Agenda. Exyte Engineering & Construction of Technology Facilities Exyte Technology Cleanroom Technologies & Controlled Environments

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Spencer McLaughlin
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1 Exyte Technology

2 Agenda Exyte Engineering & Construction of Technology Facilities Exyte Technology Cleanroom Technologies & Controlled Environments Products and Solutions Cleanroom Products Air Handling Units Critical Subsystems Trace Analysis Customers and References Exyte Technology GmbH September

At a Glance Focused Strategy on High-Tech Facilities History of 100+ years Special expertise in controlled and

and design to managing turnkey solutions Exyte is a global leader in the design, engineering and construction of

support clients locally and globally Sales in excess of 2.

Semiconductor Flat Panel Display Photovoltaics Batteries Life Sciences & Chemicals (LSC) Pharmaceuticals &

3 At a Glance Focused Strategy on High-Tech Facilities History of 100+ years Special expertise in controlled and regulated environments Serving the most technically demanding clients Full spectrum of services from consulting and design to managing turnkey solutions Exyte is a global leader in the design, engineering and construction of high-tech facilities, plants and factories Client centric operation in in 20+ countries Uniquely positioned to support clients locally and globally Sales in excess of 2.4bn (2017) 4,800+ employees (2017) - highly experienced and motivated Advanced Technology Facilities (ATF) Semiconductor Flat Panel Display Photovoltaics Batteries Life Sciences & Chemicals (LSC) Pharmaceuticals & Biotechnology Food & Nutrition Consumer Care Specialty Chemicals Data Center (DTC) Cloud Computing Enterprise Co-Location High Performance Computing Exyte Technology GmbH September

Strategic Business Segments Serving the World s Most

Facilities Life Sciences & Chemicals Data Centers

Computing Sub- Segments Flat Panel Display Photovoltaics

Batteries Specialty Chemicals High Performance Computing

SolarCity Global Foundries Major cloud providers In

conducts certain other business activities outside its

4 Strategic Business Segments Serving the World s Most Technically Demanding Clients Advanced Technology Facilities Life Sciences & Chemicals Data Centers Semiconductor Pharmaceuticals & Biotechnology Cloud Computing Sub- Segments Flat Panel Display Photovoltaics Food & Nutrition Consumer Care Enterprise Co-Location Batteries Specialty Chemicals High Performance Computing Example northv olt Key clients (selection) Micron SolarCity Global Foundries Major cloud providers In addition to the three Global Business Units, Exyte conducts certain other business activities outside its main focus, which is summarized as Regional Specific Businesses ( RSB ). These businesses primarily include the solar business of M+W Energy and HVAC systems business of M+W Hargreaves. Exyte Technology GmbH September

5 Leader for Controlled & Regulated Environments Cleanroom Pioneer Creating Ultra-Pure Atmospheres 50+ years experience in ultra / clean air and ultra pure atmospheres ensures that today s and tomorrow s manufacturing processes are safe, clean, productive, cost effective and environmentally friendly Our Capabilities Parameters Cleanrooms Controlled environments Critical subsystems Installation & CQV services Approval documentation Advanced Technology Facilities Life Sciences and Chemicals Exyte Technology GmbH September

6 Global Footprint Ability to Follow Our Clients into All Relevant High-Tech Markets Pharma Fab Ireland Data Center Germany Semiconductor Fab USA Biotech R&D Campus China Solar Park USA Display Fab Taiwan ~1,300 AMER ~1,300 EMEA ~1,900 APAC Pharma Facility Switzerland ~300 PROD and Corporate Number of employees (FTE as per 31-Dec-2017) Semiconductor Fab Singapore Exyte Technology GmbH September

7 Our Safety Commitment Committed to an Incident Free Workplace Exyte Technology GmbH September

8 Welcome to Exyte Technology Cleanroom Technologies & Controlled Environments

9 Vision & Mission Vision Exyte Cleanroom Technologies and Controlled Environments will be the solutions of choice for high tech clean manufacturing facilities around the world. Mission We will live our philosophy of making customer s ideas and production demands the focus of our daily work. We combine experience and know-how with entrepreneurial thinking to engineer and manufacture high quality high performance and compliant products and solutions. Exceptional customer focus will ensure reliable, clean, cost effective and safe equipment which protects people and processes as well as being environmentally considerate exceed our customers expectations. Exyte Technology GmbH September

Our Value Proposition Extraordinary engineering expertise in ultra/clean air and ultra-pure atmospheres ensures that today and tomorrow s manufacturing processes are safe,

10 Our Value Proposition Extraordinary engineering expertise in ultra/clean air and ultra-pure atmospheres ensures that today and tomorrow s manufacturing processes are safe, clean, productive, cost effective and environmentally friendly. 50+ Years in Cleanroom Technology 100+ Years of Experience 300+ Trained People Exyte Technology GmbH September

More than just Products Trace Analysis Customer Process Engineering & Product Solutions Manufacturing Customer demands for highly reliable systems are more than satisfied by our comprehensive and

11 More than just Products Trace Analysis Customer Process Engineering & Product Solutions Manufacturing Customer demands for highly reliable systems are more than satisfied by our comprehensive and worldwide after sales service. This is based on our experienced and highly qualified specialists in the areas of service, product management and development. Worldwide After Sales Support Installation & Commissioning Exyte Technology GmbH September

12 Our Locations, Manufacturing and R&D Stuttgart (DE) 14,000 sqm Manufacturing 2,000 sqm Cleanroom Class 7 1,000 sqm Cleanroom Class sqm Cleanroom Class 1-3 1,000 sqm Technology Center & Trace Analysis Shanghai (CN) 9,000 sqm Manufacturing 1,000 sqm Cleanroom Class sqm Cleanroom Class sqm Technology Center Teplice (CZ) 7,500 sqm Manufacturing Exyte Technology GmbH September

Unique Engineering Solutions Decimeter Centimeter Soccer ball (ca.

8 billion nanometer 10-1 10-2 10-3 Millimeter (part in a thousand) 10-4

60-80 µm) ẸXYTE TECHNOLOGY SOLUTIONS 10-5 Dust particle (ca.

and a soccer ball is similar between a soccer ball to a nanoparticle.

13 Unique Engineering Solutions Decimeter Centimeter Soccer ball (ca.21 cm) Person with 1.80 m is measured 1.8 billion nanometer Millimeter (part in a thousand) 10-4 Dust mite (ca. 300 µm) Human hair (ca µm) ẸXYTE TECHNOLOGY SOLUTIONS 10-5 Dust particle (ca. 5 µm) 10-6 Micrometer (part in a million) 10-7 The ratio between the earth and a soccer ball is similar between a soccer ball to a nanoparticle /14 nm technology node (structure size) DNA string (ca. 2 nm) Single atom (ca nm) Nanometer (part in a billion) Exyte Technology GmbH September

Technologies Applied Physical Parameters Our Capabilities ± 0.1 ± 0.1 ± 0.01 ± 0.001 ± 20 ± 5 ± 1 ± 0.1 ± 20-30 -40-50 ± 0.5 ± 0.05 ± 0.005 ± 0.0005 ± 10 ± 5 ± 1 ± 0.

14 Technologies Applied Physical Parameters Our Capabilities ± 0.1 ± 0.1 ± 0.01 ± ± 20 ± 5 ± 1 ± 0.1 ± ± 0.5 ± 0.05 ± ± ± 10 ± 5 ± 1 ± Air Temperature Control Kelvin Humidity Control % r.h. Humidity Control/Reduction C (Dew Point) Water Temperature Control Kelvin Differential Pressure Control Pascal Magnetic Fields nt (control active/passive) Noise Insulation db (ambient/process) Exyte Technology GmbH September

Technologies Applied Other Parameters Our Capabilities 7 (10,000) 5 (100) 3 (1) 1 (0.01) D C B A 10 2 0.5 0.1 100 20 5 1.

15 Technologies Applied Other Parameters Our Capabilities 7 (10,000) 5 (100) 3 (1) 1 (0.01) D C B A Air Quality (Particles) ISO (FED STD) Air Quality (Bacteria) GMP AMC (Acids, Bases, Dopants) ppb VOC (Condensables) ng Exyte Technology GmbH September

16 Products & Solutions More than half of the world s advanced technologies cleanrooms benefits from environments created by Exyte Technology.

17 Cleanroom Technologies & Controlled Environments Cleanroom Products Air Handling Units Critical Subsystems Trace Analysis Our Markets Semiconductor Flat Panel Displays Pharmaceutical & Health Consumer Care Photovoltaic Batteries Food & Nutrition Chemicals Advanced Technology Facilities Life Sciences & Chemicals Exyte Technology GmbH September

The Atmosphere of Trust for ATF Advanced Technology Facilities Critical Subsystems Stable Temperature Control Ultra-Pure Water Supply Acoustic Enclosures Cooling Water Cabinets Cleanroom Products Air

18 The Atmosphere of Trust for ATF Advanced Technology Facilities Critical Subsystems Stable Temperature Control Ultra-Pure Water Supply Acoustic Enclosures Cooling Water Cabinets Cleanroom Products Air Showers Cleanroom Lighting Control Systems Partition Walls / Mobile Trolleys Filter Fan Unit AMC Filter Ceiling Grid Systems Raised Floors Air Handling Units Modular Environmental Control Chambers Precision Climate Systems Exyte Technology GmbH September

The Atmosphere of Trust for Life Science Industries Air Handling Units Make-up Air Exhaust Supply & Return Clean Work Areas Mobile Trolleys Modular Cabins Laminar

19 The Atmosphere of Trust for Life Science Industries Air Handling Units Make-up Air Exhaust Supply & Return Clean Work Areas Mobile Trolleys Modular Cabins Laminar Air Flow Units Control Systems Lighting Filter Fan Units AMC Filter PIFF Wall Systems Air Shower Systems Ceiling Grid Systems Exyte Technology GmbH September

20 Cleanroom Technologies & Controlled Environments Cleanroom Air Handling Units Critical Subsystems Trace Analysis Products Exyte Technology GmbH September

21 Cleanroom Products Air Shower Systems Rotation Air Showers Single use Tunnel Air Showers High personnel traffic Rotation Air Shower Modular Systems Customized Solutions: material locks, hatches and conveying systems High cleaning effect Automatic functioning Tunnel Air Shower Exyte Technology GmbH September

Cleanroom Products Filter Fan Units (FFU)

and development of customized FFU designs

Fan (PIFF), FFU SILENT, FFU ECO, FFU LIGHT,

INDIVIDUAL INDIVIDUAL Air-filtration with

22 Cleanroom Products Filter Fan Units (FFU) SILENT ECO 2 LIGHT Standard Filter Fan Units and development of customized FFU designs COMPACT PIFF CWIC Plenum Integrated Filter Fan (PIFF), FFU SILENT, FFU ECO, FFU LIGHT, FFU COMPACT, FFU Return Air RETURN AIR INDIVIDUAL INDIVIDUAL Air-filtration with HEPA/ULPA filter, pre-filter, and AMC-filter More than 50 years of experience FFU s standard and special Exyte Technology GmbH September

Cleanroom Products Control Systems Up to

Regulated systems (air velocity, pressure)

(LON, Exyte Bus, Modbus/0-20V) Low overheads

23 Cleanroom Products Control Systems Up to 25,000 FFU s / system Automatic installation Regulated systems (air velocity, pressure) CSD: Ultra Display CSD: Control Terminal FMCS / BMS connection via OPC Redundancy distributed systems Field Bus technology (LON, Exyte Bus, Modbus/0-20V) Low overheads Low investment needs CRiS xt Exyte Technology GmbH September

24 Cleanroom Products AMC Chemical Filter Makeup/Return Air Filter Tool & Process Protection Filters Compact Carbon Filter Ion-Exchange Filter Carbon Cartridge System Very high capacity Long useful lifetime Very high removal efficiencies Excellent process protection Very low pressure drop Low energy consumption Ion-Exchange Filter Impregnated CarbonFilter Combination Filter Exyte Technology GmbH September

Grid Ceiling Sprinkler Line Ceiling Grid

For electronic applications with a groove on

For pharmaceutical applications, powdercoated

25 Cleanroom Products Ceiling Grid Systems Walkable and non-walkable Heavy-duty ceiling (Transport systems) Ceiling systems for underpressure in the plenum Cassette Ceiling Grid Ceiling Sprinkler Line Ceiling Grid Ceiling systems for overpressure in the plenum For electronic applications with a groove on the bottom for installation of other components For pharmaceutical applications, powdercoated with closed profile to the cleanroom Exyte Technology GmbH September

26 Cleanroom Products Wall Systems Cleanroom walls including: Air Return Extensive, double glazing Pass Through Box Opening Conveyor Belt Opening for conveyor belts Integrated Doors Plenum Pass Through Boxes Air Returning Glazing Exyte Technology GmbH September

technology Suitable for all standards with

Applications with switchable light color

27 Cleanroom Products Lighting Recessed Luminaire Strip Light Standard and LED technology Suitable for all standards with crtification according to national law (UL, CCC, etc.) Yellow light for UV-Sensitive Applications with switchable light color (yellow / white) Customized solutions: Dimensions, connections, special requirements & emergency lighting Teardrop Luminaire Emergency Light Exyte Technology GmbH September

28 Cleanroom Products Raised Floor Systems Raised Flooring Systems for electronics and semiconductor industry Solid Slab Grid Slab Heights up to 2,500 mm Pointload up to 2.5 t Surface load up to 6.0 t Individual Solutions Possibilities of diverse coatings Ventilation Flap Perforated Slab Exyte Technology GmbH September

curtain systems Solutions with integrated

29 Cleanroom Products Clean Work Areas Modular Cleanrooms Room-in-Room Systems Stationary or mobile, open or closed systems Cleanroom Cabin Mobile Cleanroom Unit Cleanroom classes 1.0 to 8.0 (DIN EN ISO ) Different wall and curtain systems Solutions with integrated makeup air and exhaust air supply, cooling systems and control engineering Room-in-Room-System Biotec Cabin Exyte Technology GmbH September

30 Cleanroom Technologies & Controlled Environments Cleanroom Products Air Handling Critical Subsystems Trace Analysis Units Exyte Technology GmbH September

Air Handling Units Pharmaceutical AHU Test

Conditioning of outdoor air Conditioning of

of gaseous contaminations Thermic treatment

31 Air Handling Units Pharmaceutical AHU Test AHU Recirculation AHU Make-Up AHU Conditioning of outdoor air Conditioning of supply and recirculation air Exhaust air treatment AMC compatible Design GMP compliant Air volume conveyance from to m 3 /h Particle filtration Filtration of gaseous contaminations Thermic treatment of the air: Humidification & Dehumidification Heating & Cooling Exyte Technology GmbH September

32 Cleanroom Technologies & Controlled Environments Cleanroom Products Air Handling Units Critical Trace Analysis Subsystems Exyte Technology GmbH September

33 Controlled Environments Critical Subsystems Stand-Alone Systems Air Temperature Control Cabinets Air-Temperature-Control Precision Climate Systems Precision Climate Systems Ultra-Pure Water Conditioning Ultra-Pure Cooling Water Cabinets UPW Conditioning UPW Cabinets Exyte Technology GmbH September

Controlled Environments Critical Subsystems Modular

Clean Air Supply ISO 1 Environmental Chamber

(Depending on frequency) EMI Dampening > 20 db

34 Controlled Environments Critical Subsystems Modular Environmental Chambers In variable combinations for: Clean Air Supply ISO 1 Environmental Chamber Environmental chamber Temperature Stability ± 2 mk (With recycled air) Humidity Control ± 0.3 % rh (With recycled air) Acoustic Dampening 20 db (Depending on frequency) EMI Dampening > 20 db (Depending on frequency) Environmental Chamber Environmental chamber Exyte Technology GmbH September

35 Controlled Environments Critical Subsystems Customized Solutions Air Supplies on top of tool Tool Integrated Air Supply Temperature & Sumidity Controlled Air Supplies Tool-Integrated Air Supply Inert Gas Chambers Ultra-Pure Water Conductivity Control Inert Gas Chamber Individual Conductivity Control Exyte Technology GmbH September

36 Cleanroom Technologies & Controlled Environments Cleanroom Products Air Handling Units Critical Subsystems Trace Analysis Exyte Technology GmbH September

Technology Center & Trace Analysis Development & Engineering Trace Analysis

Studies - Conceptual Designs - Cost of Ownership Investigations - Risk

Measurements - AMC Measurements - Outgassing Tests - Leachout Tests -

Qualification Measurements - Benchmark Tests - Cleanroom ISO Classes 1-7 -

37 Technology Center & Trace Analysis Development & Engineering Trace Analysis Approval & Qualification Test Facilities and Environments - Feasibility Studies - Conceptual Designs - Cost of Ownership Investigations - Risk Assessments - System Integration On-Site - Ultra Trace Analysis - UPW Measurements - AMC Measurements - Outgassing Tests - Leachout Tests - Contamination Control - Product Certification - System Optimization - Qualification Measurements - Benchmark Tests - Cleanroom ISO Classes Filter Test Rigs - Echoic Chamber - Air Handling Units - UPW Facilitiy Exyte Technology GmbH September

38 Trace Analysis Particle detection in air and liquids Ultra - trace analysis in ppb to sub - ppt range Filter development and measurement Analytical investigations for contamination control Clean environments with focus on semiconductor industry Exyte Technology GmbH September

39 References

40 Selection of our Customers Exyte Technology GmbH September

41 Thank you for your attention!

Contact Exyte Technology GmbH Lotterbergstraße 30 70499 Stuttgart Germany Phone:

42 Contact Exyte Technology GmbH Lotterbergstraße Stuttgart Germany Phone: M+W Products (Shanghai) Co., Ltd. A Company of the M+W Group No. 139 Beimin Road, Che dun, Songjiang Area Shanghai, , P.R. China Phone Fax

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