CLEAN ROOM PROTOCOL AND WAFER HANDLING

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1 CLEAN ROOM PROTOCOL AND WAFER HANDLING Prof. Madya Dr. Uda Hashim 1

2 Outline Cleanroom Cleanroom protocol Wafer handling procedure 2

3 CLEANROOM

4 Definition Cleanroom - The cleanliness of the air inside the room or area. The number of particles, humidity and temperature is control according to the standard. Cleanroom Protocol - A set of rules and procedures that cleanroom workers must follow to maintain the cleanliness of the cleanroom environment. All cleanroom workers must be trained and certified when they start with, and at least once a year thereafter. 4

5 International Standard Federal Standard 209E British Standard 5295 ISO Standard 5

6 Federal Standard 209E Class , , ,

7 A few facts: Cleanroom Cleanrooms must be designed around the process and then adapted into the architecture. The level of cleanliness must meet the demands and flow of the process. The process must be designed around the design of the cleanrooms. The cleanrooms must be designed to adopt to the site, existing conditions, budget, schedule and future expansion. 7

8 Cleanroom The level of filtration is achieved using high efficiency filters or HEPA filters as they are called in the semiconductor field. HEPA is an acronym for high efficiency particulate accumulator. A new upgrade to the standard HEPA filter is the ULPA or ultra efficient particulate accumulator. The single most important concept of cleanroom design is that described in the term "laminarity". Laminar flow must be achieved before a Class 100 cleanroom or better can be accomplished. This most often is accomplished through ceiling coverage of high efficiency filters with downward flow and low wall return. 8

9 Class 100 Versus Class 1 or Class 10 Cleanroom Most of the construction methods for Class 1 and 10 are similar to the Class 100 but with design flexibilities removed for the Class 1 and 10. Some of the following rules apply: 1. Class 1 and 10 must have 100 percent HEPA ceiling coverage. 2. Class 1 and 10 must have a raised floor for return. 3. Class 1 clean aisles must be narrow - 12 feet maximum. 4. Class 1 return chases must be isolated from lower class cleanrooms and rated minimum Class 1, Selection of HEPA filters must be specifically for each class. 9

10 Class 100 with SubFab Cleanroom Some facilities require a subfab or lower floor to provide more space for tools and equipment on the clean floor and placement of pumps and other "dirty" equipment below in the basement. The subfab allows for a more uniform laminar flow as well as a higher cleanliness level. Most modern and ultra-pure facilities are designed this way and have the price tag to prove it. Class 1,000 Areas and "Worse" Numerous design possibilities exist with the design of a Class 1,000 areas and the lower classifications of cleanrooms. Some people consider low-wall return an important issue as opposed to returns in the ceiling. Others argue the placement of HEPA filters and ceiling coverage is vitally important. The most important issue is not what Federal Spec 209E argues, but what specification the customer really needs to meet. A Class 10,000 cleanroom can meet the test of a particle counter for Class 1,000 if the door is left closed long enough. A room can clean up to almost any specification if particle tests are the only thing to worry about. Some clean areas in this range are for cosmetic reasons only. Some are for customer perception. And still others are simply to keep the work force from eating pizza on the same table they are 10 performing board assembly.

11 Protocol During Construction: Level 1 until Level 5 During Operational Cleanroom protocol is covers gowning/degowning procedures and cleanroom behavior/work ethics 11

12 Source of Contamination Equipment 25% Personnel 35% Process 20% Chemicals 20% 12

13 Requirement All cleanroom workers must be trained and certified when they start with, and at least once a year thereafter. Bunny suits are required for all personnel in the Cleanroom at all times. Bunny suits are effective at containing contamination originating from clothing 13

14 CLEAN ROOM PROTOCOL 14

15 PURPOSES To ensure the clean room procedure is implemented and practiced by all personnel including visitors. To control and maintain the cleanliness of the clean room. To maintain the good quality of products. To ensure the safety of personnel and properties. 15

16 SCOPE Clean room protocol is applies to all clean room personnel and individual or visitors who enter the fab building and clean room (production area, gray area and sub fab). 16

17 RESPONSIBILITES Manufacturing Operation Director responsible for ensuring clean room protocol is implemented and practiced Production Manager shall ensure that every personnel has been certified before they allowed to enter the clean room. Briefing and certification will be conducted by their authorized personnel. 17

18 Briefing CERTIFICATION Certification/Test PROCEDURES 18

19 CLEAN ROOM ENTRY ITEMS Garments & Booties Blue - maintenance, facility, contractors White - process, production, test/pi Green - visitors/vendors 19

20 GARMENTS ITEMS Jumpsuit Smock Test Lab Shoe Rack Hood, Face Mask and Jumpsuit Hair cover, Face Mask and Glove Booty and High Top Booty 20

21 GOWNING PROCEDURES- Pre Entry Change street shoes to clean shoes Visitor must wear shoe cover Enter fab building Remove and place all belongings at designated cabinet. Place clean shoes to shoe rack. 21

22 GOWNING PROCEDURES Changing Room Put on Disposable Hair Cover Visitor need to wear disposable face mask first Put on Hood and Face Mask Put on the Coverall (Don t allow coverall to touch the floor) Walk to gowning bench and wear high top booty Swing over to clean area after wearing booty at one side. Check in front of mirror. Put on gloves. (Ensure the glove tight under your garment) Walk along the tacky mat to air shower. Enter main air shower (maximum 3 persons). Make few rotation when air is blown. Wait until air blow stops. 22

23 DEGOWNING PROCEDURE Changing Room Enter Air shower (Wait until back door closed). Remove gloves and throw into dustbin. Walk to gowning bench. Remove one of high top booty. Swing over to pre-clean area and remove another high top booty. Remove jumpsuit, hood, permanent face mask and hair cover. Hang properly to garment cabinet. Visitor need to remove disposable face mask and hair cover. Thrown into dustbin. Wear clean shoe. Visitor need to remove shoe cover at fab entrance/linkway entrance. 23

24 PROHIBITED MATERIALS Unauthorized toolboxes or tools. All types of aerosols, colognes or perfumes. Brushes/Wood/ Cardboard Pencil/Eraser/Chalk Mercury Emery paper/sand paper/steel wool Polishing compounds Non clean room type lubrication Drills/Sanders/ Cutting tools Normal paper/tissues /drawing/book Any non clean room compatible materials. Handphone 24

25 PROHIBITED MATERIALS 25

26 CLEAN ROOM WORK ETHICS Only authorized and trained personnel will be allowed to enter clean room. Visitor must be escorted by clean room personnel Any Contractors/supplier work must be supervised by authorized clean room personnel. For safety reason, at least 2 persons will be at any place in clean room including sub-fab and gray area. Enter or out from or to clean room must pass through air shower except for emergencies (3 person for main air shower and 2 person for mini air shower) 26

27 CLEAN ROOM WORK ETHICS Do not touch any product or equipment with bare hand. Glove must be wear all the times in clean room. Never touch your garment or other surface when wearing gloves. No bare street clothes allowed inside clean room. Pregnant women are not allowed to enter clean room. Sick worker; flu, coughing etc should be temporarily assigned to tasks outside of the clean room. No eating or drinking 27

28 CLEAN ROOM WORK ETHICS Cutting and drilling work must follow standard procedure. Curtain must be used when perform those jobs. Permission must be obtained first Do not block the air flow from the HEPA filter to the product. No spitting and yelling in the clean room. Do not allow hair uncovered at the front of the head on the fore line Do not wear soiled or sweaty street clothes under the clean room garment. Do not used any external medications. 28

29 CLEAN ROOM WORK ETHICS When not in use, clean room clothing should not be allowed to come into contact with any possible contamination. For maintenance, contractor and vendors, all non clean room blue prints, operations manuals or instruction sheet are not allowed to bring into clean room. Never comb hair in clean room or changing room. Mirror at changing room only purposely used to check proper garment wear by personnel. Wallet may be carried out but worn under garment and not remove in the clean room. 29

30 CLEAN ROOM WORK ETHICS No smoking at any time inside the wafer fabrication building. Do not expose any street clothing. Do not wear watch or ring Helmet should be worn at all the time at sub fab for safety purposes. Permission must be obtained before bringing in any outside equipment to cleanroom. The equipment must first be wiped using IPA 5% 30

31 Thank You 31

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