Collaborative Alliance for Semiconductor Test (CAST) Special Interest Group (SIG) Rich Interactive Test Data Base (RITdb) 2017

Transcription

1 Collaborative Alliance for Semiconductor Test (CAST) Special Interest Group (SIG) Rich Interactive Test Data Base (RITdb) 2017

2 Streaming RITdb is a new standard which is intended to go beyond STDF SEMI CAST RITdb Working group Join LinkedIn group to monitor status. Semiconductor Big Data - RITdb the next gen STDF 2

3 The working group original intent to replace STDF was not sufficient for the growing needs of the industry. Working group started with the intention to create a modern replacement for STDF What we found? Just another way to collect & share data was not compelling enough to make a change. What is needed? Real time bidirectional data stream. 3

4 History of the Working group Next Generation of STDF define new container to collect/transport test data Expanded RITdb to handle more data: strip, event, equipment logs, events Moved from a file store to real-time event handling. (Data transport would be via a collection of RITdb files containing desired information.) 4

5 RITdb WG objective is to provision a standards driven data environment for Semiconductor Test Simple standards-based data capture, transport and relationship model for: E-test, probe, map and final test data Equipment configuration and performance data Event logs Model intended to support: Near real time Monitoring of status and performance Data analysis that requires accurate, consistent data from multiple related sources The requirements of the ITRS Adaptive Test Roadmap Model should be something that can be applied to legacy systems. 5

6 RITdb is a single simple extensible data model that can capture a variety of data E-test, probe and final test datalogs Equipment configuration information and performance data Equipment events, adaptive controls and results, etc. 6

7 Real-time streaming model provide ability to collect and monitor data/systems from sand to landfill Combine and synchronize data from multiple sources Enable monitoring and other realtime applications Key Requirements: Identity, Security, Trust, Time 7

8 Addresses ITRS Adaptive Test Roadmap requirements including Multilevel data stores with feedforward and feedback Both real-time and non real-time adaptive test 8

9 Plug-and-Play of components from multiple suppliers consumers and producers linked through SEMI standard messages and data format This provides capability to easily integrate events with the data i.e. test floor temperature or humidity, location, 9

10 Factory Server (or Appliance) The RITdb team plans to provide a collection of open software that can be loaded onto a server [appliance]. The software will translate datalogs and other data to RITdb. It will also provide GURU through which users can index, store and access the RITdb data. Tester Prober Handler Tester Prober Handler Legacy Test Cell Data Logger Legacy Bridge Test Cell Broker Cell Apps non-ritdb datalog Bridge Broker Web Server Browser Datalog Mapper Factory Apps GURU (RITdb Index, Store, access) STDF Outlier Det Wafermap Gen Adaptive Test STDF-> RITdb MES Monitoring Factory Server (Appliance) RITdb ->STDF STDF AWS bridge GURU cache Apps Store Amazon Cloud Open Message Infrastructure Provided by Appliance User Specific 10

11 The ability to integrate legacy equipment into this new environment is a critical requirement. Tools to facilitate the integration of legacy equipment have been developed and will be provisioned with the specification STDF Translator provides ability to generate RITdb C++ portal provides mechanism to stream data from tester. This will be integrated and tested at TI 11

12 The translator can be used via gui or command line to convert stdf files to RITdb A STDF translator is available to convert STDF file into RITdb. Can do single file or all files in a selected directory. Metadata indexing is also available. This provides the ability to lookup desired RITdb file using identified key information like lot, tester, program, STDF RITdb A log db is created to record stdf conversion. 12

13 RITdb is the physical container which holds the data. RITdb Physical Container Structure is a SQLITE file with a single table named narrow. Sequence is an integer representation of time and indicates the time dependent order. The Entity ID, Index ID and name define the type and attribute of the data contained in the row. Column Type Constraint Sequence Long Integer Unique, primary key EntityID Long Integer Not null IndexID Long Integer Not null Name String Not null Value Untyped Not null Value2 String UTC in Seconds Fractional time The value and value2 columns contain the data referenced by the Index ID and name of a given Entity Instance 13

14 RITdb data is inserted using a familiar object model as used in object oriented programming. Object Reference: entityid Object Class: ENTITY_TYPE Instance Variable: a row with name, indexid, value, and value2. ` ` ` ````` ````` ````` ````` ``` ` ` ` ``````````````````````` ``````````````````````` 14

15 Instance variables can be classified in one of four categories. Single Value indexid is set to 0 Value vs. Object Reference indexid Contains the object reference. Object reference value contains the object reference. Aligned array indexid is used to align related instance variables in an array ``````````````````````` ``````````````````````` ``````````````````````` ``````````````````````` 15

16 Use Case: datalog datalog.wafer Heavily tested by Roos Instruments. STDF translator supports this use case. Included in TI prototype datalog.unit Heavily tested by Roos Instruments. STDF translator supports this use case. Included in TI prototype datalog.strip spec has been defined but not exercised. Included in TI prototype. 16

17 STDF to RITdb: Result (PIR/PTR/PRR) PTR => test_info PIR/PRR = test_event 17

18 RITdb is based on a run. 18

19 All RITdb file contains some common entities for key meta data Meta data answers the question who, what, when and where. Entity Types RUN_INFO and FILE_INFO contain meta data. FILE_INFO may also contain some source file content. 19

20 More robust definition of specification is needed in several areas. Dynamic cond/limit Some exercise of dynamic conditions/limits has been done but more is needed. Equipmentlog.tpv will be a good testbed for dynamic conditions/limits. Scan Implemented STDF specification into RITdb using CBOR arrays. No user has been identified to exercise the specification. Adaptive Ability to record adaptive data as events in datalog is available No user has been identified to help define this use case. 20

21 Some use cases for Streaming datalog RITdb have been identified and will be prototyped by TI in Realtime PAT Stream datalog real time Identify new limits Apply limits and send result back to tester Re-bin if fail FT Feed Forward FT1 identify outliers FT2 get outliers from FT1, check if unit is an outlier using ECID. If unit is outlier, re-bin. 21

22 Some datalog use case are reserved. No specification for these use cases has been written. wafer-pcm Have discussed how this would fit into use case and made accommodations to handle this in the future. Need driver identified in WG. slt Have discussed how this would fit into use case and made accommodations to handle this in the future. Need driver identified in WG. burnin This use case is reserved. No further consideration for the requirements has been discussed. 22

23 Some equipmentlog use cases are actively being exercised. inventory TI has implemented system to collect inventory data from testers across the fleet. (j750, FLEX, UFLEX, Eagle MST, Eagle Vision, 93K, VLCLT, FUSION) Streaming prototype planned. contactor* Contactor tester data is generated in a RITdb container and consumed by TI data systems. tpv* Tester performance data Work ongoing to collect this data in a RITdb container. Streaming prototype planned. 23

24 Some equipmentlog use case have not been exercised. cal diag minidiag No user has been identified to help exercise this use case. No user has been identified to help exercise this use case. No user has been identified to help exercise this use case. 24

25 Equipmentlog.inventory: Slot to Board/Module to PIN RESOURCE CONNECTION MODULE BOARD PIN 25

26 Some use cases for Streaming equipmentlog RITdb have been identified and planned to be prototyped by TI. Tester Inventory Stream inventory data and tester events (pgm load, diag/cal runs, etc.) Identify board change events and correlate to tester events (diag/pgm load) TPV Stream tester performance data Monitor data and trigger alerts if issues with test are found. Compare short test to acceptance test and notify if significant differences are found. 26

27 Real-time event handling using RITdb Statistical Binning Handler faults Sensor Feedback FT PAT will be part of the TI prototype. Additional desired capability expected to identified at FT. The reaction to handler faults could provide quality improvement in the test operation. Monitor sensor information and feed back to tester if issue. TI plans to include in prototype. 27

28 A review of the map requirements was completed and related parts were integrated into datalog. datalog map Corresponding entities have been defined. Supports input and output maps PART_INSTANCE_IN, PART_INSTANCE_OUT Evaluated E142 and G85 to ensure compatibility. Need identified resource to pursue. Would like to provision a translator for RITdb that covers wafer maps, ship maps and assembly. The FT Outlier feed forward will require the use of map RITdb. 28

29 Vendor Support expected for the following: equipmentlog On demand generation of equipmentlog RITdb container. Stream RITdb inventory messages must capture any inventory change in the tester. Long term need diag/cal data datalog Customized STDF to RITdb translator** Generate RITdb container on demand Stream RITdb datalog messages - real time event Stream events (tester, test,..) Capability to define Custom events Consume messages from Stream Proposal: Define SEMI EXXX.2 Specification for MQTT-CBOR Protocol for Test Event Messaging for Semiconductors (TEMS) 29

30 Plans for 2017 July Complete Word document datalog use case Streaming RITdb: TI prototype started August Add equipmentlog to spec RITdb Streaming RITdb: Add real-time streaming OEE 2H Spec editor (excel) Streaming RITdb: : Add real-time streaming datalog (FLEX/ETS800*) 30