Kimberly Reid, PhD Director Research Technology

Transcription

1 Kimberly Reid, PhD Director Research Technology The world s first industry-led consortium (501.c.6 non-profit) for the manufacturing of smart sensors

2 New Era of International Industry Program Collaboration Industry Emerging Technologies Manufacturing Commercialization Government International State of Florida National research labs and agencies Attract joint funds Universities Universities in U.S., Europe, and Asia Funded research New ideas and approaches Partnered research capabilities Suppliers Equipment Materials Software Industry R&D Labs & Programs 2

3 Mission To provide the world s most advanced open innovation programs and platforms to attract the entire supply chain necessary to accelerate technology commercialization by providing solutions to major stakeholders while addressing critical technology gaps.

4 Goals Establish international consortium focused on >$500B advanced sensors and devices industries and next generation Silicon based devices Create and fund world-class facility for advanced R&D, commercialization & manufacturing with unprecedented processes, tools, prototyping, and access to exotic materials 4

5 Make available to small through large enterprises via significantly leveraged shared access and cost reductions for each participant Serve as a manufacturing development platform to attract / grow new technologies & products Establish base for future goals including Manufacturing Competitiveness, Advanced Energy Systems, Emerging Technology Commercialization 5

6 Key Differentiator US-headquartered advanced materials and device manufacturing development center that will provide a one-stop-shop for state-of-the-art integration of semiconductor based processes, equipment, materials & circuits for multi-applicable next generation products, especially smart sensors and photonics devices. 6

7 The Promise of Sensors Next disruptive market explosion will be semiconductor-based connected devices led by advanced sensor and complimentary photonic devices

8 Relevant Applications for FL Markets Photonics hardware for simulation industry Bioterrorism detection for homeland security Wander prevention sensors to eradicate Silver alerts Emission detection to prevent further environmental impacts Optical sensors for improved in-line production yield ChemFETs for better quality control for pharmaceuticals and food production Natural gas pipeline monitoring for dangerous hydrocarbons prior to destroying power plant turbines

9 ICAMR Materials Development Goal GOAL: Develop and Transfer to manufacturing partners, manufacturable processes to harness enabling, exotic materials that bring increased functionality, sensitivity, or reliability to high performing smart sensors. Deposition Methods: CVD UHCVD, LPCVD, APCVD Thicker dielectrics, poly silicon, a-si, metals MOCVD III-V (Ga, In, Al, As, N, P, Sb) Graphene, Carbon Nanotubes (CNT) Other? PECVD: remote plasma/direct plasma Thicker dielectrics, metals ALD Atomic layer deposition of thin dielectrics Atomic layer epitaxy of III-Vs Commercial High Vol Manufacturing 300mm Si wafers 9

10 How Proposed ICAMR Functions Key National / International Partnerships National Labs & Research Institutes Consortia Industry Partners Establish programs Develop stable processes Develop stable Integrations Develop stable Equipment Identify and qualify metrology and test Provide ESH guidance TRANSFER to manufacturing Equipment Partners Complete Eco System Partners 10

11 Location and Access Located in Kissimmee (Osceola County) FL, near Orlando International Airport. The Florida Advanced Manufacturing Research Center (FAMRC) anticipated to open Spring 2016 Rural-urban and tourism community will transform with high wage jobs

12 Planned Facility - 20 acres and 100k ft 2 ICAMR lab/fab site anchor acres for high-tech campus and industry partners 12

13 ICAMR 100,000 ft 2 state-of-the-art R&D lab/fab facility ~$125M 43,000 ft 2 of Class 10 cleanroom environment 15,000 ft 2 of lab / office area (including supporting structures - services, loading dock, etc.) Site located on newly dedicated 350 acres research park Deep commitment to best-in-class environmental remediation and safety measures for the site All utilities (electric, water, wastewater) available.

14 Key Capabilities/Differentiators for ICAMR Capability Technical Details What it Means for Business Roadmapping & Prioritization of issues for advanced materials & smart sensors Share costly deposition, metrology, test tools for novel materials Providing Novel Materials in Commercial, HVM scale tools Utilizing cost effective large scale wafers Safest hazardous material handling protocols Working Groups will be set up for establishing industry roadmaps, standards, and prioritizing issues for the supply chain to support advanced materials and smart sensor integration on silicon. Industry members will have access to MOCVD and ALD tools, as well as PL, advanced AFM, advanced testing Industry members be able to move from R&D to manufacturable integration of advanced materials such as: III-Vs (GaN, GaAs, InGaAs, InP, InGaSb), SiGe, graphene, CNT, magnetic materials into sensor devices ( mm) silicon substrates Class 10 or better environments allowing wafers to move into facility and back to customer line. Best In Class infrastructure and protocols, in reclaim, monitoring/recovery from waste stream, and emission controls to handle III-V and advanced materials. Industry members will have a louder voice to affect the supply chain, the supply chain will be given a focused list to assist in allocation of their resources to the most important industry issue. Win-win for both sides to help drive development to market. Industry members will have access to State of the Art, commercial for High Volume Manufacturingtools that are very difficult to find and access elsewhere globally Industry members will now have the ability to work with materials that are very difficult to research and/or mass produce elsewhere Industry members can produce next-generation products to make US manufacturing in the smart sensor space, a global leader - Transition these processes and tools into full scale manufacturing A safe haven for the innovation of these next-gen products while ensuring safety for personnel and the surrounding environment

15 Funding Partners Osceola County UCF FHTCC Osceola County s total investment: $109M $61M to construct and equip 100,000 square foot center 20 acres plus inkind support for power, water, and waste disposal valued at $23.5M $10M non-state and non-tuition funds to design and build center and start-up costs $7M in-kind for focused hires and resource support $1 a year lease with Osceola for 30 years for use of facility $1M match of UCF s commitment of initial operating cost UF, USF, and FIU $250K each included in match Up to $5M matching funds over five years for specific research projects $2M Enterprise Florida Quick Action Fund

16 Florida Statewide Participation KEY: Core Academic Partners Other Academic Partners Research Institutes 16

17 University of Central Florida CREOL: Center for Research & Education in Optics and Lasers (College of Optics & Photonics) Materials Characterization Facility (MCF) NanoScience Technology Center University of Florida MIST Center: NSF funded Multi-functional Integrated Systems Technology University of South Florida Florida International University Florida State University Florida Energy Systems Consortium Valencia College Tech Partners and Talent Pipeline

18 Potential Consortium Members Companies in various sectors Semiconductor and other solid state device manufacturers Defense, aerospace, oil and gas, medical and other large technology manufacturers Semiconductor and solid state device deposition and testing equipment manufacturers Advanced material and chemical suppliers Utilities Universities and private research institutions Federal agencies and National Labs

19 International Opportunities Build strong U.S. European emerging technology alliance Launch initial short term projects aligned with present capabilities and development efforts Launch large scale initiatives that address significant US and EU challenges IoT, cyber security, nano / III-V materials ESH and manufacturing processes, advanced biomedical devices, advanced energy, advanced manufacturing, trusted foundries and device quality concerns, etc. Establish high-value manufacturing development programs Opportunities to utilize and share researchers, intellectual properties, and lab capabilities Joint industry interactions in roadmapping, manufacturing gaps, standards House esteemed organizations North American headquarters US based Joint Development Partnerships possible to expand interactions with US industries, universities, and national labs Provide US fab/lab space for European Union proprietary R&D Notable potential partners include: imec, HOLST, TNO, Fraunhofer, Leti, Philips, etc. 19

20 CONTACT Kimberly Reid, PhD Director Research Technology