attocube systems Ultra Compact Positioners for Extreme Environments 14 days delivery

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1 PAGE 96 & PRODUCT CATALOG Introduction Nanopositioning why are attocube nanopositioners unique 14 Days Delivery available for positioners with standard configuration Choose your Type of Positioner find the appropriate nanopositioners Working Environments positioners are designed and manufactured for different environments Combining Positioners merge nanopositioning stages to multidimensional systems Design and Performance Refinements towards ultra robust positioning stages Position Feedback Versions optional position encoder for closed loop operation Product Quick Finder nanopositioners offered by attocube systems LINEAR POSITIONERS ANPz the smallest stepper positioner for linear, vertical motion 14 days delivery If you see this icon the positioning unit will be shipped within 14 days. ANPx linear, horizontal, and compact stepper positioner ANPz linear, vertical, and compact stepper positioner attocube systems explore your nanoworld

2 PAGE 97 & PRODUCT CATALOG ANPx linear, horizontal stepper positioner providing highest stability ANPz linear, vertical stepper positioner providing highest stability ANPx101/NUM linear, horizontal stepper positioner with optoelectronic encoder for closed loop operation ANPz101/NUM linear, vertical stepper positioner with optoelectronic encoder for closed loop operation ANPx100/RES linear, horizontal stepper positioner with resistive encoder for closed loop operation ANPz100/RES linear, vertical stepper positioner with resistive encoder for closed loop operation ANPx100/IND linear, horizontal stepper positioner with inductive encoder for closed loop operation ANPz100/IND linear, vertical stepper positioner with inductive encoder for closed loop operation ANT200/NUM linear, horizontal stepper positioner with large aperture for closed loop operation GONIOMETERS ANGt compact goniometer for Θ-positioning ANGp compact goniometer for Φ-positioning ANGt goniometer for high loads providing Θ-positioning ANGp goniometer for high loads providing Φ-positioning ROTATORS ANR the smallest rotary stepper positioner with vertical rotation axis ANR compact rotary stepper positioner with vertical rotation axis ANR50/RES ANR50 with resistive encoder for closed loop operation ANRv compact rotary stepper positioner with horizontal rotation axis ANRv50/RES ANRv50 with resistive encoder for closed loop operation ANR rotary stepper positioner with vertical rotation axis providing highest stability ANR101/NUM ANR101 with optoelectronic encoder for closed loop operation ANR101/RES ANR101 with resistive encoder for closed loop operation ANRv rotary stepper positioner with horizontal rotation axis providing highest stability ANRv101/RES ANRv101 with resistive encoder for closed loop operation AND100 NanoDrive ultra flat rotary stepper positioner with vertical rotation axis SCANNERS ANSxy compact xy-scanner ANSz compact z-scanner ANSxy large range xy-scanner ANSz large range z-scanner ANSz100sr small range, high resolution z-scanner ANSxyz large range xyz-scanner ANSxyz100sr xyz-scanner with high resolution z-range

3 PAGE 98 & PRODUCT CATALOG Introduction Nanopositioning why are attocube nanopositioners unique :... The great success of attocube systems positioners is based on the unique combination of a patented driving technology, the powerful design, the selection of high-quality materials, and the long experience of the attocube systems staff. The product line of linear, rotary, and goniometer-like positioners and scanners offers you a chance to discover new experimental possibilities. The patented driving technology plays an important role in achieving such a bandwidth of applications. Depending on your requirements you can choose from different sizes, travel ranges, and direction of movement. Our positioners allow you to move reliably objects over centimeter range with atomic precision under a large variety of conditions such as low temperature, high magnetic fields or ultra high vacuum. Optional many of the positioners can be equipped with a position sensor for closed loop operation with nm-resolution. By assembling several stages you can obtain positioning units with up to six degrees of freedom. Piezo Voltage Voltage piezo Piezo Voltage Voltage piezo Piezo Voltage Voltage piezo Piezoelectric actuator Travel Mechanism - attocube systems translation stages are AT ATREST powered using slip-stick motion. The basic principle of translation stages based on slip-stick inertial motion is the controllable use 1 Time of the inertia of a sliding block. SLIP SLIP 2 In our slip-stick inertial translation stages, the sliding block slips along a guided rod to which Time it is otherwise clamped (sticking) STICK in frictional engagement. To obtain a net step, the guiding rod is first accelerated very rapidly over 3 Time a short period of time (typically microseconds) so that the inertia of the sliding block overcomes the friction. This way, the sliding block disengages from the accelerated rod and remains nearly nondisplaced. Subsequently the guiding rod moves back to its initial position slowly enough so that the sliding block this time sticks to it and thus makes a net step. Periodic repetition of this sequence leads to a step-by-step motion of the sliding block in one direction. A piezo electric ceramics pushes or pulls the guiding rod. The exact sequence in the slip and stick motion is controlled by an appropriate voltage signal. Clamped table Guiding rod Flexible membrane Flexible Flexible membrane supports the piezo and the axis memb- x Δx x Δx Fixed frame net step is is completed The main challenge of using slip-stick translation stages for imaging is to obtain a reliable and controllable motion of the sliding block over millimeter ranges and with small and reproduceable steps. The main technical challenge is to control the frictional engagement. The design of our rod and sliding block is such that all surfaces in frictional contact are planar, producing this way a homogeneous and constant frictional force engagement. A major benefit of this technique is that large millimeter motion ranges can be obtained even at cryogenic temperatures, where PZT piezo ceramics are usually limited to scanning ranges of only a few µm. Main Advantages of the driving mechanism: > When a position is reached after a series of steps, zero voltage is applied to the piezo. Therefore, there is no noise and no drift caused by any external electronics. > Only low to moderate voltages are needed to drive the positioners. In attocube systems positioners, piezos with maximum 60 V or 150 V are used. As a consequence, shielding for high voltages is not necessary, and cabling and connectors rated for low voltages can be used. > As the piezos in the positioners can also be used for quasi-dc scanning, the device functions as a coarse stepper and a fine scanner at the same time. This is a tremendous advantage in terms of compactness and stability of the setup. attocube systems explore your nanoworld

4 PAGE 99 & PRODUCT CATALOG attocube systems Positioners Enable 14 days delivery If you see this icon the positioning unit will be shipped within 14 days. Extreme Working Environments ultra low temperature ultra high vacuum high magnetic field Ultra High Precision step sizes in the nanometer range Ultra High Stability low driving voltages no mechanical drift no backlash atomic resolution in SPM Closed Loop Operation fully integrated position sensors for closed loop operation Large Travel Range in the centimeter range (up to 25 mm) Ultra Compact Design as small as Ø 11 x 11 mm providing a coarse travel of several millimeters High Load Capacities multiples of the positioners weight Two Operation Modes coarse and fine positioning capabilities within one single device Why are all of our products presented with dice? Dice are shown for comparison to our highly compact designed products. Every dice shown is 18 x 18 x 18 mm. Extreme Equipment Reliability approved up to billions of steps per positioner Quick & Easy Handling plug & play design

5 PAGE 100 & PRODUCT CATALOG 14 Days Delivery available for positioners with standard configuration :... attocube systems positioners are now available with 14 days lead time upon receipt of your incoming order. This short delivery time applies to a big number of standard positioners out of the nanopositioning product portfolio. Watch out for the small 14 days delivery Truck within the product sections! 14 days delivery If you see this icon the positioning unit will be shipped within 14 days. Purchase Order 14 days processing time attocube systems explore your nanoworld

6 PAGE 101 & PRODUCT CATALOG Delivery

7 PAGE 102 & PRODUCT CATALOG Choose your Type of Positioner find the appropriate attocube nanopositioner :... Linear Positioner Scanner Product Series ANP30 ANP51 ANP100 ANP101 ANS50 ANS100 Closed Loop Options /RES /IND /NUM Nanopositioner Options less than 1 in diameter o o o load 100 g o o o o o overall travel 5mm o o o o Environmental Options LT compatible o o o o o o o LT UHV compatible o o o o o o o UHV compatible with high o o o o o o magnetic fields B Closed Loop Environmental Options LT compatible LT o o UHV compatible UHV o o compatible with high magnetic fields B o attocube systems explore your nanoworld

8 PAGE 103 & PRODUCT CATALOG Choose your type of positioner... Rotator Goniometer Product Series ANR30 ANR50 ANRv50 ANR101 ANRv101 ANG50 ANG101 Closed Loop Options /RES /RES /RES /NUM /RES less than 1 in diameter o o o o o o load 100 g o o o o o o 360 endless rotation o o o o o o o o o o LT compatible LT o o o o o o o o o o o UHV compatible UHV o o o o o o o o o o o o compatible with high B o o o o o o o o o o o magnetic fields LT compatible LT o o o o UHV compatible UHV o o o o o compatible with high B o o o o magnetic fields

9 PAGE 104 & PRODUCT CATALOG Working Environments positioners are designed and manufactured for different environments :... Positioners during ultra high vacuum testing in the attocube labs. attocube s engineers performing a low temperature test. attocube systems delivers positioning stages for many different working environments, which affects the selection of materials and the production processes involved. The positioners can be used at low temperatures less than 10 mk and UHV conditions up to 5E-11 mbar. Furthermore, nearly all attocube systems positioners are made from non-magnetic materials enabling usage in a very strong magnetic field (current max. tested field: 31 T). attocube systems explore your nanoworld

10 PAGE 105 & PRODUCT CATALOG Working Environments... Temperature Range Mimimum Pressure 1E-4 mbar 1E-8 mbar 5E-11 mbar C /RT /HV /UHV < 10 mk K /LT /LT/HV /LT/UHV Magnetic Field Example of a ceramic positioner: rotator made from MACOR. Most of our positioners are made from non-magnetic materials enabling usage in a very strong magnetic field (current max. tested field: 31 T). Room Temperature /RT /RT positioners are manufactured for use at room temperatures and a dry atmosphere with ambient pressure (minimum operating pressure: 1E-4 mbar). They can be tailored to the customers needs: high load, high speed, etc. Before delivery, room temperature tests are performed (this applies also for all other specifications). High Vacuum /HV /HV positioners provide reliable motion in high vacuum >1E-8 mbar. The materials used are compatible with HV specifications. Ultra High Vacuum /UHV /UHV means that the materials used are compatible with UHV specifications. These positioners can be baked out up to 150 C. A test in UHV environment is performed in order to guarantee an outgassing rate of lower than 1E-10 mbar*l/s. Low Temperature /LT /LT means that the materials used are suitable for repeated cooling and operation in low temperature less than 10 mk. Before shipping, they are tested at 4 K under He-exchange gas atmosphere. They can work in a vacuum that is generated due to cryopumping (> ~ 1E-4 mbar). Special Specifications /CUSTOM Example for custom material configuration: nanopositioner made from CuBe. attocube systems also provides special positioners for mk operation, or positioners with no superconducting materials inside. Such positioners may be used for highly sensitive SQUID measurements and other cutting edge research at ultra low temperatures. Furthermore, if you require positioners made from other materials like Al, Cu, CuBe, Macor, coinsilver, stainless steel, or need other specifications, attocube systems can provide a solution for you. Please contact info@ attocube.com for assistance with your special application.

11 PAGE 106 & PRODUCT CATALOG Combining Positioners merge nanopositioning stages to multi-dimensional systems :... attocube systems positioners can be stacked in various ways. The possible arrangements are shown in the tables to the right. The following general rules apply: > A positioner with a lower number should not be used to support one with a higher number, e.g. an ANPx51 should not carry an ANPz101. > For mounting a series 51 positioner on top of a series 101 positioner, an adapter plate is needed. > The series 30 is only compatible with other positioners by the use of a special adapter plate. Therefore they are not listed in the tables. xyz-positioning system consisting of one ANPz101 and two ANPx101. attocube systems explore your nanoworld

12 PAGE 107 & PRODUCT CATALOG Combining Positioners... Cross-mounting schemes Mount on ANPx101 ANPz101 ANGp101 ANGt101 ANR101 ANPx51 AAP 100 AAP 100 AAP 100 AAP 100 AAP 100 ANPz51 AAP 100 AAP 100 AAP 100 AAP 100 on request ANR50 AAP 100 AAP 100 AAP 100 AAP 100 AAP 100 ANSxy50 AAP 100 AAP 100 AAP 100 AAP 100 on request ANPx101 direct direct direct direct direct ANPz101 direct direct direct direct direct ANGp101 direct direct direct direct direct ANGt101 direct direct direct direct direct ANR101 direct direct direct direct direct ANSxyz100 direct direct direct direct direct Mount on ANPx51 ANPz51 ANR50 ANPx51 direct direct direct ANPz51 on request on request on request ANR50 direct direct on request ANSxy50 AAP 50 AAP 50 on request Remarks: direct - mounting possible, no adapter needed. The following positioners can only be combined applying custom made adapter plates: ANRv50; ANRv101; ANPz30; ANR30.

13 PAGE 108 & PRODUCT CATALOG Design and Performance Refinements towards ultra robust positioning stages :... The ANP51, ANP101 and ANG101 series The ANP100 model was the first stepper positioner developed by attocube systems to provide high resolution positioning at low temperatures. Modifications in the design of the linear positioners (ANP101 and ANP51 series) as well as the goniometer (ANG101 series) enable larger forces and torques to be applied to the units resulting in enhanced robustness and higher resonance frequencies. Hereby, the axis is suspended by two membranes which are flexible in the direction of the axis (perpendicular to the membrane), but stiff for all in-plane forces. The flexibility of the membranes allows motion based on the slipstick principle but any damage due to shocks or forces perpendicular to the axis will be avoided by the membranes stiffness. Piezo Voltage Voltage piezo AT ATREST 1 Time Piezoelectric actuator Clamped table Guiding rod Flexible membrane Fixed frame Main Characteristics of the ANP51, ANP101 and ANG101 > ultra robust and stable > higher resonance frequencies > sample transfer via wobble stick possible Piezo Voltage Voltage piezo SLIP SLIP 2 Flexible membrane Flexible membrane supports supports the piezo and the axis the piezo and the axis x Δx Time Piezo Voltage Voltage piezo STICK STICK 3 Time x Δx net net step step is is com- completed Slip-stick principle showing the implemented flexible membranes attocube systems explore your nanoworld

14 PAGE 109 & PRODUCT CATALOG... The ANR101 series The main difference of the new designed rotator ANR101 to the older ANR100 model is its conically shaped axis resulting in higher stability and reliability. Furthermore, the piezo elements are secured via flexure joints and thus, breakage due to hard shocks applied to the rotation axis are avoided. Main Characteristics of the ANR101 > low axial run-out > secured piezo elements, unbreakable > directly compatible with all 100 and 101 nanopositioning models > sample transfer via wobble stick possible

15 PAGE 110 & PRODUCT CATALOG Position Feedback Versions optional position encoder for closed loop operation :... Optoelectronic Readout /NUM This encoder system allows fully automized, closed loop operation with highest resolution compatible with ambient conditions and ultra high vacuum. It delivers a relative position to a reference with a sensor resolution of 50 nm and a repeatability of < 400 nm. Features like the Automatic Amplitude Control enable to drive the positioner with a constant step size which consequently results in constant motion velocity. General Functionality - In the /NUM models of the positioner, an optoelectronic measurement system is fully integrated into the piezo stepper device. The electronic controller required for the driving and position readout is the ANC350. The fully automated software and the plug-and-play design make this positioning system the ideal candidate for a variety of positioning and alignment tasks. Resistive Readout /RES An attractive alternative encoder system is the resistive readout which enables a reading of the absolute sample position. This readout version is particularly suitable for low temperature and is also compatible with ultra high vacuum and magnetic fields. General Functionality - In the /RES models of the positioner, a resistive element is completely integrated into the positioning stage. The electronic controller required for driving this readout system is the ARC200. This module has an internal amplifier which sends a continuous voltage (selectable from 0.1 to 5 V) to the resistive element integrated into the positioners. The measured voltage from the moving arm on the resistance element (X in the schematic drawing above) gives a measure for the position of the axis. 0-5 V ANC350 ARC200 x V (sensor potential = position x Grating Optochip GND resistive element Schematic drawing: Optoelectronic position readout. Schematic drawing: Resistive position readout. attocube systems explore your nanoworld

16 PAGE 111 & PRODUCT CATALOG... Inductive Position Readout /IND The inductive readout represents an additional option in order to achieve precise positioning control. Like the resistive version it enables an absolute positioning readout and can be delivered compatible with low temperatures. General Functionality - An electromechanical transducer based on the LVDT (Linear Variable Differential Transformer) principle is completely integrated into the body of the stage. Moving a core element between the primary and secondary windings of a transformer causes the inductance between the two windings to vary, thereby altering the output voltage proportional to the position of the core element. These LVDT sensors provide non contact, absolute measurements of position with high stability and repeatability. additional electronics for inductive sensor ARC200 coil assembly core element Schematic drawing: Inductive position readout.

17 PAGE 112 & PRODUCT CATALOG Product Quick Finder nanopositioners offered by attocube systems :... Product Name Description Travel Footprint x Height max. Load Page ANPz30 linear, vertical stepper positioner 2.5 mm ø11 x 11 mm 10 g 116 ANPx51 linear, horizontal stepper positioner 3 mm 15 x 15 x 9.2 mm 25 g 120 ANPz51 linear, vertical stepper positioner 2.5 mm 15 x 15 x 13.5 mm 50 g 124 ANPx101 /NUM linear, horizontal stepper positioner (closed loop solution optional) 5 mm 24 x 24 x 11 mm / 24 x 28 x 11.5 mm 100 g 128 / 136 ANPz101 /NUM linear, vertical stepper positioner (closed loop solution optional) 5 mm 24 x 24 x 18 mm / 24 x 28 x 18 mm 200 g 132 / 140 ANPx100/RES /IND linear, horizontal stepper positioner with various closed loop solutions 7 mm / 5 mm 24 x 24 x 14.5 mm 100 g 144 / 152 ANPz100/RES /IND linear, vertical stepper positioner with various closed loop solutions 6 mm / 6 mm 24 x 24 x 25 mm 200 g 148 / 156 ANT200/NUM linear, horizontal stepper positioner with large aperture 7 mm 45 x 45 x 11 mm 300 g 160 ANGt50 compact goniometer for Θ-positioning tilt: x 15 x 10 mm 25 g 166 ANGp50 compact goniometer for Φ-positioning tilt: x 15 x 10 mm 25 g 170 ANGt101 goniometer for high loads providing Θ-positioning tilt: x 24 x 11 mm 100 g 174 ANGp101 goniometer for high loads providing Φ-positioning tilt: x 24 x 11 mm 100 g 178 attocube systems explore your nanoworld

18 PAGE 113 & PRODUCT CATALOG Product Quick Finder... Product Name Description Travel (300 K / 4 K) Footprint x Height max. Load Page ANR30 rotatory stepper positioner with vertical rotation axis rotation: 360 endless ø10 x 8.9 mm 10 g 184 ANR50 /RES rotary stepper positioner with vertical rotation axis (closed loop solution optional) rotation: 360 endless ø 20 x 10.6 mm / ø 20 x 11.2 mm 30 g 188 ANRv50 /RES rotary stepper positioner with horizontal rotation axis (closed loop solution optional) rotation: 360 endless 8.5 x 20 x 21 mm / 9 x 20 x 21.5 mm 30 g 196 ANR101 /RES/NUM rotary stepper positioner with horizontal rotation axis (closed loop solution optional) rotation: 360 endless ø 30 x 15.2 mm / ø 30 x 15.8 / 17.8 mm 100 g 204 ANRv101 /RES rotary stepper positioner with horizontal rotation axis (closed loop solution optional) rotation: 360 endless 15 x 30 x 33 mm / 15.6 x 30 x 33 mm 100 g 216 AND100 rotary stepper positioner with vertical rotation axis rotation: 360 endless ø 14 x 3.3 mm 20 g 224 ANSxy50 compact xy-scanner 20 x 20 / 12 x 12 μm ANSz50 compact z-scanner 4.3 μm / 2 μm ANSxy100 large range xy-scanner 40 x 40 / 30 x 30 μm 15 x 15 x 7 mm 50 g x 15 x 6 mm 50 g x 24 x 10 mm 100 g 238 ANSz100 ANSz100sr ANSxyz100 ANSxyz100sr large / small range z-scanner 24 μm / 15 μm large / small range xyz-scanner 40 x 40 x 24 / 30 x 30 x 15 μm 24 x 24 x 10 mm 100 g 242 / x 24 x 10 mm 100 g 250 /

19 PAGE 114 & PRODUCT CATALOG attocube systems explore your nanoworld

20 PAGE 115 & PRODUCT CATALOG LINEAR POSITIONERS...

21 PAGE 116 & PRODUCT CATALOG ANPz30 the smallest stepper positioner for linear, vertical motion :... KEY FEATURES Environments Motion Travel Resolution Size Load LT UHV B linear stepping and scanning 2.5 mm sub nm Ø 11 mm; height 11 mm 10 g The 30-series positioner is the smallest vertical positioner offered by attocube systems. The ANPz30 provides high resolution z-positioning over 2.5 mm. attocube systems explore your nanoworld

22 PAGE 117 & PRODUCT CATALOG General Specifications ANPz30... Piezo Step Controller - ANC150.

23 PAGE 118 & PRODUCT CATALOG Specifications ANPz Ø 11 2x M1,6 1 Ø 11 2x M ,5 8 8 top view bottom view inner position outer position attocube systems explore your nanoworld

24 PAGE 119 & PRODUCT CATALOG ANPz ANPz30: z-movement with 2.5 mm travel.

25 PAGE 120 & PRODUCT CATALOG ANPx51 linear, horizontal, and compact stepper positioner : days delivery KEY FEATURES Environments New design Motion Travel Resolution Size Load LT UHV B ultra robust and stable linear stepping and scanning 3 mm sub nm 15 x 15 x 9.2 mm 25 g The ANPx51 provides high resolution, as well as high stability x-positioning over 3 mm. For xy-positioning, two x-positioners are mounted on top of each other with perpendicular orientation. attocube systems explore your nanoworld

26 PAGE 121 & PRODUCT CATALOG General Specifications ANPx51... Piezo Step Controller - ANC150.

27 PAGE 122 & PRODUCT CATALOG Specifications ANPx x M x M X top view bottom view inner position outer position attocube systems explore your nanoworld

28 PAGE 123 & PRODUCT CATALOG ANPx ANPx51: x-movement with 3 mm travel. 14 days delivery

29 PAGE 124 & PRODUCT CATALOG ANPz51 linear, vertical, and compact stepper positioner : days delivery KEY FEATURES Environments New design Motion Travel Resolution Size Load LT UHV B ultra robust and stable linear stepping and scanning 2.5 mm sub nm 15 x 15 x 13.5 mm 50 g The ANPz51 provides high resolution, as well as high stability z-positioning over 2.5 mm. It is the perfect base for positioning two ANPx51 in z-direction. Mounted together, an xyz-positioning unit can be achieved. attocube systems explore your nanoworld

30 PAGE 125 & PRODUCT CATALOG General Specifications ANPz51... Piezo Step Controller - ANC150.

31 PAGE 126 & PRODUCT CATALOG Specifications ANPz x M x M X top view bottom view inner position outer position attocube systems explore your nanoworld

32 PAGE 127 & PRODUCT CATALOG ANPz ANPz51: z-movement with 2.5 mm travel. 14 days delivery

33 PAGE 128 & PRODUCT CATALOG ANPx101 linear, horizontal stepper positioner providing highest stability : days delivery KEY FEATURES Environments New design Motion Travel Resolution Size Load LT UHV B ultra robust and stable linear stepping and scanning 5 mm sub nm 24 x 24 x 11 mm 100 g The ANPx101 provides high resolution, highest stability x-positioning over 5 mm for high loads. For xypositioning, two x-positioners are mounted on top of each other with perpendicular orientation. attocube systems explore your nanoworld

34 PAGE 129 & PRODUCT CATALOG General Specifications ANPx Piezo Step Controller - ANC150.

35 PAGE 130 & PRODUCT CATALOG Specifications ANPx x M x M X top view bottom view inner position outer position attocube systems explore your nanoworld

36 PAGE 131 & PRODUCT CATALOG ANPx ANPx101: x-movement with 5 mm travel. 14 days delivery

37 PAGE 132 & PRODUCT CATALOG ANPz101 linear, vertical stepper positioner providing highest stability : days delivery KEY FEATURES Environments New design Motion Travel Resolution Size Load LT UHV B ultra robust and stable linear stepping and scanning 5 mm sub nm 24 x 24 x 18 mm 200 g The ANPz101 provides high resolution, as well as highest stability z-positioning over 5 mm for loads up to 200 g. It is the perfect base for positioning two ANPx101 in z-direction. Mounted together, an xyz-positioning unit for high loads can be achieved. attocube systems explore your nanoworld

38 PAGE 133 & PRODUCT CATALOG General Specifications ANPz Piezo Step Controller - ANC150

39 PAGE 134 & PRODUCT CATALOG Specifications ANPz x M x M X top view bottom view inner position outer position attocube systems explore your nanoworld

40 PAGE 135 & PRODUCT CATALOG ANPz ANPz101: z-movement with 5 mm travel. 14 days delivery

41 PAGE 136 & PRODUCT CATALOG ANPx101/NUM linear, horizontal stepper positioner with optoelectronic encoder for closed loop operation :... KEY FEATURES Environments Closed loop Motion Travel Resolution Size Load UHV resolution: 50 nm linear stepping and scanning 5 mm sub nm 24 x 28 x 11.5 mm 100 g The ANPx101/NUM with an optoelectronic encoder allows for ultra precise, closed loop position control. This readout solution can be delivered compatible with ultra high vacuum. attocube systems explore your nanoworld

42 PAGE 137 & PRODUCT CATALOG General Specifications ANPx101/NUM... Multi-functional Piezo Controller - ANC350.

43 PAGE 138 & PRODUCT CATALOG Specifications ANPx101/NUM x M x M ,5 11, ,5 2,5 top view bottom view inner position outer position attocube systems explore your nanoworld

44 PAGE 139 & PRODUCT CATALOG ANPx101/NUM ANPx101/NUM: closed loop x-movement with 5 mm travel.

45 PAGE 140 & PRODUCT CATALOG ANPz101/NUM linear, vertical stepper positioner with optoelectronic encoder for closed loop operation :... KEY FEATURES Environments Closed loop Motion Travel Resolution Size Load UHV resolution: 50 nm linear stepping and scanning 5 mm sub nm 24 x 28 x 18 mm 200 g The ANPz101/NUM with optoelectronic encoder allows for ultra precise, absolute position control. This readout solution can be delivered compatible for ultra high vacuum. attocube systems explore your nanoworld

46 PAGE 141 & PRODUCT CATALOG General Specifications ANPz101/NUM... Multi-functional Piezo Controller - ANC350.

47 PAGE 142 & PRODUCT CATALOG Specifications ANPz101/NUM x M x M top view bottom view inner position outer position attocube systems explore your nanoworld

48 PAGE 143 & PRODUCT CATALOG ANPz101/NUM ANPz101/NUM: z-movement with 5 mm travel.

49 PAGE 144 & PRODUCT CATALOG ANPx100/RES linear, horizontal stepper positioner with resistive encoder for closed loop operation : days delivery KEY FEATURES Environments Closed loop Motion Travel Resolution Size Load LT UHV B resolution: ~ 700 nm linear stepping and scanning 7 mm sub nm 24 x 24 x 14.5 mm 100 g The linear, horizontal stepper positioner with resistive position readout allows for absolute position control. This readout solution can be delivered compatible with low temperatures, ultra high vacuum and magnetic fields. attocube systems explore your nanoworld

50 PAGE 145 & PRODUCT CATALOG General Specifications ANPx100/RES... Readout Controller - ARC200. Piezo Step Controller - ANC150.

51 PAGE 146 & PRODUCT CATALOG Specifications ANPx100/RES x M x M X top view bottom view inner position outer position attocube systems explore your nanoworld

52 PAGE 147 & PRODUCT CATALOG ANPx100/RES ANPx100/RES: x-movement with 7 mm travel. 14 days delivery

53 PAGE 148 & PRODUCT CATALOG ANPz100/RES linear, vertical stepper positioner with resistive encoder for closed loop operation : days delivery KEY FEATURES Environments Closed loop Motion Travel Resolution Size Load LT UHV B resolution: ~ 700 nm linear stepping and scanning 6 mm sub nm 24 x 24 x 25 mm 200 g The linear, vertical stepper positioner with resistive position readout allows for absolute position control. This readout solution can be delivered compatible with low temperatures and ultra high vacuum and magnetic fields. attocube systems explore your nanoworld

54 PAGE 149 & PRODUCT CATALOG General Specifications ANPz100/RES... Readout Controller - ARC200. Piezo Step Controller - ANC150.

55 PAGE 150 & PRODUCT CATALOG Specifications ANPz100/RES x M x M X 45 1 top view bottom view inner position outer position attocube systems explore your nanoworld

56 PAGE 151 & PRODUCT CATALOG ANPz100/RES ANPz100/RES: z-movement with 6 mm travel.

57 PAGE 152 & PRODUCT CATALOG ANPx100/IND linear, horizontal stepper positioner with inductive encoder for closed loop operation :... KEY FEATURES Environments Closed loop Motion Travel Resolution Size Load LT resolution: ~ 400 nm linear stepping and scanning 5 mm sub nm 24 x 24 x 14.5 mm 100 g The linear, horizontal stepper positioner with inductive position readout allows for precise, absolute position control. This readout solution can be delivered compatible with low temperatures. attocube systems explore your nanoworld

58 PAGE 153 & PRODUCT CATALOG General Specifications ANPx100/IND... Readout Controller - ARC200. Piezo Step Controller - ANC150.

59 PAGE 154 & PRODUCT CATALOG Specifications ANPx100/IND x M x M X top view bottom view inner position outer position attocube systems explore your nanoworld

60 PAGE 155 & PRODUCT CATALOG ANPx100/IND ANPx100/IND: x-movement with 5 mm travel.

61 PAGE 156 & PRODUCT CATALOG ANPz100/IND linear, vertical stepper positioner with inductive encoder for closed loop operation :... KEY FEATURES Environments Closed loop Motion Travel Resolution Size Load LT resolution: ~ 400 nm linear stepping and scanning 6 mm sub nm 24 x 24 x 25 mm 200 g The linear, vertical stepper positioner with inductive position readout allows for precise, absolute position control. This readout solution can be delivered compatible with low temperatures. attocube systems explore your nanoworld

62 PAGE 157 & PRODUCT CATALOG General Specifications ANPz100/IND... Readout Controller - ARC200. Piezo Step Controller - ANC150.

63 PAGE 158 & PRODUCT CATALOG Specifications ANPz100/IND x M x M X top view bottom view inner position outer position attocube systems explore your nanoworld

64 PAGE 159 & PRODUCT CATALOG ANPz100/IND ANPz100/IND: z-movement with 6 mm travel.

65 PAGE 160 & PRODUCT CATALOG ANT200/NUM linear, horizontal stepper positioner with large aperture for closed loop operation :... KEY FEATURES Closed loop Center hole Motion Travel Resolution Size Load resolution: 50 nm Ø 28 mm linear stepping and scanning 7 mm sub nm 45 x 45 x 11 mm 300 g The ANT200/NUM with an optoelectronic encoder allows for ultra precise, closed loop position control. This positioner is manufactured with an aperture of 28 mm in diameter. attocube systems explore your nanoworld

66 PAGE 161 & PRODUCT CATALOG ANT200/NUM... Multi-functional Piezo Controller - ANC350.

67 PAGE 162 & PRODUCT CATALOG Specifications ANT200/NUM x cntrb. f. M Ø x M2 3 top view bottom view inner position outer position attocube systems explore your nanoworld

68 PAGE 163 & PRODUCT CATALOG ANT200/NUM ANT200/NUM: x-movement with 7 mm travel.

69 PAGE 164 & PRODUCT CATALOG attocube systems explore your nanoworld

70 PAGE 165 & PRODUCT CATALOG GONIOMETERS...

71 PAGE 166 & PRODUCT CATALOG ANGt50 compact goniometer for Θ-positioning :... KEY FEATURES Environments LT UHV B Motion stepping Travel 7.2 Resolution K Size 15 x 15 x 10 mm Load 25 g The upper positioner of this compact Euler Goniometer provides high resolution, Θ-positioning over 7.2. It is closer to the common center of rotation and therefore the covered angle is slightly higher. attocube systems explore your nanoworld

72 PAGE 167 & PRODUCT CATALOG General Specifications ANGt50... Piezo Step Controller - ANC150.

73 PAGE 168 & PRODUCT CATALOG Specifications ANGt x M x M X 45 2,5 15 3,6 3,6 17,5 top view bottom view inner position outer position attocube systems explore your nanoworld

74 PAGE 169 & PRODUCT CATALOG ANGt ANGt50: Total angle of 7.2. Center of rotation ANGp50 and ANGt50: Combine them for 2-angle alignment with one center of rotation.

75 PAGE 170 & PRODUCT CATALOG ANGp50 compact goniometer for Φ-positioning :... KEY FEATURES Environments LT UHV B Motion stepping Travel 5.8 Resolution K Size 15 x 15 x 10 mm Load 25 g The lower positioner of this compact, 2-angle attocube systems Euler stage offers high resolution, Φ-positioning over a range of 5.8. In combination with the ANGt50 one can achieve ΘΦ-alignment. attocube systems explore your nanoworld

76 PAGE 171 & PRODUCT CATALOG General Specifications ANGp50... Piezo Step Controller - ANC150.

77 PAGE 172 & PRODUCT CATALOG Specifications ANGp x M x M X 45 2,5 15 2,9 2,9 17,5 top view bottom view inner position outer position attocube systems explore your nanoworld

78 PAGE 173 & PRODUCT CATALOG ANGp ANGp50: Total angle of 5.8. Center of rotation ANGp50 and ANGt50: Combine them for 2-angle alignment with one center of rotation.

79 PAGE 174 & PRODUCT CATALOG ANGt101 goniometer for high loads providing Θ-positioning :... KEY FEATURES Environments LT UHV B Motion stepping Travel 6.6 Resolution K Size 24 x 24 x 11 mm Load 100 g The upper positioner of the Euler Goniometer provides high resolution, Θ-positioning over 6.6. It is closer to the common center of rotation and therefore the covered angle is slightly higher. attocube systems explore your nanoworld

80 PAGE 175 & PRODUCT CATALOG General Specifications ANGt Piezo Step Controller - ANC150.

81 PAGE 176 & PRODUCT CATALOG Specifications ANGt M M X ,3 top view bottom view inner position outer position attocube systems explore your nanoworld

82 PAGE 177 & PRODUCT CATALOG ANGt ANGt101: Total angle of 6.6. Center of rotation ANGp101 and ANGt101: Combine them for 2-angle alignment with one center of rotation.

83 PAGE 178 & PRODUCT CATALOG ANGp101 goniometer for high loads providing Φ-positioning :... KEY FEATURES Environments LT UHV B Motion stepping Travel 5.4 Resolution K Size 24 x 24 x 11 mm Load 100 g The lower positioner of the 2-angle attocube systems Euler stage offers high resolution, Φ-positioning over a range of 5.4. In combination with the ANGt101 one can achieve ΘΦ-alignment. attocube systems explore your nanoworld

84 PAGE 179 & PRODUCT CATALOG General Specifications ANGp Piezo Step Controller - ANC150.

85 PAGE 180 & PRODUCT CATALOG Specifications ANGp M M ,7 top view bottom view inner position outer position attocube systems explore your nanoworld

86 PAGE 181 & PRODUCT CATALOG ANGp ANGp101: Total angle of 5.4. Center of rotation ANGp101 and ANGt101: Combine them for 2-angle alignment with one center of rotation.

87 PAGE 182 & PRODUCT CATALOG attocube systems explore your nanoworld

88 PAGE 183 & PRODUCT CATALOG ROTATORS...

89 PAGE 184 & PRODUCT CATALOG ANR30 the smallest rotary stepper positioner with vertical rotation axis :... KEY FEATURES Environments LT UHV B Motion rotary stepping and scanning Travel 360 endless Resolution μ Size Ø 10 mm; height 8.9 mm Load 10 g As the world s smallest inertial rotator, this stage is designed to rotate small samples with high resolution. attocube systems explore your nanoworld

90 PAGE 185 & PRODUCT CATALOG General Specifications ANR30... Piezo Step Controller - ANC150.

91 PAGE 186 & PRODUCT CATALOG Specifications ANR Ø 10 8 Ø 0,6 5 2, x M ,1 5 2x M1,6 2 1 X 45 top view bottom view side view attocube systems explore your nanoworld

92 PAGE 187 & PRODUCT CATALOG ANR ANR30: 360 endless rotation, both directions.

93 PAGE 188 & PRODUCT CATALOG ANR50 compact rotary stepper positioner with vertical rotation axis : days delivery KEY FEATURES Environments LT UHV B Motion rotary stepping and scanning Travel 360 endless Resolution μ Size Ø 20 mm; height 10.6 mm Load 30 g This piezo-driven rotator is designed for rotating small samples or one or two ANPx51 translation stages with high resolution. attocube systems explore your nanoworld

94 PAGE 189 & PRODUCT CATALOG General Specifications ANR50... Piezo Step Controller - ANC150.

95 PAGE 190 & PRODUCT CATALOG Specifications ANR X x M x M2 2 Ø Ø top view bottom view side view attocube systems explore your nanoworld

96 PAGE 191 & PRODUCT CATALOG ANR ANR50: 360 endless rotation, both directions. 14 days delivery

97 PAGE 192 & PRODUCT CATALOG ANR50/RES ANR50 with resistive encoder for closed loop operation :... KEY FEATURES Environments LT UHV B Closed loop resolution: ~ 30 m Motion rotary stepping and scanning Travel 360 endless Resolution μ Size Ø 20 mm; height 11.2 mm Load 30 g The resisitive position readout now is also available for the rotator ANR50. This readout solution can be delivered compatible with low temperatures, ultra high vacuum and magnetic fields. attocube systems explore your nanoworld

98 PAGE 193 & PRODUCT CATALOG General Specifications ANR50/RES... Readout Controller - ARC200. Piezo Step Controller - ANC150.

99 PAGE 194 & PRODUCT CATALOG Specifications ANR50/RES X 45 5 Ø 1.5 2x M x M2 2 Ø 1, Ø 20 * only mountable from below top view bottom view side view attocube systems explore your nanoworld

100 PAGE 195 & PRODUCT CATALOG ANR50/RES ANR50/RES: 360 endless rotation, both directions.

101 PAGE 196 & PRODUCT CATALOG ANRv50 compact rotary stepper positioner with horizontal rotation axis : days delivery KEY FEATURES Environments LT UHV B Motion rotary stepping and scanning Travel 360 endless Resolution μ Size 8.5 x 20 x 21 mm Load 30 g This ANR50-series rotator is equipped with a special base plate for vertical mounting. It enables to turn samples with a horizontal rotation axis with high resolution. attocube systems explore your nanoworld

102 PAGE 197 & PRODUCT CATALOG General Specifications ANRv50... Piezo Step Controller - ANC150.

103 PAGE 198 & PRODUCT CATALOG Specifications ANRv Ø 20 2x M2 3 2x M x M1, ,5 Ø 1, ,75 2,5 X ,75 top view bottom view side view front view attocube systems explore your nanoworld

104 PAGE 199 & PRODUCT CATALOG ANRv ANRv50: 360 endless rotation, both directions. 14 days delivery

105 PAGE 200 & PRODUCT CATALOG ANRv50/RES ANRv50 with resistive encoder for closed loop operation :... KEY FEATURES Environments LT UHV B Closed loop resolution: ~ 30 m Motion rotary stepping and scanning Travel 360 endless Resolution μ Size 9 x 20 x 21.5 mm Load 30 g The resisitive position readout now is also available for the rotator ANRv50. This readout solution can be delivered compatible with low temperatures, ultra high vacuum and magnetic fields. attocube systems explore your nanoworld

106 PAGE 201 & PRODUCT CATALOG General Specifications ANRv50/RES... Readout Controller - ARC200. Piezo Step Controller - ANC150.

107 PAGE 202 & PRODUCT CATALOG Specifications ANRv50/RES Ø Ø 1, ,5 9 2 x M , x M x M2 3 top view bottom view side view front view attocube systems explore your nanoworld

108 PAGE 203 & PRODUCT CATALOG ANRv50/RES ANRv50/RES: 360 endless rotation, both directions.

109 PAGE 204 & PRODUCT CATALOG ANR101 rotary stepper positioner with vertical rotation axis providing highest stability :... KEY FEATURES Environments LT UHV B Motion rotary stepping and scanning Travel 360 endless Resolution μ Size Ø 30 mm; height 15.2 mm Load 100 g This rotator allows for precise rotation of samples around 360 endless in both directions. It can also be used for rotating one or two positioners of the ANP101 series. attocube systems explore your nanoworld

110 PAGE 205 & PRODUCT CATALOG General Specifications ANR Piezo Step Controller - ANC150.

111 PAGE 206 & PRODUCT CATALOG Specifications ANR Ø 30 6 x M2 3 2 x cntrb f. M2 5, Ø 2 2 x M ,2* 17,2 9, * height without base plate (only mountable from below) top view bottom view side view attocube systems explore your nanoworld

112 PAGE 207 & PRODUCT CATALOG ANR ANR101: 360 endless rotation, both directions. Example for different material configuration: rotator made from Macor.

113 PAGE 208 & PRODUCT CATALOG ANR101/NUM ANR101 with optoelectronic encoder for closed loop operation :... KEY FEATURES Environments Closed loop UHV resolution: 0.25 m Motion rotary stepping and scanning Travel 360 endless Resolution μ Size Ø 30 mm; height 17.8 mm Load 100 g The optoelectronic encoder version is now also available for the rotator ANR101. This readout solution can be delivered compatible with ultra high vacuum. attocube systems explore your nanoworld

114 PAGE 209 & PRODUCT CATALOG General Specifications ANR101/NUM... Multi-functional Piezo Controller - ANC350.

115 PAGE 210 & PRODUCT CATALOG Specifications ANR101/NUM x M x M2.5 4 Ø 2 9,2 17,8 Ø top view bottom vieww side view attocube systems explore your nanoworld

116 PAGE 211 & PRODUCT CATALOG ANR101/NUM ANR101/NUM: 360 endless rotation, both directions.

117 PAGE 212 & PRODUCT CATALOG ANR101/RES ANR101 with resistive encoder for closed loop operation :... KEY FEATURES Environments LT UHV B Closed loop resolution: ~ 30 m Motion rotary stepping and scanning Travel 360 endless Resolution μ Size Ø 30 mm; height 15.8 mm Load 100 g The resisitive position readout is also available for the rotator ANR101. This readout solution can be delivered compatible with low temperatures, ultra high vacuum and magnetic fields. attocube systems explore your nanoworld

118 PAGE 213 & PRODUCT CATALOG General Specifications ANR101/RES... Readout Controller - ARC200. Piezo Step Controller - ANC150.

119 PAGE 214 & PRODUCT CATALOG Specifications ANR101/RES Ø 30 6 x M Ø ,8* 17,8 2x M2.5x4* 2 x Ø 2,4 *mounting holes for mounting without baseplate * height without base plate (only mountable from below) top view bottom view side view attocube systems explore your nanoworld

120 PAGE 215 & PRODUCT CATALOG ANR101/RES ANR101/RES: 360 endless rotation, both directions.

121 PAGE 216 & PRODUCT CATALOG ANRv101 rotary stepper positioner with horizontal rotation axis providing highest stability :... KEY FEATURES Environments LT UHV B Motion rotary stepping and scanning Travel 360 endless Resolution μ Size 15 x 30 x 33 mm Load 100 g This rotator is equipped with a vertical mounting plate to rotate samples or another attocube positioner around a horizontal rotation axis. The robust design enables the rotation of loads up to 100 g. attocube systems explore your nanoworld

122 PAGE 217 & PRODUCT CATALOG General Specifications ANRv Piezo Step Controller - ANC150.

123 PAGE 218 & PRODUCT CATALOG Specifications ANRv x M Ø 2 6x M x M Ø 30 top view bottom view side view front view attocube systems explore your nanoworld

124 PAGE 219 & PRODUCT CATALOG ANRv ANRv101: 360 endless rotation, both directions.

125 PAGE 220 & PRODUCT CATALOG ANRv101/RES ANRv101 with resistive encoder for closed loop operation :... KEY FEATURES Environments LT UHV B Closed loop resolution: ~ 30 m Motion rotary stepping and scanning Travel 360 endless Resolution μ Size 15.6 x 30 x 33 mm Load 100 g The resisitive position readout now is also available for the rotator ANRv101. This readout solution can be delivered compatible with low temperatures, ultra high vacuum and magnetic fields. attocube systems explore your nanoworld

126 PAGE 221 & PRODUCT CATALOG General Specifications ANRv101/RES... Readout Controller - ARC200. Piezo Step Controller - ANC150.

127 PAGE 222 & PRODUCT CATALOG Specifications ANRv101/RES x M x M Ø 2 6x M ,6 2, Ø 30 top view bottom view side view front view attocube systems explore your nanoworld

128 PAGE 223 & PRODUCT CATALOG ANRv101/RES ANRv101/RES: 360 endless rotation, both directions.

129 PAGE 224 & PRODUCT CATALOG AND100 NanoDrive ultra flat rotary stepper positioner with vertical rotation axis :... KEY FEATURES Environments Size Travel UHV Ø 14 mm; height 3.3 mm 360 endless Resolution μ Motion rotary stepping and scanning Load 10 g The NanoDrive is designed to rotate samples in very flat setups providing high resolution, endless rotation. attocube systems explore your nanoworld

130 PAGE 225 & PRODUCT CATALOG General Specifications AND100 NanoDrive... Piezo Step Controller - ANC150.

131 PAGE 226 & PRODUCT CATALOG Specifications AND100 NanoDrive Ø 13.6 Ø top view bottom vieww side view attocube systems explore your nanoworld

132 PAGE 227 & PRODUCT CATALOG AND100 NanoDrive AND100 NanoDrive: 360 endless rotation, both directions.

133 PAGE 228 & PRODUCT CATALOG attocube systems explore your nanoworld

134 PAGE 229 & PRODUCT CATALOG SCANNERS...

135 PAGE 230 & PRODUCT CATALOG ANSxy50 compact xy-scanner :... KEY FEATURES Environments LT UHV B Motion linear scanning Scan range 20 x 20 µm 2 Resolution sub nm Size 15 x 15 x 7 mm Load 50 g This high precision xy-scanner is designed to provide large scan areas with minimal spacial requirements. It is compatible with all ANP51 series positioners (photo shows scanner with matching adapter plate). attocube systems explore your nanoworld

136 PAGE 231 & PRODUCT CATALOG General Specifications ANSxy50... Piezo Scan Controller - ANC200.

137 PAGE 232 & PRODUCT CATALOG Specifications ANSxy R x M M X 45 2 x M for mounting top plate top view bottom view side view attocube systems explore your nanoworld

138 PAGE 233 & PRODUCT CATALOG ANSxy ANSxy50: xy-scan direction.

139 PAGE 234 & PRODUCT CATALOG ANSz50 compact z-scanner :... KEY FEATURES Environments LT UHV B Motion linear scanning Scan range 4.3 µm Resolution sub nm Size 15 x 15 x 6 mm Load 50 g This piezo-electric scanner allows for high precision z-scanning over a large scan range, even at low temperatures. attocube systems explore your nanoworld

140 PAGE 235 & PRODUCT CATALOG General Specifications ANSz50... Piezo Scan Controller - ANC200.

141 PAGE 236 & PRODUCT CATALOG Specifications ANSz R x M x M X 45 top view bottom view side view attocube systems explore your nanoworld

142 PAGE 237 & PRODUCT CATALOG ANSz ANSz50: z-scan direction.

143 PAGE 238 & PRODUCT CATALOG ANSxy100 large range xy-scanner : days delivery KEY FEATURES Environments LT UHV B Motion linear scanning Scan range 40 x 40 µm 2 Resolution sub nm Size 24 x 24 x 10 mm Load 100 g The piezo-electric scanner allows for high precision xy-scanning over large scan ranges, even at low temperatures. It is stackable with all ANP101 positioners. attocube systems explore your nanoworld

144 PAGE 239 & PRODUCT CATALOG General Specifications ANSxy Piezo Scan Controller - ANC200.

145 PAGE 240 & PRODUCT CATALOG Specifications ANSxy x M x M x M2 4 for mounting top plate top view bottom view side view attocube systems explore your nanoworld

146 PAGE 241 & PRODUCT CATALOG ANSxy Distance (µm) Distance (µm) LT model 300 K model 300 model 300 K LT 4 K LT 4 K (V) Voltage (V) Hysteresis of different ANSxy100 scanners. ANSxy100: xy-scan direction. 14 days delivery

147 PAGE 242 & PRODUCT CATALOG ANSz100 large range z-scanner : days delivery KEY FEATURES Environments LT UHV B Motion linear scanning Scan range 24 µm Resolution sub nm Size 24 x 24 x 10 mm Load 100 g This piezo-electric scanner allows for high precision z-scanning over a large scan range, even at low temperatures. attocube systems explore your nanoworld

148 PAGE 243 & PRODUCT CATALOG General Specifications ANSz Piezo Scan Controller - ANC200.

149 PAGE 244 & PRODUCT CATALOG Specifications ANSz x M x M X for mounting top plate top view bottom view side view attocube systems explore your nanoworld

150 PAGE 245 & PRODUCT CATALOG ANSz ANSz100: z-scan direction. 14 days delivery

151 PAGE 246 & PRODUCT CATALOG ANSz100sr small range, high resolution z-scanner : days delivery KEY FEATURES Environments LT UHV B Motion linear scanning Scan range 4.3 µm Resolution sub nm Size 24 x 24 x 10 mm Load 100 g This piezo-electric scanner allows for high precision z-scanning over a small scan range, even at low temperatures. attocube systems explore your nanoworld

152 PAGE 247 & PRODUCT CATALOG General Specifications ANSz100sr... Piezo Scan Controller - ANC200.

153 PAGE 248 & PRODUCT CATALOG Specifications ANSz100sr x M x M X for mounting top plate top view bottom view side view attocube systems explore your nanoworld

154 PAGE 249 & PRODUCT CATALOG ANSz100sr ANSz100sr: z-scan direction. 14 days delivery

155 PAGE 250 & PRODUCT CATALOG ANSxyz100 large range xyz-scanner : days delivery KEY FEATURES Environments LT UHV B Motion linear scanning Scan range 40 x 40 x 24 µm 3 Resolution sub nm Size 24 x 24 x 10 mm Load 100 g This piezo-electric scanner allows for high precision scanning over large scan ranges in three dimensions, even at low temperatures. attocube systems explore your nanoworld

156 PAGE 251 & PRODUCT CATALOG General Specifications ANSxyz Piezo Scan Controller - ANC200.

157 PAGE 252 & PRODUCT CATALOG Specifications ANSxyz x M x M x M2 4 for mounting top plate X top view bottom view side view attocube systems explore your nanoworld

158 PAGE 253 & PRODUCT CATALOG ANSxyz ANSxyz100: xyz-scan direction. 14 days delivery

159 PAGE 254 & PRODUCT CATALOG ANSxyz100sr xyz-scanner with high resolution z-range : days delivery KEY FEATURES Environments LT UHV B Motion linear scanning Scan range 40 x 40 x 4.3 µm 3 Resolution sub nm Size 24 x 24 x 10 mm Load 100 g This piezo-electric scanner allows for high precision scanning over large scan ranges in the xy direction and for high precision scanning over a small scan range in the z direction, even at low temperatures. attocube systems explore your nanoworld

160 PAGE 255 & PRODUCT CATALOG General Specifications ANSxyz100sr... Piezo Scan Controller - ANC200.

161 PAGE 256 & PRODUCT CATALOG Specifications ANSxyz100sr x M x M X for mounting top plate top view bottom view side view attocube systems explore your nanoworld

162 PAGE 257 & PRODUCT CATALOG ANSxyz100sr ANSxyz100sr: xyz-scan direction. 14 days delivery