PROBE CARD METROLOGY
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1 PROBE CARD METROLOGY HIGH TEMPERATURE TESTING OF PROBE CARDS Rod Schwartz VP & Technical Director Integrated Technology Corporation Dan Kosecki VP Software Development Integrated Technology Corporation
2 Purpose To show the effects of temperature on probe card parameters To prove the usefulness of high temperature probe card metrology To highlight some differences in probe card technology & construction
3 Equipment & Samples Probilt PB3500 Probe Card Analyzer with Hot Chuck Option Epoxy Ring Cards 3 Identical Cards J971 Type Designed for High Temperature Form Factor Card Logic Array Membrane Card Logic Array
4 Hot Chuck Block Diagram HPCDA Supply Computer Interface Air Filter & Heater Hot Chuck System Controller Heated Air Control Heated Air Flow Probe Card Hot Chuck
5 Hot Chuck System Controller
6 Heated Measurement Chuck
7 Heated Air Top-Hat
8 Bottom of Top-Hat
9 Top-Hat & Adapter
10 Hot Chuck Specifications Control Point Minimum Temp. Maximum Temp. Control Stability Heated Chuck Room 125 C +/- 1.0 C Heated Air Stream Room 125 C +/- 1.0 C
11 Metrology Environment Heated Air Flow Pogo Pins Pogo Pins Retainer Planarity Adjustors Camera & Optics Heated Chuck Heater Strips & Thermal Barrier X,Y,Z Stage Subchuck
12 Providing Leading Edge Technology to Meet Your Future Requirements Today Probe Card Construction PCB PCB Aperture Ring Aperture Ring Epoxy Probe Probe Tip Depth PC Botto Surfa Probe Details Ring Highest Probe Lowest Probe Probe Wire Diameter Epoxy Planarity Tip Length Epoxy Clearance Tip Diameter Tip Shape Flat E-tip (Radiused) Figure 3: PCB and Epoxy Ring Assembly
13 Probe Ring
14 Large Ceramic Probe Ring
15 Large Array on Probe Card
16 Cross Section View CHUCK TEMP. 25 C 25 C 60 C 120 C 80 C 10 mils 1000 mils 1004 mils
17 Pitch Change with Temp CHUCK TEMP 25 C 120 C 70 u 80 u
18 Alignment Shifts (3 Cards) Averages of 6 groups of 5 probes 3 groups each side, evenly spaced Boxes represent +/- 5 microns movement Lines represent direction and magnitude of movement (25 C C to 125 C) The + is 25 C C location #11-Red, #12-Blue, #14-Green Repeatability of multiple runs affected by stabilization time
19 Epoxy Ring Probe Card
20 Epoxy Card Array X,Y Pad Coordinates Y (microns) X (microns)
21 Alignment Shift (Epoxy Card) *Box = +/- 10u *The + in center of box is 25 C location *Each line is 5 probe average *Card 11 Red *Card 12 Blue *Card 13 Green *Length of line represents the shift in position from 25 C to 125 C.
22 Other Shifts (Epoxy Card) Parameter Card 11 Card 12 Card 14 Z Shift -221 u -147 u -148 u Planar 55u (25) 58u (25) 30u (25) Window 50u (125) 54u (125) 33u (125) Leakage 6-10 ua 6-9 ua 6-10 ua Increase
23 Memory Card Probes at 25, 36, 70 & 90 C Probes Movement with Temperature 15 Yoffset (microns) Series1 Series2 Series3-10 Xoffset (microns)
24 Form Factor Micro Spring MLC Connections Space Transformer Micro-Spring Contact Paddle Truncated Pyramid Probe Tip
25 Form Factor Probe Card
26 Form Factor Array X,Y Pad Coordinates Y (microns) X (microns)
27 Alignment Shifts (FFI) *Box = +/- 10u *The + in center of box is 25 C location *Each line is a single probe *Length of line represents the shift in position from 25 C to 125 C.
28 Other Shifts (FFI) Parameter FFI Card Value Z Shift -160 microns Planar Window Leakage Increase 36 microns (25 C) 48 microns (125 C) 0.4 to 0.6 ua
29 Form Factor Results Fairly predictable results Larger shift than epoxy ring Not as consistent as expected Data on only one card should not be taken as representative of type
30 Membrane Probe Head Window (opt) Springs Probe Frame PCB Membrane Plunger Bumps
31 Membrane Array X,Y Pad Coordinates Y (microns) X (microns)
32 Alignment Shifts (Membrane) *Box = +/- 10u *The + in center of box is 25 C location *Each line is a single probe *Length of line represents the shift in position from 25 C to 100 C.
33 Other Shifts (Membrane) Parameter FFI Card Value Z Shift -145 microns Planar Window Leakage Increase 72 microns (25 C) 71 microns (100 C) Not Run
34 Membrane Results Mylar expands and probes move a lot Very well behaved predictable results More temperature sensitive than other technologies Requires card to be designed for temperature of use
35 Cobra Probe Card
36 Cobra Head Cross Section Metalization Space Transformer Upper Die Mylar Lower Die "Cobra" Probe Needle
37 Cobra Considerations Lower die is close to wafer Heats up considerably Test time vs. Index Time changes heating Mylar insulator may move Probe stresses
38 Conclusions Probe movement for most technologies with temperature is NOT predictable, but it IS repeatable Epoxy card construction techniques can make a significant difference in temperature performance FFI cards are more predictable than epoxy, but there are still variations
39 Conclusions (2) Membrane card is the most predictable Membrane card has largest shifts with temperature
40 Future Studies Other Probe Card Technologies Scrub Mark vs. Analyzer Data Probe Material Variations Card Construction Techniques Path of Probe Movement vs. Temperature Change Stabilization Times vs. Repeatability
41 Acknowledgements Bill Williams Motorola Thanks for supplying cards for this study. Russ Allred - ITC Data Collection Hoa Do Thai - ITC Data Collection
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