HP 4145A & HP 4284A with Micromanipulator Probe Station model 6000 Electrical Test Station Standard Operating Procedure (SOP)

Transcription

1 DOCUMENT: Teaching Fab Electrical Test Station Standard Operating Procedure (SOP) Version: 1 HP 4145A & HP 4284A with Micromanipulator Probe Station model 6000 Electrical Test Station Standard Operating Procedure (SOP) Version: 10 October 2014 UNIVERSITY OF TEXAS AT ARLINGTON Nanofabrication Research Center

2 DOCUMENT: Electrical Test Station Standard Operating Procedure (SOP) Version: 1 TABLE OF CONTENTS 1 Introduction 3 11 Scope of Work 3 12 Description 3 13 Safety 9 2 Hardware 10 3 Requirements Training System Restrictions 13 4 Operating Procedures System Pre-Checks HP 4145A & HP Operating the Hewlett Packard 4145A Semiconductor Parameter Analyzer with the Micromanipulator Probe Station model Operating the Hewlett Packard 4284 Precision LCR Meter with the Micromanipulator Probe Station model Systems Shut down HP 4145A, HP4284 and MMC Creating and Editing a Plot, Transforms and Saving Project Data 51 5 Technical Information Technical Information56 2

3 DOCUMENT: Electrical Test Station Standard Operating Procedure (SOP) Version: 1 10 INTRODUCTION 11 Scope These procedures apply to the Teaching Fab Electrical Test Station comprising of the Hewlett Packard 4145A Semiconductor Parameter Analyzer, Hewlett Packard 4284 Precision LCR meter, Micromanipulator Probe Station model 6000, Agilent 82357A USB/GPIB Interface for Windows and Metrics ICS (Interactive Characterization Software) version 400 measurement engine All maintenance should follow the procedures set forth in the manufacturer s maintenance and operations manuals This document is for reference only Users must be trained by Nanofab staff before operating this equipment 12 Description The Teaching Fab Electrical Test Station comprises the Hewlett Packard 4145A Semiconductor Parameter Analyzer, Hewlett Packard 4284 Precision LCR meter, Micromanipulator Probe Station model 6000 and Metrics ICS (Interactive Characterization Software) version 400 measurement engine The HP 4145A Semiconductor Parameter Analyzer performs fast, accurate DC analysis of semiconductor devices, semiconductor wafers, packaged devices, and thin films to develop new semiconductor material technology and design architecture, to evaluate and control existing materials and processes, to verify the quality of your fabrication process and to solve semiconductor design and fabrication related problems The HP 4145A can quickly evaluate device performance to make a pass/fail test to improve device performance and yield while decreasing semiconductor device development time The HP 4145A is configured with four Source Monitor Units (SMU) Each SMU can be used as a voltage source/current monitor or as a current source/voltage monitor to stimulate and measure voltage and current sensitive devices to help you analyze data The SMU-based architecture saves time and eliminates measurement instabilities caused by physically changing the device under test (DUT) connections because each SMU can alternately act as a voltage source/current monitor or as a current source/voltage monitor by changing the SMU s programming/operating mode In addition to the four Source Monitor Units the HP 4145A is equipped two Voltage Monitors (V M ) and two Voltage Sources (V S ) The HP 4145A is completely programmable to control measurements, store data, and plot functions using the Metrics ICS (Interactive Characterization Software) version 400 measurement engine HP 4145A Semiconductor Parameter Analyzer Metrics ICS version 400 3

4 DOCUMENT: Electrical Test Station Standard Operating Procedure (SOP) Version: 1 The HP 4145A excels in both TEG (Test Element Group/ scribe line test dies) measurements performed on semiconductor wafers and packaged devices, provides R&D capabilities that will meet DC characterization requirements for current devices and also functions needed for the development of new materials A partial list of applications includes the DC characterization for these devices Semiconductors and MEMs Devices New Materials Bipolar Transistors o Gallium Arsenide Devices MOS structures, Junction FETs, GaAs FETs o Liquid Crystal Structures o Carbon Nanotubes (CNTs) Semiconductor Diodes o Ceramic Semiconductors Resistance Measurements o Amorphous Silicon Devices Photodiodes and Phototransistors o HEMT Devices Operational Amplifiers o Solar Cell Elements Gated Diode o Solar Cell Arrays Static Electricity Induced Transistors (SITs) o Biomedical Engineering Devices o Polymer Organic Applications Accelerometers and Pressure Sensors Thin Film Transistors Parameters which can be analyzed include: Bipolar Device Parameter Analysis MOS Structure Parameter Analysis DC Current Gain(hFE, hfb) Collector Current Characteristics Threshold Voltage Bulk Potential Dependency Emitter Current Characteristics Extrapolated Threshold Voltage Evaluation of Surface Recombination Current Gain Factor ( ) in Saturated/Non- Saturated Regions PN Junction Forward Bias Characteristics Mutual Conductance ( gm)drain and Gate Voltage Dependency PN Junction Reverse Bias Characteristics Body Factor Effects Multiplication Factor (M) Breakdown Voltage(BVEBO, BVCBO, BVCEO) Punch-Through Voltage Sheet Resistance PN Junction Break-Down Voltage Resistivity Collector- Emitter Saturation Voltage Channel Conductance-Gate Voltage Characteristics Emitter-Base Saturation Voltage Collector Cut-Off Current 4

5 DOCUMENT: Electrical Test Station Standard Operating Procedure (SOP) Version: 1 The HP 4284 Precision LCR meter is a general purpose LCR meter for incoming inspection of components, quality control, and research laboratory use The HP 4284A is used for evaluating LCR components, materials, and semiconductor devices over a wide range frequencies (20 Hz to1 MHz) and test signal levels (5mVrms to 20Vrms, 50µA to 200mA) to perform quick and accurate total Impedance Z or Admittance Y measurement evaluations and calculates series and parallel impedance parameters such as C, L, R, G, X, B, θ, Q and D for components such as capacitors, inductors, transformers, series and parallel LCR circuits, electromechanical and MEMs sensor devices The HP 4284A precision LCR meter is a cost-effective solution for component, DUT and material measurement to test devices to the most commonly-used test standards, such as IEC/MIL standards, and under conditions that simulate the intended application The HP 4284 uses a four-terminal pair measurement configuration which permits easy, stable and accurate measurements The four-terminal pair measurement method has the advantage in both low and high impedance measurements The outer shield conductor works as a return path for the measurement signal (not grounded) The same current flows through the center conductor and outer shield thus cancelling out the magnetic fields generated by these opposite flows of current Therefore test leads do not contribute to additional errors due to self or mutual inductance between individual leads The HP 4284 is completely programmable to control measurements, store data, and plot functions using the Metrics ICS (Interactive Characterization Software) version 400 measurement engine HP 4284 Precision LCR meter Four-Terminal Pair Measurement Principle H C : High current H P : High potential L P : Low potential L C : Low current Metrics ICS version 400 Setup, Execute, and Analyze 5

6 DOCUMENT: Electrical Test Station Standard Operating Procedure (SOP) Version: 1 Whether in research and development, quality assurance, or incoming inspection, the HP 4284A will meet all of your LCR meter test and measurement requirements A partial list of applications includes the LCR characterization for these devices Semiconductors and MEMs Devices New Materials Multilayer Ceramic Capacitors o Gallium Arsenide Oxide Interfaces MOS type semiconductors o Liquid Crystal Structures Bipolar Junction Transistors o Ceramic Semiconductors JFETs o Carbon Nanotubes (CNTs) Switching Power Supply Inductors o Organic Thin-Film Transistor (TFT) Magnetic Heads o Amorphous Silicon Devices Polymer / Polyimide Films o Solar Cell Elements Ferroelectrics o Solar Cell Arrays Photonic Devices o Ferroelectrics Ceramics Static Electricity Induced Transistors o Biomedical Engineering Devices III V Compound Devices o Polymer Organic Applications Accelerometers and Pressure Sensors o HEMT devices Parameters which can be analyzed include: Measurement Functions and Parameters Semiconductor Device and Material Parameters derived from C-V profiles Absolute value of Impedance Z Average Doping Concentrations Absolute value of Admittance Y Doping Profiles and Carrier Lifetimes L =Inductance Oxide Thickness and Oxide Charges C =Capacitance Gate Oxide Capacitance R =Resistance Interface Trap Density of Charges G =Conductance PN Junction Capacitance D =Dissipation factor Schottky Diode Barrier Height Q =Quality factor Thin Film Capacitive Density Tests Rs =Equivalent series resistance Interlayer Dielectrics Thickness Rp =Parallel resistance Contamination from Mobile Ions X =Reactance Boundary Defect Density Distribution B =Susceptance Threshold Voltage θ =Phase angle Interface Trap Density in Wafer Processing Mechanical characteristics of MEMs sensor Frequency Dependency of Capacitance and Mechanical Response a Diaphragm Spring 6

7 DOCUMENT: Electrical Test Station Standard Operating Procedure (SOP) Version: 1 The Micromanipulator Probe Station model 6000 provides excellent probing capabilities for failure analysis, research and development, design analysis and device characterization analysis The MMC model 6000 has an extensive line of probes and accessories, making it an excellent station on which to build a complete probing system The 6000 Test Station wafer chuck stage is manually operated utilizing X and Y direction control knobs Each of these control knobs have two knobs consisting of one small knob within a larger knob that are used for coarse and fine adjustment The wafer vacuum chuck is a standard 4 in (1016 mm) diameter with dual tweezer slots and for low contact resistance This electrical check station has four manipulators can be flexibly positioned on the platen probe platform The highly polished magnetic stainless surface accepts the magnetic base manipulators The probe holders are Model 77A Probe Holders with 30 or 60 from horizontal probe tip attack angles Quick probe tip replacement is achieved by the spring load mechanism in the Model 77A This holder will accept all MMC model 7 probe points/ tips Ten isolated BNC feed throughs are provided to interface the DUT to the test equipment, five on the left side of the platform and five on the right They are to provide isolation and strain relief between any probe cables and external test equipment These connectors are mounted in delrin in order to isolate them from the chassis Each BNC is tested to ensure better than 5 teraohms isolation between each conductor and its outer shell Also each BNC has greater than 5 teraohms isolation between itself and any other BNC connector as well as test station The 6000 Series Test Station features the Olympus microscope which combines high magnification of very small geometries and long working distance objectives for ease of probing The 6000 probe station is design for precise chuck movement of substrates, platen movement of manipulators and micromanipulator movements of probes tips for ease of use in everyday failure analysis, device characterization, process monitoring, and reliability testing applications Micromanipulator Probe Station model 6000 Model 77A Probe Holders with 30 or 60 tip attack angles and spring load mechanism 7

8 DOCUMENT: Electrical Test Station Standard Operating Procedure (SOP) Version: 1 The Agilent 82357A USB/GPIB Interface Converter for Windows provides instant connections, enabling a direct connection from the USB port on the PC to GPIB instruments (HP 4145A Semiconductor Parameter Analyzer and HP 4284 Precision LCR meter) The USB/GPIB Interface software allows transparent communication between the PC and up to 14 GPIB instruments and USB support is standard in Windows XP The 82357A USB/GPIB Interface also uses a thin, flexible, high quality USB cable that is USB 11 and 20 compliant The 82357A is capable of transfer rates over 750KBytes/sec with large block transfers Agilent 82357A USB/GPIB Interface Converter for Windows The Metrics ICS (Interactive Characterization Software) version 400 measurement engine is a uniquely powerful instrumentation control and data analysis software package Metrics ICS is designed to control semiconductor test equipment used for device characterization and other microelectronics testing Metrics ICS operates in the Microsoft Windows XP Professional environment and eliminates the need for any programming or front-panel interaction with the instrument Each instrument supported by Metrics ICS is controlled from a user-interface configured by point-and-click editing Instruments supported by ICS drivers include: Semiconductor Parameter Analyzers, DC Source Monitor Units, Curve Tracers, LCR Meters and Impedance Analyzers Metrics ICS 400 Software allows provides an environment for the collection of data in three basic steps: Setup, Execute, and Analyze The Setup of a Measurement typically takes no more than 1-2 minutes Metrics ICS supports several measurement modes to accommodate most testing methods The Analysis tools in this software include plotting and data extraction Once the functions are created, they can be saved with the data The advantage of ICS is that once a test is created and saved it can be re-opened and used again, including the analysis Metrics ICS version 400 Setup, Execute, and Analyze 8

9 DOCUMENT: Electrical Test Station Standard Operating Procedure (SOP) Version: 1 13 Safety 131 The Teaching Fab Electrical Test station comprising the HP 4145A Semiconductor Parameter Analyzer, HP 4284 Precision LCR meter, MMC Probe Station model 6000, Agilent 82357A USB/GPIB instruments are all connected to HIGH VOLTAGE Be very careful and remain aware of any electrical hazards If you encounter any electrical malfunctions, contact NanoFAB staff immediately 132 To minimize electrical shock hazard, these instrument chassis and cabinets must be connected to an electrical ground The instruments are equipped with a three-conductor ac power cable The power cable must either be plugged into an approved three-contact electrical outlet 133 Do not touch the probe tip holders or probe tips during a manual or automatic measurement due to dangerous currents may be present 134 Do not operate these instruments in the presence of flammable gases or fumes Operation of any of these electrical instruments in such an environment constitutes a definite safety hazard 135 Users are NOT allowed to remove instrument covers, replace internal parts, components or make internal adjustments Dangerous voltages, capable of causing death, are present in this instrument 136 Only staff maintenance is allowed to adjust or replace internal components Do not replace components with power cable connected Under certain conditions, dangerous voltages may exist even with the power cable removed To avoid injuries, always disconnect power and discharge circuits before touching them 137 Use caution when working near the cathode ray tube (CRT) Breakage of the cathode-ray tube causes a high velocity scattering of glass fragments (implosion)to prevent CRT implosion avoid rough handling or jarring of the instrument 138 Observe all Safety Symbols and their definitions used on equipment or in manuals Read any posted NanoFAB Engineering Change Notices (ECN) for any hardware, process or safety changes before running the tool 9

10 DOCUMENT: Electrical Test Station Standard Operating Procedure (SOP) Version: 1 20 HARDWARE 20 HP 4145A Semiconductor Parameter Analyzer: The instrument has four SMU s Each SMU can be used as a voltage source/current monitor or as a current source/voltage monitor SMU Range: Accuracy: V: ± 1mV to ±1000 Vdc ± 015% to (± 015% + 40mV) I : ±1pAdc to ±1000 madc ± 04% to ± 18% (± 50fA resolution in current monitor mode) 21 HP 4145A makes up to 150 measurements per second 22 HP 4145A has two Voltage Monitors (V M ) built into the system V M Range: Accuracy: V: ± 20000Vdc and ± Vdc ± 05% (20V range) and ± 02% (2V range) Resolution : ±1 mv (20V range) and ± 100µV (2V range) 23 HP 4145A has two voltage sources (V S ) built into the system V S Output Range: V: ± 20000Vdc Accuracy: ± 05% 24 HP 4284 Precision LCR meter: The instruments measurement terminals are four- terminal pair, auto and manual ranging, equivalent circuit measurements for parallel and series circuits Internal and external GPIB trigger, program delay from trigger command to start of measurement of 0 to 60s in 1 ms steps Integration time is short, medium and long Measurement cable length is 1 meter 25 The 4284A has internal DC bias voltage selections of 0 V, 15 V, and 20 V With option 001 installed, the dc bias voltage can be set from 0V to 40 V with a resolution listed below 26 Test Signal frequency is 20Hz to 1MHz with 8610 selectable frequencies and accuracy ±001% 27 Test signal and monitor modes, levels, ranges, setting accuracies and monitor accuracies More specific information and tables concerning accuracies can be found here: 10

11 DOCUMENT: Electrical Test Station Standard Operating Procedure (SOP) Version: 1 26 MMC Probe Station model 6000: 28 The MMC 6000 provides X-Y stage range of motion 4 in x 4 in (1016 mm x 1016 mm) Theta rotation control full 360º with conveniently located locking knob, control knobs coaxial X-Y for single hand operation from either side, located center front Resolution of X-Y movement: 18 microns per degree revolution 29 The Chuck is standard 4 in (1016 mm) diameter with dual tweezer slots and gold plated brass for low contact resistance The chuck flatness is ± in (±12 microns), electrical isolation exceeds 5000 megaohms at 500VDC and electrically connected to black terminal at rear of baseplate 210 The Platen is formed with 1 in (254 mm) thick honeycomb construction for maximum stability The top surface electrically grounded to white terminal at rear of baseplate The platen accepts 8 or more magnetic or vacuum base manipulators and 10 BNC strain relief's connectors The platen has fine lift control, true planar vertical motion and convenient knob control The vertical motion resolution: 03 micron per degree revolution Range: 05 in (127 mm) The platen is also equipped with a quick lift control that raises platen and microscope with adjustable microscope lift delay Range: 135 in (343 mm) Resolution: 10:1 reduction 211 The magnetics manipulators are configured with Model 77A Probe Holders with 30 or 60 from horizontal probe tip attack angles Quick probe tip replacement is enhanced by the spring load mechanism in the Model 77A This holder will accept all Model 7 probe points 11

12 DOCUMENT: Electrical Test Station Standard Operating Procedure (SOP) Version: The Agilent 82357A USB/GPIB Interface Converter provides a direct interface connection from the USB port on your PC to GPIB instruments 213 The 82357A includes an attached USB cable that is USB 11 compliant This cable is shielded and the connector is specified for up to 1,500 insertions 214 The 82357A is capable of transfer rates over 750KBytes/sec with large block transfers 215 The 82357A USB/GPIB Interface Converter is supported ONLY for PCs with Windows Me, Windows 2000, or Windows XP Professional operating systems The 82357A USB/GPIB interface is a Microsoft auto-detect plug and play device 216 The minimum 82357A USB/GPIB hardware and software requirements: 217 The Metrics ICS (Interactive Characterization Software) version 400 measurement engine performs I-V and C-V characterization measurements and analysis for design verification, process troubleshooting, reliability engineering, and failure analysis 218 The ICS Software includes full suite of data analysis tools and provides quick transfer of data to popular software packages such as spreadsheets, Excel, word processors and databases 219 ICS software has Point, Click, and Measure Capabilities: Controls your instrumentation with one easy-to-use graphical interface, provides programming-free test setup generation and supports multiple measurement modes 220 ICS software has Graphic and Data Analysis tools: ICS delivers spreadsheet functionality, provides powerful plotting capabilities, dynamically links data to other spreadsheet programs and databases, and uses Windows clipboard flexibility to incorporate plots into documents and presentations 221 ICS software has Comprehensive Data management: Uses project files as a central location to store test setups and data, provides a hierarchical database engine that organizes and manages your data while eliminating DOS file naming restrictions ICS includes ASCII export of data which allows for advanced analysis on workstation, Macintosh, PC-based engineering tools and delivers advanced post-measurement search and report capabilities Metrics ICS version 400 : Setup, Execute, and Analyze 12

13 DOCUMENT: Electrical Test Station Standard Operating Procedure (SOP) Version: 1 30 REQUIREMENTS 31 Training All users must be trained and authorized on the Teaching Fab Electrical Test Station comprising of the Hewlett Packard 4145A Semiconductor Parameter Analyzer, Hewlett Packard 4284 Precision LCR meter, Micromanipulator Probe Station model 6000, Agilent 82357A USB/GPIB Interface for Windows and the Metrics ICS (Interactive Characterization Software) version 400 measurement engine Training is supplied by a Nanofab staff member please contact the tool owner to schedule training 32 System Restrictions 321 Users are NOT allowed to remove instrument covers, replace internal parts, components or make internal adjustments Dangerous voltages, capable of causing death, are present in this instrument For any maintenance issues call staff to check the system 322 Users are NOT allowed to operate these electrical instruments in the presence of flammable gases or fumes Operating any of these electrical instruments in such an environment constitutes a definite safety hazard 323 Users are NOT allowed to place any liquids (vessels containing fluids) on the chuck for measuring special DUT measurements Any non-standard set up needs staff approval 324 Users are NOT to operate the electrical instruments outside or higher than the output voltage, current, signal or frequency ranges in MANUAL or AUTOMATIC modes as specified in section 20 HARDWARE : sections :20 to Users are required to allow 30 minutes for the instruments to warm up 326 Users are NOT allowed to connect external voltage/current sources, meters, signal generators or oscilloscopes unless authorized by staff 327 Measure only clean dry samples (DUT s) 328 Use clean dry probe tips If probe tips need cleaning rinse in deionized water or spray Methanol then use N 2 to dry excess water from the tip To remove oxide deposits, dip probe tips into a 10 Normal sodium hydroxide (NaOH) solution for a few seconds ( rinse with deionized water and dry with N 2 Store probe tips in sealed product box and store in the N 2 desiccator 329 The probe holders are very expensive so use extra caution when handing the probe holders, probe holding springs locks and when inserting and removing the probe tips 3210 This system requires a NanoFab Management System reservation before using 13

14 DOCUMENT: Electrical Test Station Standard Operating Procedure (SOP) Version: 1 40 OPERATING PROCEDURES 41 System Pre-Checks 411 The Teaching Fab Electrical Test Station comprising of the Hewlett Packard 4145A Semiconductor Parameter Analyzer, Hewlett Packard 4284 Precision LCR meter, Micromanipulator Probe Station model 6000, Agilent 82357A USB/GPIB Interface for Windows and the Metrics ICS (Interactive Characterization Software) version 400 computer should already be plugged into the power strips and the power strip plugged into the wall power Check to ensure the connections before you start If any on these instruments are not plugged or the wall power is disconnect call staff to check 412 Check to ensure the 82357A USB/GPIB Interface in plugged into the back of Hewlett Packard 4145A Semiconductor Parameter Analyzer and the Hewlett Packard 4284 Precision LCR meter (they are piggyback connected) If they are not plugged in call staff to check 413 Carefully check to ensure the four blue triac SMU s cables are connected properly to the back of Hewlett Packard 4145A instrument The triac connectors will lock in Check to ensure the four black bnc cables are properly connected to the front of the Hewlett Packard 4284 Precision LCR meter The bnc connectors will lock in HP 4145A HP 4284 Precision LCR meter 414 Check to ensure the four blue triac SMU s cables are connected properly to back side of the triac-to-bnc converter box as shown If you are using the Hewlett Packard 4145A check to ensure all four micromanipulator bnc cables are connected properly to the front the of the triac-to-bnc converter box as shown If you are using the Hewlett Packard 4284 four-terminal pair is connected to the bottom of the bnc mounting plate and two of the micromanipulator bnc cables are connected properly to the top the bnc mounting plate shown The triac and bnc connectors will lock in Hewlett Packard 4145A back and front side of the triac-to-bnc converter Hewlett Packard 4284 top and bottom side of the bnc plate 415 Check to ensure the USB security key in plugged into the computer 14

15 DOCUMENT: Electrical Test Station Standard Operating Procedure (SOP) Version: 1 42 Operating the Hewlett Packard 4145A Semiconductor Parameter Analyzer with the Micromanipulator Probe Station model If you have not completed the System Pre-Checks in steps then you must complete those before proceeding 422 Turn ON the TF electrical test computer by pressing the front power button At the Windows XP login screen type in the password using: test Computer will boot up to MS desktop screen password use: test TF Electrical Test computer MS screen 423 Check to ensure the Agilent 82357A USB/GPIB interface converter power up sequence completes normally (the TF electrical test computer needs to be ON) Initially only the red FAIL LED should be ON After a few seconds all three LEDs should be ON After another minute only the green READY LED should be ON If all three LEDs remain ON notify staff to check After a minute only the green READY LED should be ON 424 Check to ensure four blue triac SMU s cables are connected properly to back side of the triac-to-bnc converter box and all four micromanipulator bnc cables are connected properly to the front the of the triac-to-bnc converter box If the manipulator bnc s are connected to the HP 4284 bnc plate disconnect them and reconnect to the front side of the triac-to-bnc converted box 425 Turn the Hewlett Packard 4145A power ON by pressing the power switch button in After about 1 minute the cathode ray tube (CRT) will display the HP 4145 Main Menu and the red AUTO CAL led will be ON The AUTO CAL will perform the auto calibration routine every 3 seconds To disable the auto calibration press the AUTO CAL button and the red led will go OFF 426 Check to ensure the instrument cooling fan is ON at the back of the Hewlett Packard 4145A If the fan is not ON turn instrument s power OFF and notify staff Allow the instrument to warm up 30 minutes 15

16 DOCUMENT: Electrical Test Station Standard Operating Procedure (SOP) Version: Turn the Olympus lamp power supply ON by moving the switch to the ON position Adjust the lamp voltage to less than ½ of the maximum as shown Check the lamp housing to see if the lamp is ON If there is no light call staff to check Do not remove lamp housing to check bulb, dangerous ac voltages are present at the lamp connectors less than ½ of the maximum 428 Raise the Platen height by slowly rotating the stage Z knob CW and raise the manipulator probe holder by rotating the manipulator s top thumb screw CW until to have about 1/2" to 1 " clearance between the chuck and probe holder; otherwise you may break or damage the prober tips and probe holders during the DUT, stage and manipulator set up Platen height Z knob 1/2" to 1 " clearance between the chuck and probe holder 429 Carefully check the probe holder collar is finger tight, if it is loose rotate the collar CW so that it is finger tight The probe holders are very expensive so use extra caution when handing the probe holders, probe holding springs locks and when inserting and removing the probe tips 4210 Move the manipulators away from the stage and carefully insert the Micromanipulator type 7 probe tips into the prober holder by gently holding the probe holder and pulling the spring-load locking mechanism backwards and carefully inserting the probe tip through the bottom hole 1 st Be careful not to accidentally bump the thinner measuring tip or it may bend or break When the probe is about ⅓ to ½ inserted slowly release the spring-load securing the probe tip 16

17 DOCUMENT: Electrical Test Station Standard Operating Procedure (SOP) Version: Insert all the probe tips the same length through the probe holders that you will be using and adjust the manipulators top thumbscrews to adjust the probe holders and tips to the same height above the stage 4212 Move the stage position to the center of the platen base plate by rotating the large outer X-travel knob (left to right stage motion) and the smaller inner Y-travel knob (front to back stage motion) as shown Larger outer X-travel knob (left to right stage motion) smaller inner Y-travel knob (front to back stage motion) 4213 Carefully lift and move manipulators to the center of the stage This places the manipulators at the center of the Olympus microscope s field of view They are held to the platen by strong magnet Disconnect the probe holder grounding lead screw if necessary 4214 Re-connect the probe holder s outer grounding lead to the closest platen terminal ground port (color coded) The probes outer bnc connectors are already connected to earth ground This colored coded lead connection is for grounding the platen (the platen is isolated from ground without connections made) Some of these connectors are alligator or small set screw type 17

18 DOCUMENT: Electrical Test Station Standard Operating Procedure (SOP) Version: If you need the platen grounded make an electrical connection between the color coded terminal you have already connected in the previous step to the white terminal at the back plane of the MMC 600 as shown If you need the gold plated chuck grounded connect the black terminal (chuck terminal) to the white terminal (earth ground) using the alligator wire connectors 4216 Carefully place the DUT in the center of the stage without bumping the probe tips Turn on stage vacuum (¼ to 4" wafer will hold) 4217 Make further DUT to stage centering and theta adjustments using X, Y and theta knobs After making your theta adjustments, tightened the theta rotation locking thumbscrew by turning the smaller knob on top CW until it stops turning as shown This places the DUT near the center of the Olympus microscope s field of view Larger outer X-travel knob (left to right stage motion), smaller inner Y-travel knob (front to back stage motion), theta rotation is locked by turning the smaller top knob CW until it stops turning as shown 4218 Adjust the platen height and micromanipulators probe heights using the top thumbscrews to move the bottom of probe tips to 10mm to 20mm above the DUT measurement location After your probe tips are this close do not move the stage X, Y and theta knobs Platen height Z knob 10mm to 20mm clearance between probe tips and DUT 18

19 DOCUMENT: Electrical Test Station Standard Operating Procedure (SOP) Version: Now use the Olympus microscope to locate and focus on the probe tip points in the center of the objectives field of view For most application the microscope 2X objective will be sufficient to see the probe tips and device test locations The eyepiece magnification is 10X 2X objective eyepiece is 10X magnification 4220 The Microscopes lateral movement and vertical focusing is controlled by the following : Vertical Lever front-back Horizontal Lever left-right Top Thumbscrew coarse focus Side knob fine focus Top Thumbscrew coarse focus Horizontal Lever left-right Vertical Lever front-back Side knob fine focus 4221 Adjust the eyepiece diopter cross hairs for more precise centering of the probe tips above the DUT measurement locations and adjust the lamp intensity as needed 19

20 DOCUMENT: Electrical Test Station Standard Operating Procedure (SOP) Version: Focus the microscope over the DUT for each probe tip you will be using to make any final adjustments to the stage X,Y or theta positions 10mm to 20mm above the DUT 4223 Very slowly lower the 1 st probe tip to a height of 5mm to 10mm above the DUT measurement site position by rotating the manipulator/probe holder top thumbscrew CCW Now adjust the 1 st probe tip X and Y position to the center of the DUT measurement site by rotating the manipulator/probe holder side and rear thumbscrew CW or CCW and constantly adjusting the microscope fine focus and lamp intensity rear thumbscrew is forward-backward probe motion side thumbscrew is left-right probe motion At this point you are at the center of the DUT measurement location and 5mm above the surface 4224 Extremely slowly lower the 1 st probe tip by rotating the manipulator/probe holder top thumbscrew CCW and constantly adjusting the microscope fine focus and lamp intensity Focus to about 1mm above the DUT You can use the on the DUT surface or features of the DUT such as surface grains, lines, patterns, pads as a reference how close you are to making probe contact with the DUT test measurement location 20

21 DOCUMENT: Electrical Test Station Standard Operating Procedure (SOP) Version: When the probe tip makes contact with the DUT measurement site surface it will stop moving One final very small downward movement the probe tip will move (skip) forward about 1-2 um This will ensure you have made good contact with the surface Do not go beyond this final downward motion or you will bend the probe tips affecting your measurements and causing damage the probe tip 4226 Do not move the platen height or the stage X, Y and theta rotation until the all measurements are completed Do not move the platen height or the stage X, Y and theta rotation 4227 Slowly move the microscope position to the other probe tips and make contact with the DUT the same way as the 1 st probe tip as per sections 4218 to 4220 and 4222 to 4226 only Omit section Turn the microscope lamp voltage to 0V so no radiant energy will affect your measurements You are now ready to use the Metrics ICS software to set up measurement conditions to test the DUT 21

22 DOCUMENT: Electrical Test Station Standard Operating Procedure (SOP) Version: On the TF electrical test computer at the MS Windows desktop screen double click on the MT ICS icon to open the Metrics software TF Electrical Test computer MS screen and MT ICS icon 4230 The Metrics software will boot up to and show a grey main menu screen with task bar at the top header as shown Task bar at the top header If you have previously made an ICS program click on the File tab to open the projects file to access the saved program The previously saved ICS programs have saved all previous configuration and testing conditions/parameter settings the process to section: 4235 to 4239 to verify the testing conditions and SMU designations To connect, check configuration and test the communication of the instrument proceed to the next step Click on the first icon on the task bar as show to connect an instrument In the Instruments menu the left window list the available instruments Use the scroll down tab to finds hp4145 Click on hp4145 it will be highlighted blue and then press the Connect -> button 22

23 DOCUMENT: Electrical Test Station Standard Operating Procedure (SOP) Version: Next click on the Config button to check the communication between the software and HP 4145A instrument The GPIB address is set to 17Verify the communication by clicking on Poll button You will hear the HP4145A clicking as a response to the polling Click the OK button to connect the HP4145A and get back to main screen For any instrument connection issues call staff to check 4233 Click on the second icon on the task bar as shown The Set Up editor menu will open automatically, click on the New button as and enter a file name for this measurement test and press OK as shown 4234 Next click on the Devices box to choose the device type test for your DUT Use the arrow up and down slide bar to scroll through all the device type options Select the device type and polarity if needed for testing and then click on OK 23

24 DOCUMENT: Electrical Test Station Standard Operating Procedure (SOP) Version: To verify ICS is connected to HP4145A for this file name click on the Instruments tab 4236 Next Click on the Sources box to connect the SMU's to the appropriate manipulators and probes In this example click on HP4145SMU1 in the Source Units window and then click on box A (blue box) of the device Then click on HP4145SMU2 in the Source Units window and click on box K (blue box) of the device as shown The SMU icon will be displayed next to box A and K Then click on the Done box in the Source Units window when you are finished connecting all the SMU you will be using If you need additional voltage sources or measuring sources (VS1,VS2,VM1,VM2) call staff check on Tirac and BNC cable availability 4237 Next Click on SMU1 icon to open SMU setup parameter page as shown and enter the Source and Measure parameters conditions you want to test this DUT measurement site under Click on the remaining SMU icons and enter any allowed source and measuring parameters you want to obtain A list of source and measuring parameters available and there functions are listed below 24

25 DOCUMENT: Electrical Test Station Standard Operating Procedure (SOP) Version: The HP4145A Source and measuring parameters definitions, functions and operating ranges are listed below Note: Most SMU's can only measure the signal that is not being sourced Therefore in this case we have selected the Stimulus to be Current resulting in the Voltage being measured The values returned for Current in this case would be the calculated current steps The opposite is true when the Stimulus mode is set to Voltage The Sweep Time parameters are to control the rate of the sweep 4239 When you are done entering the source and measuring parameters for all the SMU locations you are using press OK If you want to discontinue the Setup press Cancel This will return the ICS software to the Setup Editor screen 4240 To set an integration time click on the Options tab Integration time can be set to Short, Medium or Long and the measurement can be set to Single or Repeat 25

26 DOCUMENT: Electrical Test Station Standard Operating Procedure (SOP) Version: Agilent 4155A integration time and Measure Modes are described as follows : Integration time is used to reduce measurement errors caused by line frequency noise, thermal noise, magnetic, vibrational, air currents or any other environmental noise source, The 4155A/4155B takes a number of measurement samples and averages them to obtain a measurement data The number of measurement samples taken during each measurement depends on integration time Setting a longer integration time increases the number of measurement samples, so you can get more accurate measurement data Integration time is divided into three categories short, medium and long Short integration time is < 1 PLC (power line cycle) To perform high-speed measurements, set integration time to short Short integration time is effective when you need high-speed measurements But the measurement data have lower resolution Medium integration time is 1 PLC (power line cycle) Integration time depends on the power line cycle thus 1 PLC cannot change its value (for example, 20 ms for 50 Hz) If you measure current in the 1 na or lower ranges by using SMUs, integration time of SMUs is automatically changed as follows: Long integration time is > 1 PLC (power line cycle) To perform more accurate measurements, set integration time to long Long integration time is effective when you need high resolution and noise reduction measurement But the measurement speed is slow Power line cycle (PLC) integration eliminates measurement error cause by noise from the AC supply current and other environmental noise sources by sampling over multiple power line cycles and averaging the samples There are three measurement execution modes Single, Repeat, and Append Measurement: Single measurement Clears GRAPHICS or LIST page, then executes measurement one time Measurement results are displayed on GRAPHICS or LIST page Repeat measurement executes measurements continuously Before each measurement is executed, the GRAPHICS or LIST page is cleared Most recent measurement results are displayed on GRAPHICS or LIST page Append measurement Executes measurement one time Does not clear GRAPHICS or LIST page That is, measurement results are added to the existing results 26

27 DOCUMENT: Electrical Test Station Standard Operating Procedure (SOP) Version: To Copy, Rename or Delete your ICS measurement file name click on the appropriate tab and enter file names and then press OK or Cancel to abort the operation 4243 If the DUT is using time based measurements click on the Time tab and enter your time domain conditions: time units, sampling type, wait time, start, stop, and step values When you are finished entering the time based conditions click on Done tab 4244 When you are done setting up all the SMU conditions and any Setup Editor test functions, time domains, measurement mode and integration time changes, renaming or copy functions and are ready to test the DUT press the Done button 4245 To create a measurement sequence click on the third icon of the task bar as shown 4246 Select or un-select the file name to create a test sequence as show When you are done creating the sequence click on the OK or Cancel tab to exit 27

28 DOCUMENT: Electrical Test Station Standard Operating Procedure (SOP) Version: To run an electrical test or a sequence test on the DUT click on the fourth icon of the task bar as shown 4248 The Measurement pop-up window will be displayed as shown 4249 The Agilent 4155A integration time, Measuring Modes, history enable can be modified prior to the DUT measurement as per sections 4239 to 4241 For time based measurements you must specify the measurement mode as Time Meas 4250 To run the electrical test on the DUT click on the Single arrow button 4251 During the measurement the HP 4145A s red measuring led will be ON, the instrument will respond by a making clicking noises and an executing single measurement scan message will be displayed on the bottom header of the ICS main screen Allow sufficient time for the measurement scan to complete When the measurement is completed the red led will go off and the scan message at the bottom header will be removed 28

29 DOCUMENT: Electrical Test Station Standard Operating Procedure (SOP) Version: To stop the electrical tests in progress click the Stop button 4253 After the electrical test has been completed the scan message at the bottom header will be removed and test file name and results will be displayed on the lower header as shown 4254 To define data view vectors for plotting graphics click on the 5th icon of the task bar as shown 4255 Enable the Data View functions by clicking on the OK tab then click again on the 5th icon of the task bar to display the define data view screen 4256 In the Define Data View screen there are Data Vectors and View Vectors Remove any view vectors you will not be using or are not available with the HP4145A (ACCSTRESS is not available with model HP4145A ) by clicking on the appropriate Col X : View Vectors and making them highlighted blue Then click on the Remove tab to remove from viewing To add a Data Vector to the View Vector list click on the appropriate data vector and then click on the Add-> tab When you done removing or adding view vectors you click on the Done tab upper right of the same widow 29

30 DOCUMENT: Electrical Test Station Standard Operating Procedure (SOP) Version: Next click on the 6th icon of the task bar to plot your data as shown 4258 The Set Plot View screen will be displayed Click on X, Y, Z-axis tabs to name the X,Y,Z axes on the graphics display Enable grid line or invert axis if you want these options Click on X, Y, Z-axis tabs to name the X,Y,Z axes on the graphics display Click on Data Groups (X, Y1, Y2) drop down menu to select the SMU data channel (VK, IK, IA ) the selected channel will be highlighted blue Click on the Scale Type drop down menu for X, Y1, Y2 groups and choose linear or log graphics scaling To change the Min and Max Values of the SMU data collection by using the computer keyboard to overwrite the current values When you are done setting the plot view click on the Done tab at the bottom left of this menu and the plot will be created 30

31 DOCUMENT: Electrical Test Station Standard Operating Procedure (SOP) Version: The plot is made from whatever data window is currently active The name of the plot in the Window title is the setup name followed by a dash and a number Multiple plots can be created from the same data set, the number will just increase If you want to enlarge or compress the graphics image, click in one corner of the plot and drag the corner outward or inward When the image is the size you want, release the mouse button 4260 To copy the plot image to your files use Print Screen key on your keyboard 1) Press the Print Screen key on your keyboard It may be labeled [PrtScn] 2) Open Microsoft Paint program 3) Go to the Edit menu and choose Paste 4) If prompted to enlarge the image, choose Yes 5) Optional: Use your image editor's crop tool to crop out unnecessary portions of the screen shot 6) Go to the File Menu and choose Save As 7) Save images to the following path : 8) C:\Documents and Settings\user\My Documents\USERS FILE\ name of user \ 9) Type a file name for the image Microsoft Paint program C:\Documents and Settings\user\My Documents\USERS FILE\ name of user \ 4261 For more information about the ICS software s editing tools available for plots such as changing the axis to linear or log, auto scaling, adding notes to the plot, overlaying plots, zooming features and set up changes go to section: 45 Creating and Editing a Plot, Transforms and Saving Project Data 31

32 DOCUMENT: Electrical Test Station Standard Operating Procedure (SOP) Version: To view electrical test data table click the data window tab at the bottom left header 4263 To save the data tables simply select File >> Save As and select the directory and enter a filename Metrics ICS version 400 allows the data to be stored anywhere within the windows file system Note: If you want the ICS Backup utility to save the data make sure it is saved within the C:\ Metrics\ics\project\ USER FILE path 4264 To save the Currently Opened Project simply click on the 8 th icon of the task bar as shown The file path for automatically saving projects with the Save icon is : C:\Metrics\ics\projects\USER FILE 4265 To save ICS data tables to MS Excel spreadsheet simply click on the 10 th icon of the task bar as shown 32

33 DOCUMENT: Electrical Test Station Standard Operating Procedure (SOP) Version: Click on the Start tab at the lower left of the MS XP screen to open MS Excel 2010 software 4267 To paste ICS data table to MS Excel spreadsheet right click the mouse on box A To save the Excel spread sheets simply select File >> Save As and select the directory and enter a filename Metrics ICS version 400 allows the data to be stored anywhere within the windows file system Use the following path for saving Excel spread sheets ONLY : C:\Documents and Settings\user\My Documents\USERS FILE\ name of user \ C:\Documents and Settings\user\My Documents\USERS FILE\ name of user \ 4269 When you are finished measuring the 1 st DUT component or measurement site and are going to measure other DUTs device locations proceed to section 4211 to 4228 to set up the probes on another DUT s location on your wafer 4270 When you are finished measuring all the site locations you will be testing proceed to section 44 Systems Shut down HP 4145A, HP4284 and MMC 6000 Sections 441 to 4417 to raise the probes off the wafer and the removal of your probes from the manipulators and then perform system shutdowns 33

34 DOCUMENT: Electrical Test Station Standard Operating Procedure (SOP) Version: To exit the Metrics ICS software click on the File header on the top left of the screen, the File tab will open then click on the Exit option to exit the software 4272 The software will prompt you to save parameter changes for the measurement files you created and modified Click on Yes to save, No or Cancel 4273 Clicking on Yes to save will display the file path as in section 4262 to 4263 Simply select File >> Save As and select the directory and enter a filename Metrics ICS version 400 allows the data to be stored anywhere within the windows file system Close any remaining open ICS files Note: If you want the ICS Backup utility to save the file and data make sure it is saved within the C:\ Metrics\ics\project\ USER FILE path 4274 Close the Metrics ICS software by clicking on the Close button at the upper right corner The ICS software will close and the MS XP desktop screen will be displayed 4275 Shutdown the Teaching Fab XP computer by clicking the desktop start tab and then the Turn Off Computer button as shown 34

35 DOCUMENT: Electrical Test Station Standard Operating Procedure (SOP) Version: 1 43 Operating the Hewlett Packard 4248 Precision LCR Meter with the Micromanipulator Probe Station model If you have not completed the System Pre-Checks in steps then you must complete those before proceeding 432 Turn ON the TF electrical test computer by pressing the front power button At the Windows XP login screen type in the password using: test Computer will boot up to MS desktop screen password use: test TF Electrical Test computer MS screen 433 Check to ensure the Agilent 82357A USB/GPIB interface converter power up sequence completes normally (the TF electrical test computer needs to be ON) Initially only the red FAIL LED should be ON After a few seconds all three LEDs should be ON After another minute only the green READY LED should be ON If all three LEDs remain ON notify staff to check After a minute only the green READY LED should be ON 434 For the Hewlett Packard 4284 check to ensure the four-terminal pair bnc s are connected the bottom of the bnc mounting plate and two of the micromanipulator bnc cables are connected properly to the top the bnc mounting plate shown If the manipulator bnc cables are connected to the triac-bnc converter box then disconnect two of them and connect the cables to the top of the bnc mounting plate The bnc plate is labeled H(pot/cur) and L(pot/curr) The bnc connectors will lock in Hewlett Packard 4284 top and bottom side of the bnc plate 35

36 DOCUMENT: Electrical Test Station Standard Operating Procedure (SOP) Version: Turn HP4284 front panel power switch to the ON position by moving the switch to the ON position 436 Check to ensure the instruments cooling fan is ON at the back of the HP4284 If the fan is not ON turn instrument s power OFF and notify staff 437 Allow the instrument to warm up 30 minutes 438 Carefully place and position the DUT at center of the chuck per sections: 427 to 4223 Leave 5mm-10mm separation between the DUT surface and the probes to perform an OPEN and SHORT test Position the DUT at center of the chuck per sections: 427 to On the TF electrical test computer at the MS Windows desktop screen double click on the MT ICS icon to open the Metrics software TF Electrical Test computer MS screen and MT ICS icon 36

37 DOCUMENT: Electrical Test Station Standard Operating Procedure (SOP) Version: The Metrics software will boot up to and show a grey main menu screen with task bar at the top header as shown Task bar at the top header 4311 If you are going to run a previously saved ICS program click on the File tab to open the Projects file to access the saved program The previously saved ICS programs have saved all previous configuration and testing conditions/parameter settings Proceed to section 4323 to 4327 to verify the program, perform any open and short test To connect, configure and test the communication of the instrument proceed to the next step Click on the first icon on the task bar as show to connect an instrument In the Instruments menu the left window list the available instruments Use the scroll down tab to finds hp4284 Click on hp4284 it will be highlighted blue and then press the Connect -> button 37

38 DOCUMENT: Electrical Test Station Standard Operating Procedure (SOP) Version: Next click on the Config button to check the configuration setting and the communication between the software and HP4284 instrument Verify the GPIB address is set to 16, if it is not set to 16 call staff to check In the Options window click on the 001 Power Amp/ DC Bias bubble to enable this configuration Check the cable length is set to 1 meter, if it is not 1 meter click on the cable length drop down menu and change to 1 meter 4314 Verify the communication by clicking on Poll button The HP4284 the led will flicker If led flickers then the communication is working, then click on the OK tab Click on instruments screen OK to exit led flickers then the communication is working Click on instruments screen OK to exit 4315 To create a new program click on the second icon on the task bar as shown The Set Up editor menu will open automatically, click on the New button as and enter a file name for this measurement test and press OK as shown 38

39 DOCUMENT: Electrical Test Station Standard Operating Procedure (SOP) Version: To measure the Impedance Z or Admittance Y of capacitors,inductors, resistors, circuits and other components click on the Devices box to choose the CAP device type Use the arrow up and down slide bar to scroll through all the device type options clicking on the CAP device type Click the OK button to and get back to Set Up editor main screen 4317 Next in the Set Up editor menu click on the Sources tab, a Source Units sub menu will drop down 4318 To verify ICS is connected to HP4284 for this file name click on the Instruments tab to check if HP4284 is displayed 4319 In the Source Units sub menu click on the Source Units tab to program and electrically connect your DUT to the appropriate probe-manipulator high and low signal cables labeled H(pot/cur) and L(pot/curr) After clicking on the Source Units tab the two terminals will be displayed in the Source Units window HP4284 CMH and HP4284 CML 4320 Click on HP4284 CMH, it will be highlighted blue then click on box A (blue box) of the device to designate the manipulator labeled H(pot/cur) as HP4284 CMH 39

40 DOCUMENT: Electrical Test Station Standard Operating Procedure (SOP) Version: Click on HP4284 CML in the Source Units window and click on box K (blue box) of the device to designate the manipulator labeled L(pot/curr) as HP4284 CML 4322 The CMH and CML icons will be displayed next to box A and K as shown Then click on the Done box in the Source Units window when you are finished connecting CMH and CML to the DUT 4323 Next Click on CMH icon to open the HP4284 Setup page to enter the HP4284 measurement conditions you want to test the DUT site with HP4284 Setup page A list of HP4284 measurement conditions, functions and ranges available are listed below 40

41 DOCUMENT: Electrical Test Station Standard Operating Procedure (SOP) Version: The HP4284 measurement setup parameters and conditions, parameters definition, parameter functions,operating ranges and the measurement display fields available are listed in the two figures below HP 4284 notes : ALC,Signal Level Monitors 41

42 DOCUMENT: Electrical Test Station Standard Operating Procedure (SOP) Version: When you are you are done entering the HP4284 measurement setup parameters and conditions for CMH box A press OK to return Setup Editor Screen If you want to discontinue the Setup press Cancel to return also to the Setup Editor screen press OK 4326 In the Setup Editor Screen CML box K requires no entries, if you click on CML icon the following message will be displayed No Parameter setting are required 4327 In the Setup Editor Screen click Options to perform the Open and Short compensation tests If you want to skip these test click on Done to continue 4328 If you click on Options the following sub-menu is displayed 42

43 DOCUMENT: Electrical Test Station Standard Operating Procedure (SOP) Version: Click on Open bubble to enable the Open circuit compensation test, then click on the Cal at All Frequencies box to enable the Open test to be performed over a range of Frequencies or run the test at single frequency Note: Leave 5mm-10mm separation between the DUT surface and the probes to perform an OPEN test 10mm to 20mm above the DUT Note : Open correction compensates for stray Admittance due to the test fixture Note: Enabling the Cal at All Frequencies : option will collect open data at 48 preset frequencies listed below, or you can collect data at a single frequency 4330 After you have set up your Open compensation test click on Calibrate to perform the test The test may take up to 2 minutes to complete 43

44 DOCUMENT: Electrical Test Station Standard Operating Procedure (SOP) Version: To perform the Short compensation test click on the Short bubble, then click on the Cal at All Frequencies box to enable the Short test to be performed over a range of frequencies or run the test at single frequency Note: The Short compensation test the probes connection contacts need to shorted together on the DUT conduction pad, conduction line or a shorting plate and the probes should be shorted at a minimum separation distance to each other Per section 4221 to 4226 Do not go beyond this final downward motion or you will bend the probe tips affecting your measurements and causing damage the probe tip Note : Short correction compensates for stray resistance and inductance due to the test fixture Note: Enabling the Cal at All Frequencies : option will collect open data at 48 preset frequencies listed below, or you can collect data at a single frequency 44

45 DOCUMENT: Electrical Test Station Standard Operating Procedure (SOP) Version: After have set up your Short compensation test click on Calibrate to perform the test The test may take up to 2 minutes to complete 4333 To close HP4284 calibration sub menu click on the Close tab to return to the Setup Editor screen 4334 To copy, delete, create time based measurements or make a measurement test sequence go back to sections 4241 to 4246 and follow instructions If you are ready to run the test click on the Done tab 4335 To make any last probe placement adjustments go back to section 4221 to To run an electrical test or a sequence test on the DUT click on the fourth icon of the task bar as shown 4337 The Measurement pop-up window will be displayed as shown For time based measurements you must specify the measurement mode as Time Meas 45

46 DOCUMENT: Electrical Test Station Standard Operating Procedure (SOP) Version: The default measurement mode is STANDARD 4339 To run the electrical test on the DUT click on the Single arrow button 4340 During the measurement the HP 4284A s yellow led flickers, and the HP 4284A LCD displays the running test The LCD will display the LCR measurements, DC bias sweeps, oscillator levels,frequencies and an executing measurement scan message will be displayed on the bottom header of the ICS main screen Allow sufficient time for the measurement scan to complete When the measurement is completed the scan message at the bottom header will be removed 4341 To stop the electrical tests in progress click the Stop button 4342 After the electrical test has been completed the scan message at the bottom header will be removed and test file name and results will be displayed on the lower header as shown 4343 To define Data View Vectors (Capacitance, Inductance, DC bias, oscillator levels, frequencies, Q, D, Z, Y, etc) Set Plot View screen, plot your data, save graphics and data to MS Excel go to sections 4254 to 4268 and follow the instructions Sections 4254 to

47 DOCUMENT: Electrical Test Station Standard Operating Procedure (SOP) Version: When you are finished measuring the 1 st DUT component or measurement site and are going to measure other DUTs device locations proceed to section 4211 to 4228 to set up the probes on another DUT s location on your wafer Then go to sections 4316 to 4343 to check or change measurement conditions, run an open and short tests (optional) if you desire and run the test 4345 When you are finished measuring all the site locations you will be testing proceed to section 44 Systems Shut down (HP 4145A, HP4284 and MMC 6000) Sections 441 to 4417 to raise the probes off the wafer and the removal of your probes from the manipulators and then perform instrument and computer shutdowns 44 Systems Shut down (HP 4145A, HP4284 and MMC 6000) 47

48 DOCUMENT: Electrical Test Station Standard Operating Procedure (SOP) Version: 1 44 Systems Shut down (HP 4145A, HP4284 and MMC 6000 ) 441 Do not move the platen height or the stage X, Y and theta rotation until the all the probes have been raised from the surface of the DUT Do not move the platen height or the stage X, Y and theta rotation 442 Extremely slowly raise the 1 st probe tip by rotating the manipulator/probe holder top thumbscrew CW several turns to raise the probe tip above the DUT s device surface to 10mm to 20mm separation distance Turn thumbscrew CW several turns to raise the probe tip above the DUT to 10mm to 20mm separation distance 443 Repeat this step (442) for the rest of the manipulator/probes that are in contact with the DUT s device surface 444 Raise platen height by slowly rotating the platen Z knob CW and raise the manipulator probe holder higher by rotating the manipulator s top thumb screw CW until to have about 1/2" to 1 " clearance between the chuck and probe holder; otherwise you may break or damage the prober tips and probe holders during the removal of the DUT Platen Z knob and Manipulator Thumbscrew CW to obtain ½ to 1 clearance 445 Turn the wafer vacuum switch to the OFF position and carefully remove your DUT from the chuck 48

49 DOCUMENT: Electrical Test Station Standard Operating Procedure (SOP) Version: If you have more DUT s to test on the HP 4145A or the HP 4284 go back to sections 4211 to 4228 to set up the probe contacts onto the next DUT 447 To run the next electrical test using the HP 4145A go to sections 4228 to To run the next electrical test using the HP 4284 go to sections 431 to If you are finished using the electrical station turn the HP 4145A or the HP 4284 power OFF by pressing the power switch button out (HP 4145A) or turning the power switch to the OFF position(hp 4284) before removing your probes Turn the HP 4145A or the HP 4284 power OFF before removing your probes 4410 Disconnect any of the manipulators-probe holder s outer grounding lead from the platen terminal connector post Some of these connectors are alligator or small set screw type 4411 Carefully move the manipulators away from the stage and microscope to have better access to the probes then carefully remove the Micromanipulator type 7 probe tips from the prober holder by gently holding the probe holder and pulling the spring-load locking mechanism slowly backwards and carefully removing the probe tip through the bottom hole Be careful not to accidentally bump the thinner measuring tip or it may bend or break When the probe is completely removed slowly release the spring-load mechanism and set the manipulators back on the platen The probe holders are very expensive so use extra caution when handing the probe holders, probe holding springs locks and when inserting and removing the probe tips 49

50 DOCUMENT: Electrical Test Station Standard Operating Procedure (SOP) Version: If you have not exited the Metrics ICS software then click on the File header on the top left of the screen, the File drop down menu will open then click on the Exit option to exit the software 4413 The software will prompt you to save parameter changes for the measurement files you created and modified Click on Yes to save, No or Cancel 4414 Clicking on Yes to save will display the file path as in section 4262 to 4263 Simply select File >> Save As and select the directory and enter a filename Metrics ICS version 400 allows the data to be stored anywhere within the windows file system Close any remaining open ICS files Note: If you want the ICS Backup utility to save the file and data make sure it is saved within the C:\ Metrics\ics\project\ USER FILE path 4415 Close the Metrics ICS software by clicking on the Close button at the upper right corner The ICS software will close and the MS XP desktop screen will be displayed 4416 Shutdown the Teaching Fab XP computer by clicking the desktop start tab and then the Turn Off Computer button as shown 4417 Enter the required information into the logbook 50

51 DOCUMENT: Electrical Test Station Standard Operating Procedure (SOP) Version: 1 45 Creating and Editing a Plot, Transforms and Saving Project Data 451 After the electrical test has been completed the scan message at the bottom header will be removed and test file name and results will be displayed on the lower header as shown 452 To define Data View Vectors (Capacitance, Inductance, DC bias, oscillator levels, frequencies, Q, D, Z, Y, etc) Set Plot View screen, plot your data, save graphics and data to MS Excel go to sections 4254 to 4268 and follow the instructions Sections 4254 to The plot is made from the data window is currently active The name of the plot in the Window title is the setup name followed by a dash and a number Multiple plots can be created from the same data set, the number will just increase 51

52 DOCUMENT: Electrical Test Station Standard Operating Procedure (SOP) Version: To enlarge or compress the graphics image, click in one corner of the plot and drag the corner outward or inward When the image is the size you want, release the mouse button 455 The plot window contains many editing tools for the plot The Axis button reveals the tools to change the axis from linear to logarithmic and to auto scale the plot The Cursors button allows the addition and control of cursors on the plot The Fits button allows the application of curve fits related to the cursors The Opts button presents several options for adding notes to the plot, overlaying plots, zooming features, and setup changes 52

53 DOCUMENT: Electrical Test Station Standard Operating Procedure (SOP) Version: To change the colors of the Axis, Numbers, Labels,Titles and Curves right click on an axis to open the drop down menu to change colors as shown 457 To add or modify graph Title names and comments right click on the top title or click on the Title icon in the plot window 458 The editing functions are discussed in great detail within the ICS Reference Manual 459 To create a transform or calculation of the data vectors click on the 7 th icon on the task bar as Shown to open the Transform Editor 53

54 DOCUMENT: Electrical Test Station Standard Operating Procedure (SOP) Version: Clicking on the Transform Editor icon the Transform Editor will be displayed 4511 The Transform Editor has several areas: Transform Entry Box: The location to enter a transform or calculation Edit Constants Button: Allows constants to be defines and edited Defined Transform List: A list of all transforms defined for this setup Function List: Predefined functions available for the calculation of parameters Constants List: A list of constants that can be used in the calculation Vector List: A list of the measured and calculated data vectors Action Buttons: Controls for the saving of transforms, deleting transforms and exiting the transform editor 4512 To create a Transform calculation enter the calculation in the "Transform" box The calculation must be in the form result = function (vector) 54