Scanning Electron Microscope

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1 COXEM, Nano-Metrology Partner Scanning Electron Microscope Nano-Metrology Partner

Scanning Electron Microscope Optical Microscope Electron Microscope Electronic Source

Ernst Ruska: Electron optics, and for the design of the first electron microscope

2 Scanning Electron Microscope Optical Microscope Electron Microscope Electronic Source Light Electron Mag. ~ X 1500 X 10 ~ 300,000 Purpose Micron unit Meas. Sub-micron unit Meas. Mechanic Material Optical Technology Origin The Nobel Prize in Physics, Ernst Ruska: Electron optics, and for the design of the first electron microscope Science Mathematics SEM Commercialization Nations Germany (Carl Zeiss) America(FEI, ) Czech(Tescan) Japan(Hitachi, JEOL, ) South Korea(COXEM) <Optical Microscope> <Scanning Electron Microscope>

3 Company COXEM Co., Ltd Foundation Combining the Technology of National R&D Institute with the Capital of Daeduck R&D Special Zone 1996 ~2007 : Invest 10 million Dollars to develop SEM Technology Licensing Daeduck R&D Special Zone Fund Established on Jun Management Profile Section NAME Graduation Major Carrier CEO/CTO R&D Director JH LEE Kyungpook National Univ. EE KAIST EECS MS/Ph.D Paion Senior Researcher, LOGSYS CTO YJ KIM KAIST EECS BS/MS/Ph.D LOGSYS Senior Researcher, DreamAD Director Sales Rep. KS CHOI Yonsei Univ. EE BS/MS Daewoo Electronics, Cadence Korea Director BC LEE Choongnam Univ. Atomic Energy MS KAERI Responsible Researcher Nonexec. Director Nonexec. Director Nonexec. Director SJ LEE Kyungpook Nat l EE, Yonsei MBA KTB Network, STIC Investment, Innopolis YK CHO SNU Metallurgical Engineering Tokyo Univ. Material MS/Ph.D KIMM, KRISS Chief of Leading Edge Analysis Instrument DW PARK SNU Electric Engineering KTI CEO, Hanmi Invest, GoldStar Electronics

4 Company COXEM Co., Ltd (Cont.) Items Corporate CEO COXEM Co., LTD Junhee Lee Establishment June, 13, 2007 Capital 1,500,000 US Dollar Descriptions Shareholders Innopolis Capital LLC (83.8%) Korean Development Bank (9.0%), and Others (7.2%) Employee Products Headquarter 30 persons W-SEM, Ion Coater, Semiconductor Equipment #201 Migun-Techno-World, 533 Yongsan-Dong, Yuseong-Gu, Daejeon-City, Korea Contact (Phone) ( )

Microscope Market Market of election microscope is

industry and technology [Reference] Worldwide TEM and

5 Microscope Market Market of election microscope is increasing rapidly, whereas optical microscope is stagnant. Limitation of optical microscope throughout the industry and technology [Reference] Worldwide TEM and SEM market share, Strategies, and Forecast, 2009 to 2015", WinterGreen Research Inc., Jan Carl Zeiss(de), Tescan (cz) Korea (3%) Others (2%) [Market Share] [Reference] BBC Research, Welleley, 2007 [Areal Distribution]

Products and Specification [Year 2008 1 st Generation] Resolution: 3.

[Year 2010 2 nd Generation]-Middle End Resolution: 3.

[Tabletop SEM] [Year 2011 2 nd Generation]-Low End Resolution: 7.

6 Products and Specification [Year st Generation] Resolution: 3.5nm Magnification: 10x ~ 300,000x Stage: manual X, Y, Z, T, R Interface: EDS, WDS, BSE [Console SEM] [Year nd Generation]-Middle End Resolution: 3.0nm Magnification: 10x ~ 300,000x Stage: auto X, Y, Z, T, R Interface: EDS, WDS, BSE [Console SEM] [Tabletop SEM] [Year nd Generation]-Low End Resolution: 7.0nm Magnification: 20x ~ 80,000x Stage: auto X, Y, T, R Interface: EDS (Option), BSE [Year rd Generation]-Low End Resolution: 5.0nm Magnification: 20x ~ 100,000x Stage: auto X, Y, T, R Interface: EDS (Default), BSE [Tabletop SEM+EDS]

Comparison of Competitors (Normal SEM) Maker COXEM Hitachi Jeol FEI Model CX-200TA S-3400N

-20 ~+90 5 Axis Automatic X : 80mm Y : 40mm Z : 35mm R : 360 T : -20 ~+90 5 Axis Automatic X

7 Comparison of Competitors (Normal SEM) Maker COXEM Hitachi Jeol FEI Model CX-200TA S-3400N JSM-6610 Inspect-S50 Filament W hairpin filament Resolution 3.0nm Acc Voltage 0.5 ~ 30kV Magnification Max x Vacuum System Turbo Pump Stage 5 Axis Automatic X : 40mm Y : 60mm Z : 60mm R : 360 T : -20 ~+90 5 Axis Automatic X : 80mm Y : 40mm Z : 35mm R : 360 T : -20 ~+90 5 Axis Automatic X : 80mm Y : 40mm Z : 48mm R : 360 T : -10 ~+90 4 Axis Automatic X : 50mm Y : 50mm Z : 50mm R : 360 T : -15 ~+75 (manual) Price USD 99,000 USD 150,000 USD 140,000 USD 150,000

Comparison of Competitors (Table top SEM) Maker Coxem Jeol Hitachi FEI Model EM-30 JCM-5000 TM-3000 Phenom G2

X20,000 X15 to X30,000 X20 to X45,000 Acc Voltage 5kV/10kV/15kV/20kV/30kV 5kV/10kV/15kV 5kV/15kV 5kV Stage X

axis: 360 o X axis: 35mm Y axis: 35mm Z axis: 0 to 50mm R axis: 360 o X axis: 35mm Y axis: 35mm Z axis: 0 to

~20 Frame/Sec List Price US$74,000 [4] US$85,000 US$90,000 US$100,000 Remarks Fast Pumping ( < 3 min) Wide

8 Comparison of Competitors (Table top SEM) Maker Coxem Jeol Hitachi FEI Model EM-30 JCM-5000 TM-3000 Phenom G2 Pro Filament W hairpin filament CeBix Vacuum System Turbo-pump Magnification X20 to X100,000 [1] X10 to X20,000 X15 to X30,000 X20 to X45,000 Acc Voltage 5kV/10kV/15kV/20kV/30kV 5kV/10kV/15kV 5kV/15kV 5kV Stage X axis: 35mm (Motorized [2] ) Y axis: 35mm (Motorized [2] ) T axis: 0~45 o (Motorized [2] ) Z axis: 0 to 50mm R axis: 360 o X axis: 35mm Y axis: 35mm Z axis: 0 to 50mm R axis: 360 o X axis: 35mm Y axis: 35mm Z axis: 0 to 50mm R axis: 360 o X axis: (Motorized) Y axis: (Motorized) R axis: 360 o Frame Rate at TV ~ 10 Frame/Sec [3] ~20 Frame/Sec List Price US$74,000 [4] US$85,000 US$90,000 US$100,000 Remarks Fast Pumping ( < 3 min) Wide Image Viewer Touch Screen Sample loading (<30sec) Wide Image Viewer [1] ~ [4] Differentiation between Coxem and competitors

9 Ion Sputtering Coater [General Ion Coater] [High-end Ion Coater]

10 R&D Roadmap 4 th Gen. Nobel-2020 (Edu-SEM) 4 th Gen. Galapagos (FE-SEM) 3 rd Gen. CX rd Gen. EM-30AX 2.1 nd Gen. CX-200TM nd Gen. EM-20 (Low-End) 2.1nd Gen. EM st Gen. CX nd Gen. CX-200TA (Middle-End) Derivatives - EDS (Combined) - Multi-User Derivatives - BSE Detector (Default) - Cool Stage - Big Chamber

11 Customers User Group Application Classify Industry/ Research Center/ University/ Abroad Samsung(Solar), LG Chemical(Battery Cell), WoongJin Energy(Solar- Ingot) KRISS, KOPTI, KAIST, Yonsei Univ. etc. USA, Japan, China, Turkey, Indonesia etc.

12 Thank You 2015, Global Top 6. SEM Company Question & Answer

JSM-IT100 Series. InTouchScope. Scientific/Metrology Instruments. Scanning Electron Microscope

JSM-IT100 Series. InTouchScope. Scientific/Metrology Instruments. Scanning Electron Microscope Scientific/Metrology Instruments Scanning Electron Microscope InTouchScope JSM-IT100 Series The JSM-IT100 represents 50 years of SEM expertise and innovation at JEOL. This scaleable, compact, easy-to-use