PPS-28. Precision Piezo Stage Reference Manual. S e r i e s. (Open and Closed Loop Versions)

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1 PPS-28 S e r i e s Precision Piezo Stage (Open and Closed Loop Versions)

2 PPS-28 Piezo Positioner Stage Rev 3.02 MICRONIX USA, LLC Barranca Parkway, E-106 Irvine, CA Tel: Fax:

3 Contents 1. Introduction Product Description Recommended Controllers Technical Data Load Characteristics Model configurations PPS-28 Order Numbers Preparing to Install the PPS Installation Preparation Package Contents Installing the PPS PPS-28 Installation General Mounting X-Y Mounting Connecting the PPS Atmospheric Environments Open Loop Installation & Wiring Diagram Closed Loop/Encoder Installation & Wiring Diagram Vacuum Environments Handling and Preparation Open loop Installation & Wiring Diagram Closed Loop/Encoder Installation & Wiring Diagram Dimensions PPS-28 20mm with Digital Encoder PPS-28 20mm with Analog Encoder Stacking Configurations Configuration Examples (Additional configurations available upon request) Supplementary Information Maintenance Units and Conventions A. Appendix 15 A.1 DB-9 Male Motor Connector A.2 2 Phase Piezo Motor Wiring Diagram A.3 Open Loop Vacuum Wiring Diagram

4 A.3.1 Straight Through 9-Pin Feed Through A.4 Using the Encoder Module A.4.1 Encoder Module Pin-out... Error! Bookmark not defined. A.4.2 Operating and Electrical Specifications... Error! Bookmark not defined. A.4.3 Output Signals & Signal Termination for A quad B, Index and limits A.4.4 Resolution A.4.5 Digital Encoder Wiring Diagram A.4.6 Straight Through 25-Pin Feed Through A.5 Using an Analog Encoder A.5.1 Analog Encoder Overview A.5.2 Encoder Pin-out A.5.3 Operating and Electrical Specifications A.5.4 Analog Output (Pins 1,2,6, and 7) A.5.5 Index Window (Pins 3) A.5.6 Resolution A.5.7 Analog Encoder Wiring Diagram A.5.8 Straight Through 15-Pin Feed Through

It utilizes our patent-pending multi-phase piezo motor resulting in high speed (>2mm/s) and high blocking force (>2N).

5 1. Introduction 1.1 Product Description The PPS-28 is a high-precision, long travel linear piezo stage. Miniature cross-roller bearings assure high stiffness and guiding accuracy for loads up to 50N (Horizontal orientation). It utilizes our patent-pending multi-phase piezo motor resulting in high speed (>2mm/s) and high blocking force (>2N). The PPS-28 is available in travel lengths of up to 103mm, and an optional linear encoder provides nanometer repeatability. Vacuum, Ultra High Vacuum (10-9 torr) and/or Cryo (<4 Kelvin) compatible versions are available. Carriage Features: Travel ranges of 26mm, 35mm, 51mm, 76mm, and 102mm Load capacity up to 5kg Optional linear encoder Scale Bracket Bearings Base Encoder Scale Encoder Head Encoder Bracket PPS-28 20mm Open Loop Or Internal 10nm Encoder (Shown in center position) PPS-28 20mm with external 2nm encoder (Shown in center position) PPS-28 20mm with external Analog encoder (Shown in center position) 3

6 1.2 Recommended Controllers The following controllers are available from MICRONIX USA: MMC-100 MMC Technical Data Motor Speed Max. (mm/sec) Resolution Typical (nm) Bi-directional Repeatability (nm) Uni-directional Repeatability (nm) Accuracy (µm) PM (MMC-100), 10 (MMC-110) <1 (open loop), 2 (digital encoder), 10 (analog encoder) N/A (open loop), ± 20 (digital encoder), ±50 (analog encoder) N/A (open loop), 20 (digital encoder), 50 (analog encoder +/- 3 (+/- 1 on request) 1.4 Load Characteristics Load Characteristics Fx(N) Fy(N) Fz(N) Mx(Nm) My(Nm) Mz(Nm) PM

7 2. Model configurations 2.1 PPS-28 Order Numbers Order No. PPS Piezo Motor PM mm Travel 1 51mm Travel 3 76mm Travel 4 102mm Travel 5 Open Loop 0 Analog (1Vpp), 10nm 2 Digital, 2nm 3 No Limit Switch 0 Non-vacuum 0 Vacuum prepared, 10-6 mbar 6 Vacuum prepared, 10-9 mbar 9 Contact MICRONIX USA for custom applications and stacking configurations. 5

8 3. Preparing to Install the PPS Installation Preparation When mounting the stage it is important to consider the flatness of the mounting surface, as the stage will conform to the shape of that mounting surface. A surface that is not flat can adversely affect the performance and structural integrity of the stage. The stage is calibrated and guaranteed to be within specification at 20 C ±5 C unless otherwise specified. Be sure to use the stage under the following conditions: Mount to a clean and flat surface which is free of debris, burrs or dings An indoor atmosphere free of corrosive gasses, and condensation Temperature range of 0-40 C Relative humidity between 20-80% Locate away from water, heat, and electrical noise 3.2 Package Contents If product is damaged or there are missing components, contact MICRONIX USA immediately. Do not discard product packaging in case of return shipment. Package Should Contain: PPS-28 Linear Stage Any other previously agreed upon components such as a controller 6

4. Installing the PPS-28 All mounting patterns require M2.5 screws for mounting and M1.5 x 5mm dowel pins for precision alignment.

PPS-28 Installation 4.1.1 General Mounting For general mounting configurations, mount the base to the mounting surface.

(Please note, it is possible to move the carriage manually without damaging the stage) Requires: 2x M1.5 x 5mm Dowel Pins 2x M2.

9 4. Installing the PPS-28 All mounting patterns require M2.5 screws for mounting and M1.5 x 5mm dowel pins for precision alignment. Additional brackets and screws may be needed for custom applications. 4.1 PPS-28 Installation General Mounting For general mounting configurations, mount the base to the mounting surface. Align carriage with clearance holes to access base mounting pattern. (Please note, it is possible to move the carriage manually without damaging the stage) Requires: 2x M1.5 x 5mm Dowel Pins 2x M2.5 x 5mm Socket Head Cap Screws (optional) 2x M2 x 5mm Socket Head Cap Screw for ear mounts Clearance Hole Direction of Travel Customer Supplied Base Plate or Mounting Surface 1. Align Carriage with Clearance Hole. Install Dowel Pins and M2 Socket Head Cap Screw 2. Align carriage with remaining clearance hole and install second M2 Socket Head Cap Screw Travel A B 26mm mm mm mm

4.1.2 X-Y Mounting For additional mounting configurations see section 8.

without damaging the stage) Travel A B 26mm 45 37 51mm 90 82 76mm 120 112 102mm 150

5 Button Head Screws 2x M2 x 4mm Socket Head Screws Direction of Travel Y-Axis

Install Dowel Pins and M2 Socket Head Cap Screw 1.

10 4.1.2 X-Y Mounting For additional mounting configurations see section 8. Stacking Configurations (Please note, it is possible to move the carriage manually without damaging the stage) Travel A B 26mm mm mm mm Requires: 4x M1.5 x 4mm Dowel Pins 4X M2.5 Button Head Screws 2x M2 x 4mm Socket Head Screws Direction of Travel Y-Axis Stage 2. Align X-Axis Stage Carriage with Clearance Holes. Install Dowel Pins and M2 Socket Head Cap Screw 1. Align Carriage with remaining clearance holes and install second M2 Socket Head Cap Screw Note: For stages assembled in an XY configuration in factory do not require disassembly for base mounting 8

11 5. Connecting the PPS Atmospheric Environments For controller information refer to the appropriate MMC controller manual Open Loop Installation & Wiring Diagram Connecting the PPS-28 in an open loop configuration only requires that the D- sub 9 Pin Motor Cable be connected to a compatible controller. No other cables or components are needed Closed Loop/Encoder Installation & Wiring Diagram Using the PPS-28 stage with an encoder requires a closed loop compatible controller (MMC-100 or MMC-110) that recognizes encoder feedback. Connect the stage as shown below Analog Encoder Wiring Diagram 9

12 Digital Encoder Wiring Diagram For a PPS-28 with a digital encoder, connect the stage as shown below using the supplied 15 to 9 pin cable to connect the Encoder Module to the Controller. PPS-28 Shown with 2nm External Encoder 5.2 Vacuum Environments Handling and Preparation When preparing the stage for vacuum environments, take the necessary precautions (such as wearing gloves, clean room clothing, etc.) when handling the stage as to avoid any contaminants. Maximum Bake-out temperature is 100 C. MICRONIX USA supplies the stage with vacuum compatible connectors: 9-pin female PEEK connectors for open loop, 15-Pin female PEEK connector for closed loop with analog encoder, 25-pin female PEEK connector for closed loop with digital encoder Open loop Installation & Wiring Diagram Connecting an open loop PPS-28 in a vacuum chamber requires the use of a feed through connector at the vacuum chamber wall. The vacuum compatible PPS-28 will be supplied with wiring for a straight through feed through not a cross over gender changer. MICRONIX USA supplies test connectors that simulate the vacuum feed through to allow functionality test prior to installation in a vacuum chamber. For details regarding the pin-out and feed through specifications see the Appendix A.3 10

13 5.2.3 Closed Loop/Encoder Installation & Wiring Diagram Closed loop installation of the PPS-28 stage in vacuum environments requires an intermediate feed through connector at the vacuum chamber wall that can accommodate both the motor cable, and the encoder cable. The vacuum compatible PPS-28 will be supplied with wiring for a straight through feed through not a cross over gender bender. MICRONIX USA supplies test connectors that simulate the vacuum feed through to allow functionality test prior to installation in a vacuum chamber. For details regarding the pin-out and feed through specifications see the Appendix A.4.5, A Analog Encoder Wiring Diagram 11

14 Digital Encoder Wiring Diagram 6. Dimensions 6.1 PPS-28 20mm with Digital Encoder. * Grey parts for external closed loop only L Travel A B C 45 26mm mm mm mm

6.2 PPS-28 20mm with Analog Encoder L Travel A B C 45 26mm 37 1 40 90

15 6.2 PPS-28 20mm with Analog Encoder L Travel A B C 45 26mm mm mm mm Stacking Configurations 7.1 Configuration Examples (Additional configurations available upon request) X-Y PPS-28, PPS-20 Using Adapter Plate (P/N: ) PPS-28 & PR-32 13

16 8. Supplementary Information 8.1 Maintenance The PPS-28 series of Linear Piezo stages utilizes a maintenance free design. Do not modify the stage or perform any maintenance unless specifically instructed to do so by MICRONIX USA personal. If the stage is not performing up to the original specifications, please contact MICRONIX USA. The PPS-28 Linear Piezo stage is a precision mechanical device and should be handled with care. Do not drop or mishandle the stage. Do not touch the bearings, as this will contaminate the lubrication and jeopardize the longevity of the stage. Follow the Installation Preparation requirements and use proper cable management to ensure a clean and safe operating environment. 8.2 Units and Conventions All measurements in this document are in the metric system of units. Metric Unit English Unit 1 millimeter inches 1 micron inches 1 Newton lbs 1 Newton-meter 8.85 in-lbs 14

17 A. Appendix A.1 DB-9 Male Motor Connector Pin Description Color 1 Phase 1 Red 2 Phase 2 Yellow 3 N/C N/C 4 Not In Use N/C 5 Ground Black& Green 6 +5V N/C 7 +5V N/C 8 Not In Use N/C 9 Not in Use N/C A.2 2 Phase Piezo Motor Wiring Diagram 15

18 A.3 Open Loop Vacuum Wiring Diagram A.3.1 Straight Through 9-Pin Feed Through 16

A.4 26BUsing the Digital Encoder Module When using the digital external encoder configuration, the Encoder Module should display two green LED s indicating a power source and proper encoder alignment.

For more information refer to MicroE Systems Mercury Encoders. A.4.

19 A.4 26BUsing the Digital Encoder Module When using the digital external encoder configuration, the Encoder Module should display two green LED s indicating a power source and proper encoder alignment. A Red or Yellow Signal Level LED indicates misalignment of the Encoder Head, if this occurs contact MICRONIX USA. Do not adjust the Encoder Head or scale. For more information refer to MicroE Systems Mercury Encoders. A BEncoder Module Pin-out Pin Description Pin Description 1 *Right Limit+ 9 Ground 2 Ground 10 *Left Limit+ 3 *Right Limit- 11 *Left Limit- 4 Index- 12 Index+ 5 B- 13 B+ 6 A- 14 A+ 7 +5V 15 (not used) 8 +5V *-Limits must be specified at the time of order, and calibrated at the factory. Note: Tri-state alarm: A and B are tri-stated if the encoder signal becomes too low for reliable operation. 17

20 A.4.2 Operating and Electrical Specifications Power Supply 5VDC 140mA (No outputs 180mA (A, B, I, and both limits terminated); 50mA at the sensor Operating Temperature 0 to 70 C Humidity 10-90% RH non-condensing A.4.3 Output Signals & Signal Termination for A quad B, Index and limits *Output signals are differential. Inverse signals are not shown for clarity. **Note: At some interpolations values the index pulse may be aligned with other states of A or B than the ones shown. ***Above are with reference to the sensor s optical centerline A.4.4 Resolution All closed loop stages are supplied with 20µm scales. The digital encoder module interpolates to a higher resolution as specified in the order. With a digital encoder the MMC-100 has an achievable resolution of 2nm. 18

21 A.4.5 Digital Encoder Wiring Diagram Cable Descriptions: A. PPS-28 Motor Cable - Vacuum Side (Female Dsub 25 Pin Peek Connector, 1.5m) B. PPS-28 Encoder Cable - Vacuum Side (Female Dsub 25 Pin Peek Connector, 1.5m) C. Encoder Module Breakout Cable (Female Dsub 25 Pin to MII 6000 Interpolator Module, 1m) D. Motor Breakout Cable (Female Dsub 25 Pin to Male Dsub 9 Pin, 1.5m) E. Encoder Module Adapter Cable (Female Dsub 15 Pin to Female Dsub 9 Pin,.5m) Wiring Diagram: A C E D J5 J6 B J1 J2 J3 J4 Description: Color J1 J2 J3 Color J4 J8 Phase 1 Red Red 13 1 Phase 2 Yellow W hite (Green TP) 12 2 Ground Black/Green Black/Green 25 5 Shield Casing + 5VDC Red Red 10 GND Black Black 22 DCLK - Gray Gray 9 DCLK + W hite (Gray TP) W hite (Gray TP) 21 M ISO - Violet Violet 8 M ISO + W hite (Violet TP) W hite (Violet TP) 20 M OSI - Blue Blue 7 M OSI + W hite (Blue TP) W hite (Blue TP) 19 nss - Green Green 6 nss + W hite (Green TP) W hite (Green TP) 18 CLK - Brown Brown 5 CLK + W hite (Brown TP) W hite (Brown TP) 17 Shield NC J8 J Female PEEK Dsub25 Connector - Rear View Description: J5 Color J6 J8 Index - 4 W hite (Purple TP) 4 8 B - 5 W hite (Yellow TP)5 7 A - 6 W hit e (Brow n TP) VDC 7 Red 7 5 Ground 2 Black 2 4 I ndex + 12 Purple 12 3 B + 13 Yellow 13 2 A + 14 Brow n 14 1 A.4.6 Straight Through 25-Pin Feed Through 19

22 A.5 Using an Analog Encoder A.5.1 Analog Encoder Overview A PPS-28 with Analog encoder will need to be paired with an appropriate controller. The MMC-100 has an Analog option. The PPS-28 with internal Analog encoder will be supplied with a 15 pin connector that incorporates both motor and encoder signals. A.5.2 Encoder Pin-out Pin Description 1 A+/Cos+ 2 B+/Sin+ 3 Index + 4 Ground 5 +5V 6 A-/Cos- 7 B-/Sin- 8 Index - 9 Not In Use A.5.3 Operating and Electrical Specifications Power Supply 5VDC 330mA (60mA for sensor) Operating Temperature 0 to 70 C Humidity 10-90% RH non-condensing A.5.4 Analog Output (Pins 1,2,6, and 7) A.5.5 Index Window (Pins 3) 20

23 A.5.6 Resolution All closed loop stages are supplied with 20µm scales. The interpolation is done in the MMC-100 to a higher resolution as specified in the order. With an analog encoder the MMC-100 has an achievable resolution of 10nm. A.5.7 Analog Encoder Wiring Diagram Standard Cable Descriptions: A. PPS-28 Motor Cable - Vacuum Side (Female Dsub 15 Pin Peek Connector, 1.5m) B. PPS-28 Encoder Cable - Vacuum Side (Female Dsub 15 Pin Peek Connector, 1.5m) C. Encoder Cable (Female Dsub 15 Pin to Dsub 9 Pin 1.5m) D. Motor Breakout Cable (Female Dsub 15 Pin to Male Dsub 9 Pin, 1.5m) Wiring Diagram: J6 A C B J1 J2 J3 J4 D J5 Description: Color J1 J2 J3 J4 J5 J6 Phase 1 Red (Red) 1 Phase 2 Yellow (W hite - Green TP) 2 Ground Black/Green (Black/Green) 5 Shield (Shield) Casing GND Black (Black) 4 Cos+ Brown (Brown) 1 +5V Red (Red) 5 Cos- Orange (W hite - Brown TP) 6 Sin+ Yellow (Yellow ) 2 Sin- Green (W hite - Yellow TP) 7 Index- Blue (Violet - W hite TP) 8 Index+ Violet (Violet ) 3 Shield (Shield) Casing Female PEEK Dsub15 Connector - Rear View A.5.8 Straight Through 15-Pin Feed Through 21

Precision Piezo Stage Reference Manual (Open and Closed Loop Versions)

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