EFFECTIVE HEAT SINKING AT LIGHT SOURCE

Transcription

1 EFFECTIVE HEAT SINKING AT LIGHT SOURCE Rackmount Chillers Stand Alone Chillers Mini Chillers Lasers Laboratory Medical and Biopharmaceutical Military and Defense Semiconductor THERMAL MANAGEMENT

2 Our cooling systems meet the cooling requirements of demanding applications Laser marking systems Laser sintering Medical and Biopharmaceutical Semiconductor industry Analytical instruments Datacom equipment Oncology machines Electron microscopes Military and Defense Printing Heat Sinking at the Light Source We offer the entire range of laser cooling solutions including a variety of heat sinks for actively and passively cooled light sources, the full range of recirculating chillers from 150 W to 90 kw as well as cabinet cooling for laser equipment. Effective heat sinking at the light source allows for higher light output, improves the ecological footprint as it reduces the chiller cooling demand and/or increases the lasers operational range without condensation to occur. For the most challenging actively cooled laser diodes AMS Technologies offers micro channel heat sinks for single or two phase fl ow heat transfer for up to 300 W per diode. For passively cooled light sources standard and customized peltier cooling solutions for single light sources as well as highly effi cient fl uid channel designs for whole arrays of laser diodes are available. 02 Recirculating Chillers thermoelectric and compressor based

3 Recirculating Chillers precise temperature control and high reliability AMS Technologies Thermal Management team focuses on electronics cooling, thermoelectrics and specialised cooling solutions. Exceptional know-how and leading-edge products from our principals are put to work for our customers as standard or custom solutions. Recirculating chillers are available with thermoelectric and compressor engines. Both types feature precise temperature control, quiet operation and high reliability. A variety of options can be provided for different fl uids, pumps, low temperatures below freezing, control and monitoring, additional heating and other aspects. Thermoelectric chillers are the ideal solution when excellent temperature stability is needed and/or cooling capacity needs vary from very few up to a few hundreds of Watts. Peltier technology is known to lend itself for most accurate temperature control, but also for its poor effi ciency when driven hard. AMS Technologies thermoelectric chillers utilize a voltage source control such that its peltier modules do not consume any energy when in idle mode and are still fairly effi cient when driven moderately. Very quiet and/or vibration free operation are optional features to be highlighted for laser applications. Compressor based chillers are available from 300 W to 20 kw of cooling capacity. They are designed to guarantee troublefree operation of laser equipment. A variety of monitoring and safety options, pump options, rackmount and standalone chassis models, typical temperature stability of +/-0.1 C, low noise and low vibration options and design for de-ionised water are some of the important features. Apart from the wide range of confi gurable chillers AMS Technologies also offers the design of customized OEM chillers to fi t special space constraints or other requirements. Recirculating Chillers thermoelectric and compressor based 03

4 AMS Technologies Recirculating Chillers thermoelectric and compressor based Thermoelectric based Recirculating Chillers Rackmount chillers Rackmount chillers are designed to resolve the problems caused to a fab by conventional Freon-based chillers: reliability, size, noise, fi rst wafer effect, consistent wafer-to-wafer and within-wafer temperature control and power consumption. After 13 years designing and manufacturing our thermoelectric technology-based temperature control products for wet benches and many applications beyond the semiconductor industry, we created the ThermoRack 1200 Watt chiller especially for poly, metal and trans-ambient oxide etchers. Precise temperature control Compact, rack-mount chiller Lowest cost of ownership Improved wafer to wafer repeatability Reduced energy costs Increased MTBF Saved fab space Reduced repair costs Eliminated Freons and their replacement chemicals Can operate in heating or cooling modes Stand alone chillers Configurable TE Chiller < 400W For precise temperature control of water or liquid-cooled lasers, our chillers improve performance by keeping wavelength and beam shape constant. Precise temperature control also provides improved reliability and longer laser life. The soccer ball-sized ThermoCube is portable and can be confi gured with numerous options, including whisper-quiet and virtually vibration-free packages. Current Customer Applications: Low light CCD camera Laser research Fusion research Laser hair removal Laser tattoo removal Medical lasers Compact low cost TE Chiller < 300W For applications with very limited space constraints, the Oasis chiller is the smallest W capacity chiller available today. Oasis integrates easily inside most enclosures. Oasis uses reliable thermoelectric modules to achieve precise thermal control. It responds instantaneously to changes in heat load, holding to ±0.1 C, even near ambient. Current Customer Applications: Analytical lasers Diode laser cooling Small CO2 laser cooling Femtosecond laser cooling DPSS laser cooling 04 Recirculating Chillers thermoelectric and compressor based

5 Compressor based Recirculating Chillers Rackmount chillers Rackmount chillers are designed to resolve the problems caused to a fab by conventional Freon-based chillers: reliability, size, noise, fi rst wafer effect, consistent wafer-to-wafer and within-wafer temperature control and power consumption. Compact, customer specifi ed device description Smallest compressor based chiller RPM-regulated 24VDC electrical components Highly effi cient Nearly maintenance free Available in various types Multi Voltage power supply Stand alone chillers AMS Technologies stand-alone thermoelectric recirculating liquid chillers are temperature control systems with full PID control for both heating and cooling. Customizable Stand Alone Chiller (1-18kW) Extreme High Capacity Chiller (21-95kW) Extreme High Temperature Chiller (4 C-200 C) Extreme Low Temperature Chiller (-85 C 90 C) Standard Confi gurable Chiller (1-11kW) Mini chillers The small compressor based AMS Technologies chillers are based on 24V speed driven compressors. All electric components 24V. Multi voltage power supply. Miniature Direct Cooling, Customized (OEM) The miniature direct cooling is based on the 24V speed regulated Aspen compressors. The speciality of this system is that the Freon is direct evaporated into a stainless steel plate and keeps it temperature stable. A water circle is not necessary what makes the whole system user friendly, smaller and service friendly. Light and small Smallest compressor based chiller Multi voltage power supply Speed regulated components Highest effi ciency Fast response Better than any TE chillers Best costs - performance rate Recirculating Chillers thermoelectric and compressor based 05

6 AMS Technologies Recirculating Chillers thermoelectric and compressor based Cabinet Cooling Laser equipment inside hermetically sealed enclosures for outdoor use typically requires temperature control. AMS Technologies offers standard and customized heat pipe, thermoelectric and compressor based cabinet coolers. Heat pipe cabinet coolers most compact, reliable and energy effi cient Heat pipe cabinet coolers up to 1000 W heat removal at 10 C temperature rise Thermoelectric cabinet coolers 30 to 300 W nominal Thermoelectric cabinet coolers IP65 rated Mini compressor cabinet cooler 400W - 1 KW Consultancy and Services Optimised cooling solutions require thermal design expertise, engineering resources and access to the manufacturers technologies. In the past 12 years, many customers have received their solutions in more than 300 thermal design reports produced by AMS Technologies. Most studies are based on numerical calculations with computational fl uid dynamics, although many studies are also based on empirical tests generated in close cooperation with our manufacturing partners. Computer simulations allow for numerous optimisation models to be calculated and evaluated. Verifi cation of underlying thermal models and refi nement of the designs can be achieved only with the empirical data obtained in the wind tunnel, on the water cooling test bench or in the laboratory for thermoelectric assemblies respectively. Thermal Design Consultancy Power electronics, lasers, medical and laboratory equipment, small refrigeration applications and many others usually need tailored cooling or temperature stabilisation systems. AMS Technologies engineers will conceive and develop your optimised solutions and supply comprehensive documentation. We and our partner companies utilise analytical, numerical and empirical methods in order to ensure most accurate prediction of performance. 06 Recirculating Chillers thermoelectric and compressor based

7 Technology Overview: Thermal Design of Thermoelectric Systems The energy balance of thermoelectric systems is more complex than in other cooling applications. The Peltier effect, Joule heat and Fourier heat conduction inside a TEM and its boundary conditions require special prediction tools and expertise in order to properly dimension and optimise a TE system. Our own engineers and our partner companies offer comprehensive analysis and design studies including detailed documentation of your optimised solution. Brief Overview of a Thermoelectric Module A thermoelectric module pumps heat from one ceramic face to the other ceramic face when DC current is applied. Unlike the compressor in a standard refrigeration system that pumps Freon, thermoelectric modules use electrons to transfer heat. Thermoelectric modules can also work in reverse, generating DC current (power) if one side is hot and the other is cold. This phenomenon was discovered in 1834 by Peltier, but did not realize commercial success until semiconductors were developed during the 20th Century. Thermoelectric cooling systems are currently found in many homes, laboratories, manufacturing facilities, hospitals, and in spacecraft and military applications. Since thermoelectric modules have no moving parts, they are quiet and reliable. Thermoelectric Cooling Assemblies for Prototyping and Testing Compact Air-Cooled Liquid Recirculating Chiller OASIS Technology Overview: Compressor Based Chillers versus Absorption Compressor-based recirculating chillers are the ideal solution when you need precise temperature control or cooling below ambient temperature. The thermodynamic cycle of an absorption chiller is driven by a heat source; this heat is usually delivered to the chiller via steam, hot water, or combustion. Compared to electrically powered chillers, an absorption chiller has very low electrical power requirements - very rarely above 15 kw combined consumption for both the solution pump and the refrigerant pump. However, its heat input requirements are large, and its COP is often 0.5 (singleeffect) to 1.0 (double-effect). A compressor-based recirculating chiller offers outstanding performance and high reliability as well as quiet operation and easeof-use. Applications include semiconductor equipment, medical equipment, medical and industrial lasers, electron microscopes, analytical instrumentation, printing equipment, and more. Our chillers are designed for de-ionized water, thus can be used for active and passive cooling. The conductivity of the water can also be monitored and controlled to a desired level. Our products range from air-water heat exchangers for small lasers commonly used in the medical fi eld, air-water compressor based chillers commonly used for diode lasers in the middle range of performance through to air-water compressor based chillers for high powered diode lasers. Recirculating Chillers thermoelectric and compressor based 07

8 WHAT CAN WE DO FOR YOU? Please contact us for further information Germany AMS Technologies AG (Headquarters) Fraunhoferstr Martinsried, Germany Phone +49 (0) Fax +49 (0) United Kingdom AMS Technologies Ltd. Unit 11, St Johns Business Park Lutterworth Leicestershire LE17 4HB, United Kingdom Phone +44 (0) Fax +44 (0) France AMS Technologies S.A.R.L. Silic 717 Bâtiment Magnolia 16, avenue du Québec Courtaboeuf Cedex Phone +33 (0) Fax +33 (0) Italy AMS Technologies S.r.l. Via San Bernardino, Legnano (MI), Italy Phone Fax Spain AMS Technologies S.L. C/Muntaner, 200 Atico, 4a Barcelona, Spain Phone +34 (0) Fax +34 (0) Nordic AMS Technologies Nordic Azpect Photonics AB Aminogatan Mölndal, Sweden Phone +46 (0) Fax +46 (0) Optical Technologies Power Technologies Thermal Management ISO 9001 DIN EN ISO 9001 TAW Cert Zert.Nr.: AMS Technologies. All rights reserved