New Features in CODE V Version 10

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Patience West
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2 About This Presentation This presentation consists of: A PowerPoint show to introduce and describe the new features A few demonstrations to show how the features work in CODE V Questions & Answers New Features in CODE V, Slide 2

3 CODE V 10 - New Feature Highlights Parallel processing support for Optimization Variable limit increased to 999 Usability enhancements O/S & Language Support Beam Synthesis Propagation (BSP) Beta Release New Features in CODE V, Slide 3

4 AUT Parallel Processing Support CODE V 10.0 will support parallel processing calculations of key merit functions in the automatic optimization feature (AUT) With the parallel processing feature, CODE V uses two or more cores on a single computer to perform design optimization in a fraction of the time needed using a single processor This provides the potential for significant speed-up for both local and global optimization on PCs with multiple processors and/or multiple cores on each processor New Features in CODE V, Slide 4

5 Parallel Processing Illustrated CODE V parallel processing illustrated for a 4-core PC chip New Features in CODE V, Slide 5

6 Amdahl s s Law Will a PC with 8-cores optimize 8x faster? Unfortunately no, the speed-up will never be equal to the number of cores (Amdahl s Law) There is always a serial part (S) of the computation that cannot be run on multiple threads There is also computational overhead as the # of cores is increased that degrades the % performance improvement For more information on parallel processing background, references, and hardware recommendations, please see the CODE V 10.0 Release Notes Amdahl s Law Speed-up = 1/(1-P+P/N) P = Parallel Fraction (1-S) N = Number of Cores New Features in CODE V, Slide 6

7 Supported Error Functions Which CODE V error functions can be used with parallel processing? Currently the following error functions are enabled for parallel processing: Transverse Ray Aberration (default) Wavefront Variance (WFR) User Defined Error Function (UDEF) The UDEF parallel processing implementation is not currently as complete as either the default or WFR error functions, so the speed-up factor isn t as large New Features in CODE V, Slide 7

8 Parallel-Processing Processing Benchmarks 7.1x Speed-up on 8-cores 6.9x Transverse 6.7x Wavefront 3.9x UDEF 5.1x New Features in CODE V, Slide 8 1 of 9 zoom configurations 5.5x The actual speed up depends on system attributes & optimization parameters

9 Demonstration Demonstration of Optimization (AUT) Parallel Processing Support New Features in CODE V, Slide 9

10 Parallel Processing w/gs GS Starting Points 9MM - 36 MM F/2 ZOOM U.S. PAT. 3,464,763 Position: 3 FULL SCALE MM ORA 10-Aug-08 New Features in CODE V, Slide 10

11 Parallel Processing Issues Will macro functions, macro database items, and user-modifiable routines (e.g., User Defined Surfaces, UDS; User Surface Properties USP; etc.) work with parallel processing? CODE V supplied macro functions; CODE V macro database items; and user-modifiable routines (UMRs) must be thread-safe to utilize parallel processors New Features in CODE V, Slide 11

12 What does thread-safe mean? A piece of code is thread-safe if it functions correctly while it is executed simultaneously on multiple threads For example, if various threads can update a shared variable simultaneously, they may update or access the variable while it s in an invalid state, yielding an inaccurate result Making the code thread-safe prevents problems like this New Features in CODE V, Slide 12

13 Thread-safety in CODE V Most macro functions & database items that are commonly used as part of user-defined constraints (UDCs) in optimization, have been made threadsafe See the Release Notes for a list of macro functions and database items that are not thread-safe For UMRs, you must tell CODE V that the UMR is thread-safe by compiling the UMR with a new CVISTHREADSAFE function defined The CODE V 10.0 Release Notes include a Quick Start Guide to writing thread-safe UMRs, and also on-line references to thread-safe code Most of the UMRs supplied with CODE V are threadsafe New Features in CODE V, Slide 13

14 Non-thread thread-safe Code If you try to use a non-thread safe macro function, database item, or a UMR that was not compiled with the CVISTHREADSAFE function defined, no worries! CODE V will detect the problem, issue a warning, and reset your MPP value to 1 for the optimization run New Features in CODE V, Slide 14

15 Increased Variable Limit CODE V 10.0 allows up to 999 variables In CODE V 9.82 and before, 300 variables was the max Parallel processing scales very well for systems with many variables The graph below show the speed-up compared to optimizing on a single core AUT Performance for Lens with 999 Variables 8 Speedup using MPP1 as Base System is a 24-element, refractive imager for Microlithography with: 46 variable curvatures; 48 variable thicknesses; and 905 variable aspheric terms CORE AUT_TRA AUT_WFR AUT_UDEF New Features in CODE V, Slide 15

16 LDM Spreadsheet Improvements Based on customer requests we have added quick access to the System Data and Surface Properties windows from the LDM Spreadsheet: New Features in CODE V, Slide 16

O/S & Language Support CODE V 10.0 will operate on: with both administrator and non-administrator privileges We officially support (i.e., test) Windows Vista Business 32-bit & 64-bit The user experience in CODE V 10 on VISTA should be similar to using CODE V on WinXP CODE V 10.

17 O/S & Language Support CODE V 10.0 will operate on: with both administrator and non-administrator privileges We officially support (i.e., test) Windows Vista Business 32-bit & 64-bit The user experience in CODE V 10 on VISTA should be similar to using CODE V on WinXP CODE V 10.0 offers new UI localization choices of French and German New Features in CODE V, Slide 17

$Beam Synthesis Propagation Beam Synthesis Propagation (BSP) is a new analysis option of CODE V It uses a highly accurate, beamletbased, diffraction propagation algorithm for optical field propagation$ correctly than any other commercial beam propagation software 96.000 mm Array Theorem: BSP Surface 4 96.000 mm Wavelength 500.00000 nm. Plot centered at X=0; Y=0 mm 0.5000 mm 3.

correctly than any other commercial beam propagation software 96.000 mm Array Theorem: BSP Surface 4 96.000 mm Wavelength 500.00000 nm. Plot centered at X=0; Y=0 mm 0.5000 mm 3.

18 Beam Synthesis Propagation Beam Synthesis Propagation (BSP) is a new analysis option of CODE V It uses a highly accurate, beamletbased, diffraction propagation algorithm for optical field propagation and will include diffraction effects through the entire optical system BSP includes a pre-analysis feature to help users determine the correct inputs for their system This makes BSP easier to use correctly than any other commercial beam propagation software mm Array Theorem: BSP Surface mm Wavelength nm. Plot centered at X=0; Y=0 mm mm mm Array Theorem: BSP Surface 3 Wavelength nm. Plot centered at X=0; Y=0 mm mm Int (DB) JWST, Visible Imaging Segment, Surface 34 Int (DB) Int (DB) Wavelength nm. Plot centered at X=0; Y=0 mm mm New Features in CODE V, Slide 18

$Typical Diffraction Modeling Most optical design software uses an exit-pupil diffraction model to analyze diffraction A grid of rays* is geometrically traced through the system The complex field at$

19 Typical Diffraction Modeling Most optical design software uses an exit-pupil diffraction model to analyze diffraction A grid of rays* is geometrically traced through the system The complex field at the exit pupil is determined from the intensity and phase (OPD) for each ray that passes through the system unobstructed Physical optics are used to propagate the field to the focal plane (an FFT is typically used) * For accurate results, the grid rays should be distributed uniformly in direction cosine space in the exit pupil. CODE V does this. New Features in CODE V, Slide 19

20 General Beam Propagation General beam propagation should be used to analyze systems for which diffraction effects are important, but a geometrical ray tracing approach with an exit-pupil diffraction model does not accurately account for the propagation of light through the system Some system factors that require beam propagation for accurate analyses include: Clipping by multiple apertures Ray-wave disconnects (i.e., slow beams) Intermediate image structure Segmented aperture systems New Features in CODE V, Slide 20

$exit-pupil diffraction model BSP-computed PSF at$ $Image Diffracted light from the 1 st aperture is$

21 Clipping at Multiple Apertures Image 2 nd Clipping Aperture + Lens 1 st Clipping Aperture - the line represents the clear aperture PSF at Image exit-pupil diffraction model BSP-computed PSF at Image Diffracted light from the 1 st aperture is blocked by the 2 nd aperture New Features in CODE V, Slide 21

Ray-Wave Disconnects When slow beams (e.g.

22 Ray-Wave Disconnects When slow beams (e.g., laser beams) propagate, a ray-based approach may adequately represent the field initially, but may fail to adequately represent the field downstream Intensity at final surface: Ray-based (0.6 mm square) Intensity at final surface: BSP-based (0.6 mm square) New Features in CODE V, Slide 22

$In reality, physical diffraction of the wavefront$ $PSF (log scale) Uses exit-pupil diffraction model$ $intermediate focus LUM (no diffraction included) BSP$

23 Intermediate Image Structure Structure at intermediate images simply blocks rays geometrically In reality, physical diffraction of the wavefront will occur Intensity predictions 15 um from focus PSF (log scale) Uses exit-pupil diffraction model Mask of obscuring apertures just inside the intermediate focus LUM (no diffraction included) BSP (log scale) Includes diffraction from mask New Features in CODE V, Slide 23

$Segmented Aperture Systems FFT-based diffraction computations may have difficulties if the pupil becomes$ Prism System PSF Results: Warning: The PSF results at one or more fields are inaccurate.

Prism System PSF Results: Warning: The PSF results at one or more fields are inaccurate.

24 Segmented Aperture Systems FFT-based diffraction computations may have difficulties if the pupil becomes non-contiguous BSP does not have this limitation FOOtprint on Lens Surface TIR surfaces NSS Double-dove Prism System PSF Results: Warning: The PSF results at one or more fields are inaccurate. The mapping between entrancepupil coordinates and exit-pupil coordinates is nonlinear. BSP Results New Features in CODE V, Slide 24

25 How BSP Works A beamlet consists of: A base ray A field that is (initially) localized about the base ray Using the fact that the wave equation is linear, an optical field: Can be approximated as a summation of individual beamlets The beamlets can be propagated independently The beamlets can be summed anywhere downstream to get the propagated optical field New Features in CODE V, Slide 25

26 BSP Innovation: Pre-Analysis Determining appropriate inputs for any beam propagation algorithm can be very challenging We are introducing a feature in BSP called preanalysis to address this problem BSP Pre-Analysis (PRA [RUN TIM]) analyzes the resident lens system with a smaller number of probe beamlets (for relatively fast execution) and provides the following recommendations to users: Input field sampling (NRI) Resampling surfaces & grid (RSF) Clip checking surfaces & parameters (CLC & BMU) Output grid X/Y location, size & sampling (Gxx) An estimate of execution time (for PRA inputs or user inputs) New Features in CODE V, Slide 26

27 BSP Workflow With Pre-Analysis Specify input field type & location (or use default) Specify output data (or use default) List Pre-Analysis recommendations YES Run Pre- Analysis? STOP Use Pre-Analysis recommendations Run BSP New Features in CODE V, Slide 27

28 BSP Workflow Without Pre-Analysis Specify input field type & location (or use default) Specify output data (or use default) Run Pre- Analysis? NO User specifies input field sampling User specifies resampling surfaces & parameters User specifies clip checking surfaces & controls User specifies output grid location, size & sampling Run BSP User specifies other propagation controls New Features in CODE V, Slide 28

29 Specifying the Image Patch In order for Pre-Analysis to make appropriate recommendations regarding clip checking (i.e., special handling of designated clipping surfaces) and output size it needs to know the image patch size of interest Specified by the IMA Si Si..j <#_Airy_Disks> command (default size is 2 Airy Disks square) IMA is only used if Pre-Analysis (PRA) is requested Airy disk size is computed by the angular spread of base rays associated with the probe beamlets Physical dimensions corresponding to Airy disk input are listed in the Pre-Analysis output New Features in CODE V, Slide 29

BSP Algorithm Innovations The BSP algorithm includes several innovations over competitive algorithms to provide highly accurate results with a reduced number of

30 BSP Algorithm Innovations The BSP algorithm includes several innovations over competitive algorithms to provide highly accurate results with a reduced number of beamlets Far-field PSF comparison for an ideal system with a circular clipping aperture Ring 10 Ring 25 Ring 40 Ring 60 Airy Disk Radius New Features in CODE V, Slide 30

31 Demonstration Demonstration of Beam Synthesis Propagation (BSP) New Features in CODE V, Slide 31

32 Thank You! Thank you for attending this webinar We hope you find the enhancements in CODE V 10.0 useful for your own work We d be happy to answer any questions that you might have, and of course, if you have questions later, you can always contact Modern High-Tech, or ORA directly via: SERVICE@OPTICALRES.COM New Features in CODE V, Slide 32

Ray Optics I. Last time, finished EM theory Looked at complex boundary problems TIR: Snell s law complex Metal mirrors: index complex

Ray Optics I. Last time, finished EM theory Looked at complex boundary problems TIR: Snell s law complex Metal mirrors: index complex Phys 531 Lecture 8 20 September 2005 Ray Optics I Last time, finished EM theory Looked at complex boundary problems TIR: Snell s law complex Metal mirrors: index complex Today shift gears, start applying