Measuring Microfeatures with Dense Point Clouds

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Anastasia Charles
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1 Measuring Microfeatures with Dense Point Clouds Scanning with tomography, microprobes and confocal or contrast variation systems Dr.-Ing. Ingomar Schmidt

2 Microfeature Geometries smaller than 300 µm, which cannot be reached by standard probes Part tolerances between 1 µm 20 µm Independent of workpiece size

3 Measure Microfeatures No difference in the possibilities compared to standard geometries (with the right sensor ) Dimensions Position Form / Shape Roughness

4 Measure Microfeatures Standard sensors do not deliver enough point density, because feature form in relation to dimension is almost always worse.

5 Measure Microfeatures Solution: Create dense point clouds by using the right sensor technology

6 Measuring Point Clouds VT-A _E

7 Color coded Presentation VT-A _E

8 The Microfeature CMM Werth VideoCheck UA 400x400 -Highest precision and accuracy for measurements on MICROPARTS due to one nanometer resolution and accuracy optimized design - MPE E1 (unid./20x) : ( L /900) µm - MPE E (3D WFP) : ( L /600) µm

9 Werth VideoCheck UA 400x400 Multisensor Head High precision, telecentric optics Werth Fiber Probe WFP Highly accurate distance sensor Werth Chromatic Focus Probe (CFP) VT-A _E

10 Multisensor IP in Picture K IP at Picture IP Scanning Grid Scanning Trigger Probe Scanning Probe Z O Z Focus Variation Laser Line Probe Chromatic Focus Probe Computer Tomography Nano Focus Probe Werth Laser Probe Werth Interferometer Probe Werth Contour Probe Werth Fiber Probe VT-A _E

11 Multisensor K Z O Z Focus Variation Computer Tomography Nano Focus Probe Werth Interferometer Probe Werth Fiber Probe VT-A _E

12 3D-Patch Focus Variation Z2 Z0 Z1 VT-A _E

13 3D-Patch Micro Form Punch

14 Nano Focus Probe - Principle Z2 Z0 Z1 VT-A _E

15 Confocal Scanning of a Micro Form Punch with NFP

16 Werth Fiber Probe WFP (Pat.) Principle Ball Size down to 10µm Radius Sensor Chip Probe in Zero Probe deflected Probing Element DL Moving Direction Workpiece Developed in cooperation with PTB Braunschweig, Germany VT-A _E

17 Scanning of Micro-gears with WFP

18 Tooth Implant Measured by WFP Scanning

19 Werth 3D Fiberprobe WFP Principle Sensor Chip z- deflection, measured with distance sensor Distance sensor x-/y- deflection, measured with image processing sensor Fiber Probe in zero position Fiber Probe Spring leaf suspension Fiber Probe deflected DL Workpiece Direction of movement

20 Werth 3D Fiberprobe WFP Design

21 Error in mm Werth 3D Fiber Probe WFP Results 3D probing deviation: 0,15 µm* Error on a calibration sphere 0,15 0, ,075-0, position * measured on a reference sphere with VideoCheck UA and 3D correction of probing sphere form error

22 Werth Interferometer Probe WIP

23 Werth Interferometer Probe WIP Fiber Carrier Beam Former Unit µm 23

Werth Interferometer Probe WIP Technical Data Sensor principle: interferometry Working distance: 0.

24 Werth Interferometer Probe WIP Technical Data Sensor principle: interferometry Working distance: mm Measuring range: ± 150 μm Probe diameter: mm Probe length: mm 0 up to 90 beam direction Probing error MPE for P1: 0.25 μm

25 X-Ray Tomography VT-A _E

26 The Microfeature CT - CMM Werth TomoCheck Computer Tomography integrated in a Multisensor Coordinate Measuring Machine

27 Measurement of an Injector Nozzle with the Werth TomoScope Tomography result VT-A _E

28 Measurement of an Injector Nozzle with the Werth TomoScope Results can be displayed either color coded

29 Measurement of an Injector Nozzle with the Werth TomoScope as values which can be measured in defined areas. This Example shows how to measure the diameter devolution

30 SOFTWARE

WinWerth 3D CAD Module Online and Offline 3D CAD- Online

CNC measuring process is calculated automatically Support of

curves, and points 3D CAD- Offline - Programming without

31 WinWerth 3D CAD Module Online and Offline 3D CAD- Online Control of the machine with CAD-data Selection of an element CNC measuring process is calculated automatically Support of all sensors Measuring points can be defined on patches, curves, and points 3D CAD- Offline - Programming without machine The measuring process is shown in the graphic VT-A _E

32 WinWerth 3D BestFit color coded presentation of deviations VT-A _E

: Messung in Tiefe : Seite 4 90 Kreisformabweichung 0-1,0 0,0 1,0 2,0

33 Result Output Numerical Output 3D Nominal / Actual Comparison 2D Nominal / Actual Comparison Formplot Meßprotokoll Bericht Nr. : Messung in Tiefe : Seite 4 90 Kreisformabweichung 0-1,0 0,0 1,0 2,0 3,0-6,0-5,0-4,0-3,0-2,0-10,0-9,0-8,0-7,0-15,0-14,0-13,0-12,0-11,0-20,0-19,0-18,0-17,0-16, Kreisformabweichung 3,0 2,0 1,0 0,0-1, ,0-3,0-4,0 Graphical Presentation Roughness Plot First Article Inspection Report Statistics VT-A _E

34 The integration of scanning sensors for dense point clouds in Multisensor CMM s opens new horizons in the metrology field. For more information see

35 Questions?

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