ISMI Industry Productivity Driver

Transcription

1 SEMATECH Symposium Taiwan September 7, 2010 Accelerating Manufacturing Productivity ISMI Industry Productivity Driver Scott Kramer VP Manufacturing Technology SEMATECH Copyright 2010 SEMATECH, Inc. SEMATECH, and the SEMATECH logo are registered servicemarks of SEMATECH, Inc. International SEMATECH Manufacturing Initiative, ISMI, Advanced Materials Research Center and AMRC are servicemarks of SEMATECH, Inc. All other servicemarks and trademarks are the property of their respective owners.

2 ISMI - Focus on semiconductor manufacturing productivity The productivity challenge How to determine, achieve, and maintain world class fab productivity How to increase productivity today and into the future The cost reduction challenge How to continuously reduce costs in today s fabs How to manage ever-increasing capital, manufacturing, and R&D costs The sustainability challenge How to reduce our environmental footprint Good for the environment, good for business 2

3 Manufacturing solutions to improve productivity and reduce cost Benchmarking and shared learning forums for continuous productivity improvement of existing factories and equipment Industry standards and guidelines for manufacturing excellence in next generation factories and equipment Environment, safety, and health technology for resource conservation and manufacturing sustainability Development and evaluation of applications for advanced metrology technology Realization of a cost-effective 450 mm transition SECS/GEM Port Control Interface A Port Data Councils and Forums Continuous Improvement Manufacturing Capabilities ESH Technology Metrology Technology 450 mm Transition 3

4 ISMI members 4

5 ISMI focus areas Mature Fabs Manufacturing Capabilities Program ESH Technology Center Metrology 450mm Transition Five operations councils Seven business Councils Fab productivity workshops Equipment productivity workshops (150mm, 200mm and 300mm) Alternate source spare parts Factory productivity improvement Factory cost analysis Enhanced equipment quality assurance Equipment performance improvement ESH global Strategies ESH resource Conservation ESH technology Environmental Research center (ERC) ESH advanced technology assessments Defect Metrology Lithography Metrology Films Metrology 450mm silicon readiness 450mm test wafer generation 450mm equipment demonstration 450mm ESH challenges 450mm factory readiness / ITB Manufacturing Excellence Installed based equipment forums 5

6 Mature Fabs 6

7 ISMI Mature Fabs roadmap Current Fab Manufacturing Methods Operations cost reduction Equipment throughput Maintenance practices Facilities operations Quality Reliability Supply chain management Probe and test development Fab, probe and final test Yield Probe card Materials Logistics Supplier relations Statistics New Add new topic spaces for the mature fabs market: Manufacturing cost benchmarking Manufacturing Execution Systems (MES) and AEC/APC for mature fabs Automated Material Handling (AMHS) Broader OEM focus for equipment productivity improvements Non-Product Wafer (NPW) and engineering lot handling R&D management and manufacturability of new technologies Equipment alarms and message management 7

8 ISMI Mature Fabs program structure Operations councils Business councils Fab productivity workshops Equipment productivity forums Alternate source spare parts Project Manufacturing & methods Yield Assembly & packaging Facilities Test Probe Quality Reliability Failure analysis Critical materials Equipment procurement Statistics Semiconductor logistics Manufacturing costs Maintenance practices Alternate spares Equipment component standards Equipment alarms and messages standards Thermal (RTP and furnace) Ion implant CVD (single wafer) Dry etch Litho (exposure) Wet Process Metrology PVD Comprehensive Database CMP Experts may participate in over 25 separate forum areas, where each forum may meet multiple times a year 8

9 ISMI councils Manufacturing Methods Council Facilities Council Yield Council Operations Councils Wafer Probe Council Test Council Assembly - Package Council Critical Materials Council Reliability Council Quality Council Business Councils Statistics Council Failure Analysis (FA) Council Semiconductor Logistics Forum Equipment Procurement Council 9

10 Manufacturing methods council Member share and benchmarking 3 metrics benchmarking surveys 5 member requested mini surveys 5 member share presentation sets Meeting roundtable discussion topics 2 member company site visits Technology transfer reports (members only) Industry influence and supplier direction Supplier presentation/evaluations/visits Industry standards/guidelines/ roadmap/ presentations/ reports/white papers Expert presentations/training Symposium/conferences/workshop Joint workshop sponsorship (CIP) Economic downturn workshop 1Q09 Maintenance workshop 2Q09 10

11 ISMI councils Benchmarking: know where you stand Identify best-in-class Share best practices Communicate requirements to suppliers Percent Example: Facilities cost survey Allocated facilities spending as a percent of total fab operations spending Member Fabs Surveyed 11

12 ISMI's equipment teams portfolio Equipment Productivity Forums A series of workshops - equipment suppliers, component suppliers, and fab equipment owners - collaborate to improve the productivity of installed base equipment Thermal process team Ion implant team Wet process team Metrology team PVD team CVD team Dry etch team CMP team Litho team 12

13 ISMI Equipment Productivity Forums 2010 Equipment Productivity Forums: Thermal (RTP and furnace) March 2010 Ion Implant April 2010 CVD (single wafer) June 2010 Dry Etch July 2010 Litho (exposure) Sept 2010 Wet Process Sept 2010 Metrology Oct 2010 PVD Oct 2010 CMP Nov 2010 Typical Equipment Productivity Forum agenda 13

14 Equipment Productivity Forum Core elements 3 day face-to-face meeting Member share Top issues, best known methods, equipment performance metrics Multi OEM engagement Separate session with each OEM Presentations Industry experts and alternate parts and services providers Supplier exhibition 14

15 Mature fabs workshops Mature fab, fab-wide topic space forums for benchmarking, member sharing, expert learning, solving top issues and industry wide networking Manufacturing costs Equipment component standards Maintenance practices Alternates spares Equipment alarms and message management Other topics in development 15

16 Mature fabs workshops Core elements 1 day face-to-face meeting Member share on specific topic using ISMI developed template Presentations Industry experts, OEM s and alternate parts and services providers Workshops can be combined with equipment productivity forums ISMI members determine the workshop topic 16

17 ISMI focus areas 450 mm Realization Advanced Metrology Mature Fabs Program Manufacturing Capabilities ESH Technology Center 450 mm Silicon Readiness 450 mm Test Wafer Operations Defect Metrology Lithography Metrology Operations councils Business councils Equipment forums Predictive Preventive Maintenance Data Collection ESH Global Strategies ESH Resource Conservation 450 mm Supplier Engagement 450 mm Demonstration Test Methods and Metrics 450 mm Equipment Platform Development 450 mm Factory Integration Readiness Films Metrology Workshops Alternate Source Spare Parts ESH Technology and ERC Companies can become a member of Mature Fabs Program without being a full member of ISMI 17

18 ESH Technology Center 18

19 ISMI - Focus on semiconductor manufacturing productivity The productivity challenge How to determine, achieve, and maintain world class fab productivity How to increase productivity today and into the future The cost reduction challenge How to continuously reduce costs in today s fabs How to manage ever-increasing capital, manufacturing, and R&D costs The sustainability challenge How to reduce our environmental footprint Good for the environment, good for business 19

20 ISMI ESH Technology Center Project areas ESH global strategies Understand impacts of current and emerging global ESH regulations Assist our industrial membership with response to global regulatory initiatives ESH resource conservation and manufacturing sustainability Reduce manufacturing environmental footprint Influence suppliers to reduce resources (energy, chemicals, water) ESH technology and assessments Emerging technologies assessments, e.g., EUV, TSV, nano-particles Greenhouse gas emissions University R&D on SC manufacturing sustainability, e.g., nano-particle exposure/toxicity 20

21 ISMI ESH Technology Center How we work Information meetings Technical projects Benchmarking and surveys Collaboration among IC makers Collaboration among IC makers and suppliers Develop guidelines and specifications University research ISMI ESH Technology Center Technical project presentations, workshop, and working group meetings Technical projects as requested by member companies Detailed surveys as requested by member companies Collaboration focused on technical projects Collaboration among IC makers, and equipment and materials suppliers on technical projects Guidelines, state of technology reports Industry guidance of University research for semiconductor sustainability 21

22 ISMI ESH Technology Center Component improvements 22

23 ISMI ESH Technology Center Fab-specific green building initiatives Green Fab Working Group established to apply green building principles to high tech manufacturing Fab-specific LEED workshops presented and online training developed Promotes adoption of fab-specific credits into the LEED rating system LEED Application guide for high tech facilities developed ISMI Member network currently includes 13 LEED projects, many others planned Texas Instruments RFAB, LEED Gold Certified 23

24 450 mm Transition 24

25 Wafer size the great cost equalizer 200mm 300mm 450mm ~ >2012 History shows that increasing wafer surface area by ~2.25X yields a 30% cost reduction and enables the inexpensively part of Moore s Law 25

26 ISMI 450 mm program mission and organization ISMI s 450 mm mission statement Enable a cost-effective 450 mm transition through coordination and development of infrastructure, guidance, and industry readiness ISMI 450 mm organization 450 mm transition program Supplier engagement Factory integration readiness Test wafer operations Starting materials Vacuum platform development Equipment test methods and metrics 26

27 450 mm progress 2009 thru 2010 Wafer Inventory Process and Metrology Equipment Factory Integration Standards and Guidelines Jul-2009 Single crystal wafers available for development 1 st 450 mm equipment ordered Multiple carriers, loadports and EFEMS in testing. Mech. Wfr standard passed Jul-2010 ~440 wafers loaned to 25 suppliers 450mm Particle inspection, wafer edge inspection, wet cleaning, lot sorter, and ellipsometer equipment installed and operational Experiments started for thermal oxidation and oxide deposition/etch. 450 mm EHS Guidelines Defined 450 mm Factory Integration is reasonably mature ISMI ITB is nearing completion AMHS pilot lines exist, and are under evaluation FOUP and Loadport standards completed Developmental wafer Standard completed 27

28 ISMI s unique value proposition Members determine programs and deliverables Industry wide benchmarking Critical mass of industry participants Provides a legal safe haven for competitive benchmarking Tried and true methods and procedures Facilitate shared learning Group discussions produce new and best known methods Learn from another company's ingenuity Share business process methodologies and approaches Secure member website for 24/7 IP access Peer networking Create structured interactions for value creation Industry experts Key industry supply base 28

29 SEMATECH/ISMI model for participation SEMATECH membership Members participate in all programs ISMI membership International SEMATECH Manufacturing Initiative Members participate only in manufacturing programs Program membership Members participate in individual programs Membership open to chipmakers and equipment/material suppliers Project/council membership Members participate in individual projects or business councils Supplier participate by invitation in council and workshop sessions 29

30 Summary ISMI is an industry driver for productivity Cost reduction Productivity improvement Projects cover all facets of semiconductor manufacturing Many ways to participate join us! 30

31 Accelerating the next technology revolution Research Development Manufacturing 31