MEMS: BIOSENSORS AND NANOSENSORS

Transcription

1 MEMS: BIOSENSORS AND NANOSENSORS IAS027C August 2013 Andrew McWilliams Project Analyst ISBN: X BCC Research 49 Walnut Park, Building 2 Wellesley, MA USA (toll-free within the USA), or (+1) information@bccresearch.com

2 TABLE OF CONTENTS CHAPTER 1 INTRODUCTION 2 STUDY BACKGROUND 2 GOALS AND OBJECTIVES 2 INTENDED AUDIENCE 3 SCOPE OF REPORT 3 METHODOLOGY AND INFORMATION SOURCES 3 ANALYST'S CREDENTIALS 4 RELATED BCC RESEARCH 4 BCC ONLINE SERVICES 5 DISCLAIMER 6 CHAPTER 2 EXECUTIVE SUMMARY 8 SUMMARY TABLE GLOBAL MICROSENSOR MARKET PROJECTIONS, THROUGH 2018 ($ SUMMARY FIGURE GLOBAL MICROSENSOR MARKET PROJECTIONS, ($ 8 8 CHAPTER 3 MICROSENSORS OVERVIEW 11 GENERAL DESCRIPTION 11 DEFINITIONS 11 Sensors 11 Microsensors 11 Microelectromechanical Systems (MEMS) 12 Biosensors 12 Nanosensors 13 HISTORICAL PERSPECTIVE 13 MICROSENSOR TECHNOLOGIES AND APPLICATIONS 14 TABLE 1 MAJOR MICROSENSOR TECHNOLOGIES AND APPLICATIONS 14 ACCELEROMETERS 15 GYROSCOPES 16 PRESSURE MICROSENSORS 16 CHEMICAL AND GAS MICROSENSORS 16 THERMAL MICROSENSORS 16 MAGNETIC MICROSENSORS 17 OTHER MICROELECTROMECHANICAL SYSTEMS (MEMS) SENSORS 17 BIOCHIPS 17 MINIATURE BIOSENSORS 18 NANOCHEMICAL SENSORS 18 NANOFORCE SENSORS 18 NANOBIOSENSORS 19 NANO-RADIATION SENSORS 19 NANO-THERMAL SENSORS 19 MICROSENSOR MARKETS 20 TABLE 2 GLOBAL MICROSENSOR MARKET PROJECTIONS, THROUGH 2018 ($ FIGURE 1 PROJECTED GLOBAL MICRO MARKET TRENDS, ($ 21 20

3 TABLE 3 GLOBAL MARKET PROJECTIONS FOR MICROSENSORS BY END USE, THROUGH 2018 ($ FIGURE 2 PROJECTED TRENDS IN THE GLOBAL MICROSENSOR MARKET BY END USER SEGMENT, (PERCENT OF TOTAL SALES) CHAPTER 4 ENABLING TECHNOLOGIES FOR MICROSENSORS 24 MATERIALS TECHNOLOGIES 24 FIGURE 3 GLOBAL MARKET SHARE PROJECTIONS FOR MICROSENSOR MATERIALS TECHNOLOGIES BY TYPE, 2012 AND 2018 (PERCENT OF TOTAL MEMS SHIPMENTS) SILICON 25 POLYMERS 25 METALS 25 NANOMATERIALS 25 Nanoparticles 26 Carbon Nanotubes 26 Graphene 27 Nanoribbons 27 Nanowires 28 Nanoceramics 28 Other Nanostructured Materials 29 MANUFACTURING TECHNOLOGIES 29 MICROMACHINING 29 Surface Micromachining 30 FIGURE 4 SACRIFICIAL LAYER ETCHING 30 Bulk Micromachining 31 LIGA 31 FIGURE 5 LIGA PROCESS DIAGRAM 31 Wafer Bonding 32 Anodic Bonding 32 Intermediate-Layer Assisted Bonding 32 Direct Bonding 33 Flip-Chip Bonding 33 ETCHING 33 Wet Anisotropic Etching 33 FIGURE 6 ISOTROPIC VS. ANISOTROPIC ETCHING 33 Dry Etching 34 Reactive Ion Etching 34 Deep Reactive Ion Etching 34 LASER MICROFABRICATION 35 Laser Micromachining 35 Laser-Assisted Chemical Etching 35 Laser-Assisted Deposition 36 Stereolithography 36 Laser Surface Modification 36 Laser-Assisted Manipulation and Assembly 37 Laser Microbending 37 Physical Manipulation of Parts 37 Laser Joining 37 24

4 NANOPATTERNING 37 Nanoimprint Lithography 38 Hot Embossing Lithography 39 Ultraviolet Nanoimprint Lithography 39 Microcontact Printing 40 Dip-Pen Nanolithography 40 Laser-Based Particle Deposition 41 Other Technologies 42 Powder Blasting 42 Micro-Molding 42 CHAPTER 5 ACCELEROMETERS 44 TECHNOLOGIES 44 OPERATING MECHANISM 44 TABLE 4 MAJOR MICROELECTROMECHANICAL SYSTEMS (MEMS) ACCELEROMETER TECHNOLOGIES Capacitive 45 Electromagnetic 46 Piezoelectric 46 Piezoresistive 46 Optical 47 Tunneling 47 Thermal 48 AXES OF MEASUREMENT 48 LOW-G ACCELEROMETERS 49 APPLICATIONS 49 TABLE 5 COMMERCIAL ACCELEROMETER APPLICATIONS 49 AUTOMOTIVE APPLICATIONS 49 Airbag Actuation 49 Stability Systems 50 Vehicle Navigation 50 Other Applications 50 LIFE SCIENCES 50 Rate-Responsive Heart Pacemakers 50 Actigraphs 51 ENERGY 51 Oil and Gas Exploration 51 MILITARY/AEROSPACE 52 INFORMATION TECHNOLOGY 52 Hard Disk Drop Protection 52 CONSUMER PRODUCTS 53 "Smart" Sporting Goods 53 Personal Electronics 53 MISCELLANEOUS APPLICATIONS 54 ACCELEROMETER MARKET 54 SUMMARY 54 TABLE 6 GLOBAL MARKET PROJECTIONS FOR MICROELECTROMECHANICAL SYSTEMS (MEMS) ACCELEROMETERS, THROUGH 2018 ($ 44 55

5 FIGURE 7 GLOBAL MICROELECTROMECHANICAL SYSTEMS (MEMS) ACCELEROMETER MARKET SHARE PROJECTIONS BY APPLICATION SEGMENT, (PERCENT OF TOTAL SHIPMENTS) AUTOMOTIVE APPLICATIONS 56 TABLE 7 GLOBAL MARKET PROJECTIONS FOR ESTABLISHED AUTOMOTIVE ACCELEROMETER APPLICATIONS, THROUGH 2018 ($ Airbag Sensors 56 TABLE 8 PROJECTED GLOBAL SHIPMENTS OF AIRBAG MODULES, THROUGH 2018 (MILLION UNITS) FIGURE 8 PROJECTED TRENDS IN GLOBAL SHIPMENTS OF AIRBAG MODULES, (MILLION UNITS) TABLE 9 GLOBAL MARKET PROJECTIONS FOR AIRBAG SENSORS IN MOTOR VEHICLES, THROUGH 2018 (MILLION UNITS/$ Vehicle Stability Control Systems 58 TABLE 10 PROJECTED GLOBAL PRODUCTION OF VEHICLES EQUIPPED WITH STABILITY CONTROL SYSTEMS, THROUGH 2018 (MILLION VEHICLES) FIGURE 9 PROJECTED TRENDS IN GLOBAL SALES OF LIGHT VEHICLES WITH STABILITY CONTROL SYSTEMS, (MILLION VEHICLES) TABLE 11 GLOBAL MARKET FOR LOW-G ACCELEROMETERS USED IN VEHICLE STABILITY CONTROL SYSTEMS, THROUGH 2018 (MILLION UNITS/$ Navigation Systems 60 TABLE 12 PROJECTED GLOBAL SHIPMENTS OF VEHICLE IN-DASH NAVIGATION SYSTEMS WITH INTEGRATED INERTIAL NAVIGATION SYSTEMS (INS), THROUGH 2018 (MILLION VEHICLES) FIGURE 10 PROJECTED TRENDS IN GLOBAL SHIPMENTS OF VEHICLE IN-DASH NAVIGATION SYSTEMS, (MILLION SYSTEMS SHIPPED) TABLE 13 GLOBAL MARKET PROJECTIONS FOR MICROELECTROMECHANICAL SYSTEMS (MEMS) ACCELEROMETERS USED IN VEHICLE NAVIGATION SYSTEMS, THROUGH 2018 (MILLION UNITS/$ LIFE SCIENCES APPLICATIONS 62 TABLE 14 GLOBAL MARKET FOR ESTABLISHED ACCELEROMETER APPLICATIONS IN THE LIFE SCIENCES, THROUGH 2018 ($ Rate-Responsive Heart Pacemakers 62 TABLE 15 GLOBAL SALES PROJECTIONS FOR CARDIAC PACEMAKERS, THROUGH 2018 (THOUSANDS OF PACEMAKERS) FIGURE 11 PROJECTED TRENDS IN GLOBAL SALES OF CARDIAC PACEMAKERS, (THOUSAND UNITS) TABLE 16 GLOBAL MARKET PROJECTIONS FOR ACCELEROMETERS USED IN RATE RESPONSIVE HEART PACEMAKERS, THROUGH 2018 (THOUSAND UNITS/$ Activity Monitoring Systems 64 TABLE 17 GLOBAL MARKET PROJECTIONS FOR ACCELEROMETERS USED IN ACTIGRAPHS, THROUGH 2018 (THOUSAND UNITS/$ ENERGY APPLICATIONS 65 Seismic Detection Systems 65 TABLE 18 GLOBAL MARKET PROJECTIONS FOR ACCELEROMETERS USED IN SEISMIC DETECTION EQUIPMENT, THROUGH 2018 (MILLION UNITS/$ MILITARY/AEROSPACE APPLICATIONS 66 TABLE 19 PROJECTED GLOBAL SALES OF GLOBAL POSITION SYSTEMS (GPS) FOR MILITARY/AEROSPACE APPLICATIONS, THROUGH 2018 ($ FIGURE 12 PROJECTED TRENDS IN GLOBAL MILITARY/AEROSPACE MARKET FOR GLOBAL POSITION SYSTEMS (GPS), ($

6 TABLE 20 GLOBAL MARKET PROJECTIONS FOR ACCELEROMETERS USED IN MILITARY/AEROSPACE APPLICATIONS, THROUGH 2018 (THOUSAND UNITS/$ INFORMATION TECHNOLOGY APPLICATIONS 67 TABLE 21 GLOBAL MARKET PROJECTIONS FOR MICROELECTROMECHANICAL SYSTEMS (MEMS) ACCELEROMETERS IN CONSUMER PRODUCTS, THROUGH 2018 ($ Hard Disk Drive Drop Protection 68 TABLE 22 GLOBAL MARKET PROJECTIONS FOR HARD DRIVE-EQUIPPED LAPTOP COMPUTERS, THROUGH 2018 (MILLION UNITS) FIGURE 13 PROJECTED GLOBAL TRENDS IN SALES OF HARD DRIVE-EQUIPPED LAPTOP COMPUTERS, (MILLION DEVICES) TABLE 23 GLOBAL MARKET PROJECTIONS FOR LAPTOP COMPUTER HARD DRIVE DISK (HDD) PROTECTION APPLICATIONS, THROUGH 2018 (MILLION UNITS/$ Hard Disk Read/Write Head Tracking Mechanism 70 TABLE 24 GLOBAL MARKET FOR MICROELECTROMECHANICAL SYSTEMS (MEMS) ACCELEROMETERS IN HARD DISK DRIVE (HDD) READ/WRITE HEAD TRACKING SYSTEMS, THROUGH 2018 (MILLION UNITS/$ CONSUMER PRODUCTS APPLICATIONS 70 TABLE 25 GLOBAL MARKET PROJECTIONS FOR MICROELECTROMECHANICAL SYSTEMS (MEMS) ACCELEROMETERS IN CONSUMER PRODUCTS, THROUGH 2018 ($ Mobile Phone User Interface 71 TABLE 26 GLOBAL MARKET PROJECTIONS FOR MOBILE PHONE HANDSETS, THROUGH 2018 (MILLIONS OF HANDSETS) FIGURE 14 PROJECTED TRENDS IN GLOBAL SALES OF MOBILE PHONE HANDSETS, (MILLIONS OF HANDSETS) TABLE 27 GLOBAL MARKET PROJECTIONS FOR MICROELECTROMECHANICAL SYSTEMS (MEMS) ACCELEROMETERS IN MOBILE PHONE HANDSETS, THROUGH 2018 (MILLION UNITS/$ Electronic Gaming User Interface 73 TABLE 28 GLOBAL MARKET PROJECTIONS FOR MICROELECTROMECHANICAL SYSTEMS (MEMS) ACCELEROMETERS IN HANDHELD GAMING DEVICES, THROUGH 2018 (MILLION UNITS/$ Digital Camera Image-Stabilization Systems 73 TABLE 29 PROJECTED GLOBAL DIGITAL CAMERA SALES, THROUGH 2018 (MILLIONS OF CAMERAS) FIGURE 15 PROJECTED GLOBAL UNIT SALES OF DIGITAL CAMERAS, (MILLION UNITS) TABLE 30 GLOBAL MARKET PROJECTIONS FOR MICROELECTROMECHANICAL SYSTEMS (MEMS) ACCELEROMETERS IN DIGITAL CAMERA IMAGE-STABILIZATION SYSTEMS, THROUGH 2018 (MILLION UNITS/$ "Smart" Sporting Goods 75 TABLE 31 GLOBAL MARKET PROJECTIONS FOR MICROELECTROMECHANICAL SYSTEMS (MEMS) ACCELEROMETERS IN "SMART" SPORTING GOODS, THROUGH 2018 (THOUSAND UNITS/$ OTHER APPLICATIONS 75 TABLE 32 GLOBAL MARKET PROJECTIONS FOR ACCELEROMETERS USED IN OTHER NONMILITARY APPLICATIONS, THROUGH 2018 (MILLION UNITS/$ CHAPTER 6 GYROSCOPES 78

7 TECHNOLOGIES 78 TABLE 33 MAJOR MICROELECTROMECHANICAL SYSTEMS (MEMS) GYROSCOPE TECHNOLOGIES TUNING FORK GYROSCOPES 79 WINE GLASS RESONATOR GYROSCOPES 79 RING RESONATOR GYROSCOPES 79 VIBRATING WHEEL GYROSCOPES 80 SPINNING-WHEEL GYROSCOPES 80 MICRO-OPTICAL-ELECTROMECHANICAL SYSTEMS (MOEMS) GYROSCOPES 80 Interferometric Micro-Optical-Electromechanical Systems (MOEMS) Gyroscopes APPLICATIONS 81 TABLE 34 GYROSCOPIC MICROELECTROMECHANICAL SYSTEMS (MEMS) APPLICATIONS AUTOMOTIVE 81 Vehicle Stabilization Systems 81 Rollover Detection 82 Vehicle Navigation Systems 82 LIFE SCIENCES 82 CONSUMER PRODUCTS 83 Digital Camera Image-Stabilization Systems 83 Personal Transportation Devices 83 Robotic Toys 83 Household Robots 83 MILITARY/AEROSPACE 84 OTHER APPLICATIONS 84 Mobile Industrial/Service Robots 84 GYROSCOPE MARKET 84 SUMMARY 84 TABLE 35 GLOBAL MARKET PROJECTIONS FOR MICROELECTROMECHANICAL SYSTEMS (MEMS) GYROSCOPES, THROUGH 2018 ($ FIGURE 16 GLOBAL MICROELECTROMECHANICAL SYSTEMS (MEMS) ACCELEROMETER MARKET SHARE PROJECTIONS BY APPLICATION SEGMENT, (% OF TOTAL SHIPMENTS) AUTOMOTIVE 86 TABLE 36 GLOBAL MARKET PROJECTIONS FOR GYROSCOPIC MICROELECTROMECHANICAL SYSTEMS (MEMS) IN AUTOMOTIVE APPLICATIONS, THROUGH 2018 ($ Stability Control 86 TABLE 37 GLOBAL MARKET PROJECTIONS FOR MICROELECTROMECHANICAL SYSTEMS (MEMS) GYROSCOPES USED IN VEHICLE STABILITY CONTROL SYSTEMS, THROUGH 2018 (MILLION UNITS/$ Rollover Detection 87 FIGURE 17 PROJECTED TRENDS IN GLOBAL SALES OF VEHICLES WITH ROLLOVER DETECTION SYSTEMS, (MILLION UNITS) TABLE 38 GLOBAL MARKET PROJECTIONS FOR MICROELECTROMECHANICAL SYSTEMS (MEMS) GYROSCOPES USED IN VEHICLE ROLLOVER DETECTION SYSTEMS, THROUGH 2018 (MILLION UNITS/$ Navigation Systems

8 TABLE 39 GLOBAL MARKET PROJECTIONS FOR MICROELECTROMECHANICAL SYSTEMS (MEMS) GYROSCOPES USED IN VEHICLE NAVIGATION SYSTEMS, THROUGH 2018 (MILLION UNITS/$ CONSUMER PRODUCTS 89 TABLE 40 GLOBAL MARKET PROJECTIONS FOR GYROSCOPIC MICROELECTROMECHANICAL SYSTEMS (MEMS) IN CONSUMER PRODUCTS, THROUGH 2018 ($ Digital Camera Image-Stabilization Systems 89 TABLE 41 GLOBAL MARKET PROJECTIONS FOR MICROELECTROMECHANICAL SYSTEMS (MEMS) GYROSCOPES IN DIGITAL CAMERA IMAGE-STABILIZATION SYSTEMS, THROUGH 2018 (MILLION UNITS/$ Personal Transportation Devices 90 FIGURE 18 PROJECTED GLOBAL SALES OF SEGWAY HUMAN TRANSPORTERS, (UNITS) TABLE 42 GLOBAL MARKET PROJECTIONS FOR MICROELECTROMECHANICAL SYSTEMS (MEMS) GYROSCOPES IN SEGWAY HUMAN TRANSPORTERS, THROUGH 2018 (THOUSAND UNITS/$ MILITARY/AEROSPACE 92 TABLE 43 GLOBAL MARKET PROJECTIONS FOR MICROELECTROMECHANICAL SYSTEMS (MEMS) GYROSCOPES USED IN MILITARY/AEROSPACE APPLICATIONS, THROUGH 2018 (MILLION UNITS/$ OTHER APPLICATIONS 92 Mobile Industrial/Service Robots 92 FIGURE 19 PROJECTED TRENDS IN GLOBAL SHIPMENTS OF MOBILE INDUSTRIAL/SERVICE ROBOTS, (UNITS) TABLE 44 GLOBAL MARKET PROJECTIONS FOR MICROELECTROMECHANICAL SYSTEMS (MEMS) GYROSCOPES IN MOBILE INDUSTRIAL/SERVICE ROBOTS, THROUGH 2018 (UNITS/$ CHAPTER 7 PRESSURE SENSORS 96 TECHNOLOGY 96 APPLICATIONS 96 TABLE 45 ESTABLISHED PRESSURE-SENSING MICROELECTROMECHANICAL SYSTEMS (MEMS) APPLICATIONS, 2012 AUTOMOTIVE APPLICATIONS 96 Manifold Absolute Pressure (MAP) Sensors 97 Tire Pressure Sensors 97 LIFE SCIENCES APPLICATIONS 97 Blood Pressure Monitors 97 CONSUMER PRODUCTS 97 Appliance Pressure Sensors 97 OTHER APPLICATIONS 98 PRESSURE SENSOR MARKET 98 SUMMARY 98 TABLE 46 GLOBAL MARKET PROJECTIONS FOR MICROELECTROMECHANICAL SYSTEMS (MEMS) PRESSURE SENSOR APPLICATIONS, THROUGH 2018 ($ FIGURE 20 PROJECTED GLOBAL MICROELECTROMECHANICAL SYSTEMS (MEMS) PRESSURE SENSOR MARKET SHARES BY APPLICATION SEGMENT, (PERCENT OF TOTAL SHIPMENTS) AUTOMOTIVE

9 TABLE 47 GLOBAL MARKET FOR ESTABLISHED AUTOMOTIVE MICROELECTROMECHANICAL SYSTEMS (MEMS) PRESSURE SENSOR APPLICATIONS, THROUGH 2018 ($ Manifold Absolute Pressure Sensors 100 TABLE 48 GLOBAL MARKET PROJECTIONS FOR MICROELECTROMECHANICAL SYSTEMS (MEMS) MANIFOLD ABSOLUTE PRESSURE SENSORS, THROUGH 2018 (MILLION UNITS/$ Tire Pressure Sensors 100 TABLE 49 GLOBAL MARKET PROJECTIONS FOR MICROELECTROMECHANICAL SYSTEMS (MEMS) TIRE PRESSURE MONITORING SYSTEMS, THROUGH 2018 (MILLION UNITS/$ LIFE SCIENCES 101 Blood Pressure Monitors 101 TABLE 50 GLOBAL MARKET PROJECTIONS FOR MICROELECTROMECHANICAL SYSTEMS (MEMS) BLOOD PRESSURE SENSORS, THROUGH 2018 (MILLION UNITS/$ CONSUMER PRODUCTS 102 Appliance Pressure Sensors 102 TABLE 51 GLOBAL MARKET PROJECTIONS FOR MICROELECTROMECHANICAL SYSTEMS (MEMS) PRESSURE SENSORS IN HOME APPLIANCES, THROUGH 2018 (MILLION UNITS/$ CHAPTER 8 CHEMICAL AND GAS SENSORS 104 TECHNOLOGIES 104 ELECTROCHEMICAL SENSORS 104 MASS SENSORS 104 OPTICAL SENSORS 105 APPLICATIONS 105 TABLE 52 MICROELECTROMECHANICAL SYSTEMS (MEMS) CHEMICAL AND GAS SENSOR APPLICATIONS AUTOMOTIVE 106 Exhaust and Cabin Air Quality Sensors 106 LIFE SCIENCES 106 Blood Gas Monitors 106 ENVIRONMENTAL PROTECTION 106 Portable/Personal Air Quality Detectors 106 MILITARY/PUBLIC SAFETY 106 Chemical Agent Detectors 106 OTHER APPLICATIONS 107 Industrial Leak Detection and Process Control 107 MARKETS 107 TABLE 53 GLOBAL MICROELECTROMECHANICAL SYSTEMS (MEMS) CHEMICAL AND GAS SENSOR MARKET PROJECTIONS BY APPLICATION SEGMENT, THROUGH 2018 ($ FIGURE 21 GLOBAL MICROELECTROMECHANICAL SYSTEMS (MEMS) CHEMICAL AND GAS SENSOR MARKET SHARE PROJECTIONS BY APPLICATION SEGMENT, (PERCENT OF TOTAL SHIPMENTS) AUTOMOTIVE 108 TABLE 54 GLOBAL MARKET PROJECTIONS FOR MICROELECTROMECHANICAL SYSTEMS (MEMS) GAS SENSORS USED IN AUTOMOTIVE APPLICATIONS, THROUGH 2018 ($

10 Exhaust Gas and Cabin Air Quality Sensors 109 TABLE 55 PROJECTED NUMBER OF CATALYTIC CONVERTER-EQUIPPED VEHICLES PRODUCED WORLDWIDE, THROUGH 2018 (MILLION UNITS) FIGURE 22 PROJECTED GLOBAL PRODUCTION OF VEHICLES EQUIPPED WITH CATALYTIC CONVERTERS, (MILLION VEHICLES) LIFE SCIENCES 110 Blood Gas Monitors 110 TABLE 56 PROJECTED GLOBAL SALES OF BLOOD GAS MONITORS, THROUGH 2018 (UNITS) FIGURE 23 PROJECTED TRENDS IN GLOBAL SALES OF BLOOD GAS MONITORS, (UNITS) TABLE 57 GLOBAL MARKET PROJECTIONS FOR MICROELECTROMECHANICAL SYSTEMS (MEMS) BLOOD GAS SENSORS, THROUGH 2018 (UNITS/$ ENVIRONMENTAL PROTECTION 112 Air Quality Monitoring 112 TABLE 58 GLOBAL SALES OF AIR POLLUTION MONITORING EQUIPMENT, THROUGH 2018 ($ BILLIONS) FIGURE 24 PROJECTED GLOBAL AIR POLLUTION MONITORING AND SENSING EQUIPMENT MARKET TRENDS, ($ BILLIONS) TABLE 59 GLOBAL MARKET PROJECTIONS FOR MICROELECTROMECHANICAL SYSTEMS (MEMS) USED IN PORTABLE/PERSONAL AIR QUALITY MONITORS, THROUGH 2018 (UNITS/$ MILITARY/PUBLIC SAFETY 114 Chemical Agent Detectors 114 TABLE 60 GLOBAL MARKET PROJECTIONS FOR MICROELECTROMECHANICAL SYSTEMS (MEMS) USED IN PORTABLE CHEMICAL WARFARE (CW) AGENT DETECTORS, THROUGH 2018 (THOUSAND UNITS/$ PROCESS INDUSTRIES 114 Industrial Process Control and Leak Detection 115 TABLE 61 GLOBAL MARKET PROJECTIONS FOR OTHER TYPES OF MICROELECTROMECHANICAL SYSTEMS (MEMS) INDUSTRIAL CHEMICAL AND GAS SENSORS, THROUGH 2018 ($ millions) CHAPTER 9 THERMAL SENSORS 117 TECHNOLOGIES 117 THERMOCOUPLES 117 THERMORESISTORS 117 MICROBOLOMETERS 117 MICROCANTILEVERS 118 OTHER TECHNOLOGIES 119 APPLICATIONS 119 AUTOMOTIVE 119 MILITARY/PUBLIC SAFETY 119 OTHER 120 MARKETS 120 TABLE 62 GLOBAL MARKET PROJECTIONS FOR THERMAL MICROSENSORS BY APPLICATION SEGMENT, THROUGH 2018 (THOUSAND UNITS/$ FIGURE 25 GLOBAL MICROELECTROMECHANICAL SYSTEMS (MEMS) INFRARED SENSOR MARKET SHARE PROJECTIONS BY APPLICATION SEGMENT, (% OF TOTAL SHIPMENTS)

11 MILITARY/PUBLIC SAFETY 121 TABLE 63 GLOBAL MILITARY/PUBLIC SAFETY MARKET FOR INFRARED MICROELECTROMECHANICAL SYSTEMS (MEMS) SENSORS, THROUGH 2018 (THOUSAND UNITS/$ AUTOMOTIVE 122 Night-Vision Systems 122 TABLE 64 GLOBAL AUTOMOTIVE MARKET PROJECTIONS FOR INFRARED MICROELECTROMECHANICAL SYSTEMS (MEMS) SENSORS, THROUGH 2018 (THOUSAND UNITS/$ OTHER APPLICATIONS 123 TABLE 65 GLOBAL MARKET FOR INFRARED MICROELECTROMECHANICAL SYSTEMS (MEMS) SENSORS IN OTHER APPLICATIONS, THROUGH 2018 ($ CHAPTER 10 MAGNETIC SENSORS 126 TECHNOLOGIES 126 RESONANT SENSORS 126 FLUXGATE SENSORS 126 HALL SENSORS 126 GIANT MAGNETORESISTIVE SENSORS 127 MAGNETIC TUNNELING JUNCTION SENSORS 127 ANISOTROPIC MAGNETORESISTIVE (AMR) MAGNETIC SENSORS 127 APPLICATIONS 128 TABLE 66 MAGNETIC SENSOR APPLICATIONS 128 AUTOMOTIVE APPLICATIONS 128 LIFE SCIENCES 128 CONSUMER PRODUCTS 129 OTHER APPLICATIONS 129 MARKETS 129 TABLE 67 GLOBAL MAGNETIC MICROSENSOR MARKET PROJECTIONS BY APPLICATION SEGMENT, THROUGH 2018 ($ FIGURE 26 GLOBAL MAGNETIC MICROSENSOR MARKET SHARE PROJECTIONS BY APPLICATION SEGMENT, (% OF TOTAL SHIPMENTS) AUTOMOTIVE 131 LIFE SCIENCES 131 CONSUMER PRODUCTS 131 OTHER APPLICATIONS CHAPTER 11 OTHER MICROELECTROMECHANICAL SYSTEMS (MEMS) SENSORS 133 TABLE 68 GLOBAL STRAIN MICROSENSOR MARKET PROJECTIONS, THROUGH 2018 ($ 133 CHAPTER 12 BIOCHIPS 135 TECHNOLOGIES 135 SAMPLE MANIPULATION TECHNOLOGIES 135 Microchannels 135 Micropumps 136 Mechanical Micropumps 136 Piezoelectric Pumps 136 Pneumatic Pumps 136

12 Thermopneumatic Pumps 136 Electrostatic Pumps 137 Nonmechanical Pumps 137 Capillary Pumps 137 Electrohydrodynamic Pumps 137 Electrokinetic Pumps 137 Magneto-Hydrodynamic Pumps 138 Phase Difference Pumps 138 Micronozzles 138 Microvalves 138 Passive Microvalves 138 Active Microvalves 139 Micromixers 139 Active Mixers 139 Surface Acoustic Wave (SAW) Mixers 139 Magneto-Hydrodynamic Mixers 139 Passive Mixers 139 Microreactors 140 SENSING MEDIATOR 140 Enzyme Biochips 140 Affinity Biochips 140 TRANSDUCER 141 APPLICATIONS 141 TABLE 69 BIOCHIP APPLICATIONS 141 LIFE SCIENCES 141 MILITARY/PUBLIC SAFETY 142 Chemical and Biological Agent Detectors 142 PROCESS INDUSTRIES 142 Food Quality Testing 143 MARKETS 143 TABLE 70 GLOBAL BIOCHIP MARKET PROJECTIONS BY APPLICATION SEGMENT, THROUGH 2018 ($ FIGURE 27 GLOBAL BIOCHIP MARKET SHARE PROJECTIONS BY APPLICATION SEGMENT, (% OF TOTAL SHIPMENTS) LIFE SCIENCES 144 TABLE 71 GLOBAL MARKET PROJECTIONS FOR BIOCHIPS IN THE LIFE SCIENCES BY APPLICATION, THROUGH 2018 ($ Life Sciences Research 145 TABLE 72 GLOBAL MARKET PROJECTIONS FOR BIOCHIPS USED IN LIFE SCIENCE RESEARCH APPLICATIONS, THROUGH 2018 ($ Diagnostic Biochips 145 TABLE 73 GLOBAL MARKET PROJECTIONS FOR BIOCHIPS IN LABS-ON-A-CHIP (LOC) DIAGNOSTIC DEVICES, THROUGH 2018 ($ MILITARY/PUBLIC SAFETY 146 TABLE 74 GLOBAL MARKET PROJECTIONS FOR MICROFLUIDIC BIOCHIPS USED IN CHEMICAL AND BIOLOGICAL WARFARE (CBW) SENSORS, THROUGH 2018 ($ PROCESS INDUSTRIES 147 Food Testing

13 TABLE 75 GLOBAL MARKET PROJECTIONS FOR BIOCHIPS USED IN FOOD TESTING APPLICATIONS, THROUGH 2018 ($ 147 CHAPTER 13 NANOCHEMICAL SENSORS 149 TECHNOLOGIES 149 TABLE 76 NANOCHEMICAL SENSOR TECHNOLOGIES 149 NANOTUBES 150 Carbon Nanotubes 150 Other Types of Nanotubes 151 NANORIBBONS 151 NANOWIRES 152 NANOCANTILEVERS 152 NANOPARTICLES 153 NANOCERAMICS 154 GRAPHENE SENSORS 154 APPLICATIONS 155 TABLE 77 NANOCHEMICAL SENSOR APPLICATIONS 155 LIFE SCIENCES 156 Respiratory Monitoring 156 PROCESS INDUSTRIES 156 Leak Detection 156 MARKET 157 TABLE 78 GLOBAL SALES PROJECTIONS FOR NANOCHEMICAL SENSORS BY APPLICATION SEGMENT, THROUGH 2018 ($ 157 CHAPTER 14 NANOFORCE SENSORS 159 TECHNOLOGIES 159 APPLICATIONS 160 LIFE SCIENCES 160 INFORMATION TECHNOLOGY 160 OTHER APPLICATIONS 160 MARKETS 161 TABLE 79 GLOBAL SALES PROJECTIONS FOR NANOFORCE SENSORS (ATOMIC FORCE MICROSCOPES) BY APPLICATION SEGMENT, THROUGH 2018 ($ 161 CHAPTER 15 NANOBIOSENSORS 163 TECHNOLOGIES 163 TABLE 80 NANOBIOSENSOR TECHNOLOGIES 163 SILICON NANOWIRES 164 NANOCANTILEVERS 164 FIBER OPTIC 164 NANOTUBES 165 NANOSTRUCTURED MEMBRANE 165 PHOSPHOLIPIDS 166 DNA-SENSITIZED GRAPHENE VAPOR SENSORS 167 NANOGAP SENSOR ARRAY 167 APPLICATIONS 167 TABLE 81 NANOBIOSENSOR APPLICATIONS 168

14 LIFE SCIENCES 168 Molecular Diagnostics 168 MARKETS 168 LIFE SCIENCES 168 TABLE 82 PROJECTED GLOBAL SALES OF NANOBIOSENSORS TO THE LIFE SCIENCES MARKET, THROUGH 2018 ($ Molecular Diagnostics 169 FIGURE 28 GLOBAL MARKET SHARE PROJECTIONS FOR IN VITRO MOLECULAR DIAGNOSTIC EQUIPMENT VS. CONSUMABLES, 2012 (%) TABLE 83 GLOBAL MARKET PROJECTIONS FOR NANOBIOSENSOR POINT- OF-CARE (POC) MOLECULAR DIAGNOSTIC EQUIPMENT, THROUGH 2018 ($ CHAPTER 16 NANO-RADIATION SENSORS 172 TECHNOLOGIES 172 NANOCANTILEVER SENSORS 172 GRAPHENE SENSORS 172 APPLICATIONS 173 TABLE 84 NANO-RADIATION SENSOR APPLICATIONS 173 MARKET 173 CHAPTER 17 NANO-THERMAL SENSORS 175 TECHNOLOGIES 175 NANOPOWDER-BASED SENSORS 175 MARKETS 175 APPLICATIONS 175 TABLE 85 NANO-THERMAL SENSOR APPLICATIONS 176 CHAPTER 18 INDUSTRY CHARACTERISTICS 178 NUMBER/SIZE OF FIRMS 178 FIGURE 29 GLOBAL MICROSENSOR INDUSTRY CONCENTRATION, 2012 (PERCENT OF TOTAL MICROSENSOR SHIPMENTS) MARKET SHARES 178 FIGURE 30 OVERALL GLOBAL MICROSENSOR MARKET SHARES BY COMPANY, 2012 (PERCENT OF TOTAL MICROSENSOR SHIPMENTS) CHAPTER 19 COMPANY PROFILES 182 AFFYMETRIX INC. 182 ANALOG DEVICES INC. 182 ARCHANGEL SYSTEMS INC. 183 ASAHI KASEI MICRODEVICES CORP. 183 ROBERT BOSCH GMBH 183 BOSTON MICROSYSTEMS INC. 184 BRUKER AXS 184 CALIPER LIFE SCIENCES 184 CEPHEID THERAPEUTICS 185 COLIBRYS SA 185 COMBIMATRIX CORP. 185 CONTINENTAL AG 186

15 CUSTOM SENSORS AND TECHNOLOGIES 186 DELPHI AUTOMOTIVE LLP 186 ENDEVCO CORP. 187 ENZO LIFE SCIENCES 187 EUROGENTEC 187 FEBIT AG 188 FLIR SYSTEMS INC. 188 FREESCALE SEMICONDUCTOR INC. 188 GE SENSING 189 GENETIX LTD. 189 GMA INDUSTRIES INC. 189 INTEGRATED NANO-TECHNOLOGIES LLC 190 I-STAT CORP. 190 KIONIX INC. 190 KNOWLES ELECTRONICS 191 LOCKHEED MARTIN CORP. 191 MATSUSHITA ELECTRIC INDUSTRIAL CO. LTD. 191 M-BIOTECH INC. 192 MEASUREMENT SPECIALTIES INC. 192 MEMSIC INC. 192 MICROCHEMICAL SYSTEMS SA 193 MURATA MANUFACTURING CO. LTD. 193 NANOMIX INC. 193 NIPPON DENSO CORP. 194 OMRON CORP. 194 ROCHE NIMBLEGEN INC. 195 SENSONOR AS 195 SILICON DESIGNS INC. 195 SILICON SENSING SYSTEMS 196 SONY CORP. 196 SPHERE MEDICAL LTD. 196 STMICROELECTRONICS 197 SYNKERA TECHNOLOGIES INC. 197 TOSHIBA CORP. 197 ULIS 198 VTI TECHNOLOGIES OY 198 XEOTRON CORP. 198 CHAPTER 20 PATENT ANALYSIS 200 PATENTS BY TYPE OF MICROELECTROMECHANICAL SYSTEM (MEMS) 200 FIGURE 31 RECENT U.S. MICROSENSOR-RELATED PATENTS BY TYPE OF SENSOR (PERCENT OF PATENTS ISSUED BETWEEN JANUARY 1, 2005 AND JULY 1, 2013) MICROELECTROMECHANICAL SYSTEMS (MEMS) PATENT ASSIGNEES 201 TABLE 86 LARGEST U.S. MICROSENSOR HOLDERS (NUMBER OF PATENTS ISSUED BETWEEN 1/1/2005 AND 7/15/2013)

16 LIST OF TABLES TABLE HEADING SUMMARY TABLE GLOBAL MICROSENSOR MARKET PROJECTIONS, THROUGH 2018 ($ TABLE 1 MAJOR MICROSENSOR TECHNOLOGIES AND APPLICATIONS 14 TABLE 2 GLOBAL MICROSENSOR MARKET PROJECTIONS, THROUGH 2018 ($ TABLE 3 GLOBAL MARKET PROJECTIONS FOR MICROSENSORS BY END USE, THROUGH 2018 ($ TABLE 4 MAJOR MICROELECTROMECHANICAL SYSTEMS (MEMS) ACCELEROMETER TECHNOLOGIES TABLE 5 COMMERCIAL ACCELEROMETER APPLICATIONS 49 TABLE 6 GLOBAL MARKET PROJECTIONS FOR MICROELECTROMECHANICAL SYSTEMS (MEMS) ACCELEROMETERS, THROUGH 2018 ($ TABLE 7 GLOBAL MARKET PROJECTIONS FOR ESTABLISHED AUTOMOTIVE ACCELEROMETER APPLICATIONS, THROUGH 2018 ($ TABLE 8 PROJECTED GLOBAL SHIPMENTS OF AIRBAG MODULES, THROUGH 2018 (MILLION UNITS) TABLE 9 GLOBAL MARKET PROJECTIONS FOR AIRBAG SENSORS IN MOTOR VEHICLES, THROUGH 2018 (MILLION UNITS/$ TABLE 10 PROJECTED GLOBAL PRODUCTION OF VEHICLES EQUIPPED WITH STABILITY CONTROL SYSTEMS, THROUGH 2018 (MILLION VEHICLES) TABLE 11 GLOBAL MARKET FOR LOW-G ACCELEROMETERS USED IN VEHICLE STABILITY CONTROL SYSTEMS, THROUGH 2018 (MILLION UNITS/$ TABLE 12 PROJECTED GLOBAL SHIPMENTS OF VEHICLE IN-DASH NAVIGATION SYSTEMS WITH INTEGRATED INERTIAL NAVIGATION SYSTEMS (INS), THROUGH 2018 (MILLION VEHICLES) TABLE 13 GLOBAL MARKET PROJECTIONS FOR MICROELECTROMECHANICAL SYSTEMS (MEMS) ACCELEROMETERS USED IN VEHICLE NAVIGATION SYSTEMS, THROUGH 2018 (MILLION UNITS/$ TABLE 14 GLOBAL MARKET FOR ESTABLISHED ACCELEROMETER APPLICATIONS IN THE LIFE SCIENCES, THROUGH 2018 ($ TABLE 15 GLOBAL SALES PROJECTIONS FOR CARDIAC PACEMAKERS, THROUGH 2018 (THOUSANDS OF PACEMAKERS) TABLE 16 GLOBAL MARKET PROJECTIONS FOR ACCELEROMETERS USED IN RATE RESPONSIVE HEART PACEMAKERS, THROUGH 2018 (THOUSAND UNITS/$ TABLE 17 GLOBAL MARKET PROJECTIONS FOR ACCELEROMETERS USED IN ACTIGRAPHS, THROUGH 2018 (THOUSAND UNITS/$ TABLE 18 GLOBAL MARKET PROJECTIONS FOR ACCELEROMETERS USED IN SEISMIC DETECTION EQUIPMENT, THROUGH 2018 (MILLION UNITS/$ TABLE 19 PROJECTED GLOBAL SALES OF GLOBAL POSITION SYSTEMS (GPS) FOR MILITARY/AEROSPACE APPLICATIONS, THROUGH 2018 ($ TABLE 20 GLOBAL MARKET PROJECTIONS FOR ACCELEROMETERS USED IN MILITARY/AEROSPACE APPLICATIONS, THROUGH 2018 (THOUSAND UNITS/$ TABLE 21 GLOBAL MARKET PROJECTIONS FOR MICROELECTROMECHANICAL SYSTEMS (MEMS) ACCELEROMETERS IN CONSUMER PRODUCTS, THROUGH 2018 ($ TABLE 22 GLOBAL MARKET PROJECTIONS FOR HARD DRIVE-EQUIPPED LAPTOP COMPUTERS, THROUGH 2018 (MILLION UNITS) TABLE 23 GLOBAL MARKET PROJECTIONS FOR LAPTOP COMPUTER HARD DRIVE DISK (HDD) PROTECTION APPLICATIONS, THROUGH 2018 (MILLION UNITS/$

17 TABLE HEADING TABLE 24 GLOBAL MARKET FOR MICROELECTROMECHANICAL SYSTEMS (MEMS) ACCELEROMETERS IN HARD DISK DRIVE (HDD) READ/WRITE HEAD TRACKING SYSTEMS, THROUGH 2018 (MILLION UNITS/$ TABLE 25 GLOBAL MARKET PROJECTIONS FOR MICROELECTROMECHANICAL SYSTEMS (MEMS) ACCELEROMETERS IN CONSUMER PRODUCTS, THROUGH 2018 ($ TABLE 26 GLOBAL MARKET PROJECTIONS FOR MOBILE PHONE HANDSETS, THROUGH 2018 (MILLIONS OF HANDSETS) TABLE 27 GLOBAL MARKET PROJECTIONS FOR MICROELECTROMECHANICAL SYSTEMS (MEMS) ACCELEROMETERS IN MOBILE PHONE HANDSETS, THROUGH 2018 (MILLION UNITS/$ TABLE 28 GLOBAL MARKET PROJECTIONS FOR MICROELECTROMECHANICAL SYSTEMS (MEMS) ACCELEROMETERS IN HANDHELD GAMING DEVICES, THROUGH 2018 (MILLION UNITS/$ TABLE 29 PROJECTED GLOBAL DIGITAL CAMERA SALES, THROUGH 2018 (MILLIONS OF CAMERAS) TABLE 30 GLOBAL MARKET PROJECTIONS FOR MICROELECTROMECHANICAL SYSTEMS (MEMS) ACCELEROMETERS IN DIGITAL CAMERA IMAGE-STABILIZATION SYSTEMS, THROUGH 2018 (MILLION UNITS/$ TABLE 31 GLOBAL MARKET PROJECTIONS FOR MICROELECTROMECHANICAL SYSTEMS (MEMS) ACCELEROMETERS IN "SMART" SPORTING GOODS, THROUGH 2018 (THOUSAND UNITS/$ TABLE 32 GLOBAL MARKET PROJECTIONS FOR ACCELEROMETERS USED IN OTHER NONMILITARY APPLICATIONS, THROUGH 2018 (MILLION UNITS/$ TABLE 33 MAJOR MICROELECTROMECHANICAL SYSTEMS (MEMS) GYROSCOPE TECHNOLOGIES TABLE 34 GYROSCOPIC MICROELECTROMECHANICAL SYSTEMS (MEMS) APPLICATIONS TABLE 35 GLOBAL MARKET PROJECTIONS FOR MICROELECTROMECHANICAL SYSTEMS (MEMS) GYROSCOPES, THROUGH 2018 ($ TABLE 36 GLOBAL MARKET PROJECTIONS FOR GYROSCOPIC MICROELECTROMECHANICAL SYSTEMS (MEMS) IN AUTOMOTIVE APPLICATIONS, THROUGH 2018 ($ TABLE 37 GLOBAL MARKET PROJECTIONS FOR MICROELECTROMECHANICAL SYSTEMS (MEMS) GYROSCOPES USED IN VEHICLE STABILITY CONTROL SYSTEMS, THROUGH 2018 (MILLION UNITS/$ TABLE 38 GLOBAL MARKET PROJECTIONS FOR MICROELECTROMECHANICAL SYSTEMS (MEMS) GYROSCOPES USED IN VEHICLE ROLLOVER DETECTION SYSTEMS, THROUGH 2018 (MILLION UNITS/$ TABLE 39 GLOBAL MARKET PROJECTIONS FOR MICROELECTROMECHANICAL SYSTEMS (MEMS) GYROSCOPES USED IN VEHICLE NAVIGATION SYSTEMS, THROUGH 2018 (MILLION UNITS/$ TABLE 40 GLOBAL MARKET PROJECTIONS FOR GYROSCOPIC MICROELECTROMECHANICAL SYSTEMS (MEMS) IN CONSUMER PRODUCTS, THROUGH 2018 ($ TABLE 41 GLOBAL MARKET PROJECTIONS FOR MICROELECTROMECHANICAL SYSTEMS (MEMS) GYROSCOPES IN DIGITAL CAMERA IMAGE-STABILIZATION SYSTEMS, THROUGH 2018 (MILLION UNITS/$ TABLE 42 GLOBAL MARKET PROJECTIONS FOR MICROELECTROMECHANICAL SYSTEMS (MEMS) GYROSCOPES IN SEGWAY HUMAN TRANSPORTERS, THROUGH 2018 (THOUSAND UNITS/$ TABLE 43 GLOBAL MARKET PROJECTIONS FOR MICROELECTROMECHANICAL SYSTEMS (MEMS) GYROSCOPES USED IN MILITARY/AEROSPACE APPLICATIONS, THROUGH 2018 (MILLION UNITS/$

18 TABLE HEADING TABLE 44 GLOBAL MARKET PROJECTIONS FOR MICROELECTROMECHANICAL SYSTEMS (MEMS) GYROSCOPES IN MOBILE INDUSTRIAL/SERVICE ROBOTS, THROUGH 2018 (UNITS/$ TABLE 45 ESTABLISHED PRESSURE-SENSING MICROELECTROMECHANICAL SYSTEMS (MEMS) APPLICATIONS, 2012 TABLE 46 GLOBAL MARKET PROJECTIONS FOR MICROELECTROMECHANICAL SYSTEMS (MEMS) PRESSURE SENSOR APPLICATIONS, THROUGH 2018 ($ TABLE 47 GLOBAL MARKET FOR ESTABLISHED AUTOMOTIVE MICROELECTROMECHANICAL SYSTEMS (MEMS) PRESSURE SENSOR APPLICATIONS, THROUGH 2018 ($ TABLE 48 GLOBAL MARKET PROJECTIONS FOR MICROELECTROMECHANICAL SYSTEMS (MEMS) MANIFOLD ABSOLUTE PRESSURE SENSORS, THROUGH 2018 (MILLION UNITS/$ TABLE 49 GLOBAL MARKET PROJECTIONS FOR MICROELECTROMECHANICAL SYSTEMS (MEMS) TIRE PRESSURE MONITORING SYSTEMS, THROUGH 2018 (MILLION UNITS/$ TABLE 50 GLOBAL MARKET PROJECTIONS FOR MICROELECTROMECHANICAL SYSTEMS (MEMS) BLOOD PRESSURE SENSORS, THROUGH 2018 (MILLION UNITS/$ TABLE 51 GLOBAL MARKET PROJECTIONS FOR MICROELECTROMECHANICAL SYSTEMS (MEMS) PRESSURE SENSORS IN HOME APPLIANCES, THROUGH 2018 (MILLION UNITS/$ TABLE 52 MICROELECTROMECHANICAL SYSTEMS (MEMS) CHEMICAL AND GAS SENSOR APPLICATIONS TABLE 53 GLOBAL MICROELECTROMECHANICAL SYSTEMS (MEMS) CHEMICAL AND GAS SENSOR MARKET PROJECTIONS BY APPLICATION SEGMENT, THROUGH 2018 ($ TABLE 54 GLOBAL MARKET PROJECTIONS FOR MICROELECTROMECHANICAL SYSTEMS (MEMS) GAS SENSORS USED IN AUTOMOTIVE APPLICATIONS, THROUGH 2018 ($ TABLE 55 PROJECTED NUMBER OF CATALYTIC CONVERTER-EQUIPPED VEHICLES PRODUCED WORLDWIDE, THROUGH 2018 (MILLION UNITS) TABLE 56 PROJECTED GLOBAL SALES OF BLOOD GAS MONITORS, THROUGH 2018 (UNITS) TABLE 57 GLOBAL MARKET PROJECTIONS FOR MICROELECTROMECHANICAL SYSTEMS (MEMS) BLOOD GAS SENSORS, THROUGH 2018 (UNITS/$ TABLE 58 GLOBAL SALES OF AIR POLLUTION MONITORING EQUIPMENT, THROUGH 2018 ($ BILLIONS) TABLE 59 GLOBAL MARKET PROJECTIONS FOR MICROELECTROMECHANICAL SYSTEMS (MEMS) USED IN PORTABLE/PERSONAL AIR QUALITY MONITORS, THROUGH 2018 (UNITS/$ TABLE 60 GLOBAL MARKET PROJECTIONS FOR MICROELECTROMECHANICAL SYSTEMS (MEMS) USED IN PORTABLE CHEMICAL WARFARE (CW) AGENT DETECTORS, THROUGH 2018 (THOUSAND UNITS/$ TABLE 61 GLOBAL MARKET PROJECTIONS FOR OTHER TYPES OF MICROELECTROMECHANICAL SYSTEMS (MEMS) INDUSTRIAL CHEMICAL AND GAS SENSORS, THROUGH 2018 ($ TABLE 62 GLOBAL MARKET PROJECTIONS FOR THERMAL MICROSENSORS BY APPLICATION SEGMENT, THROUGH 2018 (THOUSAND UNITS/$ TABLE 63 GLOBAL MILITARY/PUBLIC SAFETY MARKET FOR INFRARED MICROELECTROMECHANICAL SYSTEMS (MEMS) SENSORS, THROUGH 2018 (THOUSAND UNITS/$

19 TABLE HEADING TABLE 64 GLOBAL AUTOMOTIVE MARKET PROJECTIONS FOR INFRARED MICROELECTROMECHANICAL SYSTEMS (MEMS) SENSORS, THROUGH 2018 (THOUSAND UNITS/$ TABLE 65 GLOBAL MARKET FOR INFRARED MICROELECTROMECHANICAL SYSTEMS (MEMS) SENSORS IN OTHER APPLICATIONS, THROUGH 2018 ($ TABLE 66 MAGNETIC SENSOR APPLICATIONS 128 TABLE 67 GLOBAL MAGNETIC MICROSENSOR MARKET PROJECTIONS BY APPLICATION SEGMENT, THROUGH 2018 ($ TABLE 68 GLOBAL STRAIN MICROSENSOR MARKET PROJECTIONS, THROUGH 2018 ($ TABLE 69 BIOCHIP APPLICATIONS 141 TABLE 70 GLOBAL BIOCHIP MARKET PROJECTIONS BY APPLICATION SEGMENT, THROUGH 2018 ($ TABLE 71 GLOBAL MARKET PROJECTIONS FOR BIOCHIPS IN THE LIFE SCIENCES BY APPLICATION, THROUGH 2018 ($ TABLE 72 GLOBAL MARKET PROJECTIONS FOR BIOCHIPS USED IN LIFE SCIENCE RESEARCH APPLICATIONS, THROUGH 2018 ($ TABLE 73 GLOBAL MARKET PROJECTIONS FOR BIOCHIPS IN LABS-ON-A-CHIP (LOC) DIAGNOSTIC DEVICES, THROUGH 2018 ($ TABLE 74 GLOBAL MARKET PROJECTIONS FOR MICROFLUIDIC BIOCHIPS USED IN CHEMICAL AND BIOLOGICAL WARFARE (CBW) SENSORS, THROUGH 2018 ($ TABLE 75 GLOBAL MARKET PROJECTIONS FOR BIOCHIPS USED IN FOOD TESTING APPLICATIONS, THROUGH 2018 ($ TABLE 76 NANOCHEMICAL SENSOR TECHNOLOGIES 149 TABLE 77 NANOCHEMICAL SENSOR APPLICATIONS 155 TABLE 78 GLOBAL SALES PROJECTIONS FOR NANOCHEMICAL SENSORS BY APPLICATION SEGMENT, THROUGH 2018 ($ TABLE 79 GLOBAL SALES PROJECTIONS FOR NANOFORCE SENSORS (ATOMIC FORCE MICROSCOPES) BY APPLICATION SEGMENT, THROUGH 2018 ($ TABLE 80 NANOBIOSENSOR TECHNOLOGIES 163 TABLE 81 NANOBIOSENSOR APPLICATIONS 168 TABLE 82 PROJECTED GLOBAL SALES OF NANOBIOSENSORS TO THE LIFE SCIENCES MARKET, THROUGH 2018 ($ TABLE 83 GLOBAL MARKET PROJECTIONS FOR NANOBIOSENSOR POINT- OF-CARE (POC) MOLECULAR DIAGNOSTIC EQUIPMENT, THROUGH 2018 ($ TABLE 84 NANO-RADIATION SENSOR APPLICATIONS 173 TABLE 85 NANO-THERMAL SENSOR APPLICATIONS 176 TABLE 86 LARGEST U.S. MICROSENSOR HOLDERS (NUMBER OF PATENTS ISSUED BETWEEN 1/1/2005 AND 7/15/2013)

20 LIST OF FIGURES FIGURE TITLE SUMMARY FIGURE GLOBAL MICROSENSOR MARKET PROJECTIONS, ($ FIGURE 1 PROJECTED GLOBAL MICRO MARKET TRENDS, ($ 21 FIGURE 2 PROJECTED TRENDS IN THE GLOBAL MICROSENSOR MARKET BY END USER SEGMENT, (PERCENT OF TOTAL SALES) FIGURE 3 GLOBAL MARKET SHARE PROJECTIONS FOR MICROSENSOR MATERIALS TECHNOLOGIES BY TYPE, 2012 AND 2018 (PERCENT OF TOTAL MEMS SHIPMENTS) FIGURE 4 SACRIFICIAL LAYER ETCHING 30 FIGURE 5 LIGA PROCESS DIAGRAM 31 FIGURE 6 ISOTROPIC VS. ANISOTROPIC ETCHING 33 FIGURE 7 GLOBAL MICROELECTROMECHANICAL SYSTEMS (MEMS) ACCELEROMETER MARKET SHARE PROJECTIONS BY APPLICATION SEGMENT, (PERCENT OF TOTAL SHIPMENTS) FIGURE 8 PROJECTED TRENDS IN GLOBAL SHIPMENTS OF AIRBAG MODULES, (MILLION UNITS) FIGURE 9 PROJECTED TRENDS IN GLOBAL SALES OF LIGHT VEHICLES WITH STABILITY CONTROL SYSTEMS, (MILLION VEHICLES) FIGURE 10 PROJECTED TRENDS IN GLOBAL SHIPMENTS OF VEHICLE IN-DASH NAVIGATION SYSTEMS, (MILLION SYSTEMS SHIPPED) FIGURE 11 PROJECTED TRENDS IN GLOBAL SALES OF CARDIAC PACEMAKERS, (THOUSAND UNITS) FIGURE 12 PROJECTED TRENDS IN GLOBAL MILITARY/AEROSPACE MARKET FOR GLOBAL POSITION SYSTEMS (GPS), ($ FIGURE 13 PROJECTED GLOBAL TRENDS IN SALES OF HARD DRIVE-EQUIPPED LAPTOP COMPUTERS, (MILLION DEVICES) FIGURE 14 PROJECTED TRENDS IN GLOBAL SALES OF MOBILE PHONE HANDSETS, (MILLIONS OF HANDSETS) FIGURE 15 PROJECTED GLOBAL UNIT SALES OF DIGITAL CAMERAS, (MILLION UNITS) FIGURE 16 GLOBAL MICROELECTROMECHANICAL SYSTEMS (MEMS) ACCELEROMETER MARKET SHARE PROJECTIONS BY APPLICATION SEGMENT, (% OF TOTAL SHIPMENTS) FIGURE 17 PROJECTED TRENDS IN GLOBAL SALES OF VEHICLES WITH ROLLOVER DETECTION SYSTEMS, (MILLION UNITS) FIGURE 18 PROJECTED GLOBAL SALES OF SEGWAY HUMAN TRANSPORTERS, (UNITS) FIGURE 19 PROJECTED TRENDS IN GLOBAL SHIPMENTS OF MOBILE INDUSTRIAL/SERVICE ROBOTS, (UNITS) FIGURE 20 PROJECTED GLOBAL MICROELECTROMECHANICAL SYSTEMS (MEMS) PRESSURE SENSOR MARKET SHARES BY APPLICATION SEGMENT, (PERCENT OF TOTAL SHIPMENTS) FIGURE 21 GLOBAL MICROELECTROMECHANICAL SYSTEMS (MEMS) CHEMICAL AND GAS SENSOR MARKET SHARE PROJECTIONS BY APPLICATION SEGMENT, (PERCENT OF TOTAL SHIPMENTS) FIGURE 22 PROJECTED GLOBAL PRODUCTION OF VEHICLES EQUIPPED WITH CATALYTIC CONVERTERS, (MILLION VEHICLES) FIGURE 23 PROJECTED TRENDS IN GLOBAL SALES OF BLOOD GAS MONITORS, (UNITS) FIGURE 24 PROJECTED GLOBAL AIR POLLUTION MONITORING AND SENSING EQUIPMENT MARKET TRENDS, ($ BILLIONS)

21 FIGURE TITLE FIGURE 25 GLOBAL MICROELECTROMECHANICAL SYSTEMS (MEMS) INFRARED SENSOR MARKET SHARE PROJECTIONS BY APPLICATION SEGMENT, (% OF TOTAL SHIPMENTS) FIGURE 26 GLOBAL MAGNETIC MICROSENSOR MARKET SHARE PROJECTIONS BY APPLICATION SEGMENT, (% OF TOTAL SHIPMENTS) FIGURE 27 GLOBAL BIOCHIP MARKET SHARE PROJECTIONS BY APPLICATION SEGMENT, (% OF TOTAL SHIPMENTS) FIGURE 28 GLOBAL MARKET SHARE PROJECTIONS FOR IN VITRO MOLECULAR DIAGNOSTIC EQUIPMENT VS. CONSUMABLES, 2012 (%) FIGURE 29 GLOBAL MICROSENSOR INDUSTRY CONCENTRATION, 2012 (PERCENT OF TOTAL MICROSENSOR SHIPMENTS) FIGURE 30 OVERALL GLOBAL MICROSENSOR MARKET SHARES BY COMPANY, 2012 (PERCENT OF TOTAL MICROSENSOR SHIPMENTS) FIGURE 31 RECENT U.S. MICROSENSOR-RELATED PATENTS BY TYPE OF SENSOR (PERCENT OF PATENTS ISSUED BETWEEN JANUARY 1, 2005 AND JULY 1, 2013)