Ultrashort Laser Interactions in Fabrication of Optofluidic MicroSystems. Jianzhao Li
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1 Peter R. Herman Dept. of Electrical and Computer Engineering, Institute for Optical Sciences University of Toronto ECE 1473 Advance Laser Processing Ultrashort Laser Interactions in Fabrication of Optofluidic MicroSystems Jianzhao Li -- Herman Group Femtosecond MicroFabrication Burst Effects heat accumulation physics Optical Circuits & Microfluidics: 3D OPTOFLUIDICS 5-D Spectroscopy: 3-D imaging, time-resolved imaging, and time-resolved spectroscopy physical insights & intelligent laser processing 11/17/2009 CLEO CThG1 Tut - Herman - UofT 1
2 PULSED LASER MACHINING: nanosecond vs femtosecond laser pulses Ultrafast Laser Processing Handbook by Clark MXR Videos are downloadable from: Simplified view of physical interactions and applications for ultrafast lasers Nanosecond Laser Machining; Clark MXR view Femtosecond Laser Machining; Clark MXR view 11/17/2009 CLEO CThG1 Tut - Herman - UofT 2
3 Pulsetrain 'burst' ultrafast (1ps) machining: Fused Silica low vs. high repetition rate 7.5 ns 1 ps Fluence: 100 J/cm shots x 133 MHz No Cracks! 30- m deep Fluence: 93 J/cm 2 4 shots x 1 Hz ~14 m Temperature cycling leads to cracks Burst Laser Machining Method US Pat: 6,552,301 11/17/2009 CLEO CThG1 Tut - Herman - UofT 5
4 Ultrafast Laser-Burst Micromachining Serendipitous discovery High repetition rate offers two advantages -Minimum pulse-to-pulse separation avoids plasma shielding -Minimum repetition rate heats surrounding glass Heat diffusion scale length in 7.5-ns (4D t ) 1/2 Effective optical absorption depth 1/ eff Brittle Ductile 0.17 m 0.25 m Ultrafast Bursts offer a new means of laser material processing that controls thermal relaxation between pulses P.R. Herman, A. Oettl, K.P. Chen, R.S. Marjoribanks: SPIE Proc. 3616, 148 (1999) P.R. Herman, R.S. Marjoribanks, A. Oettl, Burst-ultrafast laser machining method, US patent (6,552,301 ) P.R. Herman et. al.: Applied Surface Science, , 577 (2000) 11/17/2009 M.Lapczyna et.al.: Applied Physics CLEO CThG1 A 69 Tut [Suppl.], - Herman UofT (1999) 6
5 Laser-Burst Micromachining Ultrafast Laser Pulses Microhole Sample 11/17/2009 CLEO CThG1 Tut - Herman - UofT 7
6 Laser-Burst Micromachining Ultrafast Laser Pulses Plume Heat Affected Zone 11/17/2009 CLEO CThG1 Tut - Herman - UofT 8
7 Laser-Burst Micromachining Ultrafast Laser Pulses for ideal Burst Effect Plume is gone Next laser pulse interacts with thin heated sheath of subtrate Heat Affected Zone has not dissipated 11/17/2009 CLEO CThG1 Tut - Herman - UofT 9
8 Laser-Burst Micromachining Ultrafast Laser Pulses for ideal Burst Effect Burst Benefits: laser heated interaction zone avoids inbuilt stresses from thermal cycling annealing of laser interaction zone improved ductility avoids microcrack generation long-enough pulse separation to avoid plume shielding maintain merits of ultrafast laser interaction benefits Next laser pulse interacts with thin heated sheath of subtrate Heat Affected Zone has not dissipated 11/17/2009 CLEO CThG1 Tut - Herman - UofT 10
9 Burst Femotosecond Laser 5D Microscopy System Setup 1 khz laser-spitfire - 800nm, 3mJ, 1 khz - 40fs to 5 ps - Modified burst 37MHz Compact Imra Fiber Laser (0.1-5 MHz, 450fs) Spitfire (1kHz, 45fs) OPA Burst Resonator Fiber-amplified MHz laser (Imra America ujewel) -1044/522nm, 300fs, 0.5 W, MHz High resolution processing station nm precision airbearing xyz stages Aerotech XYZ Air-bearing Motion Stages 11/17/2009 (100nm) CLEO CThG1 Tut - Herman - UofT 11
10 ULTRAFAST BURST GENERATOR S. Abbas Hosseini and PR Herman 11/17/2009 CLEO CThG1 Tut - Herman - UofT 12
11 Screen Spitfire ND HW Pr. I Oscillator Pr. II HW P FR P p c 11/17/2009 CLEO CThG1 Tut - Herman - UofT 13
12 Burst Train Profiles Variable # pulses Variable Time Separation (26ns x n) Variable Energy Profile 11/17/2009 CLEO CThG1 Tut - Herman - UofT 15
13 11/17/2009 CLEO CThG1 Tut - Herman - UofTBK7: Side view 16 All rights reserved. A. Hosseini µm BK7 glass: Top view Single Pulse NOT BURST 1 khz mode 1000 pulse 115 µj/pulse 280 µm
14 BK7: Side view 20 µm 342 µm 445 µm 550 µm 885 µm 300 Burst Burst mode 7 pulse in each burst 115 µj/burst 400 Burst 500 Burst 1000 Burst 11/17/2009 CLEO CThG1 Tut - Herman - UofT 17
15 Conclusion: Optofluidics, MicroReactors, Microsystems on a chip, lab on a fibre All rights reserved. A. Hosseini 2007 Start dreaming in 3D 45 µm 245 µm 150 µm Drilling holes in SMF-28 Fiber Burst mode, Jacket is not removed 11/17/2009 CLEO CThG1 Tut - Herman - UofT 18
16 BURST Ultrafast Laser Processing Toronto Discovery of Heat Accumulation Effects from purpose built burst picosecond laser Develop new burst ultrafast laser technology at UofT Today: Novel recipes, numerous patents, and IP on drilling, dicing, writing photonic and lab-on-chip microsystems. State-of-the-art Burst Laser Processing Facility at University of Toronto Damage without burst laser 11/17/2009 CLEO CThG1 Tut - Herman - UofT 19
17 Writing Optics Circuits in GLASS focusing lens laser nonlinear absorption Waveguides at the same Net exposure: glass Thermal Diffusion Heat Accumulation lowest loss waveguide: 0.2 db/cm 5-D Microscopy Time + Spectrum + Space Travel Travel Unravel underlying physics Image: diagnostic and positioning Feedback Control lower waveguide loss? 11/17/2009 CLEO CThG1 Tut - Herman - UofT 20
18 Burst Ultrafast Laser Refractive Index Modification: Cumulative heating effect AF45 borosilicate glass 450-nJ pulse energy, 1045-nm ultrafast laser, static exposure 1.5 um beam dia. 25 m Small changes in repetition rate have dramatic effect on thermal modification zone 11/17/2009 CLEO CThG1 Tut - Herman - UofT 21
19 Temperature evolution during waveguide writing 200 nj absorbed energy, 1.6- m spot size, 985 C softening point Repetition Rate Effects Borosilicate Glass Fig1.mov Heat Accumulation Here! 11/17/2009 CLEO CThG1 Tut - Herman - UofT 22
20 High Repetition Rate Laser Waveguide Writing: Constant Laser Power by Energy x Speed = constant Refractive Index Profile (RNF) Corning Eagle2000 borosilicate 200 khz 500 khz 1 MHz 1.5 MHz 2 MHz Focal plane Diffusion Dominated Dn ~ Heat Accumulation Dominates Dn ~ Lowest loss waveguides (~ db/cm) at each repetition rate Both Diffusion and Heat Accumulation large elliptical heat zone Thermal effects precluded Bragg grating formation at L ~ 0.5 m Try lower repetition rate & higher pulse energy 11/17/2009 CLEO CThG1 Tut - Herman - UofT 23
21 Effect of repetition rate on insertion loss At all repetition rates, minimum insertion loss at 200 mw, mm/s The minimum insertion loss occurs at 1.5-MHz repetition rate At 2 MHz, energy too low Mode field diameter best matched to SMF at 1-2 MHz 200 mw, 15 mm/s 11/17/2009 CLEO CThG1 Tut - Herman - UofT 24
22 Threshold energy for heat accumulation Heat Accumulation Threshold: minimum pulse energy for 2- fold expansion over single-pulse thermal diffusion size Diffusion & Heat Accumulation processing Diffusion-only processing 11/17/2009 CLEO CThG1 Tut - Herman - UofT 25
23 Devices 11/17/2009 CLEO CThG1 Tut - Herman - UofT 26
24 fs-laser writing of Optical Circuits Directional Couplers - Eagle2000 Herman Group In Progress: Birefringent Waveguide Polarization Splitters WDM SYMMETRIC COUPLERS Tailor designed Add/Drop spectrum BROAD BAND ASYMMETRIC COUPLERS Tailor designed Coupling ratio 11/17/2009 CLEO CThG1 Tut - Herman - UofT 27
25 fs-lasers: Optical Circuits - Herman Group Bragg grating waveguides (BGWs) wavelength tuning, chirping, apodization At high scan speed of ~0.5mm/s Spotsize: ~1 m Laser d Laser rep rate Eagle 2000 Glass Scan speed Waveguide Sample direction 08/07/2007 PHD thesis defense -- Haibin Zhang 28 11/17/2009 CLEO CThG1 Tut - Herman - UofT 28
26 Transmission (db) Reflection (%) 1-kHz Single Pulse Voxel Writing EAGLE2000 Borosilicate Mode Profile: Gaussian 0.55 NA, 3 J, 1ps, 0.52 mm/s 10 mm 11 mm 0.1 db Facet loss Laser Modification: ~2 um core MODE Solutions software (Lumerical) Dn DC = ~0.01 Propagation Loss 0.5 db/cm (0.2 db/cm possible) Dn AC L 1 tanh ( R) Dn AC = ~ (40%) Bragg Grating >35dB, 95%, 0.2nm Wavelength (nm) 11/17/2009 CLEO CThG1 Tut - Herman - UofT 29 T R
27 Bragg Grating Application Directions Wavlength tuning Chirping Cascading BGW fabricatio n methods Sensing Telecom 06/13/2007 PHD thesis defense -- Haibin Zhang 30 11/17/2009 CLEO CThG1 Tut - Herman - UofT 30
28 3D BGW sensor network 01/21/2008 Bulk glass BGW sensor 32 11/17/2009 CLEO CThG1 Tut - Herman - UofT 32
29 Measurement of the thermal optic property Z ASE Conduction Glass Convection BGW OSA Fiber Hot plate 01/21/2008 Bulk glass BGW sensor 33 11/17/2009 CLEO CThG1 Tut - Herman - UofT 33
30 Measurement of the thermal optic property 10.4 pm/ C, close to SMF 28 FBGs 01/21/2008 Bulk glass BGW sensor 34 11/17/2009 CLEO CThG1 Tut - Herman - UofT 34
31 Sensor strain response Fixed metal beams Fixed metal beams Expanded Center unchanged h Length L Adjustable beam Displacement D q R Compressed (a) (b) 08/07/2007 PHD thesis defense -- Haibin Zhang 35 11/17/2009 CLEO CThG1 Tut - Herman - UofT 35
32 Sensor strain response temperature compensated 1.38 pm/ e and pm/ e 1.15 pm/ e for SMF28 FBGs for 1550-nm radiation [119] 11/17/2009 CLEO CThG1 Tut - Herman - UofT 36 36
33 Surface Texturing: holographic and coloured logos Herman Group, UofT Macro, Micro, & Nano-structuring of grating relief on polished steel (stamping templates) MACRO laser: 50 fs, 800nm,10uJ 7 pulse burst train (38 MHz) 0.25 NA; 1.1 um dia. ~10 mm/s raster scan 2 20 um MACRO grating patterns controlled by line-by-line spacing 11/17/2009 CLEO CThG1 Tut - Herman - UofT 37
34 Surface Texturing: holographic and coloured logos Herman Group, UofT a b MICRO & NANO Laser-induced periodic surface structures (LIPSS) Perpendicular to polarization; sub-wavelength: 0.65 to 0.86 New: nano rippled gratings ~70 to 100 nm period that were aligned parallel to the laser polarization. MACRO, MICRO & NANO: Self-organized and direct-write gratings enable Holographic 11/17/2009 CLEO CThG1 Tut - Herman - UofT 38
35 Microfluidic Channels Laser exposure generate nanogratings HF (5%) etching direction selective Polarization control enhance/inhibit etching How to stop waveguides from being etched? 11/17/2009 CLEO CThG1 Tut - Herman - UofT 39
36 1 st Step: Laser Patterning (multi-scan) IMRA Fiber-Amplified Ultrafast Laser: Wavelength : 522-nm Power Repetition Rate : 1 MHz Objective Lens Pulse Duration : 220 fs (Lorentzian) : up to ~200 nj pulse energy : 40x 0.55-NA Aspherical Lens d S 75 µm to 210 µm d T 1 µm to 3 µm Focused d L 1 µm to >4 µmlaser Light d S Objective Lens d L Fused Silica 11/17/2009 CLEO CThG1 Tut - Herman - UofT 40 d T
37 Cross-sectional Shaping Processing Parameters Scan speed = 0.5 mm/s 5% HF etching 11/17/2009 CLEO CThG1 Tut - Herman - UofT 41
38 Integrated Optofluidic Device Single scan routine Reservoirs (L x W x H): 0.5 x 0.5 x 0.3 mm 3 Channel: 5 x 5 array with d T = 2 μm, d L = 3 μm Depth: ~75 μm deep Waveguide: single track Speed: 0.5 mm/s Power: 125 mw 3.5 5% HF 750 µm RESERVOIR (A) MICRO-CHANNEL RESERVOIR WAVEGUIDE 11/17/2009 CLEO CThG1 Tut - Herman - UofT 42 PERPENDICULAR PARALLEL CIRCULAR
39 3D OPTOFLUIDICS: Integrated ufluidic CHANNELS and BRAGG GRATING WAVEGUIDES vertical access hole Pre-etching BGWs depth beneath glass surface = 75 m 13 m 8.5 m 15.5 m 10 mm 100 m BGW Post-etching m -channel 18 m 3h etching in a 10% aqueous HF solution 10.5 m Evanescence field probe of fluid Temperature/Strain Gauges 3D Optofluidic integration 11/17/2009 CLEO CThG1 Tut - Herman - UofT 43
40 SUN Radiation spectrum from surface temperature - cannot see inner core Laser Sun : - 1 MHz heat accumulation - laser heated core opaque? - Radiative shells of decreasing temperature and decreasing opacity 11/17/2009 CLEO CThG1 Tut - Herman - UofT 45
41 Intelligent Laser Processing 5D Microscopy System Setup Compact Imra Fiber Laser (0.1-5MHz, 450fs) -Modified burst-mode khz laser (Spitfire) -Compact fiberamplified MHz laser (Imra America) Spitfire (1kHz, 45fs) Aerotech XYZ Air-bearing Motion Stages 11/17/2009 (100nm) CLEO CThG1 Tut - Herman - UofT 46 OPA -High resolution optical processing station with 100-nm precision air-bearing xyz stages
42 CCD f lens Schematic Diagram of 5D Microscopy System BS 3D Multiphoton Laser Scanning Microscopy Fiber Bundle Becker&Hickl TCSPC Board BS BS 2D Time-Resolved Imaging time-gated ICCD Andor (2 ns) Spectrograph Time-Resolved Spectroscopy Delay Generator BS 2w filter f lens 2w crystal IMRA fs laser Glass Target: Alkaline Earth Boro- Aluminosilicate glass (EAGLE2000 TM ) Aspherical / Objective Lens NA ~ 0.55 Imra ( Jewel) fiber Laser ~450 fs 1045nm/522nm 1 MHz Rep Rate v scan ~ 100 m/s to 20 mm/s internal focus ~ 0.8 m DOF: ~2.5 m air-bearing stages 11/17/2009 Aerotech CLEO CThG1 Tut - Herman - UofT 47
43 3-D Multi-photon Laser Scanning Microscopy 2-D Time-resolved Imaging Time-resolved Spectroscopy 11/17/2009 CLEO CThG1 Tut - Herman - UofT 48
44 Multiphoton UF Laser Scanning Microscopy Image of UF Laser Written Waveguides Borosilicate: Eagle2000 Cladding Layer Z: +7 m 10 m WG Writing Parameters: nm/450fs/170nJ --1MHz Rep Rate --15mm/s scan speed Z: 0 Z: -5 m Imaging Parameters: nm/450fs/40nJ --1MHz Rep Rate --10mm/s scan speed --(X) Pixel size: 0.5 m --(Y) Line separation: 0.5 m 11/17/2009 CLEO CThG1 Tut - Herman - UofT 49
45 3-D Multi-photon Laser Scanning Microscopy 2-D Time-resolved Imaging Time-resolved Spectroscopy 11/17/2009 CLEO CThG1 Tut - Herman - UofT 50
46 Time-Resolved 2D Images of Borosilicate Glass Gate Delay: 0ns 200ns 500ns 900ns 10 m 1MHz / 522nm / 170nJ / 100 m/s 0ns 12ns 22ns 62ns 1 MHz: >500ns decay! 100 khz: <100ns decay! Not Photoluminescence! 100kHz / 522nm / 170nJ / 10 m/s 11/17/2009 CLEO CThG1 Tut - Herman - UofT 51
47 3-D Multi-photon Laser Scanning Micrscopy 2-D Time-resolved Imaging Time-resolved Spectroscopy 11/17/2009 CLEO CThG1 Tut - Herman - UofT 52
48 Time-resolved Spectra of Borosilicate Glass Gate Delay: 0ns 80ns 380ns 880ns Long decay: ~500ns (1MHz) 1MHz / 1045nm / 180nJ / 15mm/s 0ns 40ns 80ns 140ns Short decay: ~60ns (100kHz) 100kHz / 1045nm / 180nJ / 1.5mm/s Laser Power absorption: 11/17/2009 CLEO CThG1 Tut - Herman - UofT 53 Emission is >2 times stronger for 1MHz!
49 Correlation: Real-time Spectra & Waveguide Loss Strongest emission associated with lowest waveguide loss: new direction for real time feedback for controlling waveguide writing? 11/17/2009 CLEO CThG1 Tut - Herman - UofT 54
50 CONCLUSION and Thanks! CLAN - What shape should it be? College and Training Activities Academic, Institutional, and Industry Participation International Partnerships Canadian Partner Organizations Strategic Areas for Collaboration Nodes of Excellence Funding: NCE, strategic networks, CFI, NSERC Strategic Projects, IRAP, etc. Model? Germany Laser Institutes Laser Material Processing is highly successful application of laser, and essential to manufacturing today Ultrafast INO Laser National Interactions Optics Institute - exciting new science events fundamental investigation - advantages to break open new commercially important applications NRC 11/17/2009 CLEO CThG1 Tut - Herman - UofT 55
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