New UV Nanoimprint Lithography Roll2Roll technologies from Lab2Fab
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1 New UV Nanoimprint Lithography Roll2Roll technologies from Lab2Fab Thomas Kolbusch, Vice President, Coatema GmbH Wilfried Schipper, Head of BU Films, Temicon GmbH
2 Summary Introduction Technology overview Products Equipment Summary COATEMA Coating Machinery GmbH 2
3 Introduction Who we are? The leading producer of high-quality micro- and nanostructured products serving as key components for applications like lighting, display, life science, solar technology and environmental engineering. The market leader in coating, printing and laminating technology with more than 40 years of experience in providing the most advanced scale-up solutions from lab to fab as well as state-of-art full production lines COATEMA Coating Machinery GmbH 3
4 Introduction COATEMA Coating Machinery GmbH 4
5 Introduction Why we are here? COATEMA Coating Machinery GmbH 5
6 Introduction NIL Nano imprint lithography R2R roll-to-roll R2P roll-to-plate P2P plate-to-plate Ultra Violet NIL UV-curable lacquer/ resin short process time processing at room temperature Hard or soft molds Low imprint pressure High replication resolution Low material shrinkage Thermal NIL Thermoplastic substrate/ resin Long process time processing above T G Hard molds High imprint pressure one-component system High material shrinkage Hard mold + wear behaviour + life time of replication mold + resolution Soft mold + imprint pressure + life time of master mold + flexibilty COATEMA Coating Machinery GmbH 6
7 Introduction Aspect ratio (AR) 5.4:1 (h:w) (ETFE mold, UV R2R NIL) [1] Residual layer (RL) thickness 30 nm [2] Coating thickness 160 nm [2] 150 µm [3] Film speed 15m/min [4] Resolution 70 nm (gratings of 70-nm lines) [4] [1] Ahn, B.S.H.; Guo, L.J.: High-Speed Roll-to-Roll Nanoimprint Lithography on Flexible Plastic Substrates. In: Advanced Materials. vol , p [2] Mäkelä, T.; Haatainen, T.; Majander, P.; Ahopelto, J.: Continuous roll to roll nanoimprinting of inherently conducting polyaniline. In: Microelectronic Engineering. vol. 84, 2007, p [3] Shan, X.C.; Lau, S.K.; Mohahidin, M.B.; Liu, T.; Lu, A.C.W.: Formation of Large Format Functional Films via Roll-to- Roll (R2R) Ultraviolet (UV) Embossing. In: IEEE Proc. of 13th Electronics Packinging Technology Conference [4] Kooy, N.; Mohamed, K.; Pin, L.T.; Guan, O.S.: A review of roll-to-roll nanoimprint lithography. In: Nanoscale Research Letters. vol. 9:320, COATEMA Coating Machinery GmbH 7
8 Introduction UV-Nanoimprint Lithography Nickel/Polymer Imprint Mould UV-Laquer Substrate Embossing and Curing with UV Separation COATEMA Coating Machinery GmbH 8
9 Introduction UV-Nanoimprint Lithography COATEMA Coating Machinery GmbH 9
10 Introduction Nanoimprinting Combi System COATEMA Coating Machinery GmbH 10
11 Introduction Display Photonics Lightguides OLED 3D Displays Light Enhancement Printed Electronics Solar Optical Encoders Micro Lens Arrays Live Science AR Surfaces Bionics Waveguides Micro Fluidics Lotus Micro Titer Plates Moth Eye Cell Separation Shark Skin Gecko COATEMA Coating Machinery GmbH 11
12 Introduction 50 µm 10 µm Shark Skin (Riblet) 10 µm Anti-bacterial Surfaces Micro and Nanostructures under SEM Haptic Surfaces µm µm 50 µm 10 µm Micro Pillars (Super-Hydrophobic Surfaces) COATEMA Coating Machinery GmbH 12
13 Introduction 100 µm Diffractive Optical Elements Retroreflectors Micro and Nanostructures under SEM 500 nm Microfluidic Structures 500 nm 10 µm Printed Electronics 2 µm COATEMA Coating Machinery GmbH 13
14 Introduction Why we are here We developed a seamless, endless patterning technology and deliver the chemistry, substrates and the equipment to provide you with patterns beyond light guides. This is the added surface value revolution in millions of products COATEMA Coating Machinery GmbH 14
15 Introduction Why we are here? COATEMA Coating Machinery GmbH 15
16 Introduction COATEMA Coating Machinery GmbH 16
17 Introduction temilux TO Transmission Optics temilux LG Lightguide Solutions temilux 3D 3D lighting effects COATEMA Coating Machinery GmbH 17
18 Technology Overview COATEMA Coating Machinery GmbH 18
19 UV - Nanoimprint Lithography Technologies & Processes Slot Die COATEMA Coating Machinery GmbH 19
20 UV - Nanoimprint Lithography Coatema s coating systems Example Characteristics Self - metered Wet thickness is determined by the conditions of coating meniscus Doctored Post applicator device determines the wet thickness Pre - metered All ink fed into an applicator is transferred to the web COATEMA Coating Machinery GmbH 20
21 UV - Nanoimprint Lithography Slot Die System COATEMA Coating Machinery GmbH 21
22 UV - Nanoimprint Lithography Slot Die System Operating a slot die meniscus is formed between die lips and substrate adhesive stabilization of meniscus by die lips very low minimum flow rate possible range of rheological parameters limited for stability Slot die Distribution chamber meniscus Coating roller COATEMA Coating Machinery GmbH 22
23 UV - Nanoimprint Lithography Technologies & Processes Nanoimprint COATEMA Coating Machinery GmbH 23
24 UV - Nanoimprint Lithography Technologies & Processes Classical Approach Structured nickel plate Welded sleeve with seam Final product with seamlines New Approach Seamless structured sleeve Seamless sleeve on imprint cylinder Final product without seamlines COATEMA Coating Machinery GmbH 24
25 UV - Nanoimprint Lithography Laser Interference Lithography Beam expander New Approach Motorized Cylinder Mirror Beamsplitter COATEMA Coating Machinery GmbH 25
26 UV - Nanoimprint Lithography UV and Laser Interference Lithography Machine Control UV-LED / Laser Unit xz-positioning Mask holder (Θ Positioning) Photomask Alignment Station COATEMA Coating Machinery GmbH 26
27 UV - Nanoimprint Lithography Imprint tools COATEMA Coating Machinery GmbH 27
28 UV - Nanoimprint Lithography Imprint tools 2 µm COATEMA Coating Machinery GmbH 28
29 Equipment COATEMA Coating Machinery GmbH 29
30 UV - Nanoimprint Lithography Machines for Lab2Fab - R2R System specifications: Mechanical speed: Working width: Roller width Max coildiameter: Tension: Dimensions LBH Siemens S7 Mobil PLC Tablet control Remote service modem 2-20 m/min mm 350 mm 250 mm N 3.200x1.900x1.300 [mm] Coating and Printing Options: Slot die Engraved roller UV-System: Standard mercury LED COATEMA Coating Machinery GmbH 30
31 UV - Nanoimprint Lithography Machines for Lab2Fab - R2R COATEMA Coating Machinery GmbH 31
32 UV - Nanoimprint Lithography Machines for Lab2Fab - R2P COATEMA Coating Machinery GmbH 32
33 UV - Nanoimprint Lithography Machines for Lab2Fab - R2R COATEMA Coating Machinery GmbH 33
34 UV - Nanoimprint Temicoat Nanoimprint R2R COATEMA Coating Machinery GmbH 34
35 UV - Nanoimprint Lithography Gravure Roller and Slot die COATEMA Coating Machinery GmbH 35
36 UV - Nanoimprint Lithography UV Nanoimprint with LED UV COATEMA Coating Machinery GmbH 36
37 UV - Nanoimprint Lithography Wireless tablet control available COATEMA Coating Machinery GmbH 37
38 UV - Nanoimprint Lithography Machines for Lab2Fab - R2R COATEMA Coating Machinery GmbH 38
39 UV - Nanoimprint Lithography Machines for Lab2Fab - R2R COATEMA Coating Machinery GmbH 39
40 UV - Nanoimprint Lithography Machines for Lab2Fab - R2R COATEMA Coating Machinery GmbH 40
41 UV - Nanoimprint Lithography Machines for Lab2Fab - R2R & R2P on I.000 mm ww COATEMA Coating Machinery GmbH 41
42 Summary COATEMA Coating Machinery GmbH 42
43 Process value chain Not only for light guides Simulation Origination Tooling Replication COATEMA Coating Machinery GmbH
44 Markets Not only for light guides 3D effects Life sciences Architecture Solar Automotive Optics Security Display Hologramms COATEMA Coating Machinery GmbH 44
45 COATEMA Coating Machinery GmbH THANK YOU Roseller Str. 4 D Dormagen / tkolbusch@coatema.de COATEMA Coating Machinery GmbH 45
46 COATEMA Coating Machinery GmbH 46
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