Photonics for Ship Building Workshop, Halifax NS, Nov , 2012 Trends in microprocessing and emerging applications enabled by short pulsed lasers

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Toronto http://photonics.light.utoronto.

19-20, 2012 Trends in microprocessing and emerging applications enabled by short

Lithography Time Scaling - Ultrafast Lasers reduce HAZ MicroMachining Applications:

$Photovoltaics 3D writing in Glass: refractive index: optical circuits for Telecom$

1 Peter R. Herman Dept. of Electrical and Computer Engineering, Institute for Optical Sciences University of Toronto Photonics for Ship Building Workshop, Halifax NS, Nov , 2012 Trends in microprocessing and emerging applications enabled by short pulsed lasers Micromachining how to make small things Wavelength Scaling - Laser Lithography Time Scaling - Ultrafast Lasers reduce HAZ MicroMachining Applications: iphone Ultrafast Laser Program Deep Via Machining: Laser physics Scribing transparent plate (glass panel) Catapulting Dielectric Film: Texturing c-silicon Photovoltaics 3D writing in Glass: refractive index: optical circuits for Telecom and sensing volume nanogratings: microfluidics and MEMs Integrated Microsystems: Lab-on-a-chip, lab-on-a-fiber, lab-in-a-film, smart catheter

2 How big is the laser market? Laser & Laser+System Sales Laser Sales (not systems) Industry Laser Solutions, Jan BioMedical -Laser? Goldfinger ECE PRHerman 2

3 Laser Basics Why are lasers commercially successful in material processing? What is unique about laser sources and their beam properties? CLEO CThG1 Tut - Herman - UofT 3

4 Why lasers for machining? Unique form of energy: non-contact with no mechanical deformation or tool wear Short Wavelength Small diffraction highly directional beams or optical fiber delivery is efficient energy transport Clean reduce chemicals, cleaning steps, green Strong material interactions: focus to high intensity select laser wavelength for strong absorption process difficult materials (glass, ceramics ) Process can be very fast Rapid prototyping (computer design) Lend themselves to automation Can drill to very shallow angles (<10 degrees) 17 4

5 Reliability of Lasers today? Better than

6 Micromachining Making things small Heat Affected Zone HAZ Scale to lower power or pulse energy Focus light to small size (diffraction limit ~ λ) 40x difference in wavelengths CO 2 Laser (λ 10μm) versus ArF Excimer Laser (λ 0.19μm) Short pulse duration or fast scan Fastest Man-Made event femtosecond = s small heat affected zone Nonlinear Interactions: strengthen absorption Coherence Interference holographic 2D or 3D structuring at resolution < λ/2 17 6

7 Excimer Laser Lithography: Semiconductor Electronic Chips ASM Lithography Optical Systems Mask and Reticle Resist Pushing Conventional Optical Limits < 22-nm moving into production Less than One-Eighth of Wavelength ECE PRHerman 7 Dozens of atoms in size

8 Lasers in MicroElectronics Resistor Trimming Circuit Repair 10 km of wiring in 10 or more wiring levels in today s microelectronic chip Vias in Circuit Boards Marking Labelling

9 Laser Micromachining Optical Display: multiple laser steps in scribing, repair Solar Panels: isolation, scribing Biomedical Products: Stents, sensors, implants, Surgical Procedures: corneal sculpting

10 Every electronic consumer product touched by laser many dozens of times

11 ECE - Photonics Group Herman Group Mantra: We start with light and make light devices Peter Herman p.herman@utoronto.ca

12 Objectives in Herman Group focusing lens laser nonlinear absorption Harvest the precise strong nonlinear interactions of ultrashort laser pulses inside optically transparent materials glass Balance heat accumulation benefits (i.e. annealing) in burst trains without degrading strong localized interaction Control surface morphology, vias, texture, scribing, refractive index modification Exploit 2.5D and 3D patterning

13 Burst Resonator 26.2ns Burst: f=38.5mhz burst train 2ms f=500hz pulse mode 2ms Ti:Sapphire Laser + burst resonator λ=800nm f=500hz MHz t = 35 fs to 5 ps 13 - tailored burst train profile

Discovery of burst effect Fluence/pulse: 93J/cm

Fluence/pulse: 100J/cm 2 430 burst train x

benefits in rapid hole drilling crack free in

14 Discovery of burst effect Fluence/pulse: 93J/cm 2 τ=1ps 4 pulses x 1Hz fused silica Fluence/pulse: 100J/cm burst train x 133MHz High Repetition Rate Burst- Trains ~14µm benefits in rapid hole drilling crack free in brittle glasses/ceramics dicing wafers Herman et al., SPIE 3616 (1999) 14

45W Burst Picosec Laser: Lumera Hyper Rapid - 10ps, 50kHz - 1MHz - 1064/532/355nn Burst Femotosecond Laser 5D Microscopy System 1 khz laser-spitfire - 800nm, 3mJ, 1 khz - 40fs to 5 ps - Modified

15 45W Burst Picosec Laser: Lumera Hyper Rapid - 10ps, 50kHz - 1MHz /532/355nn Burst Femotosecond Laser 5D Microscopy System 1 khz laser-spitfire - 800nm, 3mJ, 1 khz - 40fs to 5 ps - Modified burst 37MHz Compact Imra Fiber Laser Spitfire Fiber-amplified MHz laser (Imra America ujewel) /522nm, 300fs, 2 W, MHz OPA Burst Resonator Aerotech XYZ Air-bearing Motion Stages (100nm) Peter Herman UofT Intelligent high resolution processing & diagnostic station

16 Today s Presentations Introduction and Projects - Peter Herman Diffractive Optics Mi Li Ng & Leon Yuang 3D Optical Circuits/Fiber Cladding Photonics Jason Grenier (Luis Fernades) 3D Microfluidics Peter for Stephen Ho Optofluidics/Lab on a Fibre Moez Haque Smart Catheters (Prof. Victor Yang, Ryerson Collaboration) Kenneth Lee & Kyle Cheng Brief Overview Other Projects Peter Vias/holes & Scribing (Samira Karimelahi; Ladan Abolghasemi) 5D Spectroscopy (Jianzhao Li) Texturing PV (Kitty Kumar)

Femtosecond Laser Burst Trains High Aspect Ratio Holes

200 150 100 50 0 E p =24µJ 5 pulses 4 pulses 3 pulses

8000 total number of pulses [1] p hole depth d [μm]

pulse 1 pulse 2 pulses 3 pulses 4 pulses p 100μm 5

number of pulses [1] http://photonics.light.utoronto.

17 Femtosecond Laser Burst Trains High Aspect Ratio Holes in Fused Silica hole depth d [μm] E p =24µJ 5 pulses 4 pulses 3 pulses 2 pulses 1 pulse total number of pulses [1] p hole depth d [μm] pulses 4 pulses 3 pulses 2 pulses 1 pulse 1 pulse 2 pulses 3 pulses 4 pulses p 100μm 5 pulses 100μm total number of pulses [1] tonics.light.utoronto.ca/la Peter Herman UofT 17

18 Time-Resolved Imaging Trigger counting box f=500hz f=500hz bursts DDG Spitfire shutter 10x ICCD Burst Resonator sample shortpass filter λ=750nm 18

filament tracks - heat accumulation effects - photoluminescence - ablation plume in channels

19 Burst Train Femtosecond Laser High aspect ratio holes in transparent glasses Imaging with ICCD; time slices: Δt=2ns Temporally resolved images physical insights - laser-generated filament tracks - heat accumulation effects - photoluminescence - ablation plume in channels and open air - laser-plume interactions - recast depth d BK7 # x_3p_200ms_q.jpg 50µm 19

20 Video: 50 th burst train 50 th pulse x 1 pulse 50 th burst x 4 pulses Heat accumulation domain 20

Fiber Fused Silica Fiber through holes Jacket not removed

21 Burst Train Short-Pulsed Laser Applications In glasses: Biomedical and Sensing, Display Glass Vias in SMF-28 Optical Fiber Fused Silica Fiber through holes Jacket not removed Benefits for high aspect ratio holes in ceramics, metals, most materials

22 Femtosecond versus 10 picosecond pulse duration Key factors in material processing: Quality Processing speed fs lasers: Higher quality, sub-sub micron heat affected zones (HAZ) ps lasers: More reliable High power at high repetition rate Higher processing speed

23 High speed picosecond laser drilling of high aspect ratio holes in glass Extend benefits to higher power picosecond lasers? 50 W 100s khz 12 ps 1064 nm, 532 nm, 355 nm Samira Karimelahi Ladan Abolghasemi

24 Dynamic hole drilling IR Green μm HF Etched ( 90 min) 250 μm

25 Static front surface Hole depth versus focal position

26 Hole Drilling Processing Speed Contrast of dynamic up and static front surface

27 Picosecond laser hole drilling: stainless steel Static Various methods percussion trepanning Minimum tapering Challenges: - Smooth walls - Minimum HAZ formation Cold ablation regime

28 FiLaser Filament Scribing 0.5 m/s laser scribing Self-separation Works in tempered glasses

29 Femtosecond Laser Catapulting

30 3D Optical Circuits internal refractive index modification Benefits? Burst Train or High Repetition Rate femtosecond lasers

$Refractive Index$ Changes glass Thermal

31 focusing lens fs- laser writing of buried waveguides laser nonlinear absorption Pos/Neg Refractive Index Changes glass Thermal Diffusion Heat Accumulation Travel Travel Under right laser exposure - Buried waveguides

32 Optimize laser processing window for Low loss smooth waveguides Symmetric mode profile Mode matched to single-mode fiber Curved Waveguide Losses Modulation Bragg Waveguide Gratings (BGW)

33 Waveguide Characterization Fiber Pigtailing & Free-space Launch Index oil 33

34 BGWs Single pulse voxel writing Low rep-rate system (1kHz) Λ μ μ Laser d Laser rep-rate Eagle 2000 Glass Scan speed Waveguide Sample direction

-18 B BGW arrays -20-22 Y Axis Title -24-26

Axis Title B -6-8 Y Axis Title -10-12 -14-16

35 -18 B BGW arrays Y Axis Title X Axis Title B -6-8 Y Axis Title X Axis Title

36 fs-laser writing of Polarization Devices - Fused Silica Directional Couplers, MZ Interferometer, Interleaver Harness Birefringence in fused silica nanogratings Flat-top Interleaver: Matrix Transform Modelling Polarization beam splitter: fused silica Waveguide Waveplates: λ/4 & λ/2 polarizers

37 Laser Fabrication: Micro-Channel and Waveguide Waveguide fabrication Parallel polarization produces nanogratings perpendicular to the scanning direction Hinders etching January 24 th D Microsystems

38 Laser Fabrication: Micro-Channel and Waveguides Multi-scan for defining micro-channel with a capillary array Perpendicular polarization produces nanogratings parallel to the scanning direction Facilitates etching Provides smooth side walls January 24 th D Microsystems

39 Wet Etching: Smooth Side Walls with Waveguide Wet Etching with 5% HF January 24 th D Microsystems

µm 3 µm 3 µm d L = 2 µm 2 µm 4 µm 8 µm 2 µm 2 µm 40 January 24 th 2012

40 MICRO-FLUIDIC CHANNELS fs-laser Modfification + KOH etching MICRO-CHANNELS INVERTED-WOODPILE STRUCTURE d L dd L d L d T = 2 µm 3 µm 3 µm 3 µm d L = 2 µm 2 µm 4 µm 8 µm 2 µm 2 µm 40 January 24 th 2012 d t 3D Microsystems nj/pulse 125 nj/pulse d t [S. Ho et al., APA 2011]

$07 db/surface Diffraction + Fresnel Loss: 1.86 db January 24 th 2012 Micro-Channel http://photonics.light.utoronto.ca/laserphotonics 3D Microsystems 8251-13 Peter Herman UofT 41 [S. Ho et al.$

41 Smooth-Walled Channel with Integrated Waveguides Water Waveguide 10 μm Smooth and straight channel side wall Wavelength: 633 nm Propagation Loss: 1.1 db/cm Insertion Loss: 2 db Scattering Loss: 0.07 db/surface Diffraction + Fresnel Loss: 1.86 db January 24 th 2012 Micro-Channel 3D Microsystems Peter Herman UofT 41 [S. Ho et al., APA 2011]

42 Cytometer Device (Particle Counting) January 24 th D Microsystems Peter Herman UofT

43 Cytometer Device: Schematic 43 January 24 th D Microsystems

44 Cytometer Device: Sample Reservoir 100 µm 100 µm Glass Cubes 44 January 24 th D Microsystems

45 Cytometer Device: Taper and Calibrated Waste Reservoir 100 µm 45 Tapered transversely at 45 and sloped vertically for continuous filling 45 January 24 th D Microsystems

46 Cytometer Device: Results Beginning Bead Size: 6 8 µm diameter Total Volume: µl Theoretical Bead Count: 604 Experimentally Bead Count: 599 Error: LESS THAN 1% End 46 January 24 th D Microsystems

47 Multi-Level Microfluidic Device January 24 th D Microsystems Peter Herman UofT

49 µ-fluidic Device: Schematic Curved Micro-Channels Reservoirs January 24 th D Microsystems

50 µ-fluidic Device: Schematic Set of Bottom Micro-Channels (~140 μm deep) Set of Top Micro- Channels (~70 μm deep) January 24 th D Microsystems

51 µ-fluidic Device: Microscopic Image 50 µm 40 µm Micro-Channels Focused at: Top Bottom Surface Channels 100 μm Set of Top Micro- Channels (~70 μm deep) Set of Bottom Micro-Channels (~140 μm deep) January 24 th D Microsystems

52 µ-fluidic Device: Plug Formation Same Direction: 136 V/cm Opposite Direction: 97 V/cm January 24 th D Microsystems

53 Chromatography Device January 24 th D Microsystems Peter Herman UofT

54 Chromatography Device: Microscope Top View Reservoir Micro-Channels TOP VIEW CROSS SECTION Integrated Micro-Structure January 24 th D Microsystems

55 Migrate Laser Recipes for Optofluidics to Optical Fiber Cladding Packaging Advantage Telecom Sensing Lab-on-a-Fiber Smart Medical Catheters

56 Direct Laser Writing in Fiber Cladding Suspended Fiber (Corning SMF-28) 1.25 NA Oil Immersion Objective 5 cm Clamp Suspended Fiber Aerotech Stage Oil Between Adjustable Lens and Clamp Fiber 56

60 Summary : Optofluidics in Fiber Channel Fabrication in Fiber Cladding and Core Perpendicular Microfluidic Channels in Fiber Microfluidic Channel Losses Fluorescence Detection Parallel Microfluidic Channels in Fiber Channel Jan 23, Paper Photonics West

August 22, 2012 Prepared by Kenneth Lee & Kyle Cheng PhD

61 Polypyrrole Artificial Muscle Actuated Smart Catheter with Optical Real-time Position Feedback ELCAN Company Visit August 22, 2012 Prepared by Kenneth Lee & Kyle Cheng PhD Candidates

62 Smart Catheters and Target Application Smart Uses include drug delivery, angioplasty, and brain aneurysm coiling [1] Y.Haga and M.Esashi, Trans. IEE of Japan, 120-E (11), p.509 [2] (2000) Y.Muyari, et al., Proc. of 20 th Sensor Symposium on 62 Sensors, Micromachines, and Applied Systems, p.57 (2003) Peter Herman UofT

63 Polypyrrole Microactuator Conductive polymer expands or shrinks via ion transfer with an electrolyte reservoir upon an applied electric potential T. Shoa, et al., Proc. of IEMBS, p.2063 (2008) 63

Micron-size resolution with minimal collateral damage Highly

64 Surface Engineering using a Ultrafast Laser 80 s August 22, 2012 Ultrafast Laser advantages Template not required Non-contact Micron-size resolution with minimal collateral damage Highly flexible Rapid prototyping capability Design parameters Diameter Depth Shape Pattern 64

65 Finding Laser Processing Window August 22,

66 Optical Fiber Strain Gauge λ1 λ2 August 22,

67 Bragg Grating Sensors I λ August 22,

68 Coreless Fiber Waveguide Writing 25cm waveguide written in coreless fiber spliced between SMF ~3dB loss August 22, 2012

69 Goal In-vivo Rabbit Catheterization August 22,

SUMMARY Femtosecond laser writing and processing of Photonic Devices Strong femtosecond laser interactions + selective benefits of HEAT ACCUMULATION EFFECT Large recipe book for via drilling,

70 SUMMARY Femtosecond laser writing and processing of Photonic Devices Strong femtosecond laser interactions + selective benefits of HEAT ACCUMULATION EFFECT Large recipe book for via drilling, texturing, scribing, waveguides and optofluidic devices in fused silica, glasses, and transparent materials 3D Optical Circuits: Gratings, Directional couplers, Interferometers Compact functional 3D optical circuits with controlled spectral responses 3D microfluidics: HF or KOH etched nanogratings Optofluidics Microsystems: Optical sensing, chromatography, electrophoresis Extension to Fiber Cladding Optofluidics: Lab-on-a-fiber, smart medical catheters

71 Acknowledgement

Ultrashort Laser Interactions in Fabrication of Optofluidic MicroSystems. Jianzhao Li

Ultrashort Laser Interactions in Fabrication of Optofluidic MicroSystems. Jianzhao Li Peter R. Herman Dept. of Electrical and Computer Engineering, Institute for Optical Sciences University of Toronto http://photonics.light.utoronto.ca/laserphotonics/ ECE 1473 Advance Laser Processing Ultrashort