Miniature Precision Translation Stages

Transcription

1 Miniature Precision Translation Stages Controlling Motion with Servo Motors, Piezo Motors, Stepper Motors Ultra Precision Motion control Solutions. Linear Stage, Translation stage, positionier, micro stage

2 Ultra Precision Motion control Solutions. Linear Stage, Translation stage, positionier, micro stage Micropositioning, Nanopositioning, NanoAutomation Cutting-Edge Motion Control Solutions for Industry and Research Ultra Precision Motion control Solutions. Linear Stage, Translation stage, positionier, micro stage PI headquarters. PI employs the world's most experienced R&D and production teams for nanopositioning PI headquarters systems Nanopositioning Technology - 30 Years Ahead of its Time PI has been a world market leader in nanopositioning technology and ultra-high-precision motion-control systems for many years. The first nanopositioning systems served research centers working in interferometry and laser technology. Today, entire branches of industry such as the semiconductor industry, biotechnology and, increasingly, the machine-tool industry are dependent on progress in nanopositioning. Key Technologies Under One Roof: A Plus for Our Customers PI has a strategy of vertical integration with all key technologies developed and maintained in one compan y. This permits direct control over every step from conception to shipment, optimizing quality and cost. As a customer, you, too, can profit from our over 30 years experience in micro- and nanopositioning. PI can react quickly to development and production needs of OEM customers even for highly complex custom products and assemblies. Applications Today PI delivers Micro- & Nanopositioning solutions for all important high-tech markets: Semiconductors Data Storage Photonics, Fiber Optics, Telecom Life Sciences Lasers, Optics, Microscopy Aerospace Engineering Precision Machining Astronomy Request the 500 p. Hardbound PI Catalog 1

3 M-122 Precision Micro-Translation Stage Fast & Compact with Direct Position Measurement The M-122.2DD miniature translation stage features an optical linear encoder with 0.1 µm position resolution and a highly efficient ballscrew Ordering Information M-122.2DD High-Precision Translation Stage, 25 mm, Direct-Drive DC Motor, Ballscrew Accessories M-122.AP1 Angle bracket for vertical mounting of M-122 stages Ask about custom designs Travel Range 25 mm 0.1 µm Optical Linear Encoder for Highest Accuracy & Repeatability Min. Incremental Motion to 0.2 µm Max. Velocity 20 mm/s Cross-Roll Bearings Recirculating Ball Screw Drives Provide High Speeds & Long Lifetimes Physik Instrumente (PI) GmbH & Co. KG Subject to change without notice. All data are superseded by any new release. The newest release for data sheets is available for download at Cat120E Inspirations /10.18 The M-122 palm-top-sized tra ns - lation stage combines small dimensions, high speeds and very high accuracy at a competitive price. It features a spacesaving, folded drive train with the servo motor and drive screw side-by-side. Equipped with a non-contacting optical linear encoder and a preload ed, precision-ground, bal l- screw, these stages can provide much higher accuracy and better repeatability than conventional stepper motor stages or rotary encoder - equipped ser vo motor stages. Low Friction, High Speed, Maintenance-Free Due to its low-friction, the backlash-free ball screw yields significantly higher mechanical Application Examples Photonics packaging Fiber positioning Metrology Quality assurance testing Testing equipment Micromachining efficiency than leadscrews, and allows maintenance-free, high duty-cycle operation at high velocities up to 20 mm/sec. XY and XYZ Combinations M-122 stages can be combined to very compact XY and XYZ systems. The M-122.AP1 moun - ting bracket is available to mount the Z-axis. Limit and Reference Switches For the protection of your equipment, non-contact Hall-ef fect limit and reference switches are installed. The direc tion-sensing reference switch supports advanced auto mation applications with high precision. Low Cost of Ownership The combination of these positio ners with the networkable, single-channel C-863 Mercury servo motor controller (s. p ) offers high per formance for a very competitive price in both single- and multiaxis configurations. For multiaxis applications, the C-843 PC plug-in controller board with on-board servo amplifiers (s. p ) is another cost-effective alternative. M-122.2DD dimensions in mm, 3 m cable, Sub-D connector 15-pin Technical Data Model M-122.2DD Active axes X Motion and positioning Travel range 25 mm Integrated sensor Linear encoder Sensor resolution 0.1 µm Design resolution 0.1 µm Min. incremental motion 0.2 µm Backlash 0.2 µm Unidirectional repeatability 0.15 µm Pitch ±150 µrad Yaw ±150 µrad Max. velocity 20 mm/s Origin repeatability 1 µm Mechanical properties Drive screw Recirculating ballscrew Thread pitch 0.5 mm Stiffness in motion direction 0.25 N/µm Max. load 50 N Max. push/pull force 20 N Max. lateral force 25 N Drive properties Motor type DC motor Operating voltage 0 to ±12 V Electrical power 2.25 W Limit and reference switches Hall-effect Miscellaneous Operating temperature range -20 to +65 Material Aluminum, steel Dimensions 86 x 60 x 20.5 mm Mass 0.22 kg Recommended controller/driver C-863 (single-axis) C-843 PCI board (up to 4 axes)

4 M-110 M-111 M-112 Compact Micro-Translation Stage Choice of Drives & Travel Ranges, XY(Z) Combinations Possible Ordering Information Translation stage 0 Travel Range 5 mm 1 Travel Range 15 mm 2 Travel Range 25 mm M-116.DG DG DC Motor micro Gearhead rotary stage 2S Stepper Motor with Gearhead M-11. M-110 Stage and XYZ Combination, g 1 Leadscrew 2 Ball screw Ask about custom designs! Physik Instrumente (PI) GmbH & Co. KG Subject to change without notice. All data are superseded by any new release. The newest release for data sheets is available for download at Cat120E Inspirations /10.18 M-110 stage and XYZ combination Travel Ranges 5, 15 and 25 mm Very Cost Effective Min. Incremental Motion to 50 nm Max. Velocity 2 mm/s Closed-Loop DC Motors and Stepper Motors Non-Contact Limit and Reference Switches Optional Recirculating Ball Screw Drives Provide High Speeds & Long Lifetimes Vacuum-Compatible Versions Available to 10-6 hpa Application Examples Fiber optics testing Fiber positioning Metrology Micromachining Photonics packaging Quality assurance testing Testing equipment M-110, M-111 and M-112 are ultra-high resolution motorized translation stages providing linear motion of 5 to 25 mm in an extremely compact package. They feature a precision leadscrew with sub-micron resolution and precision linear ball bearings guaranteeing <0.5 µm straightness of travel. Compact Dimensions, High Performance To meet industrial demands, the M-11x.2 linear translation stages are equipped with a recirculating ball screw for precise motion with reduced friction. This allows 24/7 duty cycles. M- 110, M-111 and M-112 can be combined to XY and XYZ systems for multiaxis alignment applications. Stepper and Servo Motors A miniature DC or stepper motor actuates motion via a backlash-compensated screw / nut system and gearhead. Both drive options provide a cost-effective solution for industrial and OEM environments. To meet the most critical positioning demands, the DC motor is equipped with a high resolution encoder featuring resolution down to µm per count. Limit and Reference Switches For the protection of your equipment, non-contact Hall-effect limit and reference switches are installed. The directionsensing reference switch supports advanced automation applications with high precision. All stages include an integral 0.5 m cable with 15-pin sub-d connector and come with a 3 m extension cable. On the DC servo versions, the connector features integrated line drivers for cable lengths up to 10 meters between stage and controller (DC-motors only). Low Cost of Ownership The combination of these positioners with the networkable, single-channel C-863 Mercury (DC-Motor, see p ) or C-663 Mercury Step (see p ) controller offers high performance for a very competitive price in both single- and multiaxis configurations. For 3 or 4 axes, the C-843 PC plug-in board for DC motors (see p ) can also be recommended. F-130 fiber alignment system consisting of an M-110 XYZ positioning system and a P-611 XYZ Piezo-Nano Positioning system.this combination can be operated by the C-880 controller or NI controllers (request our technote!) e See Accessories (see p ff ) for adapters, brackets, etc. M-116.DG micro rotary stagem-110 XY z micropositioning combination consisting of (from top to bottom) M-116 micro rotary stage and two M-111 translation stages (M adapter for mounting the M-111 on a honeycomb breadboard

5 M-110, M-111 and M-112. Cable length: 500 mm, 15-pin sub-d connector with integrated encoder line drivers. C motor cable included: 3 m, sub-d, 15/15 pin (m/f) Technical Data Model M-110.1DG / M S / M-110.2DG / M S / Units M-111.1DG / M S / M-111.2DG / M S / M-112.1DG M S M-112.2DG M S Motion and positioning Travel range 5 / 15 / 25 5 / 15 / 25 5 / 15 / 25 5 / 15 / 25 mm Integrated sensor Rotary encoder Rotary encoder Sensor resolution Cts./rev. Design resolution * * µm Min. incremental motion µm Backlash µm Unidirectional repeatability µm Pitch / Yaw ±50 / ±150 / ±150 ±50 / ±150 / ±150 ±50 / ±150 / ±150 ±50 / ±150 / ±150 µrad Max. velocity 1 / 1.5 / 1.5 1/1/1 1.5/2/2 1/1/1 mm/s Mechanical properties Drive screw Leadscrew Leadscrew Recirculating ballscrew Recirculating ballscrew Thread pitch mm Gear ratio : : : :1 Motor resolution* 384* 384* Max. load 30 / 30 / / 30 / / 30 / / 30 / 20 N Max. push / pull force N Max. holding force N Max. lateral force 15 / 10 / / 10 / / 10 / / 10 / 10 N Drive properties Motor type DC-motor, gearhead 2-phase stepper motor DC-motor, gearhead 2-phase stepper motor Operating voltage 0 to ± to ±12 24 V Electrical power 0.52 / 1.75 / / 1.75 / W Current consumption 160 / 320 / 320** 160 / 320 / 320** ma Limit and reference switches Hall-effect Hall-effect Hall-effect Hall-effect Miscellaneous Operating temperature range -20 to to to to +65 C Material Al (black anodized) Al (black anodized) Al (black anodized) Al (black anodized) Mass 0.3 / 0.4 / / 0.4 / / 0.4 / / 0.4 / 0.5 kg Recommended controller/driver C-863 single-axis C-863 single-axis C-863 single-axis C-863 single-axis C-843 PCI board, C-843 PCI board, for up to 4 axes for up to 4 axes *2-phase stepper motor, 24 V chopper voltage, max A/phase, 24 full steps/rev., motor resolution with C-663 stepper motor controller **thermally limited 4-23

6 M-126 High-Resolution Translation Stage Compact Linear Stage with Crossed Roller Bearings Physik Instrumente (PI) GmbH & Co. KG Subject to change without notice. All data are superseded by any new release. The newest release for data sheets is available for download at R1 09/07/14.0 M-126 micropositioning systems are compact, high-precision translation stages with preloaded leadscrew and ballscrew drives for excellent resolution and repeatability. All models are equipped with precision crossed roller bearings providing straightness of travel of better than 2 µm. Five motorized versions are available: M-126.CG1 utilizes a compact closed-loop DC motor with shaft-mounted high-resolution position encoder and a precision gearhead providing 0.1 µm minimum incremental motion, M-126.DG1 is equipped with a larger motor than M-126.CG1 and provides higher velocity. The M-126.2S1 stepper motor version has a 2-phase stepper motor that provides a minimum incremental motion of 0.1 µm (controller depending). 1 M-126.CG1 translation stage with compact DC motor/gearhead Min. Incremental Motion to 0.1 µm (3.5 nm Resolution) Repeatability to 0.1 µm Velocity to 50 mm/s Travel Ranges 20 and 25 mm Manual, DC-Servo and Stepper-Motor Drives ActiveDrive Option Crossed Roller Bearings Ballscrew and Leadscrew Versions XY and XYZ Combinations Direction-Sensing Reference Switch Variety of Cost-Effective Motion Controllers Higher Speed with ActiveDrive and Ballscrews The top-of-the-line M-126.PD2 is equipped with a low friction ballscrew and and provides velocities to 50 mm/sec. Model M- 126.PD1 features a leadscrew and is recommended for lower speeds to 15 mm/sec and/or duty cycle applications. Both versions boast the high-perfomance ActiveDrive. PI s ActiveDrive design, features a high-efficiency PWM (pulse width modulation) servo-amplifier mounted side-by-side with the DC motor and offers several advantages: Increased efficiency by eliminating power losses between the amplifier and motor Reduced cost of ownership and improved reliability because no external driver is required Elimination of PWM amplifier noise radiation by mounting the amplifier and motor together in a single electrically shielded case Limit and Reference Switches For the protection of your equipment, non-contact Hall-effect limit and reference switches are installed. The direction-sensing reference switch supports advanced automation applications with high precision. XY and XYZ Combinations All stages can be cross-stacked and combined with the M Z-axis mounting bracket to provide multi-axis motion. Notes For adapters, bracket, etc. see p ff. M-126.M0 translation stage, manual version M-126.2S1 Dimensions in mm. Sub-D connector 15-pin, 3 m cable Ordering Information M-126.CG1 Translation Stage, 25 mm, Compact DC Motor Gearhead M-126.DG1 Translation Stage, 25 mm, DC Motor Gearhead M-126.PD1 Translation Stage, 25 mm, ActiveDrive DC Motor (includes 24 V power supply) M-126.PD2 Translation Stage, 20 mm, ActiveDrive DC Motor, Ballscrew (includes 24 V power supply) M-126.2S1 Translation Stage, 25 mm, 2-Phase Stepper Motor M-126.M0 Translation Stage, 25 mm, Manual Drive, Leadscrew M Z-axis Mounting Bracket for Vertical Mount of M-126 Stages M Adapter Plate for Honeycomb Tables Ask about custom designs! M-126.CG1 Dimensions in mm. Sub-D connector 15-pin, 3 m cable

7 M-126.2S1 translation stage with 2-phase stepper motor (pen for size comparison) echnical Data M-126.PD1 /.PD2 Dimensions in mm. Sub-D connector 15-pin, 3 m cable M-126.M0 Dimensions in mm. Sub-D connector 15-pin, 3 m cable M-126.DG1 Dimensions in mm. Sub-D connector 15-pin, 3 m cable Technical Data Model M-126.M0 M-126.CG1 M-126.DG1 M-126.PD1 M-126.PD2 M-126.2S1 Units Active Axes X X X X X X Motion and positioning Travel range mm Integrated sensor Rotary encoder Rotary encoder Rotary encoder Rotary encoder Sensor resolution Cts./rev Design resolution ** µm Min. incremental motion ** µm Unidirectional repeatability ** µm Bidirectional repeatability ** µm Accuracy µm Pitch / Yaw ±50 ±50 ±50 ±50 ±50 ±50 µrad Straightness / Flatness µm Max. velocity * 50 6** mm/s Origin repeatability µm Mechanical properties Drive Screw Leadscrew Leadscrew Leadscrew Leadscrew Recirculating Leadscrew ballscrew Thread pitch mm Gear ratio 69.12:1 (28/12) 4 :01 ~ 29.6:1 Motor resolution 6400** steps/rev. Max. load N Max. push / pull force 50 / / / / / / 50 N Max. lateral force N Drive properties Motor type DC Motor, DC Motor, ActiveDrive ActiveDrive 2-phase gearhead gearhead DC Motor DC Motor stepper motor Operating voltage 0 to ±12 0 to ±12 24 (PWM) 24 (PWM) 24 V Electrical power W Limit and reference switches Hall-effect Hall-effect Hall-effect Hall-effect Hall-effect Miscellaneous Operating temperature range -20 to to to to to to +65 C Material Aluminum, steel Aluminum, steel Aluminum, steel Aluminum, steel Aluminum, steel Aluminum, steel Mass kg Recommended C-863 single-axis C-863 single-axis C-863 single-axis C-863 single-axis (p ) C-663 single-axis controller/driver C-843 PCI board, C-843 PCI board, C-843 PCI board, C-843 PCI board (p ), (p ) for up to 4 axes for up to 4 axes for up to 4 axes for up to 4 axes *Max. recommended velocity **2-phase stepper motor, 24 V chopper voltage, max. 0.8 A/phase, 400 full steps/rev., motor resolution with C-663 stepper motor controller 1

8 High-Speed Piezo Linear Motor-Driven Stages M-661 / M-662 PILine Open-Loop Translation Stages with Piezo Linear Motors Smallest Translation Stages with Linear Piezomotor Drive Travel Ranges to 20 mm Max. Velocity 500 mm/s Acceleration 10 g Incremental Motion to 50 nm XY Combinations Possible PILine M-662 (left side) and M-661 stages are the smallest piezo-motor-driven translation stages available on the market that achieve speeds of up to 500 mm/s. Model Travel Drive Type / Unidir. Maximum Dimensions Range Pushing Force Repeatability Velocity M mm PILine P-661, mm/s 30 x 23 x 10 mm 2 N M mm PILine P-661, mm/s 28 x 28x 8 mm 2 N M-664 Ultra-Low-Profile PILine Linear Stage with Linear Encoder Travel Range 25 mm Low Profile 15 mm Max. Velocity 400 mm/s Up to 6 N Pushing Force Direct Metrology Linear Encoder, 0,1 µm Resolution High Guiding Accuracy rrom Crossed Roller Bearings XY Combinations Possible The M-664 linear translation stage with a profile height of only 15 mm Model Travel Drive Unidir. Maximum Dimensions Range Repeatability Velocity M mm PILine P-664, 0.3 µm 400 mm/s 90 x 60 x 15 mm 6 N M-682 High-Precision Linear Stage with Powerful PILine RodDrive Integration of the Powerful PILine RodDrive Low Profile, Compact Dimensions Max. Velocity 350 mm/s Up to 7 N Pushing Force Direct Metrology Linear Encoder, 0.1 µm Resolution Non-Magnetic and Vacuum-Compatible Versions Available 9 M-682 with integrated RodDrive, non-magnetic version. Model Travel Drive Unidir. Maximum Dimensions Range Repeatability Velocity M mm PILine M µm 350 mm/s 110 x 110 x 20 RodDrive, 7 N

9 P-653 PILine Miniature Linear Motor / Slide OEM Drive for High Volume Applications Physik Instrumente (PI) GmbH & Co. KG Subject to change without notice. All data are superseded by any new release. The newest release for data sheets is available for download at Cat120E Inspirations /10.18 True Linear Motor Slide / No Rotary Conversion Losses Cost-Effective OEM Drive for High Quantity-Applications Preassembled and Mounted on a PCB Board Very Compact: Piezomotor Drive is Only 8 mm Long Fast Response: Full Stroke in <50 ms Force Generation to 0.15 N Self Locking at Rest Travel Range 2 mm, Velocity up to 200 mm/s P-653 PILine OEM piezomotor drives are ideal for OEM applications where space is limited and moved masses are small. These tiny linear positioners can be used to replace classical drive elements like miniaturized motor/spindle systems or other linear motors, which P-653 outclasses with its speed of up to 200 mm/s. PILine piezo linear motors offer a number of advantages over classical drives: Application Examples Consumer electronics Miniature mechatronics Micromanipulation Micropositioning Toys The P-653 miniature drive including the drive electronics measures only 11 mm featuring 2 mm travel range. Side view of slider (bottom) High velocities Compact design High push/pull and holding forces relative to the drive size Integration of the P-653 in an application is simple because the moving slider and the piezo actuator are delivered assembled as a unit and already mounted on a PCB board. Drive electronics is included on the same board and requires a supply voltage of only 5 VDC. Mechanical mounting is thus facilitated as well: All that remains is to affix the payload to the slider. The motors are designed for moving small objects such as optical fibers, optics, micro- or electro-mechanical elements fast and precisely. Working Principle P-653 drives employ a new, patented, ultrasonic piezomotor drive developed by PI. The highly compact, integrated piezomotor can attain velocities of up to 200 mm/s together with high position resolution and considering its length of only 8 mm a high holding force. Because the ceramic stator is pressed against the slider, piezomotor drives resist motion with an intrinsic holding force when the unit is at rest. The result is very high position stability, without the heat dissipation common with conventional linear motors. During operation, the oscillating piezoceramic propels the slider over the length of the motor. There are no gears, leadscrews or other mechanical components to contribute play or backlash. Simple Control The high-frequency, nanometer level oscillations (~500 khz) needed by the PILine motors are created by driver electronics, which self-adjusts to the resonant frequency of the motor ceramic, meaning that no individual tuning is necessary. The driver electronics can in turn be controlled by short voltage pulses. Order Information P Miniatur PILine OEM Drive, 2 mm Travel Range, 0.15 N, mounted on PCB board P D Miniature PILine OEM Drive, 2 mm Travel Range, 0.15 N, Demo Sample Kit with USB Interface Ask about custom designs Note The products described in this document are in part protected by the following patents: German Patent No International Patent No. WO2006/027031A1 Two custom piezo motors based on the P-653 ultrasonic miniature motor show the versatility and adaptability of the basic concept: P-653KMRD on the right is based on the RodDrive principle and provides a virtually unlimited linear travel range. With the P-653KROT three miniature motors move a ring, for example for fast positioning of optical elements

10 P dimensions in mm: top view, view from drive side, end view along axis of motion (from left) Technical Data Model Motion and positioning Travel range P mm Step size at 0.25 ms ON time 5 to 15 µm Step size at 1.0 ms ON time 20 to 120 µm Max. velocity* Typ. velocity** Mechanical properties Holding force when powered down Max. push / pull force 100 to 200 mm/s 50 to 90 mm/s 0.3 N 0.15 N Drive properties Resonant frequency (typ.) 515 khz Integrated piezo motor PILine P-653 Operating voltage (drive electronics) 5 VDC Current consumption incl. drive electronics 0.1 A Control voltage 5 V TTL Miscellaneous Operating temperature range -40 to 85 C Mass 1 g ±5 % Connectors Header pin sockets Recommended driver Piezomotor drive electronics included Dimensions 15 x 11 x 8 mm incl. drive electronics Lifetime >5,000,000 cycles All data refer to 100 % duty cycle. *without 5 g: 80 to g: 50 to 100 mm/s **without load. Included in the P D demo sample there is the P OEM drive together with additional electronics featuring an USB interface

11 M-663 Piezo Motor Stage PILine Translation Stages with Ultrasonic Piezomotor and Integrated Linear Encoder PI Subject to change without notice. This data sheet is superseded by any new release. The newest release is available for download at R2 07/06/ Smallest Translation Stage with Closed-Loop Linear Motor and Encoder Travel Range 19 mm Max. Velocity 400 mm/s Accelerations up to 10 g Direct-Metrology Linear Encoder 0.1 µm Resolution XY Combinations Possible Vacuum-Compatible Versions Available Application Examples Biotechnology Micromanipulation Microscopy Quality assurance testing Metrology Mass storage device testing R&D Photonics packaging PILine M-663 stages (standard, left & vacuum version) w/ linear encoders and controller/driver in the background PILine M-663 micropositioning systems offer high velocities of up to 400 mm/s and travel ranges of 19 mm in a compact package. The M-663 is the smallest closed-loop translation stage with piezomotor drives currently on the market. Its square footprint makes it suitable for use in compact XY configurations. Working Principle PILine motors have a new, patented, ultrasonic drive developed by PI. The core piece of the system is a piezoceramic plate, which is excited to produce high-frequency eigenmode oscillations. A friction tip attached to the plate moves along an inclined linear path at the eigenmode frequency. Through its contact with the friction bar, the moving part of the mechanics drives forward or backwards. With each oscillatory cycle, the mechanics execute a step of a few nanometers; the macroscopic result is smooth motion with a virtually unlimited travel range. Advantages of PILine Micropositioning Systems The ultrasonic piezoceramic drives used in PILine micropositioners have a number of advantages over classical drives: Higher Accelerations, up to 10 g Speeds up to 500 mm/s Small Form Factor Self-Locking When Powered Down No Shafts, Gears or Other Rotating Parts Non-Magnetic and Vacuum- Compatible Drive Principle Optimized Controller and Drive Electronics PILine motors require a special drive electronics to generate the ultrasonic oscillations for piezoceramic element. For optimum performance the highly specialized C-866 motion controller is recommended. This sophisticated controller also integrates the drive electronics. Furthermore, the controller has a number of special features, including dynamic parameter switching for an optimized high-speed motion and settling behavior to take into account the motion characteristics typical of piezomotors. The broad-band encoder input (35 MHz) supports the outstanding high accelerations and velocities of PILine drives at high resolutions. Optionally, for use with third party servo controllers, the C-185 analog drive electronic (stand-alone unit) is available. It controls the motor speed by an analog ±10 V signal. For optimum performance this driver must be tuned together Request the 500 p. Hardbound PI Catalog Ordering Information M PILine Translation Stage, 20 mm, Linear Encoder, 0.1 µm Resolution M-663.Y65 PILine Translation Stage, 20 mm, Linear Encoder, 0.1 µm resolution, turned cable outlet, XY mountable M V PILine Translation Stage, 20 mm, Linear Encoder, 0.1 µm Resolution, Vacuum Compatible to 10-6 hpa Accessories: C Piezomotor Controller with Drive Electronics, 1 Channel, for PILine Systems with P-661 Motors Driver for use with separate controller: C Analog Stand-Alone Drive Electronics with Power Supply for PILine P-661 Motors with the stage and should be ordered at the same time as the motor/stage. Note The products described in this document are in part protected by the following patents: US Pat. No. 6,765,335 German Patent No

12 A 1 mm step performed by an M-663 stage with 300 g load controlled by a C-865 controller/driver reaches the end position in less than 40 ms An M-663 with 100 g load settles to 0.1 µm accuracy in 10 ms after a 100 µm step, measured with C-865 Controller/Driver Technical Data Models M Units Tolerance Active axes X Motion and positioning Travel range 19 mm Integrated sensor Linear encoder Sensor resolution 0.1 µm Min. incremental motion 0.1 µm typ. Backlash ±0.3 µm typ. Unidirectional repeatability 0.2 µm typ. Pitch 300 µrad typ. Yaw 300 µrad typ. Max. velocity 400 mm/s Reference switch repeatability 1 µm typ. Mechanical properties Max. load 5 N Max. push/pull force 1 N Max. holding force 2 N Drive properties Motor type P-661 PILine ultrasonic piezomotor Operating voltage 120 (peak-peak)* 42 (RMS)* V Electrical power 5** W nominal Current 400** ma Reference switch Hall-effect Miscellaneous Operating temperature range -20 to +50 C Material Al (black anodized) Dimensions 35 x 35 x 15 mm Mass 0.05 kg ±5 % Cable length 1.5 m ±10 mm Connector MDR, 14-pin Recommended controller/driver C Single-axis (see p ) controller/driver C Drive electronics * Power is supplied by the drive electronics ** For drive electronics M-663 dimensions in mm XY combination of two M-663s; CD for size comparison 13

13 M-683 PILine Precision Micro Translation Stage Low-Profile & High-Speed with Ultrasonic Piezomotor, Direct Position Metrology designs that allow a moving motor base are also available, see the M-674 RodDrive (see p. 1-30). Ordering Information M-683.1U4 PILine High-Speed Linear Stage, 25 mm, 4 N M-683 low-profile translation stages with integrated high-speed ceramic linear motor Physik Instrumente (PI) GmbH & Co. KG Subject to change without notice. All data are superseded by any new release. The newest release for data sheets is available for download at 09/ Max. Velocity 350 mm/s, Accleration up to 5 g Low Profile: Only 21 mm Height Compact XY Combination Possible Up to 7 N Force Generation Direct Metrology Linear Encoder with 0.1 µm Resolution Travel Ranges 25 and 50 mm Crossed Roller Bearings Provide Excellent Guiding Accuracy PILine Ceramic Motors: Non-Magnetic and Vacuum- Compatible Working Principle Self Locking at Rest Application Examples Biotechnology Micromanipulation Microscopy Quality assurance testing Metrology Semiconductor testing Mass storage device testing R&D Photonics packaging M-683 Precision Micropositioning Stages are based on the latest generation ultrasonic piezo motors. PI's patented PILine motors enable a compact design with a low profile and provide very fast response. An integrated linear encoder offers precision position control with 0.1 µm resolution. These new translation stages use paired crossedroller bearings mounted on precision-ground-aluminum profiles for better guiding accuracy. Integrated U-164 PILine linear motors provide push forces up to 7 N and a maximum velocity of up to 350 mm/s. 25 mm and 50 mm versions are standard, longer travel ranges and vacuum compatible versions are feasible and available on request. PILine Drives Replace Classical Motor/Leadscrew Systems PILine OEM piezomotors can replace classical drive components such as rotary motor / leadscrew assemblies, or magnetic linear motors. In the case of the M-683, they consist of a stationary piezo ceramic element that is preloaded against a guided runner. Other motor Advantages of PILine Micro Positioning Systems PILine ultrasonic ceramic drives provide several advantages over classical motors and drivers: Smaller dimensions Self-locking when powered down; no holding current High acceleration up to 5 g High velocity up to 500 mm/s No leadscrews, gears or other mechanical components, no wear or maintenance No lubricants Non-magnetic and vacuum compatible operating principle Optimized Controller and Drive Electronics PILine motors require a special drive electronics to generate the ultrasonic oscillations for the piezoceramic element. For optimum performance the highly specialized C-867 motion controller (see p ) is recommended. This sophisticated controller also integrates the drive electronics. Furthermore, the controller has a number of special features, M-683.2U4 PILine High-Speed Linear Stage, 50 mm, 7 N including dynamic parameter switching for an optimized high-speed motion and settling behavior to take into account the motion characteristics typical of piezomotors. The broadband encoder input (50 MHz) supports the outstanding high accelerations and velocities of PILine drives at high resolutions. Optionally, for use with third party servo controllers, the C-185 analog drive electronics (stand-alone unit, see p. 1-36) is available. It controls the motor speed by an analog ±10 V signal. For optimum performance the driver must be tuned together with the mechanics and should be ordered at the same time as the motor/stage. Patent Protection The products described in this document are in part protected by the following patents: US Pat. No. 6,765,335 German Patent No M-683.1U4 dimensions in mm

14 M-683.2U4 dimensions in mm Technical Data (preliminary) Model M-683.1U4 M-683.2U4 Tolerance Active axes X X Motion and positioning Displacement 20 mm 50 mm Integrated sensor Linear encoder Linear encoder Sensor resolution 0.1 µm 0.1 µm Min. incremental motion 0.3 µm 0.3 µm typ. Bidirectional repeatability ±0.2 µm ±0.2 µm typ. Unidirectional repeatability 0.2 µm 0.2 µm typ. Pitch ±30 µrad ±50 µrad typ. Yaw ±30 µrad ±50 µrad typ. Max. velocity 350 mm/s 350 mm/s Reference switch repeatability 1 µm 1 µm typ. Mechanical properties Max. load capacity 50 N 50 N Max. push / pull force 4 N 7 N Max. holding force 3 N 6 N Drive properties Motor type 1 x U-164 PILine 2 x U-164 PILine ultrasonic piezo drive ultrasonic piezo drive Operating Voltage 60 V rms * 70 V rms * 168 V pp * 200 V pp * Electrical power 10 W** 15 W** nominal Current consumption 0.8 A** 1.5 A** Limit and reference switches Hall-effect Hall-effect Miscellaneous Operating temperature range 0 to +55 C 0 to +55 C Material Al (black anodized) Al (black anodized) Dimensions 95 x 95 x 21 mm 130 x 95 x 21 mm Mass 0.42 kg 0.65 kg ±5 % Cable length 1.5 m 1.5 m ±10 mm Connector MDR, 14-pin MDR, 14-pin Recommended controller/driver C single-axis C single-axis controller/driver controller/driver C drive electronics C-185.D64 drive electronics *Power to the motor is supplied by the drive electronics, which runs on 12 V DC **For driver electronics

15 M-674 Piezo Motor Actuator PILine RodDrive OEM Piezo Motor Linear Drive for Integration PI Subject to change without notice. This data sheet is superseded by any new release. The newest release is available for download at R2 07/06/ M-674 PILine RodDrives represent a level of integration between PILine OEM piezo linear motors such as P-664 and guided micropositioning systems such as the M-682 series stages. RodDrives may replace classical drive elements like rotary motor/leadscrew assemblies, or magnetic linear drives integrated into a micropositioner. Application Examples System Integration for Micropositioning Products Automation Handling Micromanipulation Biotechnology Metrology The M-674 PILine RodDrive, shown with C-184 OEM and C-185 bench-top driver electronics, provides 7 N pushing force and travel ranges of 50, 100 and 150 mm Drive-Component for Integration into Micropositioning Systems Travel Ranges to 150 mm Push/Pull Forces to 7 N Min. Incremental Motion to 0.05 µm Velocity to 450 mm/s Self-Locking at Rest They consist of a rod which is preloaded by piezo linear motors from two sides. Depending on the way of integration, either the rod or the motor block is coupled to the moving platform. Advantages of PILine Micropositioning Systems The ultrasonic piezoceramic drives used in PILine micropositioners have a number of advantages over classical drives: Higher Accelerations, up to 10 g Speeds up to 500 mm/s Small Form Factor Self-Locking When Powered Down No Shafts, Gears or Other Rotating Parts Non-Magnetic and Vacuum Compatible Drive Principle Working Principle RodDrives employ a patented ultrasonic drive developed by PI. The highly compact, integrated P-664 piezomotors can provide velocities of 450 mm/s, together with high resolution and holding force. The maximum travel is determined by the length of the rod and is basically unlimited. Customized adaptations in terms of operating and holding force are feasible by varying type and number of motors used. Because the integrated ceramic motors are preloaded against the rod, RodDrives resist motion with an intrinsic holding force when at rest. The result is very high position stability without the heat dissipation common with conventional linear motors. Furthermore, there are no gears, leadscrews or other mechanical components to contribute play or backlash. Variety of Drivers / Controllers PILine piezomotors require a drive electronics for exciting the ultrasonic oscillations. The drive electronics is available as OEM board, stand-alone device or integrated inside a closedloop motion controller and therefore not included in the delivery. Ordering Information M PILine RodDrive, 50 mm, 7 N M PILine RodDrive, 100 mm, 7 N M PILine RodDrive, 150 mm, 7 N Closed-Loop Operation: Optimized for High Velocity and Rapid Step/Settling Together with a position sensor, RodDrives can be operated in closed-loop with the C-866.D64 piezo motor controller. This specialized servocontroller also integrated the motor drive electronics and enables highly constant speeds up to 350 mm/s with very short settling times (10 s of msecs). RodDrives can also be operated with conventional servocontrollers. In this case, the C-185 (to be ordered separately) external drive electronics is required which accepts a ±10 V analog signal from the controller. Note The products described in this document are in part protected by the following patents: US-Pat. No. 6,765,335 Constancy of closed-loop velocity at 200 mm/s of an integrated M-674 RodDrive

16 L1 L2 1 R1,25 5 7,9 L3 38 4,4 0, R2,45 3,1 1,62 1,6 The M-674 integrated into a Micropositioning Stage Dimensions of the M RodDrive in mm Technical Data Models M-674 M-674 M-674 Units Tolerance M M M Motion and positioning Travel range mm x Minimum incremental motion, open-loop 0.05* 0.05* 0.05* µm typ. Max. velocity mm/s Max. acceleration m/s Mechanical properties Stiffness when powered down 5** 5** 5** N/µm ±10 % Holding force when powered down N max. Push / pull force N max. Drive properties Resonant frequency khz, typ. Integrated piezo motor 2 x PILine P x PILine P x PILine P-664 (Dual Motor) (Dual Motor) (Dual Motor) Motor voltage range 200 (peak-peak)*** 200 (peak-peak)*** 200 (peak-peak)*** V 100 (RMS)*** 100 (RMS)*** 100 (RMS)*** Operating voltage drive electronics V Max. elec. power consumption W drive electronics Miscellaneous Operating temperature range -20 to to to +50 C Body material PEEK-PTFE PEEK-PTFE PEEK-PTFE Mass kg ±5 % Cable length mm ±10 mm Connector LEMO connector LEMO connector LEMO connector LEMO connector Recommended controller/driver C-184.D64 OEM drive C-184.D64 OEM drive C-184.D64 OEM drive (see p ) electronics board electronics board electronics board C-185.D64 driver C-185.D64 driver C-185.D64 driver C-866.D64 Controller for C-866.D64 Controller for C-866.D64 Controller closed-loop operation closed-loop operation closed-loop operation Dimensions 38 x 38 x 8 plus friction bar 38 x 38 x 8 plus friction bar 38 x 38 x 8 plus friction bar mm * The minimum incremental motion is a typical value that can be achieved in the open-loop mode of a piezomotor stage. To reach the specs it is important to follow the mounting guidelines of the OEM-motors. ** Stiffness at 25 C. 1 N/µm at 50 C. *** The operationg voltage is supplied by the drive electronics. 17

17 P-620 P-629 Flexure Scanning Stages PIHera Long-Range X & XY Piezo Nanopositioning Stages with Direct Metrology PI Subject to change without notice. This data sheet is superseded by any new release. The newest release is available for download at R1 06/02/ P-620 P-629 PIHera flexure systems are XY piezo-nanopositioning stages featuring travel ranges from 60 to µm. Despite the increased travel ranges, the units are extremely compact and provide sub-nanometer resolution. The long travel range is achieved with a newly designed, friction-free and extremely stiff flexure system, which also offers rapid response and excellent guiding accuracy (typically less than 5 µrad pitch/yaw over the full travel range). Application Examples (Dynamic) interferometry Microscopy Nanopositioning Biotechnology Quality assurance Semiconductor technology P-621.2CD, P-622.2CD and P-625.2CD PIHera XY piezo nano-translation stages, from left to right (CD for size comparsion). X & XY-Travel to 1500 µm Compact Design Resolution <1 nm Frictionless Precision Flexure Guiding System PICMA High-Performance Piezo Drives Direct Metrology with Capacitive Sensors for Highest Precision Up to 0.02 % Position Accuracy X, XY, Z, XYZ Versions Vacuum-Compatible Versions Superior Accuracy Through Direct-Motion Metrology with Capacitive Sensors The capacitive-sensor-equipped versions provide motion linearity to 0.02 % with effective resolution in the sub-nanometer range. PI capacitive sensors are absolute-measuring, directmetrology devices that boast very high bandwidth and exhibit no periodic errors. Unlike conventional sensors, capacitive sensors measure the actual distance between the fixed frame and the moving part of the stage. They detect errors contributed by all components in the drive train from the actuator through the flexures to the platform. This results in higher motion linearity, long-term stability, phase fidelity, and because external disturbances are seen by the sensor immediately a stiffer, faster-responding servo-loop. See p. 2-4 ff. and p. 5-2 ff., main PI catalog for more info. Nanometer Precision in Milliseconds One of the advantages of PIHera stages over motor-driven positioning stages is the rapid response input changes and fast and precise settling behavior. Furthermore our new digital control electronics with DDL (Dynamic Digital Linearization) can be used to increase linearity and effective bandwidth in scanning applications by up to 1000-fold (see p. 6-16, main PI catalog). Working Principle / Reliability PIHera stages are equipped with the award winning PICMA piezo drives, integrated into a sophisticated flexure guiding system. The flexures are FEA-modeled for zero-friction and exceptional guiding precision. The ceramic-encapsulated PICMA drives are more robust than conventional piezo actuators, featuring superior lifetime and performance in both dynamic and static applications. Because guidance, actuators and sensors are all frictionless and maintenance-free, these nanopositioning systems achieve outstanding levels of reliability. Single-Axis Versions See p. 2-40ff, main PI catalog for X and Z versions. Multi-axis combinations can be assembled without adapters. Notes See the Selection Guide, p ff., main PI Catalog for for comparison with other nanopositioning systems. Ordering Information P-620.2CD/CL* PIHera XY Nanopositioning System, 50 µm, Capacitive Sensors P L PIHera XY Nanopositioning System, 60 µm, Open-Loop, LEMO Connectors P-621.2CD/CL* PIHera XY Nanopositioning System, 100 µm, Capacitive Sensors P L PIHera XY Nanopositioning System, 120 µm, Open-Loop, LEMO Connectors P-622.2CD/CL* PIHera XY Nanopositioning System, 250 µm, Capacitive Sensors P L PIHera XY Nanopositioning System, 300 µm, Open-Loop, LEMO Connectors P-625.2CD/CL* PIHera XY Nanopositioning System, 500 µm, Capacitive Sensors P L PIHera XY Nanopositioning System, 600 µm, Open-Loop, LEMO Connectors P-628.2CD/CL* PIHera XY Nanopositioning System, 800 µm, Capacitive Sensors P L PIHera XY Nanopositioning System, 1000 µm, Open-Loop, LEMO Connectors P-629 PIHera X& XY Nanopositioning Systems, to 1500 µm Travel *.2CD with Sub-D Connector *.2CL with LEMO Connectors Vacuum versions to 10-9 hpa are available as part numbers P-62x.2UD X & Z Versions: See separate datasheets. Custom sizes & specifications available!

18 For Controllers, X & Z Versions and other Piezo Flexure Nanopositioning Stages Request the Main PI Catalog or Download from P-628.1CD (right, singleaxis) and P-628.2CD (XY) nanopositioning stages with 1000 µm travel range. PIHera XYZ combination. Dimensions of the P-62x.2CD/.2CL/.20L in mm, decimal places separated by commas. Index Technical Data Models # P-620.2CD/ P-621.2CD/ P-622.2CD/ P-625.2CD/ # P-628.2CD/ P-62x.20L Units S. p P-620.2CL P-621.2CL P-622.2CL P-625.2CL # P-628.2CL Main Catalog Active axes X, Y X, Y X, Y X, Y X, Y X, Y Min. open-loop travel -20 to 120 V per axis see P-62x.2CD µm A2 Closed-loop travel per axis µm A5 Integrated feedback sensor capacitive capacitive capacitive capacitive capacitive - B * Closed-loop / open-loop resolution 0.2 / / / / / / see P-62x.2CD nm C1 Closed-loop linearity (typ.) % Stiffness see P-62x.2CD N/µm D1 Push / pull force capacity (in X and Y) 10/5 10/8 10/8 10/8 10/8 see P-62x.2CD N D3 Max. load see P-62x.2CD N D4 Lateral force limit see P-62x.2CD N D5 Tilt ( X, Y ) (typ.) see P-62x.2CD µrad E1 Electrical capacitance per axis see P-62x.2CD µf ±20% F1 Dynamic operating current see P-62x.2CD µa/(hz x µm) F2 coefficient (DOCC) Unloaded resonant frequency 800/ / / / /75 see P-62x.2CD Hz ±20% G2 (upper / lower axis) Resonant 50 g load 395/ / / /120 85/60 see P-62x.2CD Hz ±20% G3 (upper / lower axis) Resonant 100 g load 300/ / / /105 75/55 see P-62x.2CD Hz ±20% G3 (upper / lower axis) Operating temperature range bis C H2 Voltage Connection D ** D ** D ** D ** D ** VL J1 Sensor Connection D ** D ** D ** D ** D ** - J2 Weight (with cables) g ±5% Body material Al Al Al Al Al Al L Recommended amplifier/controller Large variety of digital and analog controllers: see the main PI Catalog or go to * For calibration info see p. 2-8, main PI Catalog. Resolution of PI piezo nanopositioners is not limited by friction / stiction. The value given is noise equivalent motion with E-710 controlle r. ** Version.2CL with Lemo connectors. # P-629 Versions with 1500 µm travel 19

19 N-310 NEXACT OEM Miniature Linear Motor/Actuator Compact, High-Speed PiezoWalk Drive Self-locking when powered down; no holding current Zero backlash, no wear or maintenance, no mechanical components like gears or leadscrews. Non-Magnetic and Vacuum Compatible Operating Principle Ordering Information N NEXACT OEM linear drive, 20 mm, 10 N N NEXACT OEM linear drive, 20 mm, 10 N, Shifted Cable Exit Ask about custom designs Physik Instrumente (PI) GmbH & Co. KG Subject to change without notice. All data are superseded by any new release. The newest release for data sheets is available for download at Cat120E Inspirations / mm Standard Travel Range, Flexible Choice of the Runner Length Compact and Cost-Effective Design 0.03 nm Resolution** To 10 N Push/Pull Force Low Operating Voltage Self Locking at Rest, No Head Dissipation, Nanometer Stability Non-Magnetic and Vacuum-Compatible Working Principle Application Examples Semiconductor technology Wafer inspection Nano lithography Surface Measurement Technique Profilometry Microscopy N-310 Actuator with E-861 Servo-Controller (integrated drive electronics) N-310 NEXACT PiezoWalk linear drives feature travel ranges of 20 mm and push/pull force capacities to 10 N in a compact package of only 25 x 25 x 12 mm. With their high resolution, NEXACT drives, are ideal for high-precision positioning over long travel ranges. Motion in strong magnetic fields The N-310 can be operated in open-loop and closed-loop mode (with the addition of an external position sensor). A variety of NEXACT controllers facilitates the integration into microor nanopositioning applications. Advantages of PiezoWalk Piezo Stepping Drives NEXLINE and NEXACT drives offer several advantages over traditional drive technologies: Resolution in the picometer range Compact dimensions High drive forces from ten newtons (NEXACT ) up to several hundred newtons (NEXLINE ) High-dynamics performance with sub-microsecond response Working Principle for Application Flexibility NEXACT PiezoWalk technology overcomes the limitations of conventional nanopositioning drives and combines virtually unlimited travel ranges with high stiffness in a very small package. Furthermore, NEXACT actuators provide piezo-class resolution (far below one nanometer) and millisecond responsiveness. The special drive design reduces the operating voltage to 45 V and below. In operation, piezoceramic bending elements act on the runner, which is connected to the moving part of the application. The length of the runner determines the travel range. Force capacity, resolution and velocity are determined by the piezo geometry and drive electronics and are scalable. To move the runner over longer distances the stepping mode is used, whereas for distances smaller than one step, the linear (analog) mode enables high-dynamics positioning with resolutions far below one nanometer. Wear- and Maintenance-Free In contrast to ordinary DC or stepper motor drives, the PiezoWalk drives effect linear motion directly, without the need to transform rotation with mechanical elements such as gears, leadscrews and nuts. Therefore, mechanical limitations such as backlash and wear are eliminated and the drive is maintenance-free. Self-Locking PiezoWalk Piezo Stepping Drive NEXLINE and NEXACT exhibit high stiffness and are selflocking even when powered down due to the clamping action of the piezo actuators in the mechanics. This entails nanometer position stability at rest, with no heat dissipation or servo-dither. Controller and Drive Electronics Optimized for the Application NEXACT actuators require special drive electronics to control the complex stepping sequences. The E-860 series NEXACT controllers are a- vailable in different open-and closed-loop versions. For example, the E-861 includes a complete NEXACT servo-controller with low-noise, 24-bit drivers and a powerful DSP. It also comes with ample software for easy integration and highly effective computer control. For applications which do not require the highest resolution lower-priced drive electronics, ranging all the way to OEM boards, can be ordered. The products described in this document are in part protected by the following patents: German Patent No. P

20 N , dimensions in mm Translation stage with N-310 NEXACT drive. The positioner offers 20 mm travel range with an encoder resolution of 25 nm N , dimensions in mm Technical Data Model N , N Tolerance Active axes Motion and positioning Travel range 20 mm Step size (in step mode) 5 nm to 5 µm Travel range in analog operation 7 µm max. Open-loop resolution 0.03 nm** typ. Step frequency 1.5 khz* max. Max. speed 10 mm/s* max. Mechanical properties Push/Pull force (active) 10 N max. Drive properties Drive type NEXACT linear drive Operating voltage -10 V to +45 V Miscellaneous Operating temperature range 0 to 50 C Body material Stainless steel, non-magnetic Mass 50 g ±5 % Cable length 1.5 m ±10 mm Connector HD Sub-D connector 15 pin, single channel Recommended controller/driver E-860-series (see p. 1-20) *Depending on the control electronics. **Depending on the drive electronics. 1 nm with E-861. X

21 N-661 Miniature Linear Stage with NEXACT Drive PiezoWalk Drive Provides Nanometer Precision and Smooth Motion Physik Instrumente (PI) GmbH & Co. KG Subject to change without notice. All data are superseded by any new release. The newest release for data sheets is available for download at Cat120E Inspirations /10.18 Travel Range 20 mm Self Locking at Rest, no Heat Generation, no Servo Dither Compact Design: 70 x 50 x 20 mm Zero-Wear Piezo Stepping Drive, Ideal for Micro- and Nano- Manipulation Integrated Linear Encoder Option for Highest Accuracy with 20 nm Resolution Two Operating Modes: Continuous Stepping Mode and Continuously Variable, High-Dynamics Analog Mode for 30 pm Resolution** Up to 10 N Force Generation Dimensions of N-661 The N-661 miniature linear stage integrates a PiezoW alk NEXACT linear motor combined with a high-resolution linear encoder. It provides 20 mm travel and resolution down to the nanometer range. The compact N-661 nanopositioning stage is based on the NEXACT PiezoWalk drive. This dual-mode, high-performance piezo stepping linear motor can provide sub-nanometer resolution and high force, along with very rapid response. When run in its analog mode, fast oscillations with amplitudes up to 7 mi - crons and resolutions down to 30 pm can be achieved. This mode is of great value in highthroughput applications as well as in dynamic laser tun - ing, cell penetration applications, or even for active vibration damping. The stage is equipped with a precision guiding system and an optical linear encoder to enable highly repeatable positioning. Ordering Information N-661 Miniature NEXACT Translation Stage, 20 mm, Linear Encoder, 20 nm Resolution Available on request Ask about custom designs Application Examples Life science Photonics Laser tuning Motion in strong magnetic fields The products described in this document are in part protected by the following patents: German Patent No. P Technical Data (Preliminary) Model N-661 Active axes X Motion and positioning Travel range 20 mm Step size in stepping mode (open-loop) To 5 µm Integrated sensor Linear encoder Sensor resolution 20 nm* Travel range in analog mode 7 µm Open-loop resolution 0.03 nm** Closed-loop resolution 20 nm* Bidirectional repeatability 40 nm Pitch 50 µrad Yaw 50 µrad Step frequency 1.5 khz Max. velocity 10 mm/s* Mechanical properties Stiffness in motion direction 2.4 N/µm Max. load capacity 20 N Max. push / pull force (active) 10 N Max. holding force (passive) 15 N Lateral Force 50 N Drive properties Drive type NEXACT linear drive Operating voltage -10 to +45 V Miscellaneous Operating temperature range 0 to 50 C Material Aluminum Mass 150 g Cable length 1.5 m Connector 15-pin sub-hdd connector, one channel Recommended controller/driver E-861.1A1 Controller for NEXACT Linear Drives and Positioners (see p. 1-20) *With E-861. Depending on drive electronics. **Depending on the drive electronics. 1 nm with E-861.

22 E-861 PiezoWalk NEXACT Controller/Driver Networkable Controller for NEXACT Linear Drives and Positioners Ordering Information E-861.1A1 NEXACT Controller, 1 Channel, Linear Encoder Physik Instrumente (PI) GmbH & Co. KG Subject to change without notice. All data are superseded by any new release. The newest release for data sheets is available for download at Cat120E Inspirations / PiezoWalk System: E-861.1A1 NEXACT Controller For NEXACT Drives and Positioning Systems Complete System with Controller, Integrated Power Amplifiers and Software Open-Loop Operation, or Closed-Loop with Linear Encoder High Performance at Low Cost Daisy-Chain Networking for Multi-Axis Operation Non-Volatile Macro Storage for Stand-Alone Functionality with Autostart Macro I/O for Automation, Joystick for Manual Operation Parameter Changes On-the-Fly The new, compact E-861 controller is designed to operate NEXACT linear drives and closed-loop positioning systems using them, simply and precisely. In perfect harmony with the mechanics, the E-861 supports both motion modes of the PiezoW alk stepping drive: for longer moves, the stepping mode, and for moves shorter than typically 7 µm, the analog mode, which provides high-dynamics positioning with resolutions of less than 1 nm. The NEXACT drive design minimizes piezo operating voltages to 45 V and below. Flexible Automation E-861 controllers offer a number of features to support automation and handling. For example, macros can be stored in non-volatile memory. A programmable autostart macro allows stand-alone operation without external communication. Upon power - up, the macro with its internal command sequence is executed automatically. For easy synchronization of motion with internal or external trigger signals, four input and four output lines are provided. Multi-Axis Operation Up to 16 E-861 controllers can be networked and controlled over a single PC interface. Such daisy chain networks are flexible, can be extended at any time and are compatible with other PI controllers (e.g. DC servo-motor and stepper motor controllers). Easy System Setup, Comprehensive Software All parameters can be set and checked by software. System setup and configuration is done with the included PIMikroMove user -interface software. Interfacing to custom software is facilitated with included LabV iew drivers and DLLs. With the PI General Command Set (GCS), system programming is the same with all PI controllers, so controlling a system with a variety of different controllers is possible without difficulty.

23 Technical Data Model Function Drive type Channels 1 Motion and control Servo characteristics Trajectory profile modes Encoder input Stall detection Input limit switch Input reference switch Electrical properties Output power Output voltage Current consumption Interfaces and operation Communication interfaces Motor connector Sensor connector Controller network I/O ports Command set User software Software drivers Supported functionality Manual control (optional) Miscellaneous Operating voltage E-861.1A1 Controller for NEXACT drives / systems N NEXACT linear drive P-I-D servo control, parameter change on-the-fly Trapezoidal Analog encoder input sine-cosine, interpolation circuit preset for differential transmission, 2 V pp amplitude and 2.27 V offset of the encoder signal Servo off, triggered by programmable position error 2 x TTL (pull-up/pull-down, programmable) 1 x TTL max. 40 W -10 to +45 V max. 2 A USB 1.0, RS-232 (9-pin (m) D-Sub) D-Sub 15-pin (f) High Density D-Sub 15-pin (m) High Density Up to 16 units on single interface 4 analog/digital in, 4 digital out (TTL) PI General Command Set (GCS) PIMikroMove, PI Terminal GCS-DLL, LabVIEW drivers Start-up macro; data recorder for categories like current position or velocity; internal safety circuitry: watchdog timer Joystick, Y-cable for 2D motion, pushbutton box 24 V included: external power supply, 24 V, 2.5 A Operating temperature range 0 to +50 C Mass 1.1 kg Dimensions 206 x 130 x 66 mm (with mounting rails) Index 1-21

24 C-867 Controller for PILine Piezo Linear Drives Servo-Controller with Integrated Driver for High-Speed Ultrasonic Piezo Motors Highly Specialized PID Servo-Controller The C-867 is based on a highly specialized DSP (Digital Signal Processor) to handle the PID servo-control algorithm as well as other system functions. Because of the motion properties typical for ultrasonic piezomotors, the controller has a number of advanced features, including dynamic control parameter adaption. By automatically switching between gainsets for dynamic and static operation optimized settling behavior of a couple of 10 milliseconds is achieved. The broadband encoder input (50 MHz) allows the use of high resolution encoders with the outstanding high accelerations and velocities PILine drives deliver. Ordering Information C Piezomotor Controller with Drive Electronics, Networkable, for PILine Systems Accessories: C Axis Analog Joystick C Y Y-Cable for Connecting 2 Controllers to C Physik Instrumente (PI) GmbH & Co. KG Subject to change without notice. All data are superseded by any new release. The newest release for data sheets is available for download at R1 09/06.0 Optimized for All PILine Ultrasonic Piezo Linear Motors High-Bandwidth Encoder Inputs Allow High Speed and Resolution PID Servo-Control with Dynamic Parameter Switching Integrated Piezo Motor Power Driver with Frequency Control USB, RS-232 and Analog Interfaces (e. g. for Joystick) Programmable TTL-I/Os for Flexible Automation Data Recorder Daisy-Chain Networking for up to 16 Axes Powerful Macro Programming Language, e. g. for Stand-Alone Operation Extensive Software Support, LabVIEW, DLL,... The C-867 controller was especially designed for closed-loop positioning systems equipped with PILine piezo linear motor drives. In addition to the digital servo-controller, the compact case also contains the driver electronics for the piezo ceramic motors. Application Examples Biotechnology Fiber positioning Automation Photonics / integrated optics Quality assurance testing Testing equipment The C-867 piezo motor controller and the M-692 low-profile positioner with integrated PILine ceramic linear drive The controller can be operated by a host PC either via a USB port or an RS-232 interface. Alternatively, stand-alone operation is possible by uploading macro command sequences to the internal non-volatile memory, or through a joystick or a push-button box. Highest Stability by Frequency Control The integrated piezomotor drive electronics supports all PILine ultrasonic piezomotors used for the M-66x to M-69x positioning stage series. Drift in the mechanical frequency of the motor caused by temperature or load changes is automatically compensated by a frequency-control loop which adjusts the operating frequency of the driving voltage. This leads to highest stability in pushing force, velocity and closed-loop control. Software / Programming In addition to the user software for setup, system optimization and operation, comprehensive LabVIEW and DLL libraries are provided. The PIMikroMove user software provides the PITuningTool for system performance optimization. Graphic displays show the system's behaviour and facilitate parameter setting. Advantages of PILine Micro Positioning Systems PILine ultrasonic ceramic drives provide several advantages over classical motors and drivers: Smaller dimensions Self-locking when powered down; no holding current C-170.PB Push Button Box, 4 Buttons and 4LEDs Ask about custom designs! High acceleration up to 5 g High velocity up to 500 mm/s No leadscrews, gears or other mechanical components, no wear or maintenance No lubricants Non-magnetic and vacuum compatible operating principle

25 Technical Data (preliminary) Model C Function Controller and drive electronics for PILine piezomotors / systems Drive type PILine motors; single or dual U-161 to U-164 Channels 1 Motion and control Servo characteristics Programmable PID V-ff filter, parameter changes on the fly Trajectory profile modes Trapezoidal Encoder input A/B differential signals, 50 x 10 6 pulse/s Stall detection Servo off, triggered by programmable position error Limit switch 2 TTL (programmable) Reference switch 1 TTL (active high/low, programmable) Electrical properties Output power 15 W (max.) Output voltage 200 V pp (max.) Interfaces and operation Communication interfaces USB, RS-232 Motor connector MDR14 Controller network Up to 16 units on single interface I/O ports 4 analog/digital in, 4 digital out on mini DIN 9-pin digital: TTL analog: 0 to 5 V Command set PI General Command Set (GCS) User software PIMikroMove TM Software drivers GCS-DLL, LabVIEW drivers Supported functionality Start-up macro; macro; data recorder for recording parameters as motor input voltage, velocity, position or position error Manual control Pushbutton box, joystick (for 2 axes), Y-cable for 2D motion Miscellaneous Operating Voltage 24 VDC from external power supply (included) Current consumption 300 ma without motor Operating temperature range +5 to +40 C Mass 1010 g Dimensions 206 x 130 x 66 mm (without mounting rails)

26 C-184 C-185 Piezo Motor Driver Open-Loop PILine Drive Electronics, OEM Boards and Stand-Alone Units C-185.D64 single-channel bench-top driver electronics with PILine M-674 RodDrive featuring travel ranges up to 150 mm and 7 N drive force at 450 mm/s For PILine ultrasonic OEM motors and positioners Easy analog drive for example external motion controller Available as Cost-Effective OEM board and Plug-and-Play Desktop Unit Advantages of PILine Micropositioning Systems The ultrasonic piezoceramic drives used in PILine micropositioners have a number of advantages over classical drives: Higher Accelerations, up to 10 g Speeds up to 500 mm/s Small Form Factor Self-Locking When Powered Down No Shafts, Gears or Other Rotating Parts Non-Magnetic and Vacuum- Compatible Drive Principle Notes The products described in this document are in part protected by the following patents: US Pat. No. 6,765,335 German Patent No Ordering Information C Analog OEM Driver Board for PILine P-661 Motors C Analog Stand-Alone Drive Electronics with Power Supply for PILine P-661 Motors C Analog OEM Driver Board for PILine P-664 Motors C Analog Stand-Alone Drive Electronics with Power Supply for PILine P-664 Motors C-184.D64 Analog OEM Driver Board for PILine RodDrive M-674 C-185.D65 Analog Stand-Alone Drive Electronics with Power Supply for PILine RodDrive M-674 C Analog OEM Driver Board for PILine Translation Stages with P-665 Motors PI Subject to change without notice. This data sheet is superseded by any new release. The newest release is available for download at R1 07/06/ The C-184 OEM-board and C-185 stand-alone unit are single-channel driver electronics for PILine ultrasonic piezomotors and PILine stages. Piezomotor drive electronics convert analog input signals into the high-frequency drive signals required to excite the required oscillations in the piezomotor stator which and cause the motion. Both the C-184 and C-185 are available in four versions, for use with different motors and translation stages. OEM and Integrated Electronics The philosophy behind the design of PILine ultrasonic drives dictates that they be easily adaptable to customer requirements. This includes making the drive electronics both independent of control signal type and available either as an OEM board or as a standalone unit in its own case. While the OEM boards are the most economic solution for large quantities, the standalone units make it possible to plug a system with PILine stages together and put it into operation quickly and easily, for example for system evaluation purposes. Analog Control Both drivers control the motor speed based on an analog signal from 0 to ±10 V. With an external position sensor and a servo controller, it is possible to set up a very fast, closedloop system. For optimum closed-loop system performance, the C-866 piezo servo-controller is recommended. C Analog Stand-Alone Drive Electronics with Power Supply for PILine Translation Stages with P-665 Motors C OEM driver board with PILine P-664 OEM motor

27 104,2 49, Dimensions of single-channel bench-top C-185 in mm Technical Data Models C-184 C-185 Function Analog drive electronics (OEM board) for PILine Analog single-channel driver box for PILine C : P-661 Motors & Positioners C : P-661 Motors & Positioners C : P-664 Motors & Positioners C : P-664 Motors & Positioners C-184.D64: M-674 RodDrive C-185.D64: M-674 RodDrive C : M-665 Positioners C : M-665 Positioners Channels 1 1 Electrical properties Control in Differential, -10 V up to +10 V, polarity controls direction Differential, -10 V up to +10 V, polarity controls direction Operating voltage 12 V, ±10 % 12 VDC external power supply (included) Output power / channel Model dependent: Model dependent: C : 5 W C : 5 W C : 10 W C : 10 W C-184.D64: 15 W C-185.D64: 15 W C : 5 W C : 5 W Output voltage / channel Model dependent: Model dependent: C : 120 V PP / 42 V RMS, 210 khz C : 120 V PP / 42 V RMS, 210 khz C : 168 V PP / 60 V RMS, 155 khz C : 168 V PP / 60 V RMS, 155 khz C-184.D64: 200 V PP / 100 V RMS, 155 khz C-185.D64: 200 V PP / 100 V RMS, 155 khz C : 600 V PP / 170 V RMS, 43 khz C : 600 V PP / 170 V RMS 43 khz Interfaces and operation Motor connector Solder pads LEMO connector or MDR connector, 14-pin I/O ports Solder pads Sub-D connector, 15-pin Miscellaneous Operating temperature range +10 to +50 C +10 to +50 C Weight 15 g 690 g Dimensions 65 x 38 mm 174 x 104 x 49 mm (without ground connection, pads and fitting panel) 182 x 104 x 49 mm (with ground connection) 23

28 C-663 Stepper Motor Controller Mercury TM Step Compact Networkable Stepper Motor Controller and handling tasks in research and industry in a very costeffective way. Programming is facilitated by the high-level mnemonic command language with macro and compoundcommand functionality. Macros can be stored in the nonvolatile memory for later recall. Ordering Information C Mercury TM Step Stepper Motor Controller with Wide-Range Power Supply C-663.PS Wide-Range Power Supply for Mercury TM Step, 24 V PI Subject to change without notice. This data sheet is superseded by any new release. The newest release is available for download at 06/10/4.0 C-663 Mercury TM Step stepper motor controller for cost-sensitive micropositioning tasks High Performance at Low Cost Stand-Alone Functionality Network Capability for Multi-Axis Applications Compatible and Networkable with C-862 Mercury TM DC-Motor Controllers Joystick Port for Manual Control Non-Volatile Macro Memory Parameters Changeable On-the-Fly The Mercury TM Step stepper motor controller is the perfect solution for cost-effective and flexible motion control applications where a precision positioner is to be controlled by a PC or PLC (programmable logic controller). The C-663 supplements the successful C-862 Mercury TM servo motor controller. Microstepping of 1/16 full step (up to 6400 steps/rev. with PI 242 Application Examples Flexible automation Handling Quality control Testing equipment Photonics applications Fiber positioning stepper motors) provides for ultra-smooth, high-resolution motion. Multi-Axis Control, Combination of DC & Stepper Motors The networking feature allows the user to start out with one Mercury TM controller and add more units later for multiaxis setups. The Mercury TM Step stepper motor controller shares its programming language with the well-established Mercury TM DCmotor controller. Up to 16 Mercury TM controllers (DC and stepper) can be daisy chained and operated from one computer. Flexible Automation The C-663 offers a number of features to achieve automation For easy synchronization of motion with internal or external trigger signals four input and four output lines are provided. A joystick can also be connected for manual control. Stand-alone capability is provided by a user-programmable autostart macro to run automation tasks at power up (no runtime computer communication required!). User-Friendly: Comprehensive Software Package and Two Interface Options Easy data interchange with laptop or PC is possible via the USB interface. T o facilitate industrial applications, an RS- 232 interface is also standard. The included software supports networking of multiple controller devices. LabVIEW TM drivers and Windows DLLs allow for easy programming and integration into your system. Mercury TM Step controllers can also be operated using the PI General Command Set (GCS) via a DLL. PI-GCS allows networking of different PI-controllers such as piezo drivers and multi-axis servo controllers with minimal programming effort. Contents of Delivery Each Mercury TM Step comes with a wide-range power supply, RS-232 communications cables, a USB cable and a comprehensive software package.

29 Mercury TM Step controller with M S precision translation stage Technical Data Models C-663 Function Stepper motor controller, stand-alone capability Drive type 2-phase stepper motor Channels 1 Motion and control Trajectory profile modes Trapezoidal, point-to-point Microstep resolution 1/16 full step Limit switches 2 x TTL, programmable Reference switches 1 x TTL, programmable Motor brake 1 x TTL, programmable Electrical properties Operating voltage 15 to 30 V Current limitation per motor phase 1000 ma Interface and operation Interface/Communication USB, RS-232 (bus architecture) Motor connector Sub-D 15 (f) Controller network Up to 16 units* on single interface I/O ports 4 analog/digital in, 4 digital out Command set Mercury TM native command set, GCS User software MMCRun, PIMikroMove Software drivers GCS (PI General Command Set)-DLL, LabVIEW TM drivers, native Mercury TM DLL Supported functionality Start-up macro Manual control Joystick, Y-cable for 2D motion, pushbutton box Miscellaneous Operating temperature range 0 to 50 C Mass 0.3 kg Dimensions 130 x 76 x 40 mm 3 *16 with USB; 6 with RS-232 (depending on RS-232 output driver of PC) Request the 500 p. Hardbound PI Catalog 25

30 C-843 DC Servo Motor Controller Servo Motion Controller/Driver PCI Board for 2 / 4 Axes accuracy. Position, velocity, acceleration and several other motion parameters can be programmed individually for each axis on-the-fly. High-bandwidth counters (5 MHz) support differential encoder feedback (incremental rotary encoders or linear scales) for fast and accurate positioning. Ordering Information C DC-Motor Controller PCI PC Board, 2-Axis C DC-Motor Controller PCI PC Board, 4-Axis C-843.JS Joystick and PCI Interface Board for C-843 Motor Controller I/O for Flexible Automation In addition to 3 TTL inputs per channel for limit and reference signals, 16 more I/O lines are available for flexible automation tasks (trigger functions, etc.). The C-843 also features motor-brake output lines (e.g. for M-531.DDB stages). PI Subject to change without notice. This data sheet is superseded by any new release. The newest release is available for download at R1 06/08/07.0 C DC-motor controller board with M-110.DG linear stage, M-235.5DG heavy duty linear actuator, M-511.DD direct drive translation stage and M-501.1DG vertical stage. No external amplifier is required to drive any of these or other PI stages. Small motors are driven through the C-843 s onboard linear amplifiers, direct-drive PI stages (e.g. M-511.DD) employ ActiveDrive controlled off the C-843 s PWM outputs. Two and Four Axis Version Very Cost-Effective: Servo Amplifiers On-Board Additional PWM Outputs for High-Power Motors Trapezoidal Curve, S-Curve and Velocity Profile 32 ksamples RAM for High-Speed Buffer Operations 16 I/O Lines for Flexible Automation Fast PCI communication, 120 µs for position read Motor-Brake Control Output Extensive Software Support General Command Set (GCS) Compatible The C-843 PCI motion controller card drives up to 4 axes of micropositioning equipment. Because there is no need for external servo-amplifiers, this new card is a very cost-effective, easy-to-set-up solution. On-Board Servo-Amplifiers Unlike other PCI controller cards, the new C-843 comes with on-board, low-noise linear amplifiers for the small DC motors used in most compact micropositioning stages and actuators. In addition, PWM outputs are available to drive more powerful equipment (all direct-drive translation and rotation stages from PI feature the integrated ActiveDrive PWM amplifiers, and also connect to the C-843 with no external power amplifiers). The PWM mode and linear amplifier mode can be programmed individually for each of the 4 (or 2) channels. High-Performance PID Control The C-843 employs a fast DSP (digital signal processor) providing high-performance PID motion control with many options for trajectory generation and filter settings for superior positioning and tracking High-Speed Buffering The integrated 32 k-sample trace memory allows online buffering (read and write) at integer multiples of the servoloop time of up to four independent system variables (positions, velocities, internal register contents, etc.) This allows the observation of the motion system and also performing customized trajectory profiles. Easy-to-Use Software / General Command Set (GCS) For ease of operation, the C-843 is compatible with the PI General Command Set, designed to allow flexible combinations with other PI motion controllers (fiber aligners, stepper-motor controllers and piezo controllers for ultra-fast, sub-nanometer motion control). For more information on GCS, see p. 9-28, main catalog. Communications to/from the board consist of packet-based messages passed via memory access. An interrupt line is provided so that the chipset can signal the PC when special conditions arise, such as reception of an encoder index pulse. For system programmers the C-843 offers direct access to the DSP. In addition to an ample array of software tools, such as LabView drivers and DLL libraries, the C-843 comes with the PIMikroMove operating software, which provides a convenient interface for stage operation including tuning tool, joystick operation, terminal and macro editor. To facilitate setup, any supported PI micropositioning system just needs to be selected from a PIMikroMove menu and all default control parameters will be set. 26

31 PIMikroMove tabular presentation of four connected axes with display of absolute and relative positioning input, current position, halt axis button, state and velocity setting. The Tuning Tool which is integrated in PIMikroMove demonstrates acquiring and displaying step and settle data of micropositioning systems. Controls allow adjustment of the PID parameters for best performance. Technical Data Models C-843 Function Axes Servo characteristics Profile modes Output power / resolution Current limitation Encoder input Stall detection Limit switches Reference switches I/O ports Motor connectors Interface/communication Command set PC plug-in DC-servo-motor controller board, 32-bit plug-and-play PCI-bus interface, supported by main boards with 3.3 V and 5 V PCI bus connectors (universal card) 2 (C ); 4 (C ) Programmable PID V-ff filter, parameter changes on-the-fly Trapezoidal, S-curve, velocity profile Analog 6 watts/channel (drawn directly from PC power supply), 12-bit D/A converters, PWM 10-bit, 24.5 khz 500 ma per channel (short-circuit-proof) AB (quadrature) differential TTL signals, 5 x 10 6 counts/s Servo off, triggered by programmable position error 2 TTL / axis (active high/low, programmable) 1 TTL / axis (active high/low, programmable) 8 TTL inputs, 8 TTL outputs 15-pin (f) sub-d per channel (2 on board + 2 on bracket for C ) PC PCI bus PI General Command Set 27

32 C-863 Mercury TM Servo Controller 1-Axis DC-Servo-Motor Controller with Network Feature For easy synchronization of motion with internal or external trigger signals four input and four output lines are provided. Ordering Information C Mercury DC-Motor Controller, 1 Channel, with Wide-Range Power Supply Physik Instrumente (PI) GmbH & Co. KG Subject to change without notice. All data are superseded by any new release. The newest release for data sheets is available for download at Cat120E Inspirations /10.18 The C-863 Mercury DC servo controller features USB and RS-232 interfaces and incremental encoder signal processing at 20 MHz bandwidth High Performance at Low Cost DC Servo-Motor Controller Supplies up to 30 W 20 MHz Encoder Input for High Speed & Resolution Macro Programmable Stand-Alone Functionality Network Capability for Multi-Axis Applications Non-Volatile EEPROM for Macros and Parameters Digital I/O Lines (TTL) Motor-Brake Control USB and RS-232 Interface Optional Joystick for Manual Control Works with All PI Micropositioners The latest generation Mercury C-863 servo motor controller is even more powerful and versatile than its predecessors. Easy data interchange with laptop or PC is possible via the USB interface. The RS-232 interface provides for easy integration in industrial applications. The compact design with its integrated amplifier makes it ideal for building high-performance, Application Examples Fiber positioning Automation Photonics / integrated optics Quality assurance testing Testing equipment cost-effective micropositioning systems. Flexible Automation The Mercury offers a number of features to achieve automation and handling tasks in research and industry in a very cost-effective way. Programming is facilitated by the highlevel mnemonic command language with macro and compound-command functionality. Macros can be stored in the non-volatile memory for later recall. Stand-alone capability is provided by a user-programmable autostart macro to run automation tasks at power up (no runtime computer communication required!). Multi-Axis Control, Combination of DC & Stepper Motors Up to 16 C-863 Mercury DC servo controllers and C-663 stepper motor controllers can be daisy-chained and addressed via the same interface. The networking feature allows the user to start out with one controller and add more units later for multiaxis setups. Easy Programming All servo and stepper motor controllers of the Mercury family can be operated using the PI general command set (GCS). PI-GCS allows networking of different controller units, both for piezo-based and motorized positioning units, with minimal programming effort. In addition, the C-863 can be programmed using the native command set of previous Mercury controllers. Cost-Saving Due to Integrated Amplifier and PWM Outputs The unique Mercury concept combines a high-performance motion controller and an integrated power amplifier in a small package. Additional PWM control outputs allow the direct operation of any DCmotor-driven PI micro-positioning system even highspeed stages such as the M-500 ActiveDrive Translation Stages reducing costs, increasing reliability and simplifying the setup. C Axis Analog Joystick for Mercury Controller C Y Y-Cable for Connecting 2 Controllers to C C-170.IO I/O Cable, 2 m, Open End C-170.PB Push Button Box, 4 Buttons and 4 LEDs Contents of Delivery Each controller is delivered with a wide-range power supply, RS-232 communication cable, a daisy-chain network cable and a comprehensive software package.

33 C-863 dimensions in mm Technical Data Model Function Motion and control Servo characteristics Trajectory profile modes Encoder input Stall detection Input limit switch Input reference switch Motor brake Electrical properties Output power Output voltage Current Interfaces and operation Communication interfaces Motor connector Controller network I/O ports Command set User software Software drivers Supported functionality Manual control (optional) Miscellaneous Operating voltage C DC-servo-motor controller, 1 channel P-I-D servo control, parameter change on-the-fly Trapezoidal, point-to-point AB (quadrature) single-ended or differential TTL signal, 20 MHz Servo off, triggered by programmable position error 2 x TTL (pull-up/pull-down, programmable) 1 x TTL 1 x TTL, software controlled max. 30 W (PWM) 0 to 15 V 80 ma + motor current (3 A max.) Operating temperature range +5 to +50 C Mass 0.3 kg Dimensions 130 x 76 x 40 mm USB, RS-232 (9-pin [m] sub-d) 15-pin (f) sub-d Up to 16 units on single interface 4 analog/digital in, 4 digital out (TTL) Mercury Command Set, GCS (via DLL) PIMikroMove, MMCRun GCS (PI General Command Set)-DLL, LabVIEW drivers, native Mercury DLL Start-up macro; internal safety circuitry: watchdog timer 2-axis joystick, Y-cable for 2D motion, pushbutton box 15 to 30 V included: external power supply, 15 V / 2 A 4-115

34 Headquarters GERMANY Physik Instrumente (PI) GmbH & Co. KG Auf der Römerstr Karlsruhe/ Palmbach Tel: +49 (721) Fax: +49 (721) info@pi.ws PI Ceramic GmbH Lindenstr Lederhose Tel: +49 (36604) Fax: +49 (36604) info@piceramic.de Subsidiaries USA (East) & CANADA PI (Physik Instrumente) L.P. 16 Albert St. Auburn, MA Tel: +1 (508) Fax: +1 (508) info@pi-usa.us USA (West) & MEXICO PI (Physik Instrumente) L.P Trabuco Rd., Suite 100 Irvine, CA Tel: +1 (949) Fax: +1 (949) info@pi-usa.us The new hardbound "Piezo Nano Positioning Inspirations 2009" catalog from PI is available now. The 530 page publication is the most comprehensive reference book on the fundamentals of nanopositioning, piezo systems and micropositioning technology yet. The new catalog contains 200 product families, 30% of them new, with more than 1000 drawings, graphs, images and technical diagrams. The 530 page publication presents PI's state-ofthe-art products and technologies-such as: Nanopositioning / Scanning Stages Scanning Microscopy Stages Steering Mirrors, Mirror Shifters Piezo Actuators Piezo Motors Piezo Controllers Motorized Stages & Actuators Motor Controllers Hexapod 6-Axis Alignment Systems The catalog also contains a tutorial on piezo technology and application examples of nanopositioning products in the following industries: Biotechnology / Life Sciences Semiconductor Technology Data Storage Technology Nanotechnology Aeronautics Astronomy Adaptive Optics Metrology / Laser-Systems Precision Machining JAPAN PI Japan Co., Ltd. Akebono-cho Tachikawa-shi Tokyo 190 Tel: +81 (42) Fax: +81 (42) info@pi-japan.jp CHINA Physik Instrumente (PI Shanghai) Co., Ltd. Building No Longdong Avenue Shanghai, China Tel: +86 (21) Fax: +86 (21) info@pi-china.cn FRANCE PI France S.A.S. 32 rue Delizy Pantin Cedex Tel: +33 (1) Fax: +33 (1) info@pifrance.fr PI Japan Co., Ltd. Hanahara Dai-ni Building, # Nishinakajima, Yodogawa-ku, Osaka-shi Osaka 532 Tel: +81 (6) Fax: +81 (6) info@pi-japan.jp UK & IRELAND PI (Physik Instrumente) Ltd. Trent House University Way, Cranfield Technology Park, Cranfield, Bedford MK43 0AN Tel: +44 (1234) Fax: +44 (1234) uk@pi.ws ITALY Physik Instrumente (PI) S.r.l. Via G. Marconi, Bresso (MI) Tel: +39 (02) Fax: +39 (02) info@pionline.it MinTransl Subject to change without notice Physik Instrumente (PI) GmbH & Co. KG