M-545 XY Microscope Stage with Ultrasonic Linear Drives High Stability, Low Profile, High Speed, Direct Position Measurement

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1 M-545 XY Microscope Stage with Ultrasonic Linear Drives High Stability, Low Profile, High Speed, Direct Position Measurement The M-545.2U microscope stage with closed-loop ultrasonic piezo motors provides 25 x 25 mm travel range and very high stability Integrated Closed-Loop Linear Piezomotor Drives Provide Smooth Motion and High Speed to 50 mm/s Travel Ranges 25 x 25 mm Integrated Linear Encoders with 0.5 µm Resolution Compact Design: 30 mm Profile Height, Mounts Directly to Microscopes Self-Locking at Rest, with no Servo Dither Compatible with PI Piezo Nanopositioning / Scanning Stages M-545.2U piezomotor stages are mainly designed for automated positioning applications in microscopy. The form factor of the M-545 is optimized for a low profile height of 30 mm only; the mounting pattern is compatible with many PI piezo nanopositioning stages. Space Saving Piezomotors Compared to conventional motorized translation stages, the M-545 provides a lower profile and smaller footprint. The compact PILine piezoelectric linear motors and linear encoders make both, the lead screw duct and the flanged, bulky stepper motors employed in traditional stages obsolete. In addition, the piezomotors are self-locking at rest and hold the stage in a stable position without generating heat. Compatibility to PI Nanopositioning and Scanning Stages A number of standard PI piezo flexure stages (PInano family, P-736, etc) can be mounted directly on the M-545 stage. Depending on the application, these highly specialized, ultra-precise nanopositioning systems are available as fast XYZ scanners (for fluorescence microscopy), as vertical Z positioners (3D imaging), or with up to 6 degrees of freedom. Limit and Reference Switches For the protection of your equipment, non-contact Hall-effect limit and reference switches are installed. The direction-sensing reference switch supports advanced automation applications with high precision. Advantages of PILine Micropositioning Systems The ultrasonic piezoceramic drives used in PILine micropositioners have a number of advantages over classical drives: Higher Acceleration, Speed Smooth Motion, no Vibrations Small Form Factor Self-Locking when Powered Down, no Dither, no Energy Consumption No Shafts, Gears or Other Rotating Parts Non-Magnetic, Vacuum Compatible Drive Principle Ordering Information XY Microscope Stage System with Closed-Loop PILine Piezomotor Drives, 25 x 25 mm, 0.5 µm Linear Encoder, Includes C Axis Controller and Joystick. MD5422LOU for Olympus Microscopes MD5422LNU for Nikon Microscopes MD5422LLU for Leica Microscopes MD5422LZU for Zeiss Microscopes Ask about custom designs Application Examples Biotechnology Microscopy Scanning microscopy Confocal microscopy Semiconductor testing Handling Preliminary Specs PInano XYZ piezo scanner mounted on a M-545.2U Microscope stage. The XYZ piezo nanopositioning stage provides <1 nm resolution and 200x200x200µm scanning range. The high stability and autolocking feature of M-545 provides significant advantages over other microscope stage designs when using fast piezo scanning stages. The two-channel C controller 1 video at:

2 Preliminary Specs Piezo Nano Positioning Model M-545.2U Active axes XY Travel range 25 x 25 mm Integrated sensor Linear encoder Sensor resolution 0.5 µm (no dither at rest) Min. incremental motion 1 µm Unidirectional repeatability 1 µm Bidirectional repeatability 2 µm Max. velocity 50 mm/s Load Capacity 50*N Max. push/pull force 5 N Max. lateral force 4 N Motor type PILine U-164 Operating voltage 67 V (RMS)*** Electrical power 10 W / Axis** Operating temperature range 10 to +30 C Material Aluminum (black anodized) Mass 3.2 kg Cable length 1.7 m Connector 2 x MDR connector, 14-pin Controller/driver C axis Controller/Driver or 2x C axis Controller/Driver * 10 N for max. velocity. ** For drive electronics *** Piezomotor drive voltage; controller requires 12 VDC M-545 dimensions in mm 2

3 M-545 Manual XY Microscope Stage For Olympus, Nikon, Leica & Zeiss Microscopes / PI Piezo Stages M-545 manual microscopy stages are designed to accommodate the P-545 PInano series of XY / XYZ Piezo stag es as well as the P-5x7, P-5x8, P-56x and P-541/2 series stages. Ordering Information M-545.2M Manual Translation Stage, 25xs25 mm, Olympus, Nikon, Leica or Zeiss Versions. Ask about custom designs Application Examples Microscopy Micromanipulation Biotechnology R&D Quality assurance testing M-545 manual XY stage for Olympus, Nikon, Leica & Zeiss microscopes shown with P-545 PInano Piezo Stage (not included) For P-545 PI nano and all P-5xx Nanopositioning Stages 25 x 25 mm Traveln For Olympus, Nikon Leica & Zeiss Microscopes Motor Upgrade with M-229 Linear Drives and C-663 Controllers Preliminary Specs Piezo Stage Piezo Stage Piezo Stage: Piezo Stage Piezo Stage components, no wear or mintenance Piezo Stage Te st M-545.USG Mounting Kit for M-229 Stepper Motor Actuators (requires controllers) Adapter kit for mounting motorized actuators to the M-545 Stage. Order Controllers separate Patent Protection Compatible with: Nikon Eclipse Ti Series (Ti-S, Ti-U, Ti-E) Olympus IX Series (IX71 and IX81) Leica DMI Series (DMI3000, DMI4000, DMI5000 and DMI6000) Zeiss Axio Observer Series (A1, D1 and Z1)

4 3. Accessories The following accessories are available for the M-545 Stage. Accessory kits can be ordered from PI and are supplied with fasteners P-736.AP1 P-736 Mounting Kit For mounting the high speed P-736 Z slide scanner to the M-545 Stage M3 x 10mm Screw P-736.ZR1 or P-736.ZR2 M6 x 8mm Pan Head Screw M-545 Top Plate M-545.SH1 Sample Holder Adapter For mounting 1x3 microscope slides or 35mm Petri dishes directly to the M-545 M2 x 3mm Screw M6 x 8mm Pan Head Screw P-545.PD3 or P545.SH3 Sample Holder M-545 Top Plate

5 3. Accessories (continued) P-733.AP1 P-733 Mounting Kit Adaper kit for mounting a P-733 to the M-545. M4 x 25 mm Socket Head Screw M6 x 10mm Socket Head Screw P-733 Stage Body M545 Stage Top Plate M5 x 10mm Flat Head Screw M-545.USG Mounting Kit for M-229 Stepper Motor Actuators (requires controllers) Adapter kit for mounting motorized actuators to the M-545 Stage. Controllers are required and can be ordered separately. M S Stepper Motor Actuator Can be mounted in front or rear position Rear position requires factory installation M S Stepper Motor Actuator

6 1. Model Survey Piezo Nano Positioning The M-545 Series of stages is designed for use with inverted microscopes from the leading manufacturers (Nikon, Olympus, Leica and Zeiss). The stages are designed to allow full rotation of the lense turret throughout the Z motion range of The turret. M M N Manufacturer N Nikon O Olympus L Leica Z Zeiss M Manual Micrometer Drive 2 2 active axes (XY) 2. Compatibility The M-545 is designed to provide a highly stable mounting platform for the PI nano series of piezo electric nanopositioning stages. The PI nano was designed for microscopy applications and has accessories that facilitate mounting the sample near the bottom surface of the stage and within the focal range of the microscopes. The M-545 also has mounting holes for a variety of other PI nanopositioning stages. The following is a list of PI stages that can be used with the M-545: P-545 PInano Series XY and XYZ Stages, all versions P-736 PInano Series Z high speed Z scanner Adapter kit P-736.AP1 required P-5x7 and P-528 P-561 and P-562 PI Multi-Axis Piezo Scanner, all versions PIMars XYZ Piezo System, all versions P-541 and PI Low Profile Nanopositioning Stage, all versions P-542 P-733 Compact, High Precision XYZ nanopositioning stage All versions Adapter kit P-733.AP1 required

7 5. Mounting 5.1. M-545.2MO Mounting (for Olympus Microscopes) Spacer plates are used to adapt the M-545 stage to the Olympus microscope base. The proper hardware sizes are shown below. 4x M4x16 Socket Head Screw 4x M5x16 Socket Head Screws M545E0006 Spacer Microscope Base

8 5.2. M-545.2MN Mounting (for Nikon Microscopes) Piezo Nano Positioning Spacer plates are used to adapt the M-545 stage to the Nikon microscope base. The proper hardware sizes are shown below. 4x M4x16 Socket Head Screw 4x M5x16 Socket Head Screws M545E0007 Spacer Microscope Base

9 5.3. M-545.2ML Mounting (for Leica Microscopes) Piezo Nano Positioning No spacers or adapters are required for the Leica DMI Microscope base. Fits Leica Models DMI 4000, DMI 5000 and DMI The proper hardware sizes are shown below. 4x M4x16 Socket Head Screw 3x M4x10 Pan Head Machine Screws Microscope Base

10 5.4. M-545.2MZ Mounting (for Zeiss Microscopes) Piezo Nano Positioning No spacers or adapters are required for the Zeiss Observer Microscope base. Fits Zeiss Axio Observer Models A1, D1 and Z1. The proper hardware sizes are shown below. 4x M4x16 Socket Head Screw 3x M4x10 Pan Head Machine Screws Microscope Base

11 6.0. Focal Point Location PI has designed the P-545 stage to be easily integrated to commercial microscopes through the use of the M-545 stage. M-545 stages are available for Nikon, Olympus, Zeiss and Leica inverted microscopes. These stages mount directly to the microscope base and accept the P-545.3R2 and P-545.2R2 as well as several other PI stages. The M-545 stages can be manually driven through micrometers or using PI s precision motorized actuators. Contact your PI sales representative for details. When used in a microscope application, the focal plane for the microscope is located near the bottom of the stage. It is for this reason that the stage has a lower mounting surface. The figure below shows the nominal location of the focal plane. Vertical travel of the objective varies based on the microscope used. A series of accessories is available from PI to assist with mounting a sample holder to the stage. The P- 545.SH1 is available to hold standard 1 x 3 (25mm x 75mm) microscope slides and the P-545.PD1 is offered for holding 35mm Petri Dishes. M-545 Stage Upper Focal Plane approx. 3 mm above mounting surface Microscope Objective Bottom of Objective travel Approx. 10 mm Varies by microscope

12 M-545k Manual Microscope Stage For Bread-Board Mount / PI Piezo Stages M-545k manual microscopy stages are deigned to accommodate the P-545 PInano series of XY / XYZ Pie zo stages as w ell as the P-5x7, P-5x8, P-56x and P-541/2 series stages. Ordering Information M-545k001 Manual Translation Stage, 25 mm, stackable Ask about custom designs Application Examples Biotechnology Micromanipulation Microscopy R&D Quality assurance testing Stack of two M-545k manual stages For P-545 PI nano and all P-5xx Nanopositioning Stages 25 mm Travel Motor Mike Upgrade with M-232 Actuators and C-863 Controllers For Bread Board Mount on 1/ " Centers Preliminary Specs Stack of two M-545k manual stages with P-545 PInano Piezo Stage (not included) S 1

13 New: Large Aperture for Slides, Petri Dishes, Heaters & Specimen Holders Piezo Nano Positioning PI nano 1x3 XYZ & XY Piezo Stage Systems Low-Profile, Low-Cost, Nanopositioning Systems for Super-Resolution Microscopy PInano series nanopositioning stages feature a very low profile of 20 mm (0.8 ), a large aperture for 1x3" slides and deliver highly accurate motion with sub-nanometer resolution in up to 3 axes. Slide / petri dish holders optional. Low Profile for Easy Integration: 20 mm (0.8 ) Large Aperture for 1x3"Slides. Accessories & Holders Available All Parts Black Anodized for Minimum Reflections 200µm Standard Travel Range, Longer Ranges Available Longest Lifetime with Proprietary PICMA Piezo Technology Cost Effective due to Low-Cost Piezoresistive Sensors Compatible w/ Leading Image Acquisition Software Packages Closed-Loop Control for High Repeatability and Accuracy Millisecond Step Time, ideal for Super-Resolution Microscopy Recessed Sample Holders for Maximized Utility Cost Effective Design, High Performance PInano series piezo positioning stages are designed to provide high performance at minimum cost. For highlystable, closed loop operation, piezoresistive sensors are applied directly to the moving structure and precisely measure the displacement of the stage platform. The very high sensitivity of these sensors provides optimum position stability and responsiveness as well as sub-nanometer resolution. A proprietary servo controller significantly improves the motion linearity compared to conventional piezoresistive sensor controllers. Working Principle / Reliability Flexures optimized with Finite Element Analysis (FEA) are employed to guide the PInano series stages. FEA techniques give the design the highest possible stiffness in, and perpendicular to, the direction of motion, and to minimize linear and angular runout. Flexures allow extremely high-precision motion, no matter how minute, as they are completely free of play and friction. The award-winning PICMA piezo drives are more robust than conventional piezo Ordering Information P-545.2R7 PInano XY Nanopositioning System, 1x3" Aperture, Slide Holder 200x200 µm, Piezoresistive Sensors, 24 Bit /USB controller. P-545.3R7 PInano XYZ Nanopositioning System, 1x3" Aperture, Slide Holder 200x200x200 µm, Piezoresistive Sensors, 24 Bit /USB controller. P-545.2R2 PInano XY Nanopositioning System, 60x60 mm Aperture, 200x200 µm, Piezoresistive Sensors, 24 Bit /USB controller. P-545.3R2 PInano XYZ Nanopositioning System, 60x60 mm Aperture, 200x200x200 µm, Piezoresistive Sensors, 24 Bit /USB controller. actuators, featuring superior lifetime and performance in both dynamic and static applications. Because guidance, actuators and sensors are all maintenance-free, these nanopositioning systems achieve outstanding levels of reliability. PI Subject to change without notice. This data sheet is superseded by any new release. The newest release is available for download at 09/10/06.0 Long Travel, Low Profile, Optimized for Microscopy The new PInano XY and PInano XYZ low-profile piezo scanning stages are optimized for easy integration into highresolution microscopes. They feature a very low profile of 0.8 (20 mm), a large aperture, and long travel ranges of up to 26 Application Examples Super-resolution microscopy 3D Imaging Laser technology Mask / wafer positioning Interferometry Metrology Biotechnology Micromanipulation 200x200x200 µm with subnanometer closed-loop resolution ideal for leading-edge microscopy and imaging applications. Longest lifetime is guaranteed by the integrated ceramicencapsulated PICMA piezo actuators. Due to the significantly higher humidity resistance, the patented PICMA design provides up to 10 times longer life than conventional piezo actuators. Background: The piezo controller is included and comes with a 24-bit resolution USB port as well as ethernet, RS-232 and an analog interface. Foreground: The optional M-545 manual XY stage provides a stable platform for the the PInano piezo stage. R2 piezo stage versions (60x60 mm aperture) shown.

14 Technical Data Model PInano XY PInano XYZ Units Tolerance Active axes X, Y X, Y, Z Motion and positioning Integrated sensor Piezoresistive Piezoresistive Closed-loop travel 200 x x 200 x 200 µm *Resolution <1 <1 nm typ. Linearity +/ /- 0.1 % typ. Repeatability <5 <5 nm typ. Mechanical properties Push/pull force capacity in motion direction 100 / / 30 N Max. Max. payload g Max. Drive properties Ceramic type PICMA P-885 PICMA P-885 Electrical capacitance per axis 6 6 (X, Y), 12 (Z) µf ±20% Miscellaneous Recommended operating temperature range 20 to to 30 C Material Aluminum Aluminum Mass kg ±5% Cable length m ±10 mm Sensor / voltage connection Sub-D 25 Sub-D 25 *Resolution of PI Piezo Nanopositioners is not limited by friction or stiction. Value given is noise equivalent motion measured with interferometer. Objective Scanners & Mirrors Z/Tip/Tilt Stages XY/XYZ / XYZ Stages 6-Axis Stages Actuators / Linear Motors Piezo Controllers News & Applications The P-545 piezo stage can be mounted on the optional M-545 manual XY stage. This high-stability stage is recommended as a basis for the piezo stage, especially when the highest step-andsettle performance is required. It is available for Olympus, Nikon, Zeiss and Leica microscopes and can also be upgraded with motorized micrometers. 27