Cloud-based simulation of plasma sources for surface treatment

Transcription

1 Cloud-based simulation of plasma sources for surface treatment Using the PlasmaSolve Simulation Suite (P3S) Adam Obrusnik, Petr Zikan June 7, 2018

2 Outline 1. About PlasmaSolve 2. PlasmaSolve Simulation Suite Overview 3. Use cases: 1. Gas flow in a PVD coating chambre 2. Metal nitride deposition model 3. DC plasma torch simulation

3 About PlasmaSolve Consulting company based in Brno, CZ Simulation-aided optimization of industrial processes Focus on non-standard problems requiring detailed physics insight. Custom PlasmaSolve simulation suite integrated with Amazon AWS Cloud 6 people, 9 projects with 6 companies, 15 publications

4 About PlasmaSolve turn-key simulation approach

5 About PlasmaSolve - Collaborations

6 PlasmaSolve Simulation Suite Overview

7 Meshing in P3S

8 Meshing in P3S Based on SALOME Platform and Netgen meshing algorithm 3D geometry input in STEP, IGES or STL formats Mesh generation using unstructured tetrahedral grids allowing selective refinement (structured and hybrid meshes possible) For large geometrical studies - automatic mesh generation and parametric mesh generation

9 Meshing in P3S Example of multi-component geometry Components in the geometry easy to replace Image courtesy OSRAM CZ

10 Physics interfaces in P3S

11 P3S: EM waves Solves the time-harmonic wave equation Simulation of MHz - THz waves propagating through various 3D geometries containing Varied material properties, including non-linear materials

12 P3S: Heat transfer Solves heat equation Surface-to-surface radiation and re-absorption (method of View Factors or Rosseland model) Coupled to Navier-Stokes equation for full advection

13 P3S: Gas flow/reactive flow Gas flow simulation using Navier- Stokes equations with RANS or LES turbulence models Coupling ADR equations (advection-diffusion-reaction) to gas or liquid flow. Temperature-dependent kinetics (coupling to heat equation) Applications in thermal CVD

14 P3S: Equilibrium plasma Current conduction equation coupled to heat equation and Navier-Stokes Strongly non-linear material properties determine the plasma temperature and distribution Applicable to plasma torches or arc lamps

15 P3S: Magnetics Solves Maxwell equations in the A-V form (magnetic and electric potential) Magnetic field of coils of any shape and permanent magnets Coupled to heat equation to simulate inductive heating

16 P3S: Non-equilibrium plasma Solves the mass and momentum equation for the ions in the plasma (Euler equations) with Maxwell equations Plasma assumed quasineutral but generally two-temperature Describes propagation of quasineutral plasma through a volume, pinch effects due to B field Missing effect of external E fields on the plasma (model updated, as discussed later)

17 Cloud integration of P3S

18 P3S: Cloud integration Workstation vs Cloud: In both cases, the simulation runs on multiple processors With single simulation, Cloud not a major advantage over a high-end workstation With parametric studies, we can deploy 100s of optimized machines at the same time

19 P3S: Cloud integration Other cloud advantages: 1. Comfort: data saved in cloud storage automatically after simulation ends 2. Safety: data stored on workstations only during processing 3. Lower data transfer: no need to download ~100 GBs of data in the case of 3D simulation

20 PVD/PECVD case studies

21 Use case: Molecular flow simulation Addressing gas mixing in a vacuum chamber (molecular flow) At Knudsen number > 1, gas does not behave as continuum DSMC model utilized particle approach to fluid simulation Each superparticle corresponds to a number of actual fluid particles and is allowed to collide with other particles of the fluid

22 Use case: Molecular flow simulation

23 Use case: Low pressure PVD arc Deposition process simulation in PVD arc chamber Secondary arc modelled using magnetohydrodynamic (MHD) model Captures plasma expansion Captures pinch effect due to B-fields Does not capture interaction with external E-fields

24 Use case: Low pressure PVD arc Removing the quasi-neutrality assumption and re-deriving the equations attraction of plasma by negative potentials captured! Great benefit from OpenFOAM/Elmer coupling

25 Use case: Atmospheric DC torch Compressible Navier-Stokes equations (expanding to lower pressure) solved together with Ellenbaas-Heller (heat) equation and current conduction equation Operating in argon or an argon/hydrogen mixture (other gas mixtures feasible too) Possible to trace micro particles through the torch and evaluate the energy they absorb

26 Use case: Atmospheric DC torch

27 Conclusions 1. Open source solutions have steep learning curve 2. Once the learning curve is overcome, they are competitive to commercial simulation tools with regard to physics implementation 3. Open source solutions better in some ways a) There is no vendor-locking b) Easier to intergrate with in-house or commercial cloud solutions c) Access to source code makes simulation more transparent and extensible

28 Thank you for your attention!