps DRYVAC Dry Compressing Screw Pumps TURBOVAC i X Mechanical Turbomolecular Pumps SOGEVAC Rotary Vane Vacuum Pumps TMP MAG Line Turbomolecular Pumps Business description Leader in industrial vacuum with significant presence in high vacuum SCROLLVAC Dry Compressing Scroll Vacuum Pumps RUVAC Roots Vacuum Pumps TURBOSTREAM Turbo radial Blowers TMP Classic Line Turbomolecular Pumps SYSTEMS Standardized & customized SCREWLINE Dry Compressing Screw Vacuum Pumps COOLVAC Cryo pumps

7 FACTS IN BRIEF CSK overview 7 Headquarters: Gyeonggi-do, South Korea Exhaust management systems Employees: (2015) 400 Burn & Wet Plasma & Wet Thermal & Wet Wet Revenue: (2015) BKRW (MSEK 870) Business description A leading supplier of exhaust management and delivery systems in the Korean market, focused on the semiconductor market Delivery systems

8 VACUUM TECHNIQUE 8 Vacuum products Semiconductor Flat panel displays Solar panels Metallurgy Exhaust management systems Food & beverages Packaging Conveying and assembly and more

9 9 VACUUM A GROWING MARKET Miniaturization Scientific OEMs Electrical New processes 450 mm transition Increasing vacuum intensity Moore s law Next generation technologies LED/Solar Point of Use spectrometry (simplification) Bigger system requirements Industrial / Process Lithium Ion batteries Electric vehicle applications OLED EUV lithography Advanced packaging Integrated Systems Increasing complexity Consolidation Device proliferation LED and general lighting Green technology Freeze drying Food processing Pharmaceuticals and Healthcare Significant investment Hyper growth market Enabling rapid technology deployment Time to 1 st wafer Mobility and connectivity Electronics as necessity Vacuum Technique

10 MARKET COVERAGE 10 Market segmentation Pressure range (absolute pressures) Applications (main classifications) Rough, process and industrial vacuum Vacuum Semiconductor 1 bar mbar mbar mbar Rough vacuum Process vacuum Semiconductor process vacuum TFT-LCD display High and ultra high vacuum Thin film Instruments Industrial vacuum Solar R&D LED Brand used Leybold Edwards Atlas Copco Quincy Edwards CSK Edwards Leybold Gamma

11 VACUUM TECHNIQUE In Brief Vision is to become global market leader in vacuum solutions 2016 development Organic order growth of 22% Jan. Sept. Strong order intake from the semiconductor industry, particularly in Asia Acquisitions of CSK and Leybold in Q3 Operating margin at 21.4% (18.7) Support from volume growth and currency Dilution from acquisitions Orders, revenues and operating margin* Q Q Q *Restated figures Q Q Orders received, MSEK Operating margin, % Q Q Q Q Revenues, MSEK Q Q ROCE 16% 35% 30% 25% 20% 15% 10% 5% 0% 11

12 BSEK VACUUM TECHNIQUE Including Leybold and CSK 12 Revenues by region Revenues 16 North America 24% Asia/ Australia 54% Europe 19% South America 1% Africa/ Middle East 2% Revenues by region including Leybold and CSK (when acquired) months Sep months Sep 2016 incl. Leybold and CSK, restated Leybold CSK

13 VACUUM TECHNIQUE Including Leybold and CSK 13 Revenues by application Revenues by type Service 23% Industrial and high vacuum 40% Semiconductor 60% Equipment 77% Approximate revenue split including Leybold and CSK (when acquired)

14 14 VACUUM TECHNIQUE - WAY FORWARD

15 VACUUM TECHNIQUE FOCUS AREAS 15 Successful integration of acquisitions Successful implementation of decentralized organizational structure Improve transparency, responsibility, accountability and profitability Increase customer intimacy Improve agility and resilience Reduce working capital and supply chain complexity Optimize the utilization of the manufacturing foot print Increase service value offering, penetration and 1-to-1 ratio Leverage synergies with other business areas and the Group Innovation Accelerate time to market

16 VACUUM SOLUTIONS FOR THE SEMICONDUCTOR INDUSTRY Mike Allison 16 Edwards brand High customer concentration A wide technology portfolio Leadership in integrated systems

17 SEMICONDUCTOR INDUSTRY DRIVERS Electronics demand continues into the future 17 DRAM - FLASH MICRO PROCESSORS MICRO CONTROLLERS TELECOMS SENSORS RF POWER Moore s law Current drivers Smart phones, Tablets, PC s Data storage Internet of Things Automotive Industrial automation

18 MEMORY CONSOLIDATION IS DRIVING STABILITY 18 Global strong, profitable and consumer driven manufacturers Equipment lead times are getting shorter Smaller incremental investments based on consumer demand (e.g. phone cycles, economic events, etc.) Source: Micron and Industry Analysts

19 SEMICONDUCTOR FAB DETAILS Examples of what is inside a fab 19 Vacuum pumps Power supplies Robotics (inside) Loader Semiconductor fab Chambers Sub Fab Typical semiconductor process tool and lots of other components Turbo molecular pump / Cryo (if fitted) wafer starts per month (wspm) requires about: vacuum process tools abatement units pumps

20 CORE TECHNOLOGY PORTFOLIO Creating an interconnected solution for the sub fab 20 Extensive Vacuum technology portfolio Broad range of abatement technologies Turbo-molecular pumps (TMP) Roots Claw Dry Pump Dry Screw All roots dry pump Booster Fuel Abatement Plasma Abatement Field proven integrated solutions ezenith Integrated System

21 OUR STRATEGIC FOCUS Undisputed leader in vacuum and exhaust gas management solutions 21 High Performance Teams Applications/Process Knowledge Key Account Strategy Technology & Sub-Fab Solutions Operational Excellence, Scale, Safety and Quality

22 THE FUTURE Vacuum solutions for the semiconductor industry 22 Opportunities growth drivers Consolidation is driving stability New technologies NAND (non-volatile, flash memory) / 3D NAND Extreme Ultra Violet (EUV) lithography OLED growth Integrated systems Demand growth PC s, tablets, smartphones China - $100B investment fund Service penetration Challenges Price pressure Master new technologies Cost efficient manufacturing

23 VACUUM SOLUTIONS FOR THE GENERAL INDUSTRY Koen Lauwers 23 Leybold, Edwards and Atlas Copco brands Growth strategy Product innovation focus

24 MARKETS FOR INDUSTRIAL VACUUM 24 Strive for growth Densify presence Innovation Brand management 7 Main applications for industrial vacuum use Distillation Holding Lifting Moving Cooling Drying INDUSTRIAL VACUUM Forming Shaping Degassing De-aerating Preserving Creating a clean, controlled environment Degree of complexity

25 MARKETS FOR INDUSTRIAL VACUUM 25 Rough (utility) vacuum Direct, indirect and OEM channels Strong innovation program Holding Lifting Moving INDUSTRIAL VACUUM Forming Shaping Preserving Creating a clean, controlled environment Disruptive screw and claw technologies launched in 2015 and 2016 General industry, packaging, canning, food, electronics, etc.

26 MARKETS FOR INDUSTRIAL VACUUM 26 Industrial vacuum Harsh applications - competence prerequisite Edwards and Leybold brands well positioned OEM and end customers Cooling Drying INDUSTRIAL VACUUM Degassing De-aerating Creating a clean, controlled environment Successful penetration in the lithium ion battery markets Metallurgy, automotive, electricity, light bulbs, etc.

27 MARKETS FOR INDUSTRIAL VACUUM 27 Process vacuum Harsh applications End customers and Engineering, procurement and construction companies (EPC S) Product programs defined Distillation Cooling Drying INDUSTRIAL VACUUM Degassing De-aerating Example of an Edwards liquid ring pump skid for an offshore sea water de-aeration unit Chemicals, petrochemicals, pharmaceuticals, plastics, food processing, etc.

28 MARKETS FOR INDUSTRIAL VACUUM 28 Thin film Edwards and Leybold well positioned OEM and end customers INDUSTRIAL VACUUM Degassing De-aerating Creating a clean, controlled environment Example of coater system Optical coating, data storage, glass and surface coating, display coating, solar, etc.

29 INNOVATION The key to success for Industrial Vacuum 29 Traditional focus is on application driven solutions, allowing aging of platforms Our focus is on disruptive product platforms! Example the GHS VSD+ pump Best in class in efficiency, noise, functionality 75% same components as for the compressor range GA VSD+

30 INNOVATION CHS VSD+ Vacuum pump 30

31 THE FUTURE Vacuum solutions for the general industry 31 Opportunities Organic growth Leverage branding Expand the offer with disruptive innovation Strive for manufacturing excellence New applications in emerging markets and technologies Grow the service business Challenges Slow growth in traditional applications Competitive market conditions

32 32 SUSTAINABLE VACUUM SOLUTIONS

33 ENABLING ENVIRONMENTAL TECHNOLOGY 33 Solid state lighting, e.g. LED, can offer 80% energy savings Solar cells provide clean renewable energy Biofuel production uses vacuum in the process Vacuum used in the production of steel alloys can reduce the level of hydrogen, carbon and other impurities during the process Did you know? Over 50% of the world's solar panels made are using Edwards products

34 Clean Application Medium Application Power (kw) Harsh Application EDWARDS POWER REDUCTION TREND kw iq80/1200 (1995) 3.1 kw iq80 (1994) 1994 ih1000 (1998) 4.2 kw 2.2 kw IPX180 (1998) ih1000 (2002) 3.8 kw 1.4 kw EPX180 (2002) 1.6 kw igx1000 (2004) ixl120 achieves over 80% reduction in power compared to iqdp ixh1210h (2008) ixh1210 (2008) ixl120 (2009) ixh1210 achieves 29% reduction in power compared to iqdp80/ kw 3.4 kw 0.55 kw ixm1200 (2014) Further segmentation of medium applications achieves 63% further power reduction (ih to ixm). 1.4 kw

35 INNOVATION DRIVERS AND SUCCESS FACTORS 35 Innovation drivers Total cost of ownership Environmental challenges Noise & footprint Technology changes TECHNOLOGY LEADERSHIP INNOVATION Diagnose Develop Demonstrate Success factors Long-term collaboration with customers Proven results for customers across all core industries Partnerships with demanding customers as well as with industry and academic groups Listen Collaborate Enable Experience Solve Optimise PARTNERSHIPS APPLICATION

36 36 SERVICE OFFER

37 TWO SERVICE BUSINESSES 37 Semiconductor Service > 600 Field Service engineers Service image Providing service solutions to semiconductor customers 32 Workshops and service centers for remanufacturing Providing service solutions to customers in general industry Remanufacturing Parts Labour

38 SERVICE 1-1 Ratio 38 Semiconductor General Vacuum Current 1-to-1 Potential Current 1-to-1 Potential

39 CONNECTIVITY 39 EdCentra Edwards latest equipment monitoring and data analytics platform Deployed on a server inside a customer s facility Supporting several hundred devices per instance FabWorks (Legacy product) Total connected devices: ~

40 SUMMARY Vacuum technique 40 Vacuum is a growth area Vision is to become and remain the global leader in vacuum solutions Focus on integration Innovation

41 41 COMMITTED TO SUSTAINABLE PRODUCTIVITY.

42

43 43 CAUTIONARY STATEMENT Some statements herein are forward-looking and the actual outcome could be materially different. In addition to the factors explicitly commented upon, the actual outcome could be materially and adversely affected by other factors such as the effect of economic conditions, exchange-rate and interest-rate movements, political risks, the impact of competing products and their pricing, product development, commercialization and technological difficulties, supply disturbances, and major customer credit losses.

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