Printed and Flexible Devices for Smart Systems On Foils

Transcription

1 Printed and Flexible Devices for Smart Systems On Foils M. Bedjaoui CEA/LITEN 5 OCTOBRE 2012 CEA 10 AVRIL 2012 PAGE 1

2 Table of content CEA/LITEN Energy storage solutions on foil Electrochromic devices on foil Printed CMOS COSMIC LITEN platform for technological transfer

3 Components & Systems Integration from Advanced Materials Advanced Materials Our Competencies R&D Activities Components & Systems Integration * Heterogeneous Sytem on Foil Technology Transfer Specific Process Steps Components Systems on Foil Our way to work : application driven Application Industrial Healthcare Consumer Logistics Automotive Smart Building

4 General introduction, context and objectives A growing demand for autonomous smart systems on plastic that enable: -weight reduction, more flexibility, conformability and ease of disposal -self powered (energy harvesting/storage), wireless connection -multi-functionality: environment interaction (sensor), communicating (RF, display) -high T budget processing for certain applications (use of inorganic thin film configuration) Energy (harvest./storage) Sensors IC (RF, µc) Communication (display) AUTOMOTIVE -Reconfigurable icons -Heads Up Displays

5 Microbattery Technology 15 µm Lithium solid state battery Physics similar to classical lithium battery Only active materials No liquid/solvent - Specific electrical performances Rechargeable with high cycling capabilities Low self discharge Perfectly suited for combination with energy harvesting solutions Process compatible with foil manufacturing

6 Typical Microbattery Performance Standard TiOS/Lipon/Li S = 25 mm² 2.5 µa Capacity (µah/cm²)

7 Microbatteries on foil Battery Manufacturing on foil Bending Test Connection on foil (flexible or stretchable)

8 Combination with other components Multifoil approach with the INTERFLEX project

9 Combination with other components Convergence approach with the SMART-EC project Compatibility between EC and TFB Materials Deposition process and tools Patterning

10 SMART-EC prototypes Thin Film Battery + Electrochromic components manufactured on same PEN substrate

11 PORTFOLIO OF PRINTED DEVICES Sensors and sensors arrays Temperature Pressure Piezo Photodiode Logical fonctions R,L C RF filter printed OTFT and CMOS Analog and digital circuits COSMIC Signage Printed OLED

12 ROBUST PRINTED ORGANIC CMOS ON FOILS CEA-LITEN Sheet format Printed CMOS organic flow developped in COSMIC EU projet High perfomances for both n AND p type transistors COSMIC Full Process flow : n and p type OTFT and a Resistor Level for analog cicruits Yield > 98% : functional circuits up to 100 otft Model and Simulation tools developped by CNR/ Tue and STM Design Tool Kit available for designers Building block demonstrated : Analog and Digital circuit OTA (differential amplifier), Comparator, Flip-Flop, etc 110mm x 110mm P-OTFT N-OTFT µ sat (cm².v -1.s -1 ) Vt sat (V) Ion sat L/W (A) ~2x10-6 >10-6 Ioff sat L/W (A) ~2x10-13 ~ 5x10-14 Ion/Ioff ~10 7 > 2x10 7

13 BRING COMPONENTS FROM LAB TO FAB Dedicated platforms (printed electronics, energy) To develop new process and devices To transfer lab scale development to Sheet-to-Sheet pre-industrial facilities on 320x380mm² foil To deliver prototypes and samples to industrial and academic partners and end-users

14 FACILITIES AND CHOICES A unique panel of printing equipment in LARGE SHEET FORMAT 400m² clean room dedicated to printing Substrate standard SHEET format : 320mm x 380mm Adaptable to many processes flow Compatible with medium to high volume production Allows high precision : resolution, alignment, thickness control A complete set of printing tools

15 PICTIC TOOLS Spincoating, Sputtering TCO Plasma Slot die coating Excimer laser Screen printing Ultrasonic aerosol Jet Inkjet printing 15 Gravure printing

16 CONCLUSION A large portfolio of flexible devices for smart system on foils Lithium Microbatteries EC display High performance robust PMOS, NMOS and CMOS Sensors: photodiodes, temperature, pressure Open Platforms Scale-up technology Prototype Develop new functionalities