Mobile 3D surface inspection system with image processing Torsten Machleidt, Managing Director
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1 Mobile 3D surface inspection system with image processing Torsten Machleidt, Managing Director Gesellschaft für Bild- und Signalverarbeitung (GBS) mbh, Werner-von-Siemens-Straße 10, D Ilmenau 1
2 Basics of GBS mbh Friendly society PD. Dr.-Ing. habil. Karl-Heinz Franke Founder and Chairman Center of image- and signal processing (ZBS) 1997 year of foundation GBS is founder of the Professorship "Machine Vision" at the TU Ilmenau Company Head Office is Ilmenau International Representatives Italy France Switzerland China Taiwan Japan Israel 2
3 Idea of GBS mbh The GBS mbh as a subsidiary of the ZBS e.v. has been a competent partner in the area of image processing for solving inspection tasks since Customer-specific solutions for the tasks of production quality control Individual integrated systems with handling Software packages for rapid prototyping and image processing applications 3
4 Idea of GBS mbh The GBS mbh as a subsidiary of the ZBS e.v. has been a competent partner in the area of image processing for solving inspection tasks since Customer-specific solutions for the tasks of production quality control Individual integrated systems with handling Software packages for rapid prototyping and image processing applications Systems for non-contact 3-D surface measurements Product solutions for measurement tasks from macro to nano scales 4
5 Base of smartvis3d - White Light Interferometry Wide-band source of light Parallel data acquisition Z-Scan (acquisition image stack) Reference mirror Light source Beam splitter Localization of the interferogram Camera White-led Sample 5
6 Target position of the 3-D surface measurement Wafer Liquid bearing Diamond tool Lens Automotiv cylinder Metal Fuselage exterior (automotiv) Roughness standard 6
7 smartwli modular 3D-measurement concept Mobile Stand Manual Stand Motorised Stand OEM -System Integration 7
8 smartwli modular 3D-measurement concept smartwli modular 3D-measurement concept smartwli-basic with Manual Stand smartwli-extended with Motorized Stand and Waferholder 8
9 smartwli smartwli-basic + mobile stand Put the instrument on the sample (flat samples or roll s) printing industry and all large samples metal industry 9
10 smartwli smartwli-basic + mobile stand printing industry Target: Measuring of the volume of a stichel or laser gravure 10
11 smartwli smartwli-basic + mobile stand printing industry Target: Measuring of the volume of a stichel gravure 11
12 smartwli OEM, System Integration GBS - OEM for 3D measurement! Cylinderinspector Nanomeasuring Machine Measurement Robotics 12
13 Conclusion System Parameter Measurement principle: White-light interferometry Measurement Array [Pixel]: 1624x1234 Light source [nm]: LED 590 Measurement Array [µm]: x x 86 Vertical resolution [nm]: PSI: 0.1, VSI: 1.0 Lateral resolution [µm]: 28 0,42 Max scan speed [μm/s]: 10.6 Software smartwli: Windows 7, 64bit Software for measuring the topography smartwli-dll: DLL for measuring the topography for using in own software, Matlab or LabVIEW MountainsMap : Extensive analysis software as well as profi le and 3-D visualisation, measurement data preand post-processing, DIN EN ISO roughness and height determination, serial processing, measurement logging Modular and flexible OEM concept 13
14 Invitation to presentation / Exhibition Control Company Visits :00 clock MAY 3D Inspector Hall 7 Booth
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