Wafer Pre Aligner

Transcription

1 Universal Semiconductor Technology Head Office-sales and Main Facility-R&D Center 908, D-dong, Bun-Dang Techno Park, Yatab-dong 151, Seongnam-city, Gyeonggi-do, Korea ( ) Tel) Fax) ) Wafer Pre Aligner Services provide by UST CO.,LTD

2 Wafer Pre Aligner Wafer Pre Aligner Feature - Wafer Size (2inch ~ 18inch) - Notch, Flat Wafer, Ring Type, Thin Wafer (50um) - Si, Glass, Film, Sapphire - Compact Size - Fast Alignment (< 3.5sec) - High Performance Accuracy and Repeatability - Easy to use and Install - Ethernet, RS-232 Communication - Auto Detect function of Notch and Flat Type - Si, Glass, Sapphire Type Simultaneous use - Wafer Edge Crack and Broken Detect

3 Wafer Pre Aligner - 2inch ~ 18inch Simultaneous use (CCD Stage Moving Type) - Poor Coating and Cracked wafer support alignment - Crack Point's degree and quantity information output function (max. 500ea) - Covered Tape at Notch point by Laminator support alignment Edge Crack Detect Easy command and monitoring by HyperTerminal

4 Wafer Pre Aligner Wafer Vision Function by CCD - Compact Embedded System PC (Window XP OS) - Vision Function and Monitoring - Easy Monitoring and Capture Screen Compact Embedded System

5 ACE V Series ACE YV Series ACE XV Series Wafer Pre Aligner ( List) ACE XVL Series ACE DXV Series ACE P Series ACE XP Series ACE XPL Series ACE S Series

6 Wafer Pre Aligner (ACE-V Series) - Fixed Vacuum Chuck Type - Low-cost Aligner - Output the Align Data to Robot Ø300 ~ Ø50, Notch, Flat, Si, Film, Sapphire < 3.5 sec RS-232, Digital I/O Vacuum - ACE-V 300N, ACE-V 300NS - ACE-V 200N, ACE-V 200NS - ACE-V 100F, ACE-V 100FS

7 Wafer Pre Aligner (ACE-YV Series) - Moving Theta and Y-Axis Chuck Type - Vacuum Chuck Type - Low-cost Aligner - Output the Align Data to Robot Ø300 ~ Ø50, Notch, Flat, Si, Film, Sapphire Axis ϴ, Y Stage repeatability ± < 3um Centering accuracy ± < 20um < 3.5 sec RS-232, Digital I/O Vacuum - ACE-YV 300N, ACE-YV 300NS - ACE-YV 200N, ACE-YV 200NS - ACE-YV 100F, ACE-YV 100FS

8 Wafer Pre Aligner (ACE-XV Series) - Moving Three-Axis Vacuum Chuck Type - Output the Align Data to Robot Ø300 ~ Ø50, Notch, Flat, Si, Film, Sapphire Axis ϴ, X, Y Stage repeatability ± < 3um Centering accuracy ± < 20um < 3.5 sec RS-232, Digital I/O Vacuum - ACE-XV 300N, ACE-XV 300NS - ACE-XV 200N, ACE-XV 200NS - ACE-XV 100F, ACE-XV 100NS

9 Wafer Pre Aligner (ACE-XVL Series) - Moving the X.Y.Z-Axis for Fixed Robot Pan Ø300 ~ Ø50, Notch, Flat, Si, Film, Sapphire Axis ϴ, X, Y, Z Stage repeatability ± <3um Centering accuracy ± < 20um < 3.5 sec Lift time < 0.5 sec down, < 0.6 sec up RS-232, Digital I/O Vacuum, Air - ACE-XVL 300N, ACE-XVL 300NS - ACE-XVL 200N, ACE-XVL 200NS - ACE-XVL 100F, ACE-XVL 100FS

10 Wafer Pre Aligner (ACE-DVX Series) - Include OCR (for Reading the Wafer Lot Number) - Automatic wafer classification Ø300 ~ Ø50, Notch, Flat, Si, Film, Sapphire Measurement Automatic wafer classification Axis ϴ, X, Y Stage repeatability ± <3um Centering accuracy ± < 20um < 3.5 sec RS-232, digital I/O Vacuum - ACE-DXV 320N - ACE-DXV 215N - ACE-DXV 150N

11 Wafer Pre Aligner (ACE-P Series) - Large Vacuum Chuck - For over 300mm Wafer Ø450,300 Notch, Si, Film Chuck Size 80Ø Centering accuracy ± < 20um < 6.0 sec RS-232, Digital I/O Vacuum - ACE-P 450N - ACE-P 300N

12 Wafer Pre Aligner (ACE-XP Series) - Large Vacuum Chuck - For over 300mm Wafer Ø450,300, Notch, Si, Film Chuck Size 80Ø Axis ϴ, X, Y Centering accuracy ± < 20um < 6.0 sec RS-232, Digital I/O Vacuum - ACE-XP 450N - ACE-XP 300N - ACE-XP 200N - ACE-XP 150N

13 Wafer Pre Aligner (ACE-XPL Series) - Safety for Crack Wafer Broken - Moving the X.Y.Z-Axis for Fixed Robot Pan - Passive Type Ø450 ~ Ø50, Notch, Flat, Si, Film, Sapphire Axis ϴ, X, Y, Z Stage repeatability ± <3um Centering accuracy ± < 20um < 3.5 sec Lift time < 0.5 sec down, < 0.6 sec up RS-232, Digital I/O Air - ACE-XPL 450N - ACE-XPL 300N - ACE-XPL 200N - Option Sapphire, Glass

14 Wafer Pre Aligner (ACE-S Series) ACE-SXVO 450N (include OCR) ACE-SXVM 450N - Special Type - Include OCR (for Reading the Wafer Lot Number) - Auto alignment for All Size Wafer - Output the Align Data to Robot Special 1 Special 2 Special 3 Special 4 Ø450 ~ Ø300, Notch, Flat, Si, Film, Sapphire Include OCR and data transfer Wafer all size alignment Wafer Si - Sapphire double measurement User request Mode - ACE-SXVO 450N (include OCR) - ACE-SXVO 300N (include OCR) - ACE-SXVM 450N - ACE-SXVM 300N

15 Thank you for your business with us UST Co.,Ltd will put customer' need before us and promise that all UST staffs will do their best for maximization of satisfaction Universal Semiconductor Technology Head Office-sales and Main Facility-R&D Center 908, D-dong, Bun-Dang Techno Park, Yatab-dong 151, Seongnam-city, Gyeonggi-do, Korea ( ) Tel) Fax) )