P.G.Information. (Specialized product)

Transcription

1 P.G.Information (pecialized product) M orporation kihabara DX 15, , otokanda, hiyoda-ku, Tokyo , JP RL M orporation ll rights reserved. P Issued: May, 200 D-K P-120(K) Vacuum Pad IDX Multibellows Vacuum Pad Vacuum Pad for Transporting Disks Vacuum Pad for ixing Panel lean Vacuum Pad Vacuum Pad with pline uffer Metal Pad with uffer ponge Pad ozzle Pad with mall Diameter Vacuum Pad with Valve Heavy Duty Vacuum Pad with Valve Large Vacuum Pad ellows Type Oval Vacuum Pad ompact Pad Vacuum Pad (Downsized Type) Vacuum Pad (last Type) Large Pad lean ttachment for Vacuum Pad lide topper Pad dapter for Heavy Duty Page 2 Page 3 Page 4 Page 5 Page Page Page Page 9 Page 10 Page 12 Page 13 Page 14 Page 15 Page 1 Page 1 Page 19 Page 21 Page 23 Page 25 aution: To ensure the safest possible operation of this product, please be sure to read thoroughly the afety Instructions in our est Pneumatics general catalog before use. 1

2 Multibellows Vacuum Pad IO /IO /IO uitable for absorbing the work with wavy surface Wider attitude angle due to the multistage bellows Lower profile than metal spring buffer IO IO G G luoro rubber onductive G G luoro rubber onductive il G pecifications Pad with lock ring Pad only ø ø ø2.5 ø ø se standard (ø2 to ø) adapter. IO G G luoro rubber onductive ø13 il G pecifications Pad with lock ring Pad only 24 1 ø3 ø9 ø ø2.5 ø15 ø14 se standard (ø10 to ø1) adapter.

3 Vacuum Pad for Transporting Disks IO Vacuum pad for transporting disks of digital household electric appliances (D, DVD) To transport circular components like D and DVD ellows mechanism is realized in the pad to dampen the impact to the work. lasted (Vacuum surface has microscopic ups and downs.) IO luoro rubber G onductive G Dimension ZPT1-5 is a recommended adapter. (our adapters are necessary.) ee below for mounting. Refer to the general catalog for details. PD ø 20 PD 22.5 ø2.5 4-M5 x 0. 4-ø1 <xample of attachment> ø20. ø1.5 3

4 Vacuum Pad for ixing Panel ZP- -DJ0031 Vacuum and fix the stage of LD panels To solve vacuum mark problem, PT (fluororesin) is used for the contact surface. ellows form allows complete contact with curving work surface. ZP 0009X49Z9 DJ ø11 ø9 ø5 PT (1) luoro rubber (2) 90 4-ø4 4 ø ø1.4 4-ø2.4 cross section Part number for the pad: ZP-013-DJ0031 Part number for resin part (1): ZP-014-DJ0031 Part number for fluoro rubber part (2): ZP-013-DJ0031 4

5 lean Vacuum Pad IO-39- /ZP Rubber pad to reduce vacuum mark of the work Halogenated special minimizes the transition of oil to the work. (ote: Please consult M for details.) pplication: Vacuum process or semiconductor and PD devices Transportation of flat glass Variation ø4 ø ø ø10 ø1 ø20 ø25 ø32 ø40 ø50 Part number IO L IO L IO L IO L IO L IO L IO L IO L ZP-00409Z9-DH0010 IO L <lat pad> are the same as standard flat pad. Refer to est Pneumatics 2004 Vol.13 catalog. <autions> lean the pad before using the clean pads. This products are not cleaned. Do not use pads out of the box without cleaning, or residual materials remain in works. If any question occurred, please consult M. leaning method (Reference) 1) se vinyl gloves which do not generate particle, and hold the pad except vacuuming part. 2) upply 2-Propanol (isopropyl alcohol) for electronic industry (Purity > 99.5%) to a cloth which does not generate particle. 3) Wipe lightly the part which may contact with vacuuming part and the work. 4) Wipe it again with a dry cloth which generate no particle. This product means a pad alone. Please select the adapter from est Pneumatics 2004 Vol.13 catalog. 5

6 Vacuum Pad with pline uffer IO all spline guide is used to the buffer. Realized highly precise retaining function. IO ø2 04 ø4 0 ø 0 ø 10 ø10 luoro rubber G onductive G lat 1 uffer pecification Rotation stopper Yes 1 ø1 troke pring force 0 stroke troke end mm ø3.4 M5 x 0. uffer part number: IO Pad part number is standard ZP02 to 0, ZP10T ø Gasket 40.5 M5 x across flats ø Y ø ø IO IO IO IO IO Y

7 Metal Pad with uffer ZP-0035XTJ-DJ00315 Improve accuracy for positioning vacuum point Impact to the work is reduced by buffer. Prevent detachment failure due to static electricity, and avoid work damage ZP 0035XTJ DJ00315 Dimension M5 x 0. ø9 across flats across flats 1.5 (1) M3 x Width across flat Material: tainless steel ø1.5 ø2 ø3.5 ø uffer pecifications Rotation stopper one troke 2 mm crew part is not glued, possible to be become loose uffer part number (1): ZP-ZZZZ9ZJ-DJ00315

8 ponge Pad IO G0/IO G10 pplicable to G ball surface, electric substrate, uneven work surface Rubber is used for the adapter end surface to reduce impact when contacting the work. IO G 0 pecification G ponge 0 ø IO G 10 pecification G ponge 10 ø10 M5 x 0. M5 x Gasket 3 Gasket across flats across flats Material: Material: onductive R sponge 1.5 ø1. ø3 ø ø2.5 ø10 ø Material: Material: onductive R sponge Pad part number: IO G dapter part number: IO Pad part number: IO G dapter part number: IO D

9 ozzle Pad with mall Diameter IO /IO Vacuum pad for transporting small component (I chip, etc) IO G G luoro rubber onductive IO G G luoro rubber onductive M5 x 0. M5 x across flats Gasket across flats Gasket ø0. ø1.1 ø1. ø2 dapter part number: IO Pad part number: IO G G luoro rubber onductive dapter part number: IO Pad part number: IO G G luoro rubber onductive 9

10 Vacuum Pad with Valve (ø, ø) IO Valve function is built in the vacuum pad. Valve opens only when the pad end pin contacts the work, and vacuum is generated. When multiple pads are used in the branch piping, and even if vacuum failure or the change of work size occur, vacuum force is not reduced. pplications (1) Verifies work presence. Vacuum air only when a work is present. (2) When multiple pads are used in the branch piping, and even if there are pads which do not vacuum properly, vacuum force is not reduced. (3) Vacuuming in the line handling with different shape of works. IO ø 0 ø lat luoro rubber G onductive G G onductive fluoro rubber M x 1 Gasket across flats nd pin material nd pin luoro rubber luoro rubber Y onductive onductive silicon onductive fluoro rubber onductive fluoro rubber ø1. ø ø IO IO Y

11 Vacuum Pad with Valve (ø10 to ø1, ø20, ø25, ø32) IO /IO Valve function is built in the vacuum pad. Valve opens only when the pad end pin contacts the work, and vacuum is generated. When multiple pads are used in the branch piping, and even if vacuum failure or the change of work size occur, vacuum force is not reduced. IO ø10 13 ø13 1 ø1 lat with ribs IO ø20 25 ø25 32 ø32 lat with ribs G G luoro rubber onductive G G luoro rubber onductive Vacuum entry il Rc1/ M M x 1.25 onnection il M x Rc1/ across flats 13 across flats 13 G G across flats 12 D Y H D ø2.4 Y ø ø IO IO IO IO IO M ø2.4 ø3.4 ø ø Rc1/ D G 12.4 Y M x 1.25 Pad is standard ZP10 to 1. IO IO IO IO IO G M x 1.25 Rc1/ H 12.4 D Pad is standard ZP20 to dapter part number: IO onnection M x Rc1/ Y

12 Heavy Duty Vacuum Pad with Valve (ø40 to ø125) IO H - /IO H -/IO H Valve function is built in the vacuum pad. Valve opens only when the pad end pin contacts the work, and vacuum is generated. When multiple pads are used in the branch piping, and even if vacuum failure or the change of work size occur, vacuum force is not reduced. IO H 40 ø40 50 ø50 luoro rubber PR H Heavy duty pad Vacuum entry M x Rc1/ IO H 3 0 ø3 ø0 H luoro rubber PR Heavy duty pad Vacuum entry M x 1.25 across flats ø2.4 ø D ø 3 2 ø1 IO H - IO H - IO H - IO H M x 1.25 Rc1/ D.2 D 10 Width across flats 3 M x 1.25 ø45 4-M4 x 0. ø3 ø34 ø ø 2 Y 10 3-M3 x 0.5 IO H 100 ø ø125 H Heavy duty pad Pad is standard ZP40/50H. luoro rubber PR IO H - IO H - Pad is standard ZP3/0H D 3 39 Y heck valve with adapter: IO Width across flats 0 IO H IO H Pad is standard ZP100/125H.

13 Large Vacuum Pad ellows Type IO H J pplicable for tapered surface by pivoting pare pplicable for curved surface by bellow shape IO H J25 40 ø40 50 ø50 uffer stroke J25 25 stroke J50 50 stroke J5 5 stroke H Large bellows luoro rubber PR across flats 14 Vac. Rc1/ Pad is standard ZP40/50H. across flats M1 x 1.5 ø30 G H D ø ø Y IO H J25 IO H J50 IO H J5 IO H J25 IO H J50 IO H J D Tilt angle ±15 ø1 3-M3 x 0.5 IO H J25 IO H J50 IO H J5 IO H J25 IO H J50 IO H J G H Y

14 Oval Vacuum Pad IO W - /IO W - /IO W pplicable for substrate and LD panel (works which surface for vacuum is limited) IO W x x x x 10 G G W Oval luoro rubber onductive il G pecification Pad with adapter Pad only IO W x x x x 20 W Oval G G luoro rubber onductive 15.5 a b IO W IO W - 4 IO W - 5 IO W dapter part number: IO ø 2-ø ø Y IO W - 2-ø1. IO W - 2-ø IO W - IO W - ø2.5 ø dapter part number: IO ø b IO W x x x x M5 x 0. a W Oval G G luoro rubber onductive ø M5 x 0. Y Pad part number: IO W -G x x x x 20 W Oval G G luoro rubber onductive ø M5 x 0. Y a IO W IO W IO W IO W a 4 5 ø Y Pad part number: IO G x x x x 30 G G luoro rubber onductive dapter part number: IO

15 ompact Pad IO /IO /IO Thin lip realized vacuuming of thin works. IO G G luoro rubber onductive IO G G luoro rubber onductive ø ø se standard (ø2 to ø) adapter. se standard (ø2 to ø) adapter. IO ø lat G G ø ø2. luoro rubber onductive ø ø0. ø 0.3 ø5 0.3 ø1 ø 15

16 ompact Pad ZP- 9Z -DI00291/ZP Z -DG00025 Thin lip realized vacuuming of thin works. ZP Z DI ø ø ø ø luoro rubber 5 onductive onductive fluoro rubber lean ZP Z DG luoro rubber 5 onductive onductive fluoro rubber M5 x 0. ø ø14 M5 x 0. across flats across flats ø1 ø ø 0.3 ø1 ø30 ø ZP Z-DI ZP-0015 ZP-0020 ZP Pad part number: ZP Z9-DI ø ø ø ø luoro rubber 5 onductive onductive fluoro rubber lean dapter part number (ø10, ø15, ø20): ZP-DZZZZ9Z9Z-DI00291 dapter part number (ø25): ZP-DZZZZ9Z9Z-DG00025 Pad part number: ZP Z9-DG luoro rubber 5 onductive onductive fluoro rubber dapter part number: ZP-DZZZZ9Z9Z-DG

17 Vacuum Pad (Downsized Type) IO Low profile vacuum pad adapter Hexagon hole for the wrench enables easy replacement of the pad. M5 x 0. IO ø2 03 ø3 04 ø4 0 ø 0 ø lat luoro rubber G onductive G dapter part number: IO M5 x across flats Gasket 3.5 Gasket 10.5 ø across flats 1.5 ø ø ø 0.5 ote 1) If this adapter is used, please order the pad below. ote 2) dapter is mounted using hexagon hole. IO IO IO IO IO dapter part number: IO Pad part number: IO G 02 ø2 03 ø3 04 ø4 0 ø 0 ø G G luoro rubber PR onductive 1

18 Vacuum Pad (last Type) IO /IO /IO lasted pad vacuum surface improved detaching performance of the work. IO ø04 ø lat G G luoro rubber onductive 0 ø IO lat with rib ø G G luoro rubber onductive ø1. ø4 ø4. se standard (ø2 to ø) adapter. ø2.5 ø ø se standard (ø2 to ø) adapter. last type last type IO ø0 lat with rib G G luoro rubber onductive pecification il Pad only 5 M5 male thread 5 M5 female thread ø M5 x 0. Gasket across flats M5 x across flats ø2.5 ø ø last type ø2.5 ø ø9 0.5 ø2.5 ø ø se standard (ø2 to ø) adapter. last type last type

19 Large Pad IO /IO IO /IO Large pad for ø150 to ø340 IO lat with rib IO lat with rib 150 ø ø200 luoro rubber R PR luoro rubber R PR ø10 10 ø ø12 ø ø12 ø ø14 ø40 4-ø9 4-ø9 ø40 4-ø14 IO lat with rib 250 ø250 luoro rubber R PR IO lat with rib 250 ø250 luoro rubber R PR ø150 ø124 4-M x ø ø52 ø24 ø250 4-ø10 4-ø1 1 ø52 ø250 1 ø 4-ø14 ø 4-ø9 19

20 Large Pad IO /IO IO lat with rib 300 ø300 luoro rubber R PR IO lat with rib 340 ø340 luoro rubber R PR ø252 ø240 ø10 4-M x ø ø52 ø29 4-ø9 4-ø ø52 ø ø300 ø 4-ø14 4-ø9 ø 20

21 lean ttachment for Vacuum Pad ZP-10 -DH00142/ZP-20 -DH00142 Leave no oil on the work. PK attachment on the bellows rubber pad prevents the work from contacting the rubber material, and stops transition of the oil oozing out of the rubber material. (ote: Please consult M for details.) pplication: Vacuum process of semiconductor and PD devices Variations ize Material pplicable pad ø, ø, ø10, ø13, ø1, ø20, ø25, ø32 PK, onductive PK (volume resistivity: 10 5 to 10 Ω cm) ellows vacuum pad ttachment Type tandard pad diameter PK onductive PK ø ø ø10 ø13 ø1 ø20 ø25 ø32 ZP-101-DH00142 ZP-102-DH00142 ZP-103-DH00142 ZP-104-DH00142 ZP-105-DH00142 ZP-10-DH00142 ZP-10-DH00142 ZP-10-DH00142 ZP-201-DH00142 ZP-202-DH00142 ZP-203-DH00142 ZP-204-DH00142 ZP-205-DH00142 ZP-20-DH00142 ZP-20-DH00142 ZP-20-DH00142 ote) Part number in above table shows the number for the attachment only. If pad is ordered together, please refer followings. (the attachment and pad together) s shown below, add for the attachment part number beneath the vacuum pad number. ut please note that they are not assembled. This attachment can be mounted to M standard bellows pad only. or conductive PK attachment, use the pad made of conductive material. ttachment x. ZPT0J10-5- Vacuum pad part number ZP-101-DH00142 ttachment part number 21

22 lean ttachment for Vacuum Pad ZP-10 -DH00142/ZP-20 -DH00142 (mm) D Y D ø ø ø Y ZP0 ZP0 ZP10 ZP13 ZP1 ZP20 ZP25 ZP <aution> lean the attachment before usage. This product is not cleaned after machining. Do not use the attachment out of the package, or residual subject on the attachment is transferred to the work. Please consult M if any question occur. leaning method (Reference) 1) se vinyl gloves which do not generate particle, and hold the pad except vacuuming part. 2) upply 2-Propanol (isopropyl alcohol) for electronic industry (Purity > 99.5%) to a cloth which does not generate particle. 3) Wipe lightly the attachment vacuum surface and the part which may contact with the work. 4) Wipe it again with a dry cloth which generate no particle. If the contact with hard material become a problem, do not use the attachment. PK materials and machined products fall into xport Trade ontrol Ordinance item. 22

23 lide topper Pad IO H Heavy duty pad for body welding press Vacuum surface hard to slide O-ring is used in bellows. Recyclable by separating parts into metal and rubber. Pad (Rubber only) IO H Hexagon socket head bolt (attached) O-ring (luoro rubber) Plate (luminum) pplicable pad diameter ø40, ø50 ø3, ø0 ø100, ø125 Hexagon socket head bolt M3 x 10 M4 x 10 M5 x 12 Qty ø40 ø50 ø3 ø0 ø100 ø125 luoro rubber PR 4 4 H Heavy duty pad IO H IO H ø34 ø ø ø ø2 ø2 ø40 ø50 ø42.4 ø52. ø1 3-ø.5 ø1 3-ø.5 3-ø4 3-ø4 23

24 lide topper Pad IO H IO H IO H ø ø ø15 ø44 ø3 ø.3 ø15 ø44 ø0 ø4.4 ø34 4-ø5 ø34 4-ø5 4-ø 4-ø IO H IO H ø0 ø ø1 ø53.5 ø100 ø105.4 ø1 ø5.5 ø125 ø131 ø40 4-ø ø40 4-ø 4-ø9.5 4-ø9.5 24

25 dapter for Heavy Duty (ø40 to ø125) IO-39- Part number of shall be selected from the table below. ote) This adapter does not include the pad and the bolt. These are supplied by customer. pplicable pad diameter Hexagon socket head bolt Qty. ø40, ø50 M3 x l 3 ø3, ø0 M4 x l 4 ø100, ø125 M5 x 10 l 4 dapter table Image pplicable pad diameter ø40, ø50 ø3, ø0 ø100, ø125 Page Vacuum entry TOP Without buffer Male thread emale thread Page 2 Page 2 Vacuum entry ID Without buffer With buffer With buffer J J -105-J J J J Page 2 Page 29 Page 30 Pad Replacement Remove the bolt from the vacuum side with the hexagon wrench. ttach a new pad to the adapter place and tighten bolts so that no gap is left between the pad and the adapter plate. Pad tamp dapter plate dapter plate Hexagon socket head bolt Gap 25

26 Vacuum ntry TOP uffer one onnection Male thread ø40, ø50 IO ø3, ø0 IO M14 x 1 across flats 19 Rc1/ M1 x 1.5 across flats 24 Rc1/ across flats across flats 19 3-M3 x M4 x Width across flats 3 ø Width across flats 24 ø3 ø1 ø45 ø34 ø2 ø100, ø125 IO M1 x 1.5 Rc1/ across flats across flats 24 4-M5 x 0. Width across flats 0 ø ø0 ø40 2

27 Vacuum ntry TOP uffer one onnection emale thread ø40, ø50 ø3, ø0 IO IO onnection M x M10 x 1.5 onnection M x M10 x M12 x M1 x M3 x M4 x 0. Width across flats 24 ø2 ø1 Width across flats 3 ø45 ø34 ø100, ø125 IO IO IO onnection 12 M12 x M1 x 1.5 M x 1.25 M10 x IO IO IO IO M x 1.25 M10 x 1.5 M12 x 1.5 M1 x 1.5 Width across flats 0 4-M5 x ø40 ø0 IO IO M12 x 1.5 M1 x 1.5 2

28 Vacuum ntry TOP uffer Yes onnection Male thread ø40, ø50 IO J25 J25 J50 J5 uffer o rotation stopper (uffer stroke 25 mm) o rotation stopper (uffer stroke 50 mm) o rotation stopper (uffer stroke 5 mm) ø3, ø0 IO J25 J25 J50 J5 uffer o rotation stopper (uffer stroke 25 mm) o rotation stopper (uffer stroke 50 mm) o rotation stopper (uffer stroke 5 mm) across flats 14 Rc1/ across flats 14 across flats 2 across flats 2 Rc1/ M3 x M4 x 0. M1 x 1.5 M1 x 1.5 Width across flats ø3 ø1 5.5 IO J25 IO J50 IO J5 pring orce Width across flats ø3 ø34 5 IO J25 IO J50 IO J5 pring orce ø2 0 stroke.9 ø45 0 stroke.9 troke end 11. troke end 11. ø100, ø125 IO J25 J25 J50 J5 J100 uffer o rotation stopper (uffer stroke 25 mm) o rotation stopper (uffer stroke 50 mm) o rotation stopper (uffer stroke 5 mm) o rotation stopper (uffer stroke 100 mm) across flats 1 across flats 30 Rc1/ M22 x Width across flats 0 4-M5 x 0. IO J25 IO J50 IO J5 IO J ø4 ø40 pring orce 0 stroke.9 ø0 troke end 11. 2

29 Vacuum ntry ID uffer one onnection emale thread ø40, ø50 ø3, ø0 IO IO onnection M x M10 x 1.5 onnection 10 M10 x M12 x 1.5 across flats 21 across flats 21 Rc1/ Rc1/ M3 x M4 x Width across flats 24 ø3 ø2 ø1 Width across flats 3 ø4 ø45 ø34 IO IO M x 1.25 M10 x 1.5 IO IO M10 x 1.5 M12 x 1.5 ø100, ø125 IO across flats 21 onnection 10 M10 x M12 x 1.5 ø50 Rc1/ 4-M5 x Width across flats 0 ø4 ø0 ø40 IO IO M10 x 1.5 M12 x

30 Vacuum ntry ID uffer Yes onnection Male thread ø40, ø50 IO J25 J25 J50 J5 across flats 14 across flats 2 uffer o rotation stopper (uffer stroke 25 mm) o rotation stopper (uffer stroke 50 mm) o rotation stopper (uffer stroke 5 mm) ø3, ø0 IO J25 across flats 14 across flats 2 J25 J50 J5 uffer o rotation stopper (uffer stroke 25 mm) o rotation stopper (uffer stroke 50 mm) o rotation stopper (uffer stroke 5 mm) M1 x Rc1/ across flats 21 Width across flats 24 ø3 ø1 ø M3 x 0.5 IO J25.5 IO J IO J pring orce 0 stroke IO J25 IO J50 IO J5 pring orce troke end stroke.9 troke end M1 x Rc1/ 11.5 across flats 21 ø4 ø34 ø45 Width across flats M4 x 0. ø100, ø125 IO J25 J25 J50 J5 J100 across flats 1 M22 x 1.5 uffer o rotation stopper (uffer stroke 25 mm) o rotation stopper (uffer stroke 50 mm) o rotation stopper (uffer stroke 5 mm) o rotation stopper (uffer stroke 100 mm) across flats M5 x 0. Rc1/ across flats IO J25 IO J50 IO J5 IO J Width across flats 0 ø4 ø40 ø0 pring orce 0 stroke troke end