Bank of America S-MID Cap Conference Boston, MA. March 26,2008
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1 Bank of America S-MID Cap Conference Boston, MA March 26,2008
2 Safe Harbor Statement Safe Harbor Statement under the U.S. Private Securities Litigation Reform Act of 1995; certain matters in this presentation, including forecasts of future demand and future Company performance, are forward-looking statements that are subject to risks and uncertainties that could cause actual results to materially differ, either better or worse, from those projected. Further discussions of risk factors are available in the Company s most recent SEC filings including form 10-K for the fiscal year ended 9/30/07 The Company assumes no obligation to update the information in this presentation. Copyright 2007 by Brooks Automation, Inc. - 2-
3 Our Presentation Today Some Trends in Semiconductor Manufacturing Brooks Automation s Role in the Market The Brooks Growth Opportunity Turning the Potential Into Performance A Progress Report Closing Remarks Copyright 2007 by Brooks Automation, Inc. - 3-
4 Bank of America S-MID Cap Conference Boston, MA Market Trends
5 A Macro View What s Changing? Wafers per Month (000's) 200 mm equiv. 16,000 14,000 12,000 10,000 8,000 6,000 4,000 2,000 0 Global IC Fab Capacity (200 mm equivalent) (F) 2008 (F) 300 mm 200 mm 150 mm 125 mm or less Capacity outlook Currently tracking ~17% growth overall for 2007 ~11% growth estimated in mm/200 mm crossover in 2008? Copyright 2007 by Brooks Automation, Inc. - 5-
6 A Macro View What s Changing? Global IC Fab Capacity (200 mm equivalent) Equipment Spending by Geometry (Percent of Dollars) Wafers per Month (000's) 200 mm equiv. 16,000 14,000 12,000 10,000 8,000 6,000 4,000 2, (F) 2008 (F) 300 mm 200 mm 150 mm 125 mm or less Capacity outlook Currently tracking ~17% growth overall for 2007 ~11% growth estimated in mm/200 mm crossover in 2008? 100% 80% 60% 40% 20% 0% 4Q06 1Q07 2Q07 3Q07 4Q07 1Q08 2Q08 3Q Copyright 2007 by Brooks Automation, Inc. - 6-
7 A Macro View What s Changing? Global IC Fab Capacity (200 mm equivalent) Equipment Spending by Geometry (Percent of Dollars) Wafers per Month (000's) 200 mm equiv. 16,000 14,000 12,000 10,000 8,000 6,000 4,000 2, (F) 2008 (F) 300 mm 200 mm 150 mm 125 mm or less Capacity outlook Currently tracking ~17% growth overall for 2007 ~11% growth estimated in mm/200 mm crossover in 2008? 100% 80% 60% 40% 20% 0% 4Q06 1Q07 2Q07 3Q07 4Q07 1Q08 2Q08 3Q N. America Japan Taiwan Europe S.Korea China ROW $50 $40 $40.47 $40.91 $43.58 $45.51 $48.51 $30 $20 $10 $ (A) 2007 (F) 2008 (F) 2009 (F) 2010 (F) ROW China S.Korea Europe Taiwan Japan N. America Copyright 2007 by Brooks Automation, Inc. - 7-
8 A Macro View What s Changing? Wafers per Month (000's) 200 mm equiv. Global IC Fab Capacity (200 mm equivalent) 16,000 14,000 12,000 10,000 8,000 6,000 4,000 2, mm 200 mm 150 mm 125 mm or less Capacity outlook Currently tracking ~17% growth overall for 2007 ~11% growth (F) 2008 (F) estimated in mm/200 mm crossover in 2008? N. America Japan Taiwan Europe S.Korea China ROW $50 $48.51 $40.91 $43.58 $45.51 $40.47 $40 $30 $20 $10 $ (A) 2007 (F) 2008 (F) 2009 (F) 2010 (F) ROW China S.Korea Europe Taiwan Japan N. America % 80% 60% 40% 20% 0% Equipment Spending by Geometry (Percent of Dollars) 4Q06 1Q07 2Q07 3Q07 4Q07 1Q08 2Q08 3Q08 $50 $40 $30 $20 $10 Wafer Process Assembly & Pack. Test Other $ (A) 2007 (F) 2008 (F) 2009 (F) 2010 (F) Other Test Assembly & Pack Wafer Process Copyright 2007 by Brooks Automation, Inc. - 8-
9 A Micro View All Positive Trends WIRE VIA Today s Chips: Finer Geometry i.e. 65 nm => 45nm More Materials More than 1000 Process steps Copyright 2007 by Brooks Automation, Inc. - 9-
10 A Micro View All Positive Trends WIRE VIA Today s Chips: Finer Geometry i.e. 65 nm => 45nm More Materials More than 1000 Process steps More Process Chambers More Chambers per Tool More Tools More Wafer Moves Copyright 2007 by Brooks Automation, Inc
11 A Micro View All Positive Trends WIRE VIA Today s Chips: Finer Geometry i.e. 65 nm => 45nm More Materials More than 1000 Process steps More Process Chambers More Chambers per Tool More Tools More Wafer Moves These are all Trends that Play Directly into BROOKS Unique Capabilities! Copyright 2007 by Brooks Automation, Inc
12 Bank of America S-MID Cap Conference Boston, MA Brooks Position
13 Positioned As a Strategic Partner Our Business Starts and Ends with the Chip Makers Partner to Both the Tool Makers and the Chip Makers Best in Class Product Offerings Unmatched Breadth of Capabilities Critical Components Complete Sub-Systems Fab Support Unusual Footprint Across the Fab Unique Customer Support Activity Before the Sale During the Acquisition Process After the Sale Copyright 2007 by Brooks Automation, Inc
14 Brooks Has Successfully Targeted and Penetrated Most Process Steps 2006 FRONT END PROCESS EQUIPMENT Flow Chart with Market Sizes, 2006 ($ millions) STRONG PRESENCE TARGETED MARKETS LIMITED PRESENCE BARE WAFERS EPI $312 PROCESS CONTROL $4,265 STRIP $538 ETCH $4,598 WET STATIONS $1,150 CLEAN DRY PROCESS SPRAY $772 IMPLANT $1,364 CYCLE REPEATED UP TO 50 TIMES DEPENDING ON PRODUCT LITHOGRAPHY* TRACK $1,764 STEPPERS $6,386 DEPOSITION CMP* CVD $4,411 PVD $1,554 OXID/DIFF $641 RTP $543 ELECTRO PLATING $292 CMP $1,315 CMP CLEAN DUV $5 PHOTOMASKS $4,411 $3,200 Components: Power, Supplies, Pumps, etc. $2,300 FACTORY & TOOL AUTOMATION $2,000 CAPTIVE TOOL AUTOMATION $600 Copyright 2007 by Brooks Automation, Inc. *YBA -14-
15 An Expanding Brooks Solution Set Tool Automation Subsystems Process Vacuum Subsystems Copyright 2007 by Brooks Automation, Inc
16 Brooks ASG A Unique Capability A Success Story in Outsource Solutions Airflow Management Frame Panels Fan-filter system TAD SSD Automation Robot Track Aligner Loadports The Brooks Outsource Approach Viewed as an Extended Factory Competitive price Brooks owned content Volume and LCR Sourcing Margin % Greater than Peers Increasing Content Improves Model Transitions to Brooks Designs Value to Large and Small OEM s Subsystems Gas & fluid distribution Power management OEM Content 3 rd Party Typical Custom EFEM Solution Copyright 2007 by Brooks Automation, Inc
17 Brooks Strategy is Increasing Content & Adding Significant Value Jet EFEM Marathon 2 VWTM Razor TAD Fan Filter SSD Fusion TAD Mag 8 TAD Vision TAD Track TAD Align TAD GP CTI Copyright 2007 by Brooks Automation, Inc
18 Brooks Reaches Across the Fab Vacuum Platforms Jusung Sosul Anelva HKE Veeco Atmospheric Front Ends Loadports AMAT LAM Rudolph Varian AMAT TEL LAM Novellus Varian Axcelis KLA Vacuum Products AMAT TEL Novellus SEN Varian Nissin Wafer Transport Modules AMAT LAM Novellus KLA Varian Copyright 2007 by Brooks Automation, Inc
19 $500Million Spent Annually Supporting Our Installed Base Fab Automation PRI Automation Hermos RFID $75M SAM Lithography PRI Automation Tec-Sem Zygo $50M SAM CTI Cryogenics Vacuum Pumps System Platforms LAM Jusung Anelva Veeco Front End Accent AMAT Wafer Automation Hitachi Automation Loadports FOUP,SMIF KLA-Tencor LAM AMAT $260M Mattson Novellus SAM Novellus AMAT KLA-Tencor Varian $125M Novellus Rudolph Varian Varian Copyright 2007 by Brooks Automation, Inc. SAM -19-
20 Brooks Growth Opportunity SAM REV Share Tool Automation $950M $460M 49% Vacuum $200M $152M 76% Support/Service $510M $120M 23% Loadports AMAT TEL LAM Novellus Varian Axcelis KLA Vacuum Products AMAT TEL Novellus SEN Varian Nissin Jusung Sosul Anelva HKE Veeco Vacuum Platforms AMAT LAM Rudolph Varian Atmospheric Front Ends Wafer Transport Modules AMAT LAM Novellus KLA Varian Copyright 2007 by Brooks Automation, Inc
21 Bank of America S-MID Cap Conference Boston, MA Performance Enhancement
22 Performance Enhancement Initiative Committed to Turn Potential into Performance New Management Team As of 10/1/07 Sense of Urgency Focus on Profitable Revenue Growth Enhanced Balance Sheet Management Less Focus on Current Quarter Result Assuring Performance Throughout the Cycle Longer Term Orientation Copyright 2007 by Brooks Automation, Inc
23 Three Phase Initiative Simplifying Operations to Both Improve Customer Responsiveness & Improve Financial Performance Reduce Organizational Complexity Instill Customer Confidence Harnessing Investments Made Over the Past Eighteen Months Leverage Acquisitions Leverage Global Joint Ventures New Product Development Programs Broadening Base the Base of Brooks Adjacent Markets New Markets Copyright 2007 by Brooks Automation, Inc
24 Initiative Progress to Date Simplified Organization Leveraging Existing Talent and New Recruitments Achieved Significant Reduction in Breakeven Point Improvement in Customer Responsiveness Integrated Automation Systems Group Rationalization of Manufacturing Operations Ongoing Refocused Product Development Initiatives Alignment of Compensation and Incentive Programs Began Assessment of Adjacent Market Opportunities Copyright 2007 by Brooks Automation, Inc
25 Bank of America S-MID Cap Conference Boston, MA Summary
26 Brooks Automation Today Extremely Well Positioned Now Building on a Very Strong Base Strong Component Group Performance Enhancing Systems Group Performance Aligned and Highly Motivated Organization Outsourcing Trend is Opportunity to Outperform Near Term Is About Our Ability to Execute Positive Momentum in Design-In Wins Turning the Potential into Performance We Welcome the Opportunity to Help You Decide If Brooks Fits into Your Portfolio Copyright 2007 by Brooks Automation, Inc
27 Bank of America S-MID Cap Conference Boston, MA Thank You!
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