TABLE OF CONTENTS ABOUT ROTARY POSITIONERS...4 SR SR SR SR SR SR SR SR-5714C...

Transcription

1 Copyright 2017 SmarAct GmbH Specifications are subject to change without notice. All rights reserved. Reproduction of images, tables or diagrams prohibited. The information given in this catalog was carefully checked by our team and is constantly updated. evertheless it is not possible to fully exclude the presence of errors. In order to always get the latest information, please contact our technical sales team. SmarAct GmbH, Schuette-Lanz-Straße 9, D Oldenburg Phone: +49 (0) , Telefax: +49 (0) Internet: 1

2

3 TABLE OF COTETS ABOUT ROTARY POSITIOERS C

4 ABOUT ROTARY POSITIOERS SmarAct is offering different piezo-based rotary positioners with unlimited. The motors define the strength and speed, the used sensor the closed-loop, whereas the bearing defines the and rigidity of the rotary positioner. Some rotary positioners are based on four-point bearings. For example the 1908 rotary positioner is very compact and provides a 7 mm, which makes it suitable for applications with limited space. The 2013-S is an exceptionally compact, closed-loop nano positioner which can be delivered in a non-magnetic version, with an integrated preloaded ceramic bearing. The 4513, 5714 and 7021 rotary positioners are based on crossed roller bearings. The 4011, 7012 and are based on deep groove ball bearings. All of these rotary positioners are very rigid and allow high loads to be applied. Product Line Positioner Series SR C Mechanical Open-Loop Closed-Loop blocking torque [cm] max. normal force [] dimensions [mm 2 ] x x x x40 45 x x x x x x 90 height [mm] [g] [mm] [mm] [ ] step width [m ] scan range [m ] scan [μ ] < 2 < 1 < 1 < 1 < 1 < 0.5 < 0.5 < 0.5 < 0.5 < 1 angular speed [ /s] [khz] sensor types -S -S closedloop [μ ] -M MCS (H)CU -L MCS (H)CU compatibility -M, -L, -S I, -M, -L, -S M, -L, -S x 120 -S -S -S -S -S -S MCS HV HV, UHV HV, UHV HV HV HV HV HV, UHV HV HV, UHV HV 4

5 1908 < 300 μ 5 (500 g) 10-6 mbar 24.7 x 20 x 8.5 mm 3 max. normal force F 0.5 cm 5 positioner dimensions 24.7 x 20 x 8.5 mm 3 Ø 19 mm Ø 7 mm 13 g step width m 45 /s steel base (-ST) hard end stops, sample stub holder The 1908 is SmarAct s smallest standard rotary positioner. The very robust stainless steel bearing together with an of 7 mm enables a broad range of possible applications. -HV (10-6 mbar) 4x M1.6 x x n

6 2013 non magnetic < 2 μ available 3 (300 g) mbar 25.5 x 20 x 10.2 mm³ 0.5 cm max. normal force F 3 positioner dimensions 25.5 x 20 x 10.2 mm 3 Ø 15 mm 11 g step width m scan range > 8 m scan < 2 µ 45 /s Materials and Vacuum Options non-magnetic materials (-M) -HV (10-6 mbar), -UHV / -UHVT (10-11 mbar) sensor 25 µ closed-loop 25 µ MCS/SDC The 2013 is our lightest and smallest closed-loop rotary positioner. An integrated ceramic precision bearing is the reason for the ultra-high accuracy as well as the extremely low radial run-out. 2x M1.6 x 2.5 mm 4x M1.6 x n9.5 n x M1.6 x 1.0 mm 6

7 non magnetic 2812 < 1 µ available 3 (300 g) 10-6 mbar 24.7 x 20 x 8.5 mm 3 max. normal force F 3 cm 3 positioner dimensions 37.5 x 30 x 12 mm 3 Ø 28 mm Ø 9 mm 35 g step width m scan range > 4 m scan < 1 µ 5 /s 18.5 k Hz non-magnetic materials (-M) -HV (10-6 mbar), -UHV / -UHVT (10-11 mbar) sensor 25 µ closed-loop 25 µ MCS/SDC The 2812 is the smallest closed-loop rotary positioner with an of 9 mm. An integrated ceramic precision bearing is the reason for the ultra-high accuracy as well as the extremely low radial run-out. 4x 1 n.6 n9 n x M2 x Aperture: 9 mm 7

8 4011 < 1 μ 10 (1 kg) down to 10-6 mbar 40 x 40 x 11 mm³ 5 cm max. normal force F 10 positioner dimensions 40 x 40 x 11 mm 3 Ø 31 mm Ø 9 mm 60 g step width m scan range > 4 m scan < 1 µ 15 /s hard end stops (-E) higher blocking force (-D) -HV (10-6 mbar) sensor 15 µ closed-loop 15 μ MCS/SDC Clodsed-Loop with -L sensor 60 µ closed-loop 60 μ MCS/SDC 1 m (H)CU Clodsed-Loop with -M sensor 500 µ closed-loop 500 μ MCS/SDC 1 m (H)CU M2 (4x) max. depth 4mm 40 Ø31 30 Ø20 Ø x Ø3.2 Aperture: 7 mm 8

9 4513 < 1 μ 20 (2 kg) 10-6 mbar 45 x 45 x 13.5 mm³ max. normal force F 5 cm 20 positioner dimensions 45 x 45 x 13.5 mm 3 Ø 36 mm Ø 8 mm 89 g step width m scan range > 4 m scan < 1 µ 15 /s hard end stops (-E) higher blocking force (-D) -HV (10-6 mbar) Due to the high-load stainless steel bearing, the 4513 is very robust. Compared to the footprint, the height is relatively low, making this positioner an excellent choice for integration into flat positioning systems. sensor 15 µ closed-loop 15 μ MCS/SDC Clodsed-Loop with -L sensor 60 µ closed-loop 60 μ MCS/SDC 1 m (H)CU Clodsed-Loop with -L sensor 500 µ closed-loop 500 μ MCS/SDC 1 m (H)CU 35 n x M3 x 4 n x n3.3 Aperture: 9 mm 9

10 5018 < 1 μ 20 (2 kg) down to 10-6 mbar 50 x 50 x 16.5 mm³ max. normal force F 7 cm 20 positioner dimensions 50 x 50 x 16.5 mm 3 Ø 41 mm Ø 8 mm 100 g step width m scan range > 3.8 m scan < 1 µ 15 /s sensor 15 µ closed-loop 15 μ MCS/SDC Clodsed-Loop with -L sensor 60 µ hard end stops (-E) closed-loop 60 μ MCS/SDC higher blocking force (-D) -HV (10-6 mbar) 1 m (H)CU Clodsed-Loop with -M sensor 500 µ closed-loop 500 μ MCS/SDC 1 m (H)CU x M2 x 2.0 n x Aperture: 8 mm 10

11 5714 < 0.5 μ 25 (2.5 kg) down to 10-6 mbar 57 x 57 x 14 mm³ 5 cm max. normal force F 25 positioner dimensions 57 x 57 x 14 mm 3 Ø 57 mm Ø 25 mm 110 g step width m scan range > 2.3 m scan < 0.5 µ 9 /s higher blocking force (-D) -HV (10-6 mbar) sensor 15 µ closed-loop 15 µ MCS/SDC Designed with an of 25 mm, the robust 5714 can be used for a broad range of applications. 4x M3.0 x5.0 n25 n44 n x M2.0 x Aperture: 25 mm 11

12 5714C non magnetic < 0.5 μ 25 (2.5 kg) available down to mbar 57 x 57 x mm³ 5 cm max. normal force F 25 positioner dimensions 57 x 57 x mm 3 Ø 48 mm Ø 25 mm 105 g step width m scan range > 2.3 m scan < 0.5 µ 9 /s non-magnetic materials (-M) higher blocking force (-D) -HV (10-6 mbar), -UHV / -UHVT (10-11 m bar) sensor 15 µ closed-loop 15 µ MCS/SDC This robust positioner can be used also for applications in harsh environments, down to ultra-high environments. n30 n44 n57 n25 n30 n40 8x M2 x x M2 Aperture: 25 mm 12

13 7012 < 0.5 μ 25 (2.5 kg) down to 10-6 mbar 70 x 70 x 12 mm³ 10 cm max. normal force F 25 positioner dimensions 70 x 70 x 12 mm³ Ø 60 mm Ø 30 mm 100 g step width m scan range > 2.5 m scan < 0.5 µ 9 /s higher blocking force (-D) -HV (10-6 mbar) sensor 15 µ closed-loop 15 µ MCS/SDC 4 x Ø x M3 4 Ø

14 7021 non magnetic < 0.5 μ 25 (2.5 kg) available down to mbar 90 x 90 x 21 mm³ max. normal force F 10 cm 25 positioner dimensions 90 x 90 x 21 mm 3 Ø 70 mm Ø 25 mm 400 g step width m scan range > 3.1 m scan < 0.5 µ 9 /s sensor 15 µ closed-loop 15 µ MCS/SDC non-magnetic materials (-M) higher blocking force (-D) -HV (10-6 mbar), -UHV / -UHVT (10-11 m bar) Currently, the 7021 is our strongest rotary positioner and frequently chosen for heavy duty applications. 4x M3 x n90 8x 4 n.1 n n80 Aperture: 82 mm 14

15 12012 < 1 μ 20 (2 kg) down to 10-6 mbar 120 x 120 x 12 mm³ max. normal force F 15 cm 20 positioner dimensions 120 x 120 x 12 mm 3 Ø 110 mm Ø 82 mm 320 g step width m scan range > 4.0 m scan < 1 µ 10 /s higher blocking force (-D) -HV (10-6 mbar) sensor 5 µ closed-loop 5 µ MCS/SDC At the moment, the is our biggest rotary positioner and mostly chosen for special applications where a big and highest precision is absolutely essential. 4 x M Ø110 Ø Ø x Ø3.20 Aperture: 82 mm 15

16 16