LIGHT SCATTERING THEORY

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1 LIGHT SCATTERING THEORY Laser Diffraction (Static Light Scattering)

2 When a Light beam Strikes a Particle Some of the light is: Diffracted Reflected Refracted Absorbed and Reradiated Reflected Refracted Absorbed and Reradiated Diffracted Small particles require knowledge of optical properties: Real Index (degree of refraction) Imaginary Index (absorption of light within particle) Light must be collected over large range of angles Index values less significant for large particles

3 Diffraction Pattern

4 Diffraction Patterns

5 Young s Experiment

6 Single vs. Double Slit Patterns Single slit diffraction pattern Double slit diffraction pattern

7 Fraunhofer Diffraction: Young s Double Slit Distance between slits is INVERSELY proportional to angle (θ) nλ =d sin θ d =nλ / sin θ θ For a given measurement system with a fixed wavelength, the product nλ is constant n= order of diffraction λ = wavelength of light d= distance between slits θ = angle of diffraction

8 Fraunhofer Diffraction: Pinhole The diameter of the pinhole is INVERSELY proportional to angle (θ) nλ =d sin θ d =nλ / sin θ θ For a given measurement system with a fixed wavelength, the product nλ is constant n= order of diffraction λ = wavelength of light d= distance between slits θ = angle of diffraction

9 FRAUNHOFER DIFFRACTION - PARTICLE Angle of scatter from a particle is INVERSELY proportional to angle (θ) nλ =d sin θ d =nλ / sin θ θ For a given measurement system with a fixed wavelength, the product nλ is constant n = order of diffraction λ = wavelength of light d = distance between slits θ = angle of diffraction

10 Edge Scattering Phenomenon θ Light Scatter occurs whether from a slit, a pinhole or a particle. It occurs at the edge of an object. A SLIT and PARTICLE of the same size produce the same diffraction pattern θ θ

11 Fraunhofer Diffraction: Particles Large particles scatter light through SMALLER angles θ Small particles scatter light through LARGER angles Large Particle Small Particle θ

12 Diffraction Pattern: Large vs. Small Particles LARGE PARTICLE: Low angle scatter Large signal Narrow Pattern - High intensity Wide Pattern - Low intensity SMALL PARTICLE: High Angle Scatter Small Signal

13 Angle of Scatter vs. Particle Size Fraunhofer Diffraction describes forward scatter technology. Scatter angles are relatively small, less than 30 ANGLE OF SCATTER is INVERSELY proportional to particle size. SMALL particles scatter at larger angles than large particles. The AMOUNT OF LIGHT scattered is DIRECTLY proportional to particle size. LARGE particles scatter MORE light than small particles.

14 Light Scattering S1(Θ) and S2(Θ) are dimensionless, complex functions defined in general scattering theory, describing the change of amplitude in respectively the perpendicular and the parallel polarized light as a function of angle Θ with respect to the forward direction. Computer algorithms have been developed in order to allow computation of these functions and, thus, of I(Θ).

15 Plot of Airy Function I (W) λ = Wavelength of light A = Radius of Particle W = Angle with respect to optic axis 3.24λ 2A 1.22λ 1.22λ 2.23λ 2.23λ 2A 2A 2A 2A 3.24λ 2A W

16 Comparison of Models Fraunhofer (left) vs. Mie (right)

17 Fraunhofer Approximation dimensionless size parameter α = πx/λ; J1 is the Bessel function of the first kind of order unity. Assumptions: a) all particles are much larger than the light wavelength (only scattering at the contour of the particle is considered; this also means that the same scattering pattern is obtained as for thin two-dimensional circular disks) b) only scattering in the near-forward direction is considered (Q is small). Limitation: (diameter at least about 40 times the wavelength of the light, or a >>1)* If λ=680nm (.68 μm), then 40 x.68 = 27 μm If the particle size is larger than about 50 μm, then the Fraunhofer approximation gives good results.

18 Fraunhofer Approximation

19 Mie Theory

20 Mie vs. Fraunhofer 1.E+05 1.E μm Relative Intensity 1.E+03 1.E+02 1.E+01 1.E+00 1.E-01 1.E-02 1.E-03 3 μm 3.0 µm by Mie 3.0 µm by Fraunhofer µm by Mie µm by Fraunhofer 1.E Angle in degrees Figure A.3 -- Comparison of scattering patterns of non-absorbing particles according to Fraunhofer and Mie calculations (N p = 1,59 0,0; n water = 1,33; wavelength = 633 nm)

21 Extinction Efficiencies Extinction Efficiency Legend shows Particle refractive index Particle Size μm Extinction Efficiency Legend shows Particle Refractive Index Particle Size μm Figure A.2 -- Extinction efficiencies in relation to particle size and refractive index (Mie prediction). (n p and k p as indicated; n water = 1,33; wavelength = 633 nm) (Fraunhofer assumes an extinction efficiency of 2 for all particle sizes) Good agreement for transparent particles >50 μm opaque particles > 2 μm

22 Scattering intensity pattern for single particles in relation to size Relative Intensity 1.0E E+10 Legend Particle E+09 Size μm 1.0E E E E E E E E E E E E E Angle degrees For single particles range from 0.1 to 100 μm is Reduce by weighting to volume Mie calculation; wavelength 633 nm; Np = 1,59 0,0 i; nm = 1,33

23 Light intensity scattering patterns for equal particle volumes in relation to size Relative Intensity 1.E+05 1.E+04 1.E+03 1.E+02 1.E+01 1.E+00 Legend Particle Size μm Weighting to third power of size 1.E-01 1.E-02 1.E Angle in degrees Mie calculation; wavelength 633 nm; Np = 1,59 0,0 ; nm = 1,33

24 Influence of particle size on angular light intensity scattering patterns Width = 1% (COV)

25 Influence of imaginary parts of RI (absorbancies) Width = 1% (COV)

26 Influence of distribution width on angular light intensity scattering patterns

27 Result Calculation

28 Iterations

29 Iterations How many times to calculate new (better) results before reporting final result? For LA-930 standard = 30, sharp = 150 For LA-950 standard = 15, sharp = 1000 Fewer iterations = broader peak More iterations = narrow peak Too many iterations = fit to noise, over-resolved

30 Viewing Raw Data

31 LA-950 Optics

32 Why 2 Wavelengths? 30, 40, 50, 70 nm latex standards

33 Practical Application of Theory: Mie vs. Fraunhofer for Glass Beads

34 Practical Application of Theory: Mie vs. Fraunhofer for CMP Slurry

35 Conclusions It helps to know some of the theory to best use a laser diffraction particle size analyzer Small particles wide angles Large particles low angles Look at Intensity curves, R parameter & Chi square calculations Use Mie theory at all times (default whenever choosing an RI kernel other than Fraunhofer)

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