Former Qimonda machine diagnosis

Transcription

1 Former Qimonda machine diagnosis

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3 Introduction The aim of this intervention is to check the overall machine status to evaluate the cost of replacement parts needed for proper working. - Inventory of parts and accessories. - Measurement of samples from Infineon and machine abilities demonstration. - Preparation of a quotation for machine reinstallation and training. Overall machine status and inventory Infineon enabled the power supply and compressed air service for the tests. The system was found in a good overall condition. The accessories were properly stored in a separate locker. The PC is running ok, except the wireless keyboard + mouse that ran out of battery. At first sight the TDM Warpage software dongle is missing. One of the two dongles owned by Qimonda will be found in the locker later on. Inventory Machine SN 2008/03/31: Outer frame Inner frame Electrical rack Pneumatic hardware PID controller LED lighting ring IR optical filters CCD camera DLP videoprojector Synchronization box Fumes extractor NOTES: The machine is in good condition 3

4 PC: Table PC 19 Flat panel Monitor IO board Acquisition board Video board Image processing parallel port dongle 3D parallel port dongle TDM warpage analysis USB dongle Wireless keyboard Wireless mouse TDM Software v installed and running TDM Warpage v installed and running CorelliQ4 installed and running PC Login = pfaadmin, Password = 3dallas8 The hard drive is almost saturated. Needs some cleanup. Wireless keyboard + mouse ran out of battery. One of the two dongles owned by Qimonda is missing. The TDM software version is outdated and no longer supported. An error message pops at startup (without any consequence) because the sub-room temperature module is absent. The TDM Warpage dongle was put back in the locker together with the setup CDs 4

5 Oven: Marble base Sample holder Glass oven walls Glass oven door Lower quartz plate Upper quartz plate 4 thermocouples Capillary tubes 2 Capillary holders Graphite plate U-shaped quartz rods Thermocouples are glued to samples, one was broken when trying to un-attach it. The top quartz plate is missing Good overall condition. 5

6 Large samples (150*150) set: Large cooling frame Top lamps set : 4 * 650W Bottom lamps set : 4 * 650W Large calibration target 23 * 23 dots 6mm (?) pitch F35 camera objective lens Original projector objective lens Standard large square cooling frame not found. Lenses and lamps found in their original packing Everything is in good condition. 6

7 Small samples (50*50) set: Small cooling frame Top lamps set : 2* 500W Bottom lamps set : 4 * 500W Small calibration target F100 camera objective lens 20mm C mount extension tube F60WAl projector objective lens Everything is in good condition. Top lamps and cooling frame mounted in the oven. Camera and projection lenses mounted in the machine. 7

8 Extra heating set: Bottom lamps set : 2 * 500W Rectangular cooling frame Everything is in good condition. Bottom lamps mounted in the oven. Accessories set: Calibration tooling Ceramic stair to check calibration Extra capillary tubes Heat protective gloves Quartz manipulating gloves Kapton tape Allen keys set Everything is in good condition. Minor accessories are missing 8

9 Machine tests and measurements Machine power up Compressed air Safety loop (doors interlock) Fluo lighting PID controller ON 24V supply Projector lamp Proper projection Operating software Camera image LED lighting ring Pedal scanning Cooling frame All the lamps sets are tested and OK Calibration and 3D acquisition Everything is in working order. Error message at software startup as described before. The focus setting of the lens seems a little loose. The camera might get out of focus after a while. 9

10 Samples measurement Components and dies. Complete 3D analysis results are in a separate PDF file. Measurement of several different samples on the graphite plate in one 50x50mm FOV, at room temperature, 100 C, 150 C, 200 C, 250 C. Everything is in working order. Extremely thin and small samples are measured. The compressed air cooling will be disabled. The machine is calibrated for high accuracy, with 16 phase shifts. The measurement takes more than 5 seconds, which is quite long for high temperature measurement. Due to poor temperature stability (no cooling) and long acquisition times, you can observe quite large amplitude of residual carrier fringes in the 3D acquisitions. 10

11 In-plane analysis. Wafer analysis Component analysis 11

12 Conclusion No blocking point, the machine is in working order, good overall condition, with few missing or damaged parts. Following this report, Insidix will prepare a quotation for the following items: Preparing + supervising packing of the system. Reinstallation in Regensburg + 2 days training + Operating Software upgrade (3 days total). Additional expenses if the system goes to Malaka, Malaysia Top Quartz plate. Second offline TDM Warpage licence. 12