In-Design and Signoff Pattern Detection and Fixing Flows for Accelerated DFM Convergence. Karthik Krishnamoorthy - DFM Design Enablement

Transcription

1 In-Design and Signoff Pattern Detection and Fixing Flows for Accelerated DFM Convergence Karthik Krishnamoorthy - DFM Design Enablement 1

2 Agenda GLOBALFOUNDRIES update GLOBALFOUNDRIES reference flow In-Design Pattern Fixing Flow In-Design Auto-Fix and Sign-Off Innovus / Virtuoso-DFM Integration Results Summary 2

3 Company Highlights REVENUE ~6B* 25,000 2nd Largest Foundry Patents & Applications MORE THAN 250 Customers 18,000 Employees FAB LOCATIONS FAB CAPACITY Burlington East Fishkill Dresden Malta Singapore Trusted Foundry 300mm 200mm 200K 133K Wafers/Mo Wafers/Mo *Based upon analysts estimates

4 Global Manufacturing Capacity ~7M Wafers / Yr* East Fishkill, New York Malta, New York Burlington, Vermont Dresden, Germany Singapore TECHNOLOGY 90nm 22nm 28nm, 14nm 350nm 90nm 45nm 22nm 180nm 40nm CAPACITY IN WAFERS/MONTH Up to 14,000 (300mm) 40,000 (200mm) 60,000 (300mm) 60,000 (300mm) 68,000 (300mm) 93,000 (200mm) *200mm Equivalents

5 Process Platforms Dynamic Body-bias Ultra-low Voltage Operation 22nm FD-SOI 14nm FinFET Performance/Power Efficiency Global Manufacturing In Development 7nm High-volume Production Proven PPA 28nm nm Mainstream Solutions

6 Agenda GLOBALFOUNDRIES update GLOBALFOUNDRIES reference flow In-Design Pattern Fixing Flow In-Design Auto-Fix and Sign-Off Innovus / Virtuoso-DFM Integration Results Summary 6

7 GLOBALFOUNDRIES reference flow GLOBALFOUNDRIES DFM mandatory sign-off requirements are well integrated into the design environment DRC+: Litho hotspot detection and fixing DFM-POP: Silicon-validated Pattern OPtimization to enforce statistical yield improvement Current solutions relying on place & route heuristics to meet DFM requirements are limited and inefficient Requires several iterations and longer TAT for routing closure and sign-off Yield layout enhancements cannot be done manually due to the large number of patterns to optimize Performing GDS level changes is expensive and cumbersome for downstream flows DFM must be fast, integrated in the design and signoff flows, and provide automated fixing and optimization solutions 7

8 GLOBALFOUNDRIES reference flow DFM - DRC+ As design dimensions shrink in the advanced nodes, feature size has decreased faster than illumination wavelength Resolution Enhancement Techniques (RET) and Optical Proximity Correction (OPC) allow to improve the printability but in advanced technology nodes, proximity effects can cause variability of Critical Dimension (CD) DRC+ developed as a Super-Set of DRC, RET and OPC techniques, extended to the Design and Physical Verification space 8

9 GLOBALFOUNDRIES reference flow DFM - Pattern Optimization (DFM-POP) Traditional approach to fix In-design DRC+ hotspots Uses rip-up and re-route of design to fix hotspot violations Multiple iterations (> 5) required to converge / fix violations NO custom fixing guidelines provided in the pattern definitions Slower TAT as pattern library grows and design size increase DFM-POP flow advantages Performs In-Situ fixing of the hotspot patterns Very high fixing rate (> 85-90%) in 1st iteration Fixes are correct by construction by enabling patterns with custom fixing guidelines Faster TAT - converge to 100% fix solution in couple of iterations Before PM After PM using rip-up&re-route After PM using Fixing Guidance 9

10 GLOBALFOUNDRIES reference flow GLOBALFOUNDRIES DFM- POP flow Provides the framework to speed up the ECO Enabling fixing guidelines in the pattern definition Perform incremental pattern DRC-clean update Cadence LPA based auto fixing flow allows targeted fixing guidelines in the pattern library provided by foundry Cadence LPA based fixing flows are well integrated into the Innovus and Virtuoso Custom design platforms Placement Routing DRC+ / DFM-POP STA DRC / LVS Litho Sim Timing Closure ECO Physical Verification optional ECO

11 Agenda GLOBALFOUNDRIES update GLOBALFOUNDRIES reference flow In-Design Pattern Fixing Flow In-Design Auto-Fix and Sign-Off Innovus / Virtuoso-DFM Integration Results Summary 11

12 In-Design Pattern fixing flow Non-Integrated Flow Routed Design Export GDS (3 rd party tool) Litho/PM check Import litho HS markers GlobalDetailRoute (search&repair) Innovus/EDI DFM Flow Routed Design VerifyLitho (Integrated LPA) Fix guidelines VerifyLitho using ripup-reroute (optional) GlobalDetailRoute (search & repair) In-design pattern aware fixing improves the flow by removing extra step Additional steps at layout level (few hours) eliminates time-consuming loops after tape out LPA In-Design hotspot fixing greatly simplifies the task of handling mandatory DRC+ signoff criteria 12

13 In-Design Pattern fixing flow LPA tool based on TVL / squish topological pattern representation allows DRC+/DFM-POP pattern library definition with custom fixing guidelines TVL (Three Value Logic) Pattern Representation match occurs if: Key Region is fully covered/ Space is fully un-covered Shape edges must lie in the region between the Key and Space (i.e. within the Don t Care Region) squish topological pattern is: Topological representation: Textual bitmap of the pattern topology Dimensional information: X and Y_deltas representing the row/column sizes Optimization guidelines: targeted shape operation TVL pattern Squish pattern x_deltas=" " y_deltas= <overlay_scanline_range range_str="x1 y2 x2 y3" range_str="x5 y1 x6 y3 3-finger pattern 13

14 In-Design Pattern fixing flow LPA deck creation LPA deck defined based on TVL / squish deck pattern definitions Uses overlay_scanline / overlay_box to specify custom fixing guidelines Applied with verifylitho using squishhints Order of applying the fix guidelines TVL Squish Conf. setup Apply fixing guidelines first EDI/Innovus always starts with targeted fixing guidelines based on the order defined. If first guidelines fails, next one will be applied Localized reroute optional with ripandreroute GLOBALFOUNDRIES DRC+/DFM-POP LPA deck 14

15 In-Design Pattern fixing flow TVL pattern definition Overlay Box fixing guidelines M M X X WIDTH X 15

16 In-Design Pattern fixing flow Squish deck pattern definitions Overlay_scanline fixing guidelines X X X 16

17 Agenda GLOBALFOUNDRIES update GLOBALFOUNDRIES reference flow In-Design Pattern Fixing Flow In-Design Auto-Fix and Sign-Off Innovus / Virtuoso-DFM Integration Results Summary 17

18 In-Design LPA-based Autofix Both DRC+ and DFM-POP autofix flows based on LPA use the same built-in EDI/ Innovus command verifylitho 1st iteration: runs LPA and generates the hotspot information file (HIF) and targeted guidelines for autofix 2nd iteration: optionally runs traditional rip-up/reroute fixing for remaining hotspots The pattern fixing guidelines can be applied to both route and via shapes in the place & route database The LPA tool applies the fixing guidelines in the router database and ensures it is DRC clean EDI/INNOVUS Routed design Targeted fixing w/ guidelines Router Fixing (ripandreroute) Signoff 18

19 In-Design LPA-based Autofix LPA Techfiles enabled with the TVL overlay_boxes or squish hints can do the following Find and fix hotspots using the fixing guidelines set techfile <appropriate LPA techfile> ; # setup up techfile set dfmfixing::lpareplacedolocal 1 ; # setup up local fixing # fix with hints verifylitho routinglayersonly -techfile $techfile dir Results_1 mapfile mapfile streamoutoptions {-ouputmacros } guideline apply squishhints # find remaining and setup ripandreroute fixing verifylitho routinglayersonly -techfile $techfile dir Results_2 mapfile mapfile streamoutoptions {-ouputmacros } apply ripandreroute globaldetailroute # remove blockages foreach layer { M2 M3 C4 C5 C6 C7 K1 K2 } { deleterouteblock ${layer}_litho_repair } 19

20 Agenda GLOBALFOUNDRIES update GLOBALFOUNDRIES reference flow In-Design Pattern Fixing Flow In-Design Auto-Fix and Sign-Off Innovus / Virtuoso-DFM Integration Results Summary 20

21 LPA Innovus/Virtuoso Integration LPA engine is well integrated with both the Digital / Custom Design environment Provides flexible high-performance / capacity layout analysis and optimization Localized fixing using squish topological patterns 21

22 LPA Virtuoso Integration DRC+/DFM-POP LPA techfile can be invoked in Virtuoso environment seamlessly 22

23 Agenda GLOBALFOUNDRIES update GLOBALFOUNDRIES reference flow In-Design Pattern Fixing Flow In-Design Auto-Fix and Sign-Off Innovus / Virtuoso-DFM Integration Results Summary 23

24 Results: LPA In-Design Fix Hotspot repair with custom Fixing Guidelines Fix Guidelines Default

25 Results: Before and After LPA autofix DRC+ Fixing Results Before fixing After fixing with guidelines RULECHECK PM.Rule.C.21 = 3 (3) RULECHECK PM.Rule.lv2 = 17 (17) RULECHECK PM.Rule.lv2 = 1 (1) RULECHECK PM.Rule.21 = 1 (1) RULECHECK PM.Rule.lv2 = 1 (1) RULECHECK PM.Rule.C.21 = 1 (1) RULECHECK PM.Rule.lv2 = 2 (2) --- RULECHECK PM.Rule.C.21 = 1 (1) --- Line-end extension Size 2 sq. mm Hotspots Fixed Detection time (8 CPUs) Fixing time 1 st pass detection and fixing using guidelines (98%) 3m 55s 3m 20s 2 nd pass detection fixing using globaldetailroute 7 7 (100%) 3m 58s 3h 58m 25

26 Agenda GLOBALFOUNDRIES update GLOBALFOUNDRIES reference flow In-Design Pattern Fixing Flow In-Design Auto-Fix and Sign-Off Innovus / Virtuoso-DFM Integration Results Summary 26

27 Summary Current In-Design Pattern fix status In-Design pattern with targeted fixing guidelines deployed for 14nm / 22FDx nodes Automated pattern fixing LPA pattern fixing flow enables ~4X faster convergence than the traditional rip-up and reroute flow Fixes > 90% of the violations with the fixing guidelines in 1st iteration Ensures faster TAT for post-fix timing closure In-Design Pattern fix saves significant design cycle time 27

28 Authors GLOBALFOUNDRIES Fadi Batarseh, Ahmed Omran, Piyush Pathak, Uwe Paul Schroeder, Sriram Madhavan CADENCE Ya-Chieh Lai, Jason Sweis, Jac Paul Condella, Philippe Hurat Acknowledgements Haritez Narisetty Tamer Ragheb Ramya Srinivasan Tze Haw Liew Sumanth Prakash GLOBALFOUNDRIES Confidential 28

29 Thank you Disclaimer The information contained herein [is confidential and] is the property of GLOBALFOUNDRIES and/or its licensors. This document is for informational purposes only, is current only as of the date of publication and is subject to change by GLOBALFOUNDRIES at any time without notice. GLOBALFOUNDRIES, the GLOBALFOUNDRIES logo and combinations thereof are trademarks of GLOBALFOUNDRIES Inc. in the United States and/or other jurisdictions. Other product or service names are for identification purposes only and may be trademarks or service marks of their respective owners. GLOBALFOUNDRIES Inc Unless otherwise indicated, all rights reserved. Do not copy or redistribute except as expressly permitted by GLOBALFOUNDRIES.