Length, Germany, PTB (Physikalisch-Technische Bundesanstalt)

Transcription

1 Laser radiations Laser radiations Laser radiations Laser radiations Length Length Frequency stabilized laser (He- Ne): vacuum wavelength Frequency stabilized laser (He- Ne): absolute frequency Frequency stabilized laser (Nd- YAG, frequency doubled): vacuum wavelength Frequency stabilized laser (Nd- YAG, frequency doubled): absolute frequency Laser range finder (EDM) with flat reflector Laser range finder (EDM) with retroreflector Optical beat frequency Optical beat frequency Optical beat frequency Optical beat frequency nm Temperature (20 ± 5) ºC 0.04 fm 2 95% No 4.31/ THz Temperature (20 ± 5) ºC 24 khz 2 95% No 4.31/ nm Temperature (20 ± 5) ºC fm 2 95% No 4.31/ THz Temperature (20 ± 5) ºC 10 khz 2 95% No 4.31/ m 460 µm 2 95% No 5.23/ m 102 µm 2 95% No 5.23/14 Length Laser-interferometer system: error of indicated displacement with refractive index compensation L Comparison with calibrated (laser interferometer, weather station) 0 5 m Temperature 15 C to 25 C Q[0.015, 0.031L ], L in m µm 2 95% No 5/0192 Air pressure, humidity and CO 2 content ambient pressure ± 30 hpa The BIPM key comparison database, Juin /13

2 Length Laser-interferometer system: error of indicated displacement with refractive index and thermal expansion compensation L Gauge blocks: central length L Gauge blocks: thermal expansivity Gauge blocks: central length L Gauge blocks: central length L Photomask: linewidth (surveyor, engineer) tape, steel: line spacing L Comparison with calibrated standard (laser interferometer, weather station, body temperature sensors) Interferometry, exact fractions Mechanical comparison Interferometry, exact fractions Mechanical comparison Optical microscope and interferometer 0 5 m Temperature 15 C to 25 C Air pressure, humidity and CO 2 content ambient pressure ± 30 hpa Q[0.015, 0.074L ], L in m, for a = 11.5E-06 1/K µm 2 95% No 5/0193 a arbitrary Q[20, 0.18L ], L in nm 2 95% No 5.4/1 Q[8.8E-06/L, 6.6E-08], L in 9.00E E-05 1/K Length L 60 to 100, s 1/K 2 95% No 5.4/2 range from 1.1E- 07 to 1.6E-07 Temperature 15 C to 25 C 5.4/ Q[22, 0.066L ], L in nm 2 95% No 5.4/ Q[30, 0.L ], L in nm 2 95% No 5.4/ µm 0.02 µm 2 95% No 4.22/ m Support multiple catenary, 0.4 m distance Q[13.4, 2.6L ], L in m µm 2 95% No 5.23/2 (surveyor, engineer) tape, steel: line spacing L m Support multiple catenary, 0.4 m distance Q[132, 2.6(L - 50 m)], L in m µm 2 95% No 5.23/3 (surveyor, engineer) tape, invar: line spacing L 0 50 m Support multiple catenary, 0.4 m distance Q[13.4, 0.72L ], L in m µm 2 95% No 5.23/4 The BIPM key comparison database, Juin /13

3 (surveyor, engineer) tape, invar: line spacing L m Support multiple catenary, 0.4 m distance Q[41, 0.72(L - 50 m)], L in m µm 2 95% No 5.23/5 Precision line scale, steel: line spacing L Precision line scale, invar: line spacing L m m Q[5.8, 1.8L ], L in m Q[5.8, 0.4L ], L in m µm 2 95% No 5.23/6 µm 2 95% No 5.23/7 ar encoders: line spacing 1-D vacuum comparator Low thermal expansion substrate Q[1, 0.002L ], L in nm 2 95% No 5.21/3 Approved on19 May 2007 Precision line scale: line spacing Photomask or wafer: linewidth 1-D vacuum comparator, photoelectric microscope Scanning electron microscope and interferometer flatness < 1 µm, low thermal expansion substrate Q[9, 0.002L ], L in nm 2 95% No 5.21/ µm Top linewidth µm 2 95% No BS/10 Approved on19 May D grating: mean pitch Laser diffractometer µm Grating area > pm 2 95% No 4.22/2 2-D grating: mean pitch Laser diffractometer µm Grating area > pm 2 95% No 4.22/2 Diameter Diameter External cylinder (plug, piston, pin): L External cylinder (plug, piston, pin): L 1-D comparator and contacting probe 1-D comparator and 2 contacting probes Q[48, 0.4L ], L in Q[10, 0.1L ], L in nm 2 95% No 5.31/4 nm 2 95% No 5.31/5 The BIPM key comparison database, Juin /13

4 Diameter Diameter Diameter Angle by circle dividers Angle by circle dividers Angle by circle dividers Angle by circle dividers Angle Angle Angle Angle cylinder (ring): L cylinder (ring): L External sphere: L Optical polygon: face angle Index table: index angle Rotary encoder scale: position angle Rotary table: position angle Autocollimator: error of indicated angle Electronic level: error of indicated inclination angle Angle block: included angle 90 square: squareness 1-D comparator and contacting probe 1-D comparator and 2 contacting probes 1-D comparator and 2 contacting probes Angle comparator and autocollimator Cross calibration versus angle comparator or polygon and autocollimator Q[48, 0.4L ], L in Q[14, 0.1L], L in Q[10, 0.1L ], L in nm 2 95% No 5.31/6 nm 2 95% No 5.31/7 nm 2 95% No 5.31/ faces 0.03 " 2 95% No 5.22-BS/ " 2 95% No 5.22-BS/4 Angle comparator " 2 95% No 5.22-BS/5 Cross calibration versus angle comparator or polygon and autocollimator Angle comparator Step size " 2 95% No 5.22-BS/6 instrument specific " 1 or 2 axes of measurement 0.01 " 2 95% No 5.22-BS/8 Autocollimator " 0.3 " 2 95% No 5.22-BS/9 Angle comparator and autocollimator Polygon, autocollimator and precision straightline motion " 2 95% No 5.22-BS/ Orientation horizontal 0.2 " 2 95% No 5.22-BS/3 Size up to BS/3 The BIPM key comparison database, Juin /13

5 Angle 90 cylinder square: squareness Reversal method with reference on MFU8-PTB µm/m Length up to " 2 95% No 5.31/9 Diameter up to /9 Flatness standard Optical flat - flatness deviation over whole Tolanski multiple beam Fizeau interferometer 0 5 µm Diameter of artefact 10 to nm 2 95% No 4.21/1 Roundness Roundness Straightness Straightness Straightness Straightness Ring, plug, sphere, hemisphere: roundness R Magnification standard (e.g. flick standard): roundness R Straight edge: straightness S Straight edge with 2 parallel faces: parallelism P Cylindrical straightness standard: straightness S Cylindrical straightness standard: parallelism P Depth standard (ISO type A): profile depth Stylus-on-spindle roundness instrument Stylus-on-spindle roundness instrument Reversal method with reference on MFU8-PTB Reversal method with reference on MFU8-PTB Reversal method with reference on MFU8-PTB Reversal method with reference on MFU8-PTB Interference microscope µm Diameter 1 to µm Diameter 5 to µm Length L up to µm Length L up to µm µm µm External length L length L External length L length L depth of profile, Pt up to 400 Q[6, 10R ], R in µm Q[6, 10R ], R in µm Q[50, 0.4L, 10S ], L in, S in µm Q[70, 0.6L, 14P ], L in, P in µm Q[50, 0.4L, 10S ], L in, S in µm nm 2 95% No 5.31/13 nm 2 95% No 5.31/16 nm 2 95% No 5.31/17 nm 2 95% No 5.31/18 nm 2 95% No 5.31/19 up to /19 up to 400 Q[70, 0.6L, 14P ], L in, P in µm nm 2 95% No 5.31/20 up to /20 ISO 4287 Q[6.5, 1.5Pt ], Pt in µm nm 2 95% No 5.17/2 The BIPM key comparison database, Juin /13

6 Depth standard (ISO type A) Roughness standard (ISO type C): ISO roughness parameters Roughness standard (ISO type C, D): ISO roughness parameters Thread plug, plain: pitch Thread plug, plain: lead, pitch Thread plug, plain: flank angle Thread plug, tapered: pitch Thread plug, tapered: lead, pitch Thread plug, tapered: flank angle SFM µm Groove depth d ISO Stylus instrument, ISO 3274 Stylus instrument, ISO µm RSm µm Average parameters, Ra and Rq ISO 4287, ISO 4288, ISO ISO 4287, ISO 4288, ISO Q[1, 0.5d ], d in µm nm 2 95% No 5.14/3 0.5 µm 2 95% No 5.17/3 Q[0.5, 10Ra ], Ra in µm nm 2 95% No 5.17/4 substitution Pitch 0.75 to µm 2 95% No 5.32/ Major 5 to µm 2 95% No 5.32/2 substitution 3 90 Major 5 to ' 2 95% No 5.32/3 substitution Pitch 0.75 to µm 2 95% No 5.32/ Major 5 to µm 2 95% No 5.32/5 substitution 3 90 Major 5 to ' 2 95% No 5.32/6 Thread plug, tapered: cone angle Thread ring, plain: pitch Thread ring, plain: lead, pitch Thread ring, plain: flank angle 0 15 Major 5 to '' 2 95% No 5.32/7 substitution Pitch 0.75 to µm 2 95% No 5.32/ Minor 5 to µm 2 95% No 5.32/9 substitution 3 90 Minor 5 to ' 2 95% No 5.32/10 The BIPM key comparison database, Juin /13

7 Thread ring, tapered: pitch Thread ring, tapered: lead, pitch Thread ring, tapered: flank angle substitution Pitch 0.75 to µm 2 95% No 5.32/ Minor 5 to µm 2 95% No 5.32/ substitution 3 90 Minor 5 to ' 2 95% No 5.32/13 Complex geometry Film thickness Thread ring, tapered: cone angle Ball plate: 2D centre coordinates Ball bar: centre spacing L software: Gaussian associated features for least square for circle, sphere, cylinder, plane, cone Film thickness gauge Gauge blocks: thermal expansivity a Gauge blocks: thermal expansivity 0 15 Minor 5 to " 2 95% No 5.32/14 with laser interferometer and reversal technique with laser interferometer Ball plate size < 960 x 960 Ball bar size 10 to 960 Q[0.4, 0.5L ], L center distance in m Q[0.4, 0.5L ], L in m µm 2 95% No 5.32/19 µm 2 95% No 5.32/20 Software test 2 95% No 5.32/21 Ball plate calibration sphere SFM µm Interferometry, exact fractions Mechanical comparison size -2.0E E-05 1/K Length L < 1000 x 1000 x to 1000 Temperature 15 C to 25 C 5 to E E-05 1/K Length L Temperature 15 C to 25 C Q[0.6, 1.0L ], L length in m Q[1, 0.5h ], h thickness in µm Q[2.4E-06/L, 2.2E-09, 4.6E- 04a ], L in, a in 1/K Q[2.4E-05/L, 2.7E-08], L in µm 2 95% No 5.32/22 nm 2 95% No 5.14/1 1/K 2 95% No 5.4/5 1/K 2 95% No 5.4/6 The BIPM key comparison database, Juin /13

8 Film thickness Depth standard (ISO type A): groove depth Depth standard (ISO type A): groove depth Roughness standard (ISO type C, D): ISO roughness parameters Roughness standard (ISO type D): ISO roughness parameters Film thickness gauge Precision line scales: mean pitch p Grating scales: mean pitch p Grating scales: orthogonality Gauge block: length difference of gauge block pairs Stylus instrument, ISO 3274 Interference microscope Stylus instrument, ISO 3274 Stylus instrument, ISO µm µm µm Groove depth, d Groove depth, d Peak parameters, Rz, Rp, Rv, Rt, Rz1max Rk parameters, Rk, Mr1, Mr2, Rpk,Rvk SEM 1 50 µm Thickness h Metrological SFM nm Metrological SFM (50x50) (50000 x 50000) ISO Q[22, 36d ], d in nm 2 95% No 5.11/1 ISO Q[2, d ], d in µm nm 2 95% No 5.17/1 ISO 4287, ISO 4288, ISO ISO , ISO Q[3, 10Rz ], Rz in µm Q[3, 10Rz ], Rz in µm (25 nm + 5E- 03h ), h in µm ( E- 05p ), p in nm nm 2 ( E- 05p ), p in nm nm 2 95% No 5.17/5 nm 2 95% No 5.17/6 nm 2 95% No 5.14/2 nm 2 95% No 5.15/1 nm 2 95% No 5.15/2 Metrological SFM % No 5.15/3 Interferometry, exact fractions 0 20 µm Length 0.5 to to 14 nm 2 95% No 5.4/7 The BIPM key comparison database, Juin /13

9 Specimen with parallel end faces (e.g. gauge blocks) thermal expansivity, length stability Interferometry, exact fractions -1.0E E-04 1/K Length L 0.5 to 400 2Q[5E-11/L, 1E- 05a /L], L in m, a in 1/K 1/K 2 95% No 5.4/8 Straightness Straight edge: straightness S Reversal method with precision PTB straight guide µm Orientation Parallelism less than 10 µrad Temperature 10 C to 30 C horizontal length up to 1000 Q[50, 0.4L, 10S ], L in, S in µm nm 2 95% No 5/0119 Film thickness SiO2/Si thickness Ellipsometer nm 0.7 to 2.2 nm 2 95% No 5.14/3 Film thickness Nanoparticle size Thin layer on reflecting surface Mean nanoparticle of monodisperse spherical particles Involute gear: profile slope deviation X-ray reflectometer nm 0.24 to 2.0 nm 2 95% No Small-Angle X-ray Scattering (Synchrotron radiation) nm Mean µm nanoparticles in suspension PTB_7.1_ % 2 95% Yes 7.1/ 25 to to 1.1 µm 2 95% No 5.32/15 03 November 08 October October ISO 1328 module 70 ) The BIPM key comparison database, Juin /13

10 Involute gear: profile form deviation Involute gear: profile deviation, total Involute gear: helix slope deviation µm µm 25 to µm 2 95% No 5.32/15 25 to to 1.4 µm 2 95% No 5.32/ µm Helix angle 0 to to 1.3 µm 2 95% No 5.32/16 25 to 400 ISO 1328 module 70 ) ISO 1328 module 70 ) ISO 1328, facewidth 1000 ) The BIPM key comparison database, Juin /13

11 Involute gear: helix form deviation Involute gear: helix deviation, total Involute gear: single pitch deviation µm Helix angle 0 to µm 2 95% No 5.32/16 25 to µm Helix angle 0 to to 1.5 µm 2 95% No 5.32/ µm 25 to to µm 2 95% No 5.32/17 ISO 1328, facewidth 1000 ) ISO 1328, facewidth 1000 ) ISO 1328, module 70 ) The BIPM key comparison database, Juin /13

12 materials Involute gear: cumulative pitch deviation, total Standard particle, particle size d Algorithms for calculating minimum-zone associated features for 2D-circle, 2Dline, plane, sphere and cylinder µm Scanning Electron Microscopy in Transmission Mode (TSEM) Software test on data in the reference volume [- 500, 500 ]³ nm Mean 25 to µm 2 95% No 5.32/17 ( d ), d in nm nm 2 95% No 4.22/ Size/Position 8E % Yes 5.32/21 ISO 1328, module 70 ) Algorithms for calculating minimum-zone associated features for 2D-circle, 2Dline, plane, sphere and cylinder Software test on data in the reference volume [- 500, 500 ]³ Form deviation 2E % Yes 5.32/21 Algorithms for calculating minimum-zone associated features for 2D-circle, 2Dline, plane, sphere and cylinder Software test on data in the reference volume [- 500, 500 ]³ Orientation 2E- rad 2 95% Yes 5.32/21 The BIPM key comparison database, Juin 2018 /13

13 Angle Clinometer: error of indicated inclination angle Comparison with optical dividing head " 2 95% No 5/05 10 October 2017 The BIPM key comparison database, Juin /13