Agilent Cary Universal Measurement Spectrophotometer (UMS)

Transcription

1 Agilent Cary Universal Measurement Spectrophotometer (UMS) See what you ve been missing Date: 13 th May 2013 TRAVIS BURT UV-VIS-NIR PRODUCT MANAGER AGILENT TECHNOLOGIES 1

2 Agenda Introducing the Cary 7000 Universal Measurement Spectrophotometer Solutions for: Standard Reference Materials Substrates, Coatings and Thin Films Bulk Optics, Components and Finished Assemblies Advanced Photonics Research Wrap Up and Question Time. 2 Agilent Restricted May 13, 2013

3 UV-Vis-NIR Spectrophotometry %T and %R Angular Control Flexibility Cost per analysis Automation Productivity Consistency (%T and %R) Accuracy Performance Easy of Use Accessible Reliability Research QA/QC Testing Trouble Shooting

4 Overview Advance Your Materials Measure the optical properties of materials in the UV-Vis-NIR. Examples: coatings, thin films, optical components, solar cells, glass etc. Measure reflectance AND Transmission in a single device Reduce your cost peranalysis, while saving time and money. Cary UMS Analyze virtually any sample. Measure transmittance at any angle, and measure absolute reflectance without moving the sample - at any polarization. Perform reflection, and transmission measurement at variable angles on the Cary UMS unattended. 4 Agilent Restricted May 13, 2013

5 Agilent Cary Universal Measurement Spectrophotometer 5 Chemical Analysis Group Agilent Confidential

6 Cary UMS Schematic Productivity Automated independent control of polarization (s or p) detector (D) position and sample rotation. One baseline is needed for all %R and %T measurements, at all angles for a given polarization dramatically reducing total collect time. Perform all %R, %T measurements on a single system eliminating accessory change over, or reconfiguration time. D Performance Absolute reflection and transmission by definition the only difference between baseline and measurement is the sample itself. Incident light is fixed in shape, and position, at the sample ensuring %T and %R are collected from the same point on the sample. The detector has a pure line of sight of the sample. This unique Direct View provides the highest signalto-noise improving accuracy, reproducibility and productivity Chemical Analysis Group Agilent Confidential

7 Cary UMS Measurement Modes Chemical Analysis Group Agilent Confidential

8 Cary UMS Measurement Modes 6 Modes 1 System Perform all these measurements on the Cary 7000 UMS Chemical Analysis Group Agilent Confidential

9 Agilent Molecular Spectroscopy Evolution 1954 Cary 14 UV-Vis-NIR 1970 Cary 17 UV-Vis-NIR 2002 Cary 5000 UV-Vis-NIR

10 What does in mean to own a Cary? Over 60 years of excellence in optical design Technology leadership Award winning innovations The Cary philosophy: For investigators who on occasion must push a spectrophotometer to the very limits of its performance capability to obtain the information they need, and yet have to have an instrument which is adaptable to many different applications ~ Howard Cary Howard Cary - the man behind the early Cary instruments.

11 Absolute Specular Reflection Certified Standard Reference Material (SRM) NIST Traceable

12 Absolute Specular Reflection Application Measure absolute specular reflectance of a standard reference material (SRM) a first surface aluminum mirror approx 50 mm diameter Challenge Control of angle of incidence and polarization to match certified measurement conditions. Good photometric accuracy and linearity over full wavelength range.

13 Mirror (SRM), Reflectance (%R) S and P Polarized Measurements from 7 deg 85 deg

14 Mirror (SRM), Reflectance (%R) S and P Polarized Measurements from 7 deg 85 deg

15 Mirror (SRM), Reflectance (%R) S and P Polarized Measurements from 7 deg 85 deg 820 nm

16 Absolute Specular Reflection Summary Measurement of absolute specular reflectance of a SRM traceable to a NIST standard. Results In this figure the measured and certified spectra have been are overlaid Comparisons between measured value and certified value can be seen to correspond very closely across the wavelength range 250 nm 2500 nm. Data collect was collected in ~2 min scan.

17 Reflection and Transmission of fused silica (SiO 2 ) without moving the sample at angle and s/p polarization

18 Transmission, Reflection, Internal Transmission Application Measure transmission, reflection and internal transmittance of fused silica glass at angle and under s and p polarized light. Challenge Precise internal transmittance measurements require accurate %T and %R measurements ideally made at exactly the same angle and with identical incident beam geometry.

19 Calculating Theoretical %R and %T Fresnel Equations Used to calculate Reflection (R) and Transmission (T) at an interface, eg. air and fused silica. Requires knowledge of refractive index of the incident medium. Usually air, n 1 = 1 and sample. nn 1 nn 2 θθ ii θθ tt Sellmeier Equation Empirical relationship between refractive index and wavelength. Used to determine refractive index of a transparent medium at specific wavelengths Sellmeier Equation n 2 (λ) = 1 + Σ B iλ 2 λ 2 - C i i λ = wavelength B i and C i = Sellmeier coefficients Fresnel Equations: Reflection (R) and Transmission (T) Coefficients for s and p polarized light 2 2 n 1 cosθ i n 2 cosθ R t n 1 cosθ t n 2 cosθ i T s = R p = s = 1 - R s n 1 cosθ i + n 2 cosθ t n 1 cosθ t + n 2 cosθ i T p = 1 - R p n 1 = refractive index of incident medium n 2 = refractive index of sample θ i = angle of incidence θ t = angle of transmission Agilent Confidential

20 Transmission, Reflection, Internal Transmission Reflection (%R), Transmission (%T) and Internal Transmission (%T i ) of fused silica. T i is sometimes expressed as absorptance where A = 1 T i and R+T+A=1. Graphs show predicted and measured R, T and T i of fused silica at 7 deg AOI for S and P polarized light. Small expected differences in S and P are observed, even at near nommal 7 deg AOI, and there are expected deviations from theory where SiO2 is not completely water free (ie nm and 2200 nm) 20 Agilent Restricted May 13, 2013

21 %T and %R of Optical Components Cube Beam Splitters

22 Cube Beam Splitter Reflection and Transmission Application Optical performance of assembled optical components. Cube Beam splitter coating characterization for use in nano positioning systems which rely on polarized interferometry Challenge Cube beam splitter coating properties are dependent their opto-mechanical environment. Hence it is important to be able to measure the assembled optic and not the unassembled components.

23 Cube Beam Splitter - %T and %R Results Rs and Ts visible spectra data through a cube beam splitter designed for nm. Direct Transmission (0 deg) and reflection at 90 deg to the incident beam was measured in s and p polarized light. S-Polarized data shown. High contrast (<0.1%T) is shown for the transmitted beam Zoomed in region around nm shown for Ts shows %T < 0.1% was achieved with this coating. 23 Agilent Restricted May 13, 2013

24 Transmission of High Optical Density (OD) Filters Blocking Filters

25 Transmission Blocking Filter with high OD Application Blocking filters will high optical density are used in a wide variety of applications from bio-photonics and safety eyewear to optical instrumentation. Challenge Direct transmission measurements. The spectrophotometer requires extreme dynamic range performance, linearity and accuracy

26 Transmission Blocking Filters with high OD Results In this example the industry standard addition of filters test is used to demonstrate high absorbance measurements beyond 10 absorbance units (Abs). In addition to photometric range, the test requires the spectrophotometer to have strong foundations in linearity and accuracy. Using the addition of filters technique, photometric range, accuracy and linearity are demonstrated up to 10 Abs. The predicted result is the summation of the two individual filters (A +B). The measured result is the direct measurement of the two filters together. 26 Agilent Restricted May 13, 2013

27 Thin Films/Coatings Spectral Visualization Tools

28 Absolute Specular Reflection Application Coating characterization and design validation. Comprehensive angular, and wavelength range, analysis of a coated silicon substrate, 200 mm diameter, 800 µm thickness. Challenge Efficient and accurate thin film design measurement by multi-angle, UV-Vis-NR spectroscopy and 2D contour plot visualization tools.

29 Thin Film/Coatings, Specular Reflectance Results Absolute specular reflectance measured of a coated silicon substrate in the UV-Vis-NIR from near normal angles of incidence (AOI) to high grazing angles. Spectra with AOI from 6 deg to 86 deg in 1 deg increments are shown for p-polarized light. The entire spectral collect was executed in a single unattended operation. 29 Agilent Restricted May 13, 2013

30 Thin Film/Coatings, Specular Reflectance Results A 2D contour plot of the previous slide helps visualize the coating dependence with AOI and wavelength and aids with locating reflection minima and maxima, e.g., minimum reflection can easily identified at 1500 nm with 70 deg AOI. 30 Agilent Restricted May 13, 2013

31 Highly Angular Dependent Reflection Diffuse Scattering from a Compact Disk

32 Reflection with high angular dependence Application Optical interference coatings typically show a high level angular dependence. In this example diffuse scattering from a compact disk is used to demonstrate the superior angular control of the Cary UMS for measuring coated material. Challenge Precise and independent angular control of detector and sample for measurement of non-specular scattered reflection from a compact disk. Angular control of sample and detector at sub 0.1 deg increments is demonstrated.

33 Reflection with high angular dependence Results Angular dependent reflection is shown over a 15 deg arc of sample rotation from 48 deg 63 deg (AOI) at 0.04 deg intervals (375 spectra). Scattered light was detected at 25 deg to the incident light using a 2 deg aperture. Zoomed in view of the diffuse scattering peak of the figure at left. Angular dependent scattering is clearly resolved at 0.04 deg intervals (2 arcmin 24 arcsec) dependence. 33 Agilent Restricted May 13, 2013

34 Scattered Reflection and Transmission Photo Voltaic - Solar Silicon

35 Solar Silicon Application Solar silicon cell development and quality control. Wafer characterization was conducted at the primary stage of development using the unpolished, uncoated wafer 125 x 125 mm x 400 µm Challenge Precise and independent angular control of detector and sample for measurement of non-specular scattered reflection and transmisssion from unpolished, uncoated silicon.

36 Solar Silicon Scattered %T and %R Incident Light I o Results The radial plot shows angular, and wavelength dependent, scattering from an unpolished, uncoated, silicon wafer. Diffusely scattered reflection is displayed at three wavelengths (924 nm, 1148 nm and 1200 nm) and diffuse transmission at only two due to the strong absorptance of silicon at 924 nm. Wafer Sample Radial Scattering Plot: the sample is shown located at the centre (r = 0). Light was incident at θ = 0 deg (normal to the sample). Typical spectral transmission at θ = 180 deg. The sharp absorption edge from nm can be seen.

37 Wrap up

38 Agilent Cary Universal Measurement Spectrophotometer (UMS) Improve productivity and gain deeper insights into thin films, coatings and functional glass Value FLEXIBILITY Multi-modal perform %T/%R measurement capability without moving the sample PRODUCTIVITY Measure samples in minutes-hours compared to hours-days - unattended! PERFORMANCE Giving new insights into samples (eg. cube beam splitters, interference coatings, and reflections off back surface optics Drivers RESEARCH Need high performance with the flexibility to measure a wide range of sample types QA/QC Good performance in an automated turn-key solution that is fast, versatile and robust. 38 Agilent Confidential

39 The Agilent Molecular Spectroscopy Today UV-Vis Leadership through Cary innovation Routine to Research solutions Cary 60 innovates with room-light immunity Xe flashlamp Simplifying workflow through Fiber Optics 8453 diode array leads the way in Pharma and Biotech Unparalleled performance for all your solid sampling needs Cary research UV-Vis-NIR Cary 60 Fiber Optics 8453 Diode Array Fluorescence Measure fluorescence under room light! Leveraging our patented Xenon Flash lamp Maximum flexibility lowest cost of ownership FT-IR Over 400% more energy than any other FTIR! Award winning, worlds smallest Cary 630 FTIR Technology leader in FTIR Imaging microscopy Mobile innovation giving you answers When and Where you need them Cary Eclipse Fluorescence FTIR Imaging and Microscopy 4100 Exoscan hand-held FTIR Cary 630 worlds smallest FTIR

40 More information Agilent Website Come and see us live over summer. Optical Interference Coatings (OIC) June 2013, Whistler, Canada International Conference on Materials for Advanced Technologies (ICMAT) 30 June - 5 July 2013, Suntec, Singapore 23 rd International Congress on Glass 1 5 July, 2013, Prague, Czech Republic 40 Agilent Restricted May 13, 2013