Surface Texture Measuring Instrument

Transcription

1 Surface TextureContour Measuring Instruments Surface Texture Measuring Instrument Super Compact Design Packed with Powerful Functions Built-in Drive for Measurement E-35A, E-40A Cable-connected Drive for Measurement in Tight Locations E-35A, E-40A, E-45A E-35A Drive: Standard Type Popular standard type for on-site measuring Power functions in a compact design Large memory capacity holds data for 10 measurements. Max. measuring range: 12.5mm E-40A Drive: Retraction Type Supports seven languages! Supports various national standards! Computer connectable! Detector retracts during measuring standby and after measuring is complete. Reduces the risk of probe and pickup damage. Supports use of pickup with automated devices built-in. Retraction amount: 1.5mm Max. measuring range: 12.5mm E-45A Drive: Horizontal Tracing Type Tight location type for crankshaft pins, journals, etc. Allows highly efficient axial direction measuring using tight location horizontal tracing, which is difficult to accomplish using conventional measuring methods. Max. measuring range: 4.0mm Measuring speed: 0.3mm/s *E-45 cannot be built-in to the main unit. 274

2 HandySurf Lineup HandySurf provides a choice of types that meet the needs of a wide range of applications. In addition to the standard type, both the retraction type which can be built into a device, and a horizontal tracing type for use in tight spaces, make important contributions to on-site measuring around the world. AI Function for Easy Operation The AI function (patent pending) automatically configures ideal conditions for measuring range, evaluation length, cut-off value, and recording magnification (when a printer is being used), in accordance with the surface being measured. Measurements from Any Orientation The compact, lightweight design of the HANDYSURF unit enables measuring in horizontally, vertically, tilted, or in any other orientation. The display and drive units can be used together in an integrated configuration or separated to meet specific measuring needs. Can be Used Anywhere in the World HandySurf conforms to JIS (2001, 1994, 1982), ASME, CNOMO and other international standards. It supports operation using English, Japanese, German, French, Italian, Spanish and Portuguese. It also has cleared the European safety standard requirements for CE marking. Replaceable Displacement Pickup A displacement pickup provides exact and faithful surface roughness measuring. Since the pickup is replaceable, dedicate optional pickups also can be used for very small holes and deep grooves, facilitating a wide range of measurements. Functions to Support On-site Operation Data Storage/Rechargeable Battery On-board memory can store 10 sets of measured data for unrestricted output whenever it is required. Both the HANDYSURF unit and the printer have built-in rechargeable batteries, making them ideal for onsite measuring where power is not available. Data Transfer to a Computer A serial port (RS-232C) provided as standard makes it possible to transfer measuring conditions, parameter values, and profile curve data directly to a computer. Computer Connectable *Notebook computer connection cable (E-SC-S248A) is an option. Macro program is included. Sample of a printout when all functions are selected Inspection Report Creation Data can be imported into a Microsoft EXCEL spreadsheet and used to create an inspection report. TiMS Light (Option) High-level analysis can be performed using ACCRETECH TiMS Light integrated measuring system. 275

3 Options (Contact us about E-45A options.) Magnetic Stand E-ST-MAC For Post Magnet Ø6 E-CS-S26A Post Magnet Holder (Option) For measuring at various heights and angles. Long Hole Extension Adapter DT57506 (Option) For long hole measuring with pickup extended 50mm Adapter for Side Direction Measurements DT57507 (Option) For measuring 68 mm inside from the side of the drive unit Nose Piece (For Flat Surfaces) E-WJ-S88A (Option) For handheld measuring of a flat surface whose measuring surface is too small. Nose Piece (For Cylinders) E-WJ-S85A (Option) For handheld measuring of a cylinder whose measuring surface is too small Adapter for Hole Measurements E-WJ-S86A (Option) For handheld measuring of holes and grooves that run at a right angle to the object being measured. Specifications Measuring Range Resolution Analysis items Filter Evaluation length Drive speed Pickup Dimensions and weight Standard accessories Z-axis (vertical) X-axis (horizontal) Z-axis (vertical) Standards Parameters JIS-2001 Motif Evaluation curves Cut-off Cut-off values Fixed mode Arbitrary mode Movement system Sensing method Stylus Measuring Force Skid Power source Power consumption Weight External dimensions Printer (Option) Name Printing method Recording curves Recording Vertical direction (V) magnification Horizontal direction (H) Dimensions Weight and weight External dimensions Accessories Pickups Specifications HANDYSURF E-35A HANDYSURF E-40A HANDYSURF E-45A 160m X-axis 12.5mm 0.01m/20m 0.08m/160m Complies with JIS-2001, JIS-1994, JIS-1982, ISO-1997, ISO-1984, DIN-1990, ASME-1995, CNOMO Pt, Ra, Rq, Rz, Rzmax, Rp, Rt, R3z, RSm, Pc, Rk, Rpk, Rvk, Mr1, Mr2, VO, K, Rmr R, Rx, AR, W, Wx, AW, Wte Section profile curve, roughness curve, ISO13565 special curve, roughness motif curve, waviness motif curve, envelope waviness curve Gaussian filter, 2RC filter c0.08, 0.25, 0.8, 2.5mm, s2.5, 8m Cut-off value x to 12.5mm (unit:0.1mm) 0.6mm/s (return speed 1mm/s) Standard type Retraction type Y-axis 4.0mm 0.4 to 6.1mm (unit:0.1mm) 0.3mm/s (return speed 0.5mm/s) Horizontal tracing type Differential inductance (displacement type) Diamond, 90 cone, 5mR 4mN or less Sapphire, 32mmR (trace direction) Built-in rechargeable battery (charged with AC adapter) Approx. 1VA Approx. 600g 210W70D60Hmm Reference specimen (E-MC-S24B), rear adjustment piece (E-WJ-S64A), extension cable (E-SC-S255A), handy case (E-MA-S35A), AC adapter, instruction manual Compact Printer II E-RC-S25ADPU-H245 Thermal line dot Section profile curve, roughness curve, load curve, roughness motif curve, waviness motif curve, envelope waviness curve 100, 200, 500, 1K, 2K, 5K, 10K, AUTO 1, 2, 5, 10, 20, 50, 100, 200, AUTO Approx. 390g 140W100D40Hmm Recording paper: E-CH-S25A, Connection cable: E-SC-S245A Application Measuring Force Probe Configuration Skid E-DT-SM10A General measuring (standard) 4mN or less 5mR Diamond, 90 cone Sapphire Trace direction: 32mmR E-DT-SM11A Small hole (minimum i.d. 6mm) 4mN or less 5mR Diamond, 90 cone Sapphire Trace direction: 32mmR E-DT-SM12A Extra small hole (minimum i.d. 3mm) 4mN or less 5mR Diamond, 90 cone Sapphire Trace direction: 32mmR E-DT-SM13A Depth grooves (maximum depth 7mm) 4mN or less 5mR Diamond, 90 cone Sapphire Trace direction: 32mmR External dimensions ø ø ø ø9.5 * Excel is a trademark of the Microsoft Corporation 276

4 Surface TextureContour Measuring Instruments Surface Texture and Contour Integrated Measuring Instruments Integrated texture Measurement and High-accuracy Contour Measuring Instrument SURFCOM 2900DX SURFCOM 2900SD New high-accuracy contour detector that weighs 40% less than previous models. The laser optical diffraction scale ensures high resolution over the entire range. Contours can be measured and analyzed at high accuracy and high resolution. Linear Motor Drive Low vibration, high accuracy, high-speed movement Low vibration ensures more stable measurement at high magnifications. 2-In-1 Measuring Instrument A small, high-performance sensor and high-accuracy contour sensor for surface measurement are provided as standard. A choice of Linear Series DX Type and SD Type to suit particular needs Available as an all-in-one space-saving DX Type or conventional separate style SD Type 240

5 Expandable with High-Accuracy, Wide-Range Hybrid Detector The SURFCOM 2900DX/SD comes with a roughness detector and contour detector as standard, but a high-accuracy, wide-range hybrid detector also can be added. The features of the detectors are maintained even for workpieces with varied profiles, for highly efficient measuring. For details about the high-accuracy, wide-range hybrid detector, see the SURFCOM 2000DX/SD page. Note that the high-accuracy, wide-range hybrid detector is a factory option. Adding the detector to an existing machine requires transport of the instrument to the factory. System Expandability (Option) When roughness measurement becomes necessary following installation, the system can be upgraded to a multi-functional contour and roughness instrument simply by adding a roughness detector and roughness analysis program. Full automatic operation is enabled by adding the CNC table system. Y-axis CNC table (100mm) -axis CNC table (vertical) Specifications SURFCOM 2900DX/SD Surface evaluation Contour evaluation Measuring Range Z-axis (vertical) 1000m 50mm X-axis (horizontal) 100mm Z-axis indication accuracy 0.8+2H/100m Accuracy Resolution 0.02m to m 0.025um X-axis indication accuracy 1+2L/100m Resolution 0.1m Straightness accuracy L/1000m 1m/100mm Sensing method Z-axis (vertical) Differential transducer Laser optical diffraction scale X-axis (horizontal) Moiré striped scale Conformance Complies with JIS2001, JIS1994, JIS1982, ISO1997, ISO1984, DIN1990, ASME1995, CNOMO Ra, Rq, Ry, Rp, Rv, Rc, Rz, Rmax, Rt, Rz.J, R3z, Sm, S, Ra, Rq, Ra, Parameters Rq, TILT A, Ir, Pc, Rsk, Rku, Rk, Rpk, Rvk, Mr1, Mr2, VO, K, tp, Rmr, Rmr2, Rc, AVH, Hmax, Hmin, AREA, NCRX, R, Rx, AR, NR, CPM, SR, SAR Processing functions Speed Drive unit tilt Sensor unit Dimentions and weight Evaluation curves Surface characteristics graphs Tilt correction Type of filter Cutoff values Section profile curve, texture curve, filtered waviness curve, filtered center line waviness curve, rolling circle waviness curve, rolling circle center line waviness curve, DIN4776 special curve, roughness motif curve, waviness motif curve, envelope waviness curve Bearing area Load curve, power graph, amplitude distribution graph Linear correction, round surface correction, first half correction, latter half correction, both end correction, spline curve correction (linear, round surface and both end correction possible in arbitrary range) Gaussian phase compensation filter, standard filter (2RC), phase compensation filter (2RC) 0.008, 0.025, 0.08, 0.25, 0.8, 2.5, 8, 25, 50mm (9 stages), selectable (0.001 to 50mm range) Calculations Standard settings Measurement pitch Point, line, circle, partial circle, ellipse, max. point/min. point, distance, coordinate difference, polar coordinate difference, orthogonal/polar coordinate difference display, intersecting elements (point-line, line-line, circle-line, circlecircle, line-ellipse), symmetric elements (pointpoint, point-circle, point-ellipse, line-line, circlecircle, circle-ellipse, ellipse-ellipse), surface calculation, over-pin calculation, dimension line display function, calculation result/design value collation, mirror reversal, profile synthesis function, macro function, automatic element discrimination, calculation point repeat function, workpiece trace function, peak and valley function, auto operation log/playback function, profile design value collation, best fit, design value generation, IGES/DXF conversion Zero point setting, X-axis setting, parallel movement, rotary movement Min. 0.1m Data 32,000 max. (no s point filter); Data points 300,000 max. (with s point filter) points 100,000 max. Vertical 50, 100, 200, 500, 1K, 2K, 5K, 10K, 20K, 50K, Vertical magnification 100K, 200K, 500K, 1000K, 2000K magnification 0.01 to 10,000,000 (arbitrary or automatic) Horizontal 0.1, 1, 2, 5, 10, 50, 100, 200, 500, 1K, 2K, 5K, Horizontal magnification 10K, 20K magnification 0.01 to 10,000,000 (arbitrary or automatic) Column up/down speed (Z-axis) 3 to 10mm/s Measuring speed (X-axis) (texture) 0.03 to 3 mm/s, (waviness) 0.03 to 20 mm/s 0.03 to 20mm/s Movement speed (X-axis) 0.03 to 60mm/s ±15 (option) Stylus Replaceable Replaceable Stylus radius 2mR, equipped as standard 25mR, equipped as standard Measuring Force 0.75mN 30mN or less Measurment Directions Pull direction Pull/push both directions Measurement orientation Up/down both directions Up/down both directions Other Probe material: diamond Probe tracking angle: Ascend: 77 max., Descend: 87 max. Power Requirements Single-phase AC100V ±10%, 50/60 Hz Power consumption 400VA Installation dimensions 1250W850D1500H Weight 130kg 241

6 Surface TextureContour Measuring Instruments Surface Texture and Contour Integrated Measuring Instruments Surface texture and Contour Analysis Integrated Measuring Instrument SURFCOM 1800D-12 * Printer is optional. TiMS Integrated Measuring System (Roughness/Contour) Simply touch the icon to change between the roughness and contour measuring modes. Measured data can be combined when printed. AI Function (Roughness) (patented) The AI function automatically sets the measuring conditions and executes measurement. Automatic Operation Teaching/Playback Function (Roughness/Contour) This function automatically stores measurement and analysis procedures in the memory, including drive unit and column movements. This enables CNC measurements to be performed. Automatic Element Discrimination Function [AI Function] (Contour) The element (point, line, circle) is automatically determined without being specified. Dimension Line Display Function (Contour) This enables dimension lines to be drawn on the diagram along with actual measured values for parameters and geometric deviation. Profile Synthesis Function The profile synthesis function eliminates the analysis range limitation created by the stylus angle. 254

7 Print data Roughness analysis Peak and valley function Specifications Measuring Range Z-axis (vertical) X-axis (horizontal) Accuracy Z-axis indication accuracy (vertical) Resolution X-axis indication accuracy (horizontal) Resolution Straightness accuracy Sensing method Z-axis (vertical) X-axis (horizontal) Processing Parameters/ Functions Calculations Surface evaluation 800m 100mm (200mm for -22 System) ( L/1000)m L: Measuring length (mm) Differential transducer Moiré striped scale Complies with JIS-2001, JIS-1994, JIS-1982, ISO, DIN, ASME, CNOMO Ra, Rq, Ry, Rp, Rv, Rc, Rz, Rmax, Rt, Rz.J, R3z, Sm, S, Ra, Rq, Ra, Rq,TIL TA, Ir, Pc, Rsk, Rku, Rk, Rpk, Rvk, Mr1, Mr2, VO, K, tp, Rmr, tp2, Rmr2, Rc,AVH,Hmax, Hmin, AREA, NCRX, R, Rx, AR, NR, CPM, SR, SAR SURFCOM 1800D Contour evaluation 50mm 100mm (200mm for -22 System) ±0.25% full scale 0.1m/2.5mm, 0.4m/10mm, 1m/25mm ± (1 + 2L/100) m L: Measuring Length (mm) 0.1m 1m/100mm Differential transducer Moiré striped scale Point, line, circle, partial circle, ellipse, max. point/min. point, distance, coordinate difference, polar coordinate difference, orthogonal/polar coordinate difference display, intersecting elements (point-line, line-line, circle-line, circle-circle, line-ellipse), symmetric elements (point-point, point-circle, point-ellipse, line-line, circle-circle, circle-ellipse, ellipseellipse), surface calculation, over-pin calculation, dimension line display function, calculation result/nominal value collation, mirror reversal, profile synthesis function, macro function, automatic element discrimination, calculation point repeat function, workpiece trace function, peak and valley function, auto operation log/playback function Evaluation curves Section profile curve, roughness curve, filtered waviness curve, filtered center line waviness curve, rolling circle waviness curve, rolling circle center line waviness curve, DIN4776 special curve, roughness motif curve, waviness motif curve, envelope waviness curve Surface characteristics graphs Bearing area curve, power graph, amplitude distribution graph Tilt correction Linear correction, round surface correction, first half correction, latter half correction, both end correction, Zero point setting, X-axis setting, parallel movement, spline curve correction (linear, round surface, and both end correction possible at arbitrary range) rotary movement Horizontal magnification 1, 2, 5, 10, 50, 100, 200, 500, 1K, 2K, 5K, 10K, 20K, Arbitrary or auto Recording Vertical 50, 100, 200, 500, 1K, 2K, 5K, 10K, 20K, 50K, magnification 100K, 200K,* 500K* Arbitrary or automatic 0.01 to 10,000,000 (arbitrary or automatic) 0.01 to 10,000,000 (arbitrary or automatic) Filter types Standard filter (2RC), phase compensation filter (2RC), phase compensation filter (Gaussian) Cut-off values 0.025, 0.08, 0.25, 0.8, 2.5, 8, 25mm (7 steps) arbitrary Speed Column up/down (Z-axis) Measuring (X-axis) 3mm/s 0.03, 0.06, 0.15, 0.3, 0.6, 1.5, 3, 6mm/s (8 speeds) Sensor unit Stylus Replaceable Replaceable Measuring Force 0.75mN 30mN or less Stylus radius 2mR 25mR Stylus material Diamond Cemented carbide Measuring Feed Direction Measurement orientation Pull/push both directions Up/down both directions Dimentions and weight Power source Power consumption Single-phase AC100V ±10%, 50/60 Hz 380VA Installation dimensions 1850W800D750Hmm Weight 150kg * When high-magnification pickup is used *Contact us about the high-accuracy S1800DH Series. 255

8 Surface TextureContour Measuring Instruments Surface Texture and Contour Integrated Measuring Instruments Advanced Functions and Superior Operational Ease SURFCOM 2800E-12 * Printer is optional. TiMS Integrated Measuring System (Roughness/Contour) Simply touch the icon to change between the roughness and contour measuring modes. Measured data can be combined when printed. AI Function (Roughness) (patented) The AI function automatically sets the measuring conditions and executes measurement. Automatic Operation Teaching/Playback Function (Roughness/Contour) This function automatically stores measurement and analysis procedures in the memory, including drive unit and column movements. This enables CNC measurements to be performed. Dimension Line Display Function (Contour) This enables dimension lines to be drawn on the diagram along with actual measured values for parameters and geometric deviation. Built-in Shape Merge Function The profile synthesis function eliminates the analysis range limitation created by the stylus angle (contour). 252

9 Dimension line display function Roughness analysis function Profile Synthesis function Section Measurement Analysis With normal measuring systems, limits are imposed on the measuring angle by the detector stylus angle. ACCRETECH has solved this problem by synthesizing the data for two profiles. Specifications Measuring Range Accuracy Straightness accuracy Sensing method Z-axis (vertical) X-axis (horizontal) Processing Parameters/ Functions Calculations Recording Filter types Cut-off values Speed Sensor unit Dimensions and weight Z-axis (vertical) X-axis (horizontal) Z-axis indication accuracy (vertical) Resolution X-axis indication accuracy (horizontal) Resolution Evaluation curves Surface texture evaluation 800m 100mm (200mm for -22 System) ( L/1000)m L: Measuring length (mm) Differential transducer Moiré striped scale Complies with JIS, ISO, DIN, ASME, CNOMO Ra, Rq, Ry, Rp, Rv, Rc, Rz, Rmax, Rt, Rz.J, R3z, Sm, S, Ra, Rq, Ra, Rq, TILT A, Ir, Pc, Rsk, Rku, Rk, Rpk, Rvk, Mr1, Mr2, VO, K, tp, Rmr, tp2, Rmr2, Rc,Hmax, Hmin, AREA, NCRX, R, Rx, AR, NR, CPM, SR, SAR Section profile curve, roughness curve, filtered waviness curve, filtered center line waviness curve, rolling circle waviness curve, rolling circle center line waviness curve, DIN4776 special curve, roughness motif curve, waviness motif curve, envelope waviness curve SURFCOM 2800E Contour evaluation 50mm 100mm (200mm for -22 System) ± ( H/100)m H: Measuring height (mm) 0.025m ± (1 + 2L/100) m L: Measuring Length (mm) 0.1m 1m/100mm Laser optical diffraction scale Moiré striped scale Point, line, circle, partial circle, ellipse, max. point/min. point, distance, coordinate difference, polar coordinate difference, orthogonal/polar coordinate difference display, intersecting elements (point-line, line-line, circle-line, circle-circle, line-ellipse), symmetric elements (point-point, pointcircle, point-ellipse, line-line, circle-circle, circle-ellipse, ellipse-ellipse), surface calculation, over-pin calculation, dimension line display function, calculation result/nominal value collation, mirror reversal, profile synthesis function, macro function, automatic element discrimination, calculation point repeat function, workpiece trace function, peak and valley function, auto operation log/playback function, profile nominal value collation, best fit, design value generation, IGES/DXF conversion Surface characteristics graphs Tilt correction Bearing area curve, power graph, amplitude distribution (ADF) graph Linear correction, round surface correction, first half correction, latter half correction, both end correction, Zero point setting, X-axis setting, parallel movement, spline curve correction (linear, round surface, and both end correction possible at arbitrary range) rotary movement Horizontal magnification 1, 2, 5, 10, 50, 100, 200, 500, 1K, 2K, 5K, 10K, 20K Arbitrary or auto Vertical 0.1, 1, 2, 5, 10, 20, 50, 100, 200, 500, 1K, 2K, 5K, magnification 10K, 20K, 50K, 100K, 200K*, 500K*Arbitrary or automatic 0.01 to 10,000,000 (arbitrary or automatic) 0.01 to 10,000,000 (arbitrary or automatic) Standard filter (2RC), phase compensation filter (2RC), phase compensation filter (Gaussian) 0.025, 0.08, 0.25, 0.8, 2.5, 8, 25mm (7 steps) arbitrary Column up/down (Z-axis) Measuring (X-axis) 3mm/s 0.03, 0.06, 0.15, 0.3, 0.6, 1.5, 3, 6mm/s Stylus Measuring Force Stylus radius Stylus material Replaceable 0.75mN 2mR Diamond Replaceable 30mN or less 25mR Carbide alloy Power source Power consumption Installation dimensions Weight Single-phase AC100V ±10%, 50/60 Hz 380VA 1850W800D750Hmm 150kg * When high-magnification pickup is used 253

10 Surface TextureContour Measuring Instruments Surface Texture Measuring Instrument Operator-oriented Operation for the Workplace Compact Field Surface Measuring Instrument TFT color LCD LCD Panel Simplifies Operation Simply select the desired operation from the color LCD touch panel with a wide field of view or the reasonable monochrome LCD. Highly Portable Compact Unit The unit is small enough for use at virtually any location. Supports International Standard Analysis Parameters Select the desired standard: JIS, ISO, DIN, ASME or CNOMO. Satisfies European Directives for CE Marking Monochrome LCD Best of Class Straightness Accuracy 0.3m/50mm! Simplified 16% rule automatic discrimination Customize Icons The customize function can be used to create a special menu where only the icons that are used most frequently are displayed, substantially enhancing operational efficiency. AI Function (patented) The AI (artificial intelligence) function automatically selects the ideal cut-off value, measuring range and other conditions by simply entering the parameters and allowable values denoted on the machining drawing. This automates measurement. Guidance Function This function guides the user through the measuring procedures, enabling beginners to make measurements. Memo Function A short note or diagram can be entered with the touch pen and printed using the memo function. Supported Languages English, Japanese, German, French, Italian, Spanish and Chinese! Host of Analysis Functions The unit incorporates 34 types of roughness parameters (Ra, Rz, Ry, Sm, S, tp, etc.) and 32 types of waviness parameters. The steps on electrical parts, film thickness, surface area and other items can be analyzed. Tilt Correction Function Six types of automatic tilt correction are provided: Linear, first half, latter half, both end, round surface and spline curve (patented). Evaluation Range Setting (patented) The waveform on the screen is enclosed by two cursors, allowing the desired evaluation range to be set and the parameters to be calculated. PC Card Slot Measuring conditions, measured result management or measured data can be output in binary and text format. This data can be easily read from the PC card slot on a personal computer. Storage of data on CF cards and other types of memory cards is possible to use. 270

11 Convenient Mode Select Function for System Manager/Operator All functions are displayed for the system manager. Only required functions are displayed for the operator. All-function screen Customized screen Flexible Data Analysis Analysis with ACCRETECH s integrated measuring system Sample Data Sheet Display in RS-232C E-SC-S288A Desktop computer PC card (E-MU-S50B) Notebook computer Outstanding Analysis Functions Step Profile Evaluation Example Measurement Hybrid IC R-Surface Correction Example Measurement Shaft Measurement points Can be used for hybrid IC, magnetic head, and other step measurement, film measurement, and surface area measurement. A notched workpiece measuring function makes it possible to eliminated unused parted. 271

12 Options Roll Foot E-MA-S62A Attachment for placing the drive unit on a roll shaped object for measurement Roll outer diameter: 60 mm or more Pickup Holder for All-Orientations E-DH-S107A For measuring surface roughness of slanted surfaces, vertical surfaces, ceiling surfaces, and other non-flat surfaces. Photograph shows unit with E-MA-S63A roll foot. Pickup Holder for Horizontal Tracing E-DH-S17A Attachment for horizontal tracing of items, such as a crankshaft, that have obstacles in the front and back in the measuring direction (using double-side straddling skid) Battery Option Set E-MA-S65A For measuring and recording in a location where there is no power outlet available. Included items: AC adaptor, battery, charger PC card E-MU-S50B Provides storage for approximately 500 measurement conditions, or approximately 500 data measurements (100 text management items). Specifications: 64 MB Compact Measuring Stand E-ST-S130A The height and inclination of the drive unit can be adjusted in accordance with the size and shape of the object being measured. Table size: 410x200mm Maximum measuring height: 200mm Specifications Measuring Range X-axis (horizontal) Z-axis (vertical) Straightness accuracy Analysis items Standards Parameters Evaluation curves Surface Characteristics graphs Tilt correction Magnification Vertical (Z-axis) Horizontal (X-axis) Filter types Measuring Speed Detector Special functions AI Function Step analysis PC card Standard accessories Dimensions and Power Source weight Installation dimensions Weight SURFCOM 130A 50mm 800m (Measuring range/resolution: 800m/10nm, 80m/1nm, 8m/0.1nm) 0.3m/50mm Complies with JIS-2001, JIS-1994, JIS-1982, ISO-1997, ISO-1984, DIN-1990, ASME-1995, CNOMO Ra, Rq, Ry, Rp, Rv, Rc, Rz, Rmax, Rt, Rz.J, R3z, Sm, S, R a, R q, R a, R q, TILT A, Ir, Pc, Rsk, Rku, Rk, Rpk, Rvk, Mr1, Mr2, VO, K, tp, Rmr, tp2, Rmr2, R c, AVH, Hmax, Hmin, AREA, NCRX, R, Rx, AR, NR, CPM, SR, SAR Section profile curve, roughness curve, filtered waviness curve, filtered center line waviness curve, rolling circle waviness curve, rolling circle center line waviness curve, DIN4776 special curve, roughness motif curve, waviness motif curve, envelope waviness curve Bearing area curve, amplitude distribution (ADF) curve, power graph Linear correction, round surface correction, first half correction, latter half correction, both end correction, spline curve correction (linear, round surface, and both end correction possible at arbitrary range) 50, 100, 200, 500, 1K, 2K, 5K, 10K, 20K, 50K, 100K auto 1, 2, 5, 10, 20, 50, 100, 200, 500, 1K, 2K, 5K, auto Standard filter (2RC), phase compensation filter (2RC), phase compensation filter (Gaussian) 0.3, 0.6, 1.5, 3mm/s (4 speeds) Tip radius: 2m, Material: Diamond, Measuring force: 0.75mN AI functions provides for easy procedures, enabling beginners to make measurements. Ideal for film thickness and surface area measurement of semiconductor parts. Data output as text file for transfer to a personal computer. Standard specimen (E-MC-S24B), recording paper (E-CH-S21A), touch pen (E-MA-S54A), instruction manual AC V 10%, 50/60Hz, 30VA 700 (W) 300 (D) 150 (H) mm 8kg * PC card (E-MU-S50B) and PC connection cable (E-SC-S288A) are options. 272

13 TiMS Light Software On-site SURFCOM surface analysis software All the basic functions of TiMS program roughness analysis Expanded roughness analysis functions for high-level analysis RS-232C cable (E-SC-S288A) S480A RS-232C cable (E-SC-S248A) Desktop computer S130A TiMS Light PC card (E-MU-S50B HandySurf Data Transfer using an RS-232C interface (S130A, S480A, E35A) or PC card (S130A, S480A). Data save to files Allows analysis of measured data to be performed on-site. Computer-based operation allows sharing of data with other computers. TESCHART Excel Converter Any parameter value obtained as measured results can be transferred via RS-232C data communication in real time to a cell in Microsoft Excel running on a computer connected to the S130A/S480A or HANDY SURF. (Waveform data cannot be transferred.) Also effective for collecting data from multiple workpieces. RS-232C cable S130A/S480A Computer TES CHART-Excel Converter 273

14 Surface TextureContour Measuring Instruments Surface Texture Measuring Instrument Superior Operating Easy & Automation from Measurements to Inspection Report Creation SURFCOM 1400D-12 * Printer is an option. AI Function Simplifies Measurements (patented) The unit automatically selects the measuring conditions without setting them in advance (roughness measurement). In addition, a lesson mode is available to teach the user the operation procedures. This is a reflection of ACCRETECH s commitment to create measuring instruments that anyone can use. Automation Enhances Measurement Efficiency The teaching function can be used to automate a series of operations, from measurement at multiple locations to generation of an inspection report by pasting the data. Movement Measurement TiMS Flexible Measuring System The TiMS next-generation integrated measuring system is a new breakthrough from ACCRETECH. It links different programs with a single icon, enhancing the ease of analysis. Complies with World Standards This model complies with the latest ISO, JIS, DIN, ASME, CNOMO and other standards, and has cleared the requirements for the European safety standard CE marking. It supports operation using Japanese, English, German, French, Italian, Spanish, Chinese, and Korean. Contact ACCRETECH before taking this model to a country outside of Japan. Reanalysis After One Measurement Data can be reanalyzed after one measurement is performed. The measurement standard (linear, first half, latter half, round surface, both end) can be changed to set the measuring range for analysis, or the defective data for a notch can be removed. Outstanding Expandability The unit can be easily and efficiently upgraded to meet evolving needs. This includes upgrading from two-dimensional to three-dimensional roughness, or adding profile capability. Evaluation Functions Dramatically Strengthened A variety of customer requests for more evaluation functions have been reflected in the 1400D. These include accommodation of standards for film thickness measurement (step/area), wear volume calculation (superimposed profile area) and LCD glass substrate (special waviness). 260

15 Measurement Easy operation with icons and pull-down menus. Icons can be edited according to individual preferences. Real-time display of data. Unit can be controlled using manual mode, joystick or mouse. Analysis Desired measuring standard and evaluation range can be set. Evaluation according to different standards can be performed by simply recalculating the data. Printing The measured results can be formatted according to individual requirements and printed as an inspection report. Measuring screen Analysis screen Superimposition Function Differences before and after machining can be determined by superimposing data on the screen and calculating the different area figures for both sets of data. Up to 10 data items on the screen can be stored, and evaluation can be performed by superimposing the data sets. Specifications 2D Roughness Specifications Measuring Range/ Z-axis (vertical) Resolution X-axis (horizontal) Straightness accuracy Analysis items Conformance Parameters Evaluation curves Characteristics graphs Tilt correction Magnification Vertical (Z-axis) Horizontal (X-axis) Filter types Measuring Speed Detectors Special functions Measuring AI Waveform superimposition Automatic Operation SURFCOM 1400D 800m/0.02m to 25m/0.0004m (6.4m/0.0001m*) 100 mm/0.1m or 32,000 points (max. data points) ( L/1,000)m L: Measuring length (mm) Complies with JIS-2001, JIS-1994, JIS-1982, ISO-1997, ISO-1984, DIN-1990, ASME-1995, CNOMO Ra, Rq, Ry, Rp, Rv, Rc, Rz, Rmax, Rt, Rz.J, R3z, Sm, S, R a, R q, R a, R q TILT A, Ir, Pc, Rsk, Rku, Rk, Rpk, Rvk, Mr1, Mr2, VO, K, tp, Rmr, tp2, Rmr2, R c AVH, Hmax, Hmin, AREA, NCRX, R, Rx, AR, NR, CPM, SR, SAR Section profile curve, roughness curve, filtered waviness curve, filtered center line waviness curve, rolling circle waviness curve, rolling circle center line waviness curve, DIN4776 special curve, roughness motif curve, waviness motif curve, envelope waviness curve Bearing area curve, amplitude distribution graph (ADF) curve, power graph Linear correction, round surface correction, first half correction, latter half correction, both end correction, spline curve correction (linear, round surface, and both end correction possible at arbitrary range) 50, 100, 200, 500, 1K, 2K, 5K, 10K, 20K, 50K, 100K, 200K,* 500K,* arbitrary, auto 0.1, 1, 2, 5, 10, 20, 50, 100, 200, 500, 1K, 2K, 5K, 10K, 20K, arbitrary, auto Standard filter (2RC), phase compensation filter (2RC), phase compensation filter (Gaussian) 0.03, 0.06, 0.15, 0.3, 0.6, 1.5, 3, 6mm/s Tip radius: 2m, Material: Diamond, Measuring force: 0.75 mn AI function provides easy procedures, enabling beginners to make measurements. Waveform curve for a maximum of 10 data items can be superimposed (ideal for wear evaluation). Simplified auto mode and teaching mode enable fully automatic operation Dimensions and weight Power source Installation dimensions Weight Single phase AC100V ±10%, 50/60 Hz, 300 VA 1700W500D750Hmm Approx. 125 kg (2D model) * When high-magnification pickup is used 261

16 Surface TextureContour Measuring Instruments Surface Texture Measuring Instrument Quick Response! Linear Motor Drive Achieves Low Vibration Texture Measurements SURFCOM 1500SD SURFCOM 1500DX 14 First Roughness Measurement Instrument with Linear Motor (Patent Pending) The new linear motor enables the world s fastest measurement speeds and low vibration for stable, high-magnification measurement. A linear, non-contact drive unit and simple configuration (no feed screw or gear box) ensures vibration-free and stable, long-term operation. High-speed Measuring for Dramatically Improved Productivity Very high speeds of 3 mm/s maximum for roughness measuring, 20 mm/s maximum for wave measuring, and 60 mm/s for movement speed delivers measuring efficiency that is five to ten times better when compared with other ACCRETECH machines. New, High-Performance Compact Pickup A new compact built-in pickup allows high-magnification, wide area measuring. The measuring range is 1000m with an outside diameter of 14 mm, and a measuring magnification of 500,000 times. E-DT-SS01A Pickup for roughness measurement Smaller Footprint A new, modern design reduces the system footprint by about 25% (when compared with previous ACCRETECH models). This means lower expenses when the system is installed in a temperature controlled room. A Leader in Expandability You can easily upgrade from 2D to 3D roughness measurement or support both roughness (2D/3D) measurement and contour measurement on a single instrument just by adding on units. Upgrading to a multi-purpose system by adding a contour detector is performed at the factory. Glass Flatness Measurement Measuring Range 20mm20mm 1000 Lines (Y-direction) Conventional Instrument 165 minutes S1500DX-3DF 22 minutes 234

17 Patented AI Function Simplifies Measuring The measuring instrument selects suitable roughness settings and analysis conditions, even when measuring condition settings are not pre-configured. A lesson mode is also provided to teach users measuring instrument operations. Just one more example of ACCRETECH s commitment to build measuring instruments that can be used by anyone. Full Automation Improves Measuring Efficiency The teaching function fully automates the entire process, from multiple location measurements to creation of the final inspection report by pasting data into it. A moving speed of 60 mm/s dramatically improves measuring efficiency when performing full automatic measurement. TiMS Flexible Measuring System ACCRETECH s TiMS integrated measuring system revolutionizes measuring systems by enabling free linking between programs with a single icon for simplified analysis. World Wide Machine This model complies with the latest ISO, JIS, DIN, ASME, CNOMO and other standards, and has cleared the European safety standard requirements for CE marking. It supports operation using Japanese, English, German, French, Italian, Spanish, Chinese, and Korean. Contact ACCRETECH before taking this system to a country outside of Japan. Freedom to Re-analyze After a Single Measurement Re-analysis of single measurement can be performed easily after changing the measurement standard (linear, first half, latter half, round surface, both end), configuring the evaluation range, and removing defective data from a notch. Dramatically Enhanced Profile Evaluation Functions Support for film thickness measuring (step height, surface area), wear volume calculation (superimposed profile area), LCD glass substrates (special waviness) and other standards have been provided in order to satisfy requests from our clients. Flexible Input and Output Functions Import and export functions make it possible to paste image data into measurement results, and to paste measured waveform data into a commercially available word processor or spreadsheet file. Example Measurement with Detector Facing Upwards (With Auto Stop Function) Specifications 2D Roughness SURFCOM 1500DX/SD Measuring Range/ Z-axis (vertical) 1000m/0.02m to 6.4m/0.0001m Resolution X-axis (horizontal) 100mm/0.04m or 32,000 points (300,000 data uptake points) Straightness Analysis items Magnification Filter types Speed Standards Parameters Evaluation curves Surface characteristics graphs Tilt correction Vertical (Z-axis) Horizontal (X-axis) Column up/down speed (Z-axis) Measuring speed (X-axis) L/1,000m L: Measuring length (mm) Complies with JIS-2001, JIS-1994, JIS-1982, ISO-1997, ISO-1984, DIN-1990, ASME-1995, CNOMO Ra, Rq, Ry, Rp, Rv, Rc, Rz, Rmax, Rt, Rz.J, R3z, Sm, S, R a, R q, R a, R q TILT A, Ir, Pc, Rsk, Rku, Rk, Rpk, Rvk, Mr1, Mr2, VO, K, tp, Rmr, tp2, Rmr2, R c AVH, Hmax, Hmin, AREA, NCRX, R, Rx, AR, NR, CPM, SR, SAR Section profile curve, roughness curve, filtered waviness curve, filtered center line waviness curve, rolling circle waviness curve, rolling circle center line waviness curve, DIN4776 special curve, roughness motif curve, waviness motif curve, envelope waviness curve Bearing area curve, amplitude distribution, power graph Linear correction, round surface correction, first half correction, latter half correction, both end correction, spline curve correction (linear, round surface, and both end correction possible at arbitrary range) 50, 100, 200, 500, 1K, 2K, 5K, 10K, 20K, 50K, 100K, 200K, 500K, arbitrary, auto 0.1, 1, 2, 5, 10, 20, 50, 100, 200, 500, 1K, 2K, 5K, 10K, 20K, arbitrary, auto Standard filter (2RC), phase compensation filter (2RC), phase compensation filter (Gaussian) 3 to 10mm/s (roughness) 0.03 to 3mm/s, (waviness) 0.03 to 20mm/s Movement speed (X-axis) 0.03 to 60mm/s Detector Tip radius: 2m, Material: Diamond, Measuring force: 0.75mN Special functions Measuring AI AI function provides easy procedures, enabling beginners to make measurements. Waveform superimposition Waveform curve for a maximam of 10 data items can be superimposed (ideal for wear evaluation). Automatic Operation Simplified auto mode and teaching mode enable fully automatic operation Dimensions and weight Power source Installation dimensions Weight Single phase AC100V ±10%, 50/60 Hz, 300 VA 1250 (W) 850 (D) 1500 (H) mm Approx. 125 kg Dimensions and weight are for the DX-12 Type. 235

18 Surface TextureContour Measuring Instruments Surface Texture and Contour Integrated Measuring Instruments With Cutting-Edge Linear Motor High-Speed, Low-Vibration, High-Accuracy Measuring SURFCOM 1900SD SURFCOM 1900DX The First Application of Linear Motor Drive (Patent Pending) The new linear motor enables the fastest measurement speeds in the world and low vibration for stable, high-magnification measurement. A linear, non-contact drive unit and simple configuration (no feed screw or gear box) ensures vibration-free and stable long-term operation. High-speed measurement for dramatically improved productivity Very high speeds of 3 mm/s maximum for roughness measuring, 20 mm/s maximum for wave measuring, and 60 mm/s for movement speed delivers amazingly fast measuring efficiency that is better than ever. Teaching and playback functions automate the entire process, from multiple location measurements to creation of the final inspection report, which can be achieved by pasting data into it, for measuring efficiency that is five to ten times better than other ACCRETECH instruments. Smaller Footprint A new, modern design reduces the system footprint by about 25% (when compared with previous ACCRETECH models). This means lower expenses when the system is installed in a temperature controlled room. New, High-Performance Compact Pickup (Roughness) A new compact built-in pickup allows high-magnification, wide area measuring. The measuring range is 1000m with an outside diameter of 14 mm, with a measuring magnification of 500,000 times. Easy Evaluation of General-Purpose Part Contours Contours of parts that normally have been evaluated on a projector or tool microscope now can be obtained quickly and easily. Measured results can be incorporated into inspection reports. Superior ACCRETECH Functions (Roughness, Contour) Automatic Element Discrimination (AI Function) Elements such as points, straight lines, and circles are determined automatically without being specified by the operator. Dimension Display Actual measured values such as parameters and geometric deviation can be displayed in measurement drawing. Automatic Crowning Workpiece maximum values and minimum values are detected automatically. Calculation Point Repeat General analysis of a workpiece that includes repeating profiles can be performed by analyzing a single pattern. Workpiece Trace A single manual trace can be used to determine the measuring range without setting values. This function is ideal for measuring intricate profiles. Import and Export Image data can be pasted into measurement results and measurement waveform data can be pasted into commercially available software files. Higher Precision Allows measuring of workpiece contours that are impossible for other instruments Measuring accuracy of 2.5m (measuring range: 5 mm) provides plenty of accuracy for molds and other precision components. A level of measuring accuracy that is normally associated with highend machines greatly broadens the range of possible applications. 242

19 Expandable with High-Accuracy, Wide-Range Hybrid Detector The SURFCOM 1900DX/SD comes with a texture pickup and contour detector as standard, but a high-accuracy, wide-range hybrid detector also can be added. The features of the detectors are maintained even for workpieces with varied profiles, for highly efficient measuring. For details about the high-accuracy, wide-range hybrid detector, see the SURFCOM 2000DX/SD page. Specifications Measuring Range Accuracy Z-axis (vertical) X-axis (horizontal) Z-axis indication accuracy (vertical) Resolution X-axis indication accuracy (horizontal) Resolution Straightness accuracy Sensing method Z-axis (vertical) X-axis (horizontal) Processing Parameters/ Functions Calculations Evaluation curves Surface evaluation 1000m 100mm L/1000m L: Measuring length (mm) Differential inductance Moiŕ striped scale Complies with JIS-2001, JIS-1994, JIS-1982, ISO, DIN, ASME, CNOMO Ra, Rq, Ry, Rp, Rv, Rc, Rz, Rmax, Rt, Rz.J, R3z, Sm, S, Ra, Rq, Ra, Rq,TIL TA, Ir, Pc, Rsk, Rku, Rk, Rpk, Rvk, Mr1, Mr2, VO, K, tp, Rmr, tp2, Rmr2, Rc,AVH,Hmax, Hmin, AREA, NCRX, R, Rx, AR, NR, CPM, SR, SAR Section profile curve, roughness curve, filtered waviness curve, filtered center line waviness curve, rolling circle waviness curve, rolling circle center line waviness curve, DIN4776 special curve, roughness motif curve, waviness motif curve, envelope waviness curve SURFCOM 1900DX/SD Contour evaluation 50mm 100mm ± ( H /100)m/5 m, 20 mm range, ± ( H /100) m/50 mm range H: measuring. height (mm) 0.1m/5mm range, 0.4m/20mm range, 1m/50mm range ± (1 + 2L/100)m L: Measuring Length (mm) 0.1m 1m/100mm Differential transducer (trans) Moiŕ striped scale Point, line, circle, partial circle, ellipse, max. point/min. point, distance, coordinate difference, polar coordinate difference, orthogonal/polar coordinate difference display, intersecting elements (point-line, line-line, circle-line, circle-circle, line-ellipse), symmetric elements (point-point, pointcircle, point-ellipse, line-line, circle-circle, circle-ellipse, ellipse-ellipse), coordinate control (Zero point setting, X-axis setting, parallel movement rotary movement), surface area calculation, over-pin calculation, dimension line display function, calculation result/design value collation, mirror reversal, profile synthesis function, macro function, automatic element discrimination, calculation point repeat function, workpiece trace function, peak and valley function, auto operation log/playback function Surface characteristics graphs Bearing area curve, power graph, amplitude distribution graph Tilt correction Linear correction, round surface correction, first half correction, latter half correction, both end correction, spline correction (linear, round surface, and both end correction are supported in an arbitrary range) Horizontal magnification 0.1, 1, 2, 5, 10, 50, 100, 200, 500, 1K, 2K, 5K, 10K, 20K Arbitrary or automatic Record Vertical 50, 100, 200, 500, 1K, 2K, 5K, 10K, 20K, 50K, 100K, magnification 200K, 500K Arbitrary or automatic 0.01 to 10,000,000 (arbitrary or auto) 0.01 to 10,000,000 (arbitrary or auto) Filter types Standard filter (2RC), phase compensation filter (2RC), phase compensation filter (Gaussian) Cut-off values Speed Column up/down speed (Z-axis) 0.025, 0.08, 0.25, 0.8, 2.5, 8, 25mm (7 steps) arbitrary 3 to 10mm/s Measuring speed (X-axis) (roughness) 0.03 to 3 mm/s, (waviness) 0.03 to 20 mm/s 0.03 to 20mm/s Movement speed (X-axis) 0.03 to 60mm/s Detectors Stylus Replaceable Replaceable Measuring Force 0.75mN 30mN or less Stylus radius 2mR 25mR Stylus material Diamond Carbide alloy Measuring Feed Direction Measurement orientation Pull/push both directions Up/down both directions Dimensions and weight Power Source Power consumption Single-phase AC100V ±10%, 50/60 Hz 400VA Installation dimensions 1250W850D1500Hmm Weight Approx. 125 kg Dimensions and weight are for the DX-12 Type. 243

20 Surface TextureContour Measuring Instruments Surface Texture and Contour Integrated Measuring Instruments Linear Series High-performance surface texture and contour Integrated measuring instrument SURFCOM 2000SD SURFCOM 2000DX High-accuracy, wide-range detector built-in Measuring range Z-axis direction: 5mm range (Resolution: 80nm) to 0.05mm range (Resolution: 0.8nm) Indication Accuracy Z-axis direction ± H /100m H = detector measuring range: ±2.5mm The wide-range detector enables simple, automatic evaluation, analysis, and printing of surface texture and contour with a single measurement. TiMS integrated surface texture and contour measuring system built-in TiMS provides one-touch icon switching between evaluation and analysis of surface and contour measurement results. Measurement data printouts can include both roughness and contour. AI functions make operation easy enough for just about anyone. Other features include expert mode, parameter mode, lesson mode, and automatic measuring condition selection. New linear motor drive (patent pending) The new linear motor enables the fastest measurement speeds in the world and low vibration for stable, high-magnification measurement. A simple configuration and non-contact driver also maintains stability over long term operation. High-speed measurement for dramatically improved productivity Texture Measurement: 3mm/s max.; Contour Measurement: 20mm/s max.; Travel Speed: 60mm/s max. Measurement Efficiency : 10 times better (compared with previous models) A dedicated contour detector can also be added. 232

21 Texture and contour evaluation, analysis, and printout can be performed with a single measurement. Texture and contour data can be printed on a single page. Detectors Measuring range: 5mm max. Electric stylus retract function Specifications Measuring Z-axis (vertical) Range X-axis (horizontal) Accuracy Z-axis (vertical) Resolution Roughness Contour X-axis indication (horizontal) Resolution Straightness accuracy Sensing method Surface texture Standards Processing Parameters Functions Contour Processing functions Speed Detectors Measuring range dimensions Dimensions and weight Evaluation curves Surface characteristics graphs Tilt correction Power source/power consumption -12 SURFCOM 2000DX/SD mm 5mm/Standard arm; 10mm/2 X arm 2.5+2H/100m 0.8nm/0.05mm, 3.2nm/0.2mm range, 16nm/1mm range 8nm/0.5mm range, 32nm/2mm range, 80nm/5mm range 1+2L/100m 0.1m L/1000m Z-axis (vertical direction): differential transducer; X-axis (horizontal direction): Moiré striped scale JIS2001, JIS1994, JIS1982, ISO1997, ISO1984, DIN1990, ASME1995, CNOMO Ra, Rq, Ry, Rp, Rv, Rc, Rz, Rmax, Rt, Rz.J, R3z, Sm, S, Ra, Rq, Ra, Rq, TILT A, Ir, Pc, Rsk, Rku, Rk, Rpk, Rvk, Mr1, Mr2, VO, K, tp, Rmr, Rmr2, Rc, AVH, Hmax, Hmin, AREA, NCRX, R, Rx, AR, NR, CPM, SR, SAR Section profile curve, roughness curve, filtered waviness curve, filtered center line waviness curve, rolling circle waviness curve, rolling circle center line waviness curve, DIN4776 special curve, roughness motif curve, waviness motif curve, envelope waviness curve Bearing area curve, power graph, amplitude distribution graph Linear correction, round surface correction, first half correction, latter half correction, both end correction, spline curve correction (linear, round surface and both end correction possible in arbitrary range) Type of filter Gaussian phase compensation filter, standard filter (2RC), phase compensation filter (2RC) Cutoff values 0.008, 0.025, 0.08, 0.25, 0.8, 2.5, 8, 25, 50mm (9 stages), selectable (Range: mm) Data points 32,000 max. (Without s filter) 300,000 max. (With s filter) Vertical Display magnification 50, 100, 200, 500, 1K, 2K, 5K, 10K, 20K, 50K, 100K, 200K, 500K, 1000K, 2000K Horizontal magnification 0.1, 1, 2, 5, 10, 50, 100, 200, 500, 1K, 2K, 5K, 10K, 20K Calculations Point, line, circle, partial circle, ellipse, max. point/min. point, distance, coordinate difference, polar coordinate difference, orthogonal/polar coordinate difference display, intersecting elements (point-line, line-line, circle-line, circle-circle, line-ellipse), symmetric elements (point-point, point-circle, point-ellipse, line-line, circle-circle, circle-ellipse, ellipse-ellipse), surface calculation, over-pin calculation, dimension line display function, calculation result/nominal value collation, mirror reversal, profile synthesis function, macro function, automatic element discrimination, calculation point repeat function, workpiece trace function, peak and valley function, auto operation log/playback function, profile nominal value collation, best fit, nominal value generation, IGES/DXF conversion* Standard settings Zero point setting, X-axis setting, parallel movement, rotary movement Measurement pitch mm Data points 100,000 max. Display magnification ,000,000 (arbitrary or automatic; vertical and horizontal) Column up/down (Z-axis) Measuring (X-axis) Movement (X-axis) Stylus Measuring Force Stylus radius Stylus material Functions 3 10mm/s mm/s 60mm/s max. Changeable 0.75mN 2mR, equipped as standard Diamond Retract function Pickup movement drive distance 100mm 200mm Column up/down stroke 250mm 450mm 250mm 450mm Stone table dimensions Max. load mm 50kg mm 100kg mm 50kg mm 100kg Installation Width 1100mm 1450mm 1100mm 1450mm dimensions Depth 800mm 870mm 800mm 870mm Height 1480mm 1670mm 1480mm 1680mm Weight 180kg 190kg 380kg 190kg 200kg 390kg Single phase AC100V ± 10%, 50/60 Hz/505VA 200mm * Options Dimensions and weight are for the DX Type. 233

22 Surface TextureContour Measuring Instruments Surface Texture Measuring Instrument Operator-oriented Operation for the Workplace New Surface Texture Measuring Instrument for Easy Operation SURFCOM 480A-12 Supported Languages English, Japanese, German, French, Italian, Spanish and Chinese! JIS2001 compliant! Simplified automatic 16% rule application Surface Texture Contour Measuring Instruments TFT Color LCD Touch Panel The color LCD touch panel with a wide field of view features high clarity. Simply touch the desired icon to perform operation. Touch panel input can be performed by using your finger or with the touch-pen provided, facilitating on-site measurements. Customize Icons The customize function can be used to create a special menu where only the icons that are used most frequently are displayed, substantially enhancing operational efficiency. AI Function (patented) The AI (artificial intelligence) function automatically selects the ideal cut-off value, measuring range and other conditions by simply entering the parameters and allowable values denoted on the machining drawing. This automates measurement. Guidance Function This function guides the user through the measuring procedures, enabling beginners to make measurements. Memo Function A short note or diagram can be entered with the touch pen and printed using the memo function. Supports International Standards The 480A supports analysis parameters for JIS (2001/1994/1982), ISO, DIN, ASME and CNOMO standards, and can be switched between English, Japanese, German, Italian, French, Spanish and Chinese. In addition, any power source between AC100V and 240V can be used, and the unit satis-fies the European Directives for the CE Marking. Host of Analysis Functions The unit incorporates 34 types of roughness parameters (Ra, Rz, Ry, Sm, S, tp, etc.) and 32 types of waviness parameters. The steps on electrical parts, film thickness, surface area and other items can be analyzed. Tilt Correction Function Six types of automatic tilt correction are provided: Linear, first half,latter half, both end, round surface and spline curve (patented). Evaluation Range Setting (patented) The waveform on the screen is enclosed by two cursors, allowing the desired evaluation range to be set and the parameters to be calculated. PC Card Slot Measuring conditions, measured result management or measured data can be output in binary and text format. This data can be easily read from the PC card slot on a personal computer. Storage of data on CF cards and other types of memory cards is possible to use. 268

23 Sample Display The customize function on the menu allows icons to be edited and arranged as desired. Sample Customized Screens Main Menu Sample data sheet Analysis Results Load curve Amplitude distribution curve Power graph Specifications Measuring Range X-axis (horizontal) Z-axis (vertical) Straightness accuracy Analysis items Conformance Parameters Evaluation curves Surface Characteristics graphs Tilt correction Magnification Vertical (Z-axis) Horizontal (X-axis) Filter types Measuring Speed Detector Special functions Measuring AI Step analysis function PC card Standard accessories Dimensions and Power Source weight Installation dimensions Weight SURFCOM 480A 100mm 800m (Measuring range/resolution: 800m/10nm, 80m/1nm, 8m/0.1nm) ( L/1000) m L: Measuring length (mm) Complies with JIS-2001, JIS-1994, JIS-1982, ISO-1997, ISO-1984, DIN-1990, ASME-1995, CNOMO Ra, Rq, Ry, Rp, Rv, Rc, Rz, Rmax, Rt, Rz.J, R3z, Sm, S, R a, R q, R a, R q, TILT A, Ir, Pc, Rsk, Rku, Rk, Rpk, Rvk, Mr1, Mr2, VO, K, tp, Rmr, tp2, Rmr2, R c, AVH, Hmax, Hmin, AREA, NCRX, R, Rx, AR, NR, CPM, SR, SAR Section profile curve, roughness curve, filtered waviness curve, filtered center line waviness curve, rolling circle waviness curve, rolling circle center line waviness curve, DIN4776 special curve, roughness motif curve, waviness motif curve, envelope waviness curve Bearing area curve, amplitude distribution (ADF) curve, power graph Linear correction, round surface correction, first half correction, latter half correction, both end correction, spline correction (linear, round surface, and both end correction are supported in an arbitrary range) 50, 100, 200, 500, 1K, 2K, 5K, 10K, 20K, 50K, 100K, 200K,* 500K,* auto 1, 2, 5, 10, 20, 50, 100, 200, 500, 1K, 2K, auto Standard filter (2RC), phase compensation filter (2RC), phase compensation filter (Gaussian) 0.03, 0.06, 0.15, 0.30, 0.60, 1.5, 3, 6mm/s (8 speeds) Tip radius: 2m, Material: Diamond, Measuring force: 0.75mN AI functions provide for easy procedures, enabling beginners to make measurements. Ideal for film thickness and surface area measurement of semiconductor parts. Data output as text file for transfer to a personal computer. Standard specimen (E-MC-S24B), recording paper (E-CH-S21A), touch pen (E-MA-S54A), instruction manual AC V 10%, 50/60Hz, 90VA 1000 (W)800 (D)750 (H)mm 88kg (for SURFCOM 480A-12) * When high-magnification pickup is used 269

24 Surface TextureContour Measuring Instruments Surface Texture and Contour Integrated Measuring Instruments World Top-class High Accuracy, High Speed and High Resolution Thoroughly pursuing the limits of surface characteristics analysis Highly Stable Optical Path Laser Interferometer (patented) This measuring machine adopts an optical fiber-based laser interferometer, one of Tokyo Seimitsu's constituent technologies, and incorporates a newly developed highly stable optical path laser interferometer having a resolution of 0.3nm. This system features a dynamic range to resolution ratio of 43,333,000:1, which means that contour shapes over a wide range and minute surface shapes hidden in that shape can be evaluate by a single trace. <Sensor Structure> Optical fiber He-Ne laser X-axis scale counter Surface Texture Contour Measuring Instruments World Top-class Resolution of 0.3nm A highly stable optical path He-Ne laser interferometer is used in the sensor to achieve high resolution over a wide range. Linear Motor Drive Linear motor drive ensures high accuracy and high-speed movement. Also, low vibration ensures more stable measurement at high magnifications. Texture and Contour Analyzed in a Single Measurement Measurement efficiency improved and high accuracy maintained at the same time. Probe Workpiece Reference light Bearing Interference light Photocell Measurement light Laser interferometer counter Controller Automatic Measurement Over a Wide Range Wide measuring range of 200mm (horizontal direction) and 13mm (vertical direction) Motorized tilting unit capable of tilting to 45 also available (option) Teaching playback function allows processes from measurement through to printing to be automated. TIMS Upgraded Version TIMS (Tokyoseimitsu Integrated Measuring System) is continually evolving. Newly added functions make the system simpler and easierto-use, making it popular with both beginners and advanced users. 182

25 Advanced TIMS AI Functions Various automatic recognition techniques have resulted in a simpler and easier-to-use system. Automatic Calculation Range Expansion function Part of a geometric element (slightly smaller than the regular range) can be set as the calculation range. The optimum shape is then automatically recognized to expand the calculation range and perform calculation. This allows even more data to be used in calculations, which helps improve accuracy. Repeat function This function memorizes the previous calculation result so that it can be re-used for the next calculation range just by clicking a button. This is ideal for calculating continuous shapes. Automatic Calculation function Automatic calculation can be processed merely by setting the calculation range of geometric elements. Also, the automatic calculation range expansion function can be jointly used with the repeat function for supporting the evaluation of continuous shapes by a simpler operation. Specifications Z-axis (vertical) Measuring Range X-axis (horizontal) Z-axis indication accuracy (vertical) Resolution Accuracy X-axis indication accuracy (horizontal) Resolution Straightness accuracy Z-axis (vertical) Sensing method X-axis (horizontal) Surface Standards texture Parameters evaluation Processing functions Drive Speed Drive unit tilt Sensor unit Other Contour evaluation Evaluation curves Surface characteristics graphs Tilt correction Type of filter Cutoff values Data points Magnification (vertical) Magnification (horizontal) Calculations Standard settings Measurement pitch Data points Magnification (vertical) Magnification (horizontal) Column up/down speed (Z-axis) Drive unit measuring speed (X-axis) Drive unit movement speed (X-axis) Stylus Measuring force Stylus radius Stylus material Functions Power Requirements Power consumption Installation dimensions Weight 13mm/50mm arm, 26mm/100mm arm 200mm 0.2+IHI/1000m (0.206m/H6mm) 0.31nm/50mm arm 0.2+L/1000m (0.4m/L200mm) 0.54nm L/10000m (0.11m/L200mm) Highly stable optical path type laser interferometer SURFCOM 5000DX/SD Optical diffraction scale Complies with JIS2001, JIS1994, JIS1982, ISO1997, ISO1984, DIN1990, ASME1995, CNOMO Ra, Rq, Ry, Rp, Rv, Rc, Rz, Rmax, Rt, Rz.J, R3z, Sm, S, Ra, Rq, R_a, R_q, TILT A, Ir, Pc, Rsk, Rku, Rk, Rpk, Rvk, Mr1, Mr2, VO, K, tp, Rmr, Rmr2, R_c, AVH, Hmax, Hmin, AREA, NCRX, R, Rx, AR, NR, CPM, SR, SAR Section profile curve, texture curve, filtered waviness curve, filtered center line waviness curve, rolling circle waviness curve, rolling circle center line waviness curve, DIN4776 special curve, texture motif curve, waviness motif curve, envelope waviness curve Load curve graph, power graph, amplitude distribution graph Linear correction, round surface correction, first half correction, latter half correction, both end correction, spline curve correction (linear, round surface and both end correction possible in arbitrary range) Gaussian phase compensation filter, standard filter (2RC), phase compensation filter (2RC) 0.008, 0.025, 0.08, 0.25, 0.8, 2.5, 8, 25, 50mm (9 stages), selectable (range: to 50mm) 32,000 max. (no s point filter); 300,000 max. (with point filter) 50, 100, 200, 500, 1K, 2K, 5K, 10K, 20K, 50K, 100K, 200K, 500K, 1000K, 2000K 0.1, 1, 2, 5, 10, 50, 100, 200, 500, 1K, 2K, 5K, 10K, 20K Point, line, circle, partial circle, ellipse, max. point/min. point, distance, coordinate difference, polar coordinate difference, orthogonal/polar coordinate difference display, intersecting elements (point-line, line-line, circle-line, circle-circle, line-ellipse), symmetric elements (point-point, point-circle, point-ellipse, line-line, circle-circle, circle-ellipse, ellipseellipse), surface calculation, over-pin calculation, dimension line display function, calculation result/nominal value collation, mirror reversal, profile synthesis function, macro function, automatic element discrimination, calculation point repeat function, workpiece trace function, peak and valley function, auto operation log/playback function, profile nominal value collation, best fit, design value generation, IGES/DXF conversion Zero point setting, X-axis setting, parallel movement, rotary movement to 1mm 150,000 max to 10,000,000 (arbitrary or automatic) 0.01 to 10,000,000 (arbitrary or automatic) to 200mm/s 0.03 to 3mm/s (during texture measurement), 0.02 to 20mm/s (during contour measurement) 0.02 to 60mm/s 45 (option) Replaceable 0.75mN 2mR standard accessory (50mm arm) Diamond w/ retract function Single-phase 100 VAC10%, 50/60 Hz 505VA 2000 (W)1000 (D)2000 (H) 500kg Surface Texture Contour Measuring Instruments Dimensions and weight are for the DX Type. 183