A Test-Setup for Probe-Card Characterization
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1 Contents A test-setup for probe card characterization under Background production-like / Motivation operating conditions Third level 16pt Fourth level 14pt Michael Horn, Stephan Fuchs» Fifth level 12pt Infineon Technologies - Munich / Germany Page 1 Presentation for SWTW 2004
2 Outline Background / Motivation Test Concept Requirements Test Setup Probe-Card Measurement Results Summary Page 2
3 Background strong need for probe card evaluation process for: new probing technologies ( pad arrangements, pitch, multi DUT) new products: (materials, BEOL-stack) short time-to-market prohibits iterative improvement process evaluation process needs to start earlier missing links in the evaluation process: reliable prediction of c res performance c res stability under manufacturing conditions Page 3
4 Probe-Card Evaluation - IDEAL flow New Wfr. Process or Product Requirements Test- Setup blank wfr (alu...) Probe-Card Tester Test Program Test-/Product Wfrs. Probe-Card Tester Test Program Product Wfrs. Probe-Card New Probing Requirements PC Characterization Early Life Qualification Production Evaluation Production Release Specification Qual d Technologies Preferred Vendors Contact Stability Cleaning Recipe PC Planarity Prober Alignment Measurement - Stability Scrub Analysis incoming QC Yield Stability Cleaning Freq. Handling Issues Page 4
5 Test Concept - Requirements test scenario as close as possible to real probing conditions force current through contacts probing parameter variation temperature overdrive chuck-speed high number of Touch-Downs different contact materials Evaluation should be possible w/o specific product or test-chip amount of test-chip and/or product wfrs limited product schedule can be shifted low cost & flexible setup use existing equipment & h/w (but no tester) flexible channel assignment (Vcc, GND) Page 5
6 Test Setup- Overview 1/2 Multimeter Pwr. Supply V Personal Computer Parallel Port GPIB Interface Board Pogo Tower Probe Card Prober Page 6
7 Test Setup- Overview 2/2 Interface Board Page 7
8 Test-Setup Main Features Wafer handling: (w/ Prober-Interface Docking Unit) TSK APM 90 (available prober) Nr. of measurement channels: 128 flexible channel assignment of probe contact to Vdd or Gnd via GUI Current per needle: Repeatability (σ): Data Output: 0,1-200 ma ca. 1,4 mω ASCII format Page 8 number channel X-coordinate Y-coordinate comment DAISYDAISYDAISYDAISYDAISYDAISYDAISY VCC / GND GND VCC GND VCC GND VCC GND touchdown X Y X_abs Y_abs Example Result File
9 .. A Test-Setup for Probe-Card Characterization Test Sequence 1/ Unactivated State Probe-Card Aging State Page 9 3. Measurement State
10 Test Sequence 2/2 Power Supply on off Chuck up down t Multimeter Needle# Page 10
11 Test Setup- User Interface 1/ Page 11
12 Test Setup- User Interface 2/2 Mapping of Pins to Vdd and Gnd Page 12
13 Page 13 A Test-Setup for Probe-Card Characterization Measurement Results 1/3 cres [Ohm] Comparison of c Res for different Probing Technologies (@100mA, 90 C) 6 5 Probe-Card A Probe-Card B Probe-Card C cres [Ohm] Nr. Touch-Downs
14 Measurement Results 2/ Page 14
15 Measurement Results 3/3 cres starts to increase Page 15
16 Summary test-setup can identify contact-resistance issues better than using a product (no interpretation of test-data required) test setup enables us to assess performance trend of Probe-Cards in an early project phase less resources required during evaluation phase (ATE resources and test code development resources) Page 16
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