SIPI SCME Engineering Program and Pressure Sensor Workshops for Tribal Colleges August 9 13, 2010 Southwestern Indian Polytechnic Institute

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1 SIPI SCME Engineering Program and Pressure Sensor Workshops for Tribal Colleges August 9 13, 2010 Southwestern Indian Polytechnic Institute University of New Mexico MTTC- Manufacturing Training and Technology Center Participant Preparation: - Participants need to read safety material and review the pre-assessment quiz as required in the - Students will receive access to all educational materials. Participant Materials (SCME Provided) - Silicon Nitride Coated Wafers for Pressure Sensor - Participants will have an opportunity to select kits to be shipped to them Participants are encouraged to bring their own laptops and cameras. Discussion Led Format for presentations Ask questions! SIPI Workshop Monday 8:00 Hotel Pick up Dr. Pleil will pick up from the Days Inn and Suites Airport Albuquerque at between 8:00am Arrive at SIPI ~8:30am 8:30-9:00 Welcome and Introductions Pleil and Vadiee Agenda Review for the week - Pleil 9:00-9:15 Welcome from SIPI President, Dr. Allison 9:15 9:45 Overview of SIPI Nader Vadiee 9:45-10:45 Engineering Programs Recruitment and Placement Challenges 10:45-11:00 Break 11:00-12:00 Retention, Graduation, and Transfers 12:00-14:00 Lunch and Networking Dr. Pleil will drive participants to a local eatery to be decided by participants 14:00-15:00 Partnerships and Funding Sources - Vadiee 15:00-16:00 Tour of SIPI Facilities - Vadiee 16:00-16:30

2 Pressure Sensor Workshop UNM / MTTC Day One - Tuesday 8:00-8:30 Welcome and Introductions Pleil, Madsen, F. Lopez Overview of Activities and Expectations - Pleil o Anna s Paper Work o Pre workshop survey Computer Lab o Agenda Review for the Week Computer Lab 8:30-11:30 Learning Module Overview Online Computer Lab MEMS DVD/ Discussion - Classroom o Or Remidial Safety for those who didn t complete online training in the Computer Lab Homework: DVD Activities 11:30 12:30 Lunch at the MTTC Tango Cafe 12:30-14:30 Process Flow Chart and Flash Movie PS Process Story Board 14:30-16:00 Safety Review and Cleanroom Tour - Madsen 16:00-16:10 Break 16:10-17:00 Written Safety Test Classroom Madsen/Pleil 17:00

3 Description Pressure Sensor Cleanroom Activity 1 Gowning Procedure Wafer Handling Backside Pattern four wafers Coat, Expose, Develop, two for each group Inspect staged wafer RIE Nitride Plasma Etch two wafers staged, one for each group Inspect - Nitride Etched staged wafer Resist Strip two wafers staged, one for each group Inspect staged Nitride Etched resist stripped wafer Day Two - Wednesday 8:00 11:45pm Group A Cleanroom Pressure Sensor Activity 1 Group B Classroom o Review DVD activities o MEMS DVD Assessment / Discussion o Pressure Sensor Model Kit 11:45 12:45 pm Lunch 12:45 16:30 Group A Classroom o Review DVD activities o MEMS DVD Assessment / Discussion o Pressure Sensor Model Kit Group B Cleanroom Pressure Sensor Activity 1 16:30-17:00

4 Description Pressure Sensor Cleanroom Activity 2 Frontside Pattern Liftoff four wafers Coat, Expose, Develop, two for each group Inspect staged wafer post front side pattern Metal Deposition Demo one wafer staged in the chamber with gold or actual run of 5 wafers Inspect post gold deposition wafer Lift off Demo (2 wafers, 1 for each group), optional Inspect post liftoff staged Day Three Thursday 8:00 11:45 Group A Cleanroom Pressure Sensor Activity 2 Group B Classroom o Crystallography Kit Breaking Wafers & Origami o Rainbow Wafer Kit 11:45 12:45 Lunch 12:45 16:15 Group A Cleanroom Pressure Sensor Activity 2 Group B Classroom o Crystallography Kit Breaking Wafers & Origami o Rainbow Wafer Kit Session on MEMS Innovator Kit Overview Optional Return to Hotel

5 Description Pressure Sensor Anisotropic Etch and Probe Activity 3 Demo backside etch in KOH one wafer Inspect - completed wafer staged Probe Wafer completed wafer stage Day Four Friday 8:00 11:45 Crystallography Assessment Lift-off Kit Micromachining PPT / Crossword 11:45 12:45 Lunch 12:45 14:15 All Cleanroom and Probe Station Pressure Sensor Activity 3 o We will split into two groups 14:15-14:30 Break 14:30-17:00 Pressure Sensor Process Kit WB Assessment (Survey) Wrap up