Standard Operating Manual

Transcription

1 Standard Operating Manual Desktop Manual Coater Version 1.1 Page 1 of 10

2 Contents 1. Picture and Location 2. Process Capabilities 2.1 Cleanliness Standard 2.2 Substrate Size 2.3 Substrate Thickness 2.4 Spin Speed 2.5 Process Time 3. Contact List and How to Become a Qualified User 3.1 Emergency Response and Communications 3.2 Training to Become a Qualified User 4. Operating Procedures 4.1 System Description 4.2 Safety Warnings 4.3 Operation Precautions and Rules 4.4 Initial Status Checks 4.5 Initial System Checks 4.6 Coater Operating Procedure 4.7 Clean Up 4.8 Check Out 4.9 Shutdown the Coater (Staff only!) Version 1.1 Page 2 of 10

3 1. Picture and Location Desktop Manual Coater This tool is located at NFF Room 2240 Cleanroom Class Process Capabilities 2.1 Cleanliness Standard: Non-Standard 2.2 Substrate Size: fragments from 5mm to 100mm 2.3 Substrate Thickness: <2mm 2.4 Spin Speed: 4000rpm 2.5 Process Time: <99sec 3. Contact List and How to Become a Qualified User 3.1 Emergency Response and Communications Security Control Center: (24hr) & (24hr) Safety Officer: Mr. Wing Leong CHUNG & Deputy Safety Officer: Mr. Man Wai LEE & NFF Senior Technician: Mr. Henry YEUNG Version 1.1 Page 3 of 10

4 NFF Technician: Mr. Charles TANG Training to Become a Qualified User 1. Read through the on-line equipment operating manual of the equipment; 2. Attend the equipment hand-on operation training either by peer or NFF staff. 3. If training is provided by NFF staff, user must log in NFF equipment reservation system, and register these trainings. 4. Send an to Mr. Henry YEUNG requesting Desktop Manual Coater qualified exam. 5. Pass the examination for the equipment operation and security. 4. Operating Procedures 4.1 System Description The desktop Manual Coater is designed for the manual coating the resist. This tool accommodates miscellaneous substrates and wafers. Step 1 Time Vacuum ON/OFF Valve Power Switch Exhaust Tube Step 2 Time Coater Cover Start button Emergency Stop Button Version 1.1 Page 4 of 10

5 Step 1 Spin Speed controller 4.2 Safety Warnings Step 2 Spin Speed controllers Vacuum gauge Spin Speed display 1. Follow NFF Health and Safety Manual 2. Never operate the system without exhaust. 3. Never operate system without trained and approved by NFF staff. 4. Wear safety glasses when operating the machine always. 5. Close the Coater cover during process. 6. Resists may have irritating effects to eye, skin and mucous membranes! Observe and obey Material Safety Data Sheet (MSDS) of the corresponding materials used in the system! 7. Make sure the entire vacuum surface is easily covered by your sample. This will cause the resist to be sucked into the vacuum port on the spindle and damage the spin motor. 8. If an error or problem occurs, stop all work immediately. Leave notice that the machine is not to be used and contact the staff. Do not attempt to fix the problem. 9. The Emergency Off Button (EMO Button) button is used to interrupt the process for this coater. Version 1.1 Page 5 of 10

6 10. According to the general fire emergency procedure of HKUST, please report the accident to the Security Control Center first. The nature of other emergencies will determine whether you will call police, staff, or both. If someone is injured, the emergency number should be called before calling staff. If there is a facilities problem, such as a flood or a utility problem that does not present a danger to lab users but may result in damage to equipment, the staff or EMO need to be called. The emergency should not be called for facility or equipment problem. Always call when a potentially life threatening situation might exist (injury, fire, gas leak, etc.) 4.3 Operation Precautions and Rules 1. Do not operate the machine unless you are properly trained and approved by NFF staff. 2. Please check the checklist and fill all the details of the log sheet attached. 3. Wipe with a fresh Polyester cleanroom wiper with Acetone or IPA to clean the rim of resist bottle after each use. 4. Return small resist bottle back to assigned small resist bottle storage cabinet after each use. 5. Ensure that chuck is leveled horizontally. 6. Make sure enough vacuum, otherwise can result in broken wafer. 7. Clean the chuck in the fume hood after each use. If any user fails to clean the chuck and system properly, you may ban to use the system in future. 8. Glass disposable pipettes and plastic dropper are supplied for applying resist to small sample. Dispose glass pipettes to Broken Wafer Box after use. 9. When cleaning the spin chuck, always cover the vacuum port. If material Version 1.1 Page 6 of 10

7 enters the vacuum port, it can damage the vacuum system. 10. Make sure SU-8 and polyimide are cleaned up, don t let them harden. 11. Always change the cleanroom wiper on the process bowl after complete your coating process. 12. You can press Emergency Stop to interrupt the process at any time. 4.4 Initial Status Checks 1. Please check the status of shutdown notice posted in the NFF reservation website 2. Before operate the machine, please make sure you have read and fill the check list. 3. Please check-in the equipment via card reader. 4.5 Initial System Checks Before starting, verify the machine is in the correct idle state: 1. If system power is off, turn on the main power in front of the equipment. The switch is lit when the coater is switched on. 2. Verify that exhaust is properly connected. 3. Ensure that the correct spin chuck is used. 4. Check the vacuum. 5. Check new cleanroom wiper on the process flow 6. Check log sheet that last user had no problem. Version 1.1 Page 7 of 10

8 4.6 Coater operating procedure 1. Check the process bowl to be covered with new cleanroom wiper. Do it if necessary. 2. Select a proper chuck according to your substrate size. Make sure your substrate covers the coater chuck completely otherwise the resist will be sucked into the vacuum port on the spindle and damage the spinner. Three Chucks available 3. Make sure the chuck is clean and no any resist. Clean with acetone and cleanroom wipers in the wet station if necessary. 4. Lift up unused chuck from the spindle and gentle press down the new chuck onto the spindle. Chuck replacement 5. Use the tweezer to place your substrate on the coater chuck and center it with alignment jig. Version 1.1 Page 8 of 10

9 Alignment jig Process bowl Centering the substrate 6. Turn the vacuum valve in the right top corner to vacuum position to secure your substrate on the chuck. (Note: vacuum level can be checked via vacuum gauge >40cmHg on the control panel. Otherwise the substrate may be flied away.) Vacuum Gauge 7. Locate the Step 1 and Step 2 spin speed knob on the control panel. Turn all the way counter clockwise. 8. Locate the step 1 and step 2 Time Counter. Set the Time Counter to 30 seconds. 9. Press the START button on the deck and slowly increase the Step 1 Spin speed by turning it clockwise. The spin speed can be checked in the spin speed display. 10. If the substrate is not centered, release the vacuum by turn the vacuum valve to vent position and re-center your substrate. Repeat this process until your substrate is centered. 11. Slowly increase the Step 2 spin speed by turning it clockwise and check the Version 1.1 Page 9 of 10

10 spin speed in the spin speed display. 12. Set your desired spin Time for step 1 and step Pour the photoresist onto the substrate. For small sample, hold the pipette over the center of the wafer, carefully squeeze the photoresist out of the pipette onto the substrate, and avoid the bubbles. 14. Close the coater cover. Press the START button. (Press Emergency Stop to interrupt coating during process if necessary). 15. Release the vacuum by turn the vacuum valve to vent position on right top corner of the deck. Remove the substrate for further process by a tweezer. 16. Clean rim of the resist bottle and the bottle opening with Polyester cleanroom wiper wetted with acetone before and after you pour photoresist out of bottle. Avoid dripping any acetone into the bottle. 17. Always change the cleanroom wiper on the process bowl after complete your coating process. 4.7 Clean Up - Dispose used cleanroom wiper on the process bowl to rubbish bin and replace it with new cleanroom wiper. - Clean the chuck using moisten a clean wiper with proper solvent (acetone) or clean the chuck with acetone in the wet station. 4.8 Check Out 1. Check out the equipment immediately after use. 2. Fill in the details, problems or comments in the log sheet. 4.9 Shutdown the Coater (Staff only!) Press Power Switch to OFF the system. Version 1.1 Page 10 of 10