LINEAR GAGE. Dimension sensors offering superb durability and environmental resistance, suitable for in-line measurements. SERIES 542/572/575

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1 CTLOG No. E /572/575 LINER GGE SERIES 542/572/575 Dimension sensors offering superb durability and environmental resistance, suitable for in-line measurements.

2 1. range of models available 2. Suitable for in-line use 3. Space-saving design 2

4. Secured with nuts ES Counter I/O or BCD Output EF Counter I/O RS-232C Digimatic Code(SPC) RS Link EV Counter I/O RS-232C Digimatic Code(SPC) RS Link Features 1.

Different output modes are also available, including pulse waveform, Digimatic Code (SPC) and sine wave (limited to the LGH with 0.01mm resolution).

3 4. Secured with nuts ES Counter I/O or BCD Output EF Counter I/O RS-232C Digimatic Code(SPC) RS Link EV Counter I/O RS-232C Digimatic Code(SPC) RS Link Features 1. range of models available The linear gages offer five measuring ranges of 5, 10, 25, 50, and 100mm. Different output modes are also available, including pulse waveform, Digimatic Code (SPC) and sine wave (limited to the LGH with 0.01mm resolution). There are four resolution settings to choose from in pulse waveform output: 0.005, 0.001, and mm. Select the model offering specifications best suited for your application. 2. Suitable for in-line use The linear gages offer superb durability and environmental resistance, making them ideal for in-line measurements. Durability is ensured by strong construction and linear ball bearings in the slider unit (except for models LGS and LGD-M), which are designed to last up to 10 million vertical spindle strokes (according to Mitutoyo s internal tests). Moreover, excellent dust/ water protection (IP-66) is provided for effective use in severe in-line environments (model LGF and others). 3. Space-saving design The slender design of the gage enables installation in confined spaces. Slim-line models with outside diameters of 8mm are also available for measurements in spaces of 10mm or less. These gages come in two different cable arrangements vertical and horizontal to suit the type of fixture used. 4. Secured with nuts The gage can be installed easily and securely by drilling a hole in the flat plate and mounting the gage securely with a nut. (The specification varies by model. The use of a nut is a standard specification with some models, while others require special accessories. Some models cannot be secured with nuts. Check the specifications for each model.) 5. Various output functions The linear gage counters offer a range of output types: I/O, BCD, RS-232C and Digimatic (SPC). The EF/EV counter has a RS link function to be connected with multiple counters for multi-gage measurement (see page 19). Select the output type that meets your specific needs. 5. Various output functions Measurement mechanism The linear gages mainly use transmissiontype photoelectric linear encoders, as shown below. Some linear gages use a capacitance-type linear encoder, or a laser-hologram measurement system (see page 39) as a sensor. These highprecision linear encoders allow high precision measurement over a wide Photo-diode Index scale Main scale Condenser lens range. In the transmission-type photoelectric linear encoder shown in the figure, the light source (LED) and the sensor element (photodiode) face each other with the main scale and index scale of 20mm pitch positioned between them. s the scale moves with respect to the detector, the extent of the light passing through the window in the index scale varies constantly. t this time, two synchronized sine-wave signals having a relative 90-degree phase difference are output. These signals are then amplified and split electrically (with additional waveforms inserted) and output as 1µm or 0.5µm LED square-wave signals. Output The linear gage processes internally detects signals and outputs square-wave signals as shown below. These operating signals, which are square waves having a relative phase difference of 90 degrees, are equivalent to RS-422 signals, allowing for the independent use of the linear gage unit (gage output). However, certain models (LGD, LGD-M and LGS), do not output square-wave signals but generate Digimatic Code output (SPC output) in order to identify the measurement position. Phase-P Phase-PB Signal pitch Measuring pitch LINER GGE 3

LL MODELS OF LINER GGE Gage Heads Output [Resolution] 0.

0001mm] (4µinch)* 1 Measuring Range 5mm (.2 ) 10mm (.

8 Laser Hologage ccessories ccessories for gage head: p.

23 ccessories for SD-D1/D2: p.24 Refer to p.9 Refer to p.

00004 )* LGF LGF LGF Refer to p.10 Refer to p.

00004 )* LGB Refer to p.11 LGB Refer to p.11 Refer to p.

p.19 Before using the gage: p.27 Installing the gage: p.

34 Interconnection table for linear gage: p.

39 What is the absolute positional origin?: p.

0002 )* LGE LGE LGE Refer to p.12 Refer to p.

12 Digimatic Output with an absolute sensor [0.01mm/.

4 LL MODELS OF LINER GGE Gage Heads Output [Resolution] 0.25µm pitch Sign Wave [ mm] (1µinch) Square Wave [0.0001mm] (4µinch)* 1 Measuring Range 5mm (.2 ) 10mm (.4 ) 25mm (1 ) 50mm (2 ) LGB Laser Hologage Refer to p.8 Laser Hologage ccessories ccessories for gage head: p.16 ccessories for ES, EF and EV counter: p.23 ccessories for SD-D1/D2: p.24 Refer to p.9 Refer to p.9 Square Wave [0.0005mm] ( )* [0.001mm] ( )* LGF LGF LGF Refer to p.10 Refer to p.10 Refer to p.10 Square Wave [0.001mm] ( )* LGB Refer to p.11 LGB Refer to p.11 Refer to p.11 Operation Guide and Technical Data bout the RS link: p.19 Before using the gage: p.27 Installing the gage: p.28 Interchangeable contact point: p.31 Gage Output Specification: p.32 Counter output specifications: p.34 Interconnection table for linear gage: p.38 What is a hologram?: p.39 Underground factory: p.39 What is the absolute positional origin?: p.39 Square Wave [0.005mm] (.0002 )* LGE LGE LGE Refer to p.12 Refer to p.12 Refer to p.12 Refer to p.12 Digimatic Output with an absolute sensor [0.01mm/.0005 ] LGD Refer to p.13 LGD LGD LGD-M Refer to p.13 Refer to p.13 Refer to p.14 Digimatic Output with an incremetal sensor [0.01mm/.0005 ] LGS Refer to p.15 *: The resolution shown in inches is a calculated value. The actual resolution in inches is determined by the counter setting. 4

Display Units (Counters) 100mm (4 ) Single

Multi-Gage System KH Counter Refer to p.

21 ES Counter EF Counter EV Counter EV-16P

5 Display Units (Counters) 100mm (4 ) Single function Type Multi-function Type Multi-Gage System KH Counter Refer to p.8 EF Counter Refer to p.21 ES Counter EF Counter EV Counter EV-16P LG Refer to p.20 (Not compatible with the LGF with 0.5 mm resolution.) Refer to p.22 Refer to p.15 Refer to p.21 ES Counter SD Counter EV Counter SD-D2 EV-16D Refer to p.20 SD Counter SD-D1 Refer to p.24 Refer to p.22 Refer to p.24 LINER GGE 5

6 pplications Multipoint measurement of automobile doors The linear gage (LGS-1012 with EV counter) can be used to perform multi-point measurements for automobile doors and evaluate errors against the specified tolerances. When there are many points to measure, the use of the LGS gage provides higher cost-effectiveness. Measurement of camshaft displacement The linear gage (LGF-125L with EF counter) can be used to measure camshaft lift. The EF counter is easily installed in the equipment panel. When shearing force is to be exerted on the gage, as shown in the figure, take measurements indirectly using a fixture or the like in order to avoid applying an excess load on the gage. Measuring displacement Measuring the door shape Measurement of hydraulic coupling dimensions The linear gage (LGF-110L with EF-12PR counter) can be used to measure the outside diameters and thicknesses of hydraulic couplings used in shovel cars. EF-12PR counter allows for the calculation of sums and differences between two gages. Multipoint measurement of turbine blades The linear gage (LGB-110 with EV counter) can be used to perform multi-point measurements of aircraft turbine blades. Measuring outside diameter and thickness Measuring blade shape Measurement of aircraft fuselage distortion The linear gage (LGD-1010L with EV counter) can be used to measure changes in stress generated in an aircraft fuselage. For the very large workpiece, the use of an absolute type linear gage is recommended, since the master settings then need to be done just once. Measurement of elevator drive-rail deflection The linear gage (LGF-110L with EF counter) can be used to measure deflection in the drive rail of an elevator. Measured data can be output from the EF counter to a personal computer in order to plot the condition of displacement. Deflection data tolerance judgement nalog output Measuring displacement When shearing force is to be exerted on the gage, as shown in the figure, take measurements indirectly using a fixture or the like in order to avoid subjecting the gage to an excessive load. Plotted deflection data 6

7 Fn P.SET Measurement of cylindrical pin displacement The linear gage (LGB-110 with EF-12PR counter) can be used to measure the displacement of tape-winding capstan pins in cassette recorders. EF-12PR counter is capable of calculating sums and differences between two gages. Multipoint measurement of VTR chassis The linear gage (LGF-110L with EV counter) can be used to measure VTR components at several points. X-direction: Measuring pin displacement Y-direction: Measuring pin displacement Multi-points measurement/judgement Measurement of core metal runout for floppy disks The linear gage (LGB-110 with EF counter) can be used to measure the runout of the diskís core metal. Measurement of bridge-support joint The linear gage (LGD-1025L with ES counter) can be used to measure the displacement of the bridge-support joint. Since this measurement is performed over a long period of time, use an absolute-type linear gage that requires power only during the act of measurement. Measuring the run-out When shearing force is to be exerted on the gage, as shown in the figure, take measurements indirectly using a fixture or the like in order to avoid subjecting the gage to an excessive load. Measuring displacement Sorting of parts The linear gage (LGF with EV counter) can be used to measure the parts dimension for sorting. The EV counter can divide the dimension into 21-step and output the signal for sorting. Inspection of rivet The linear gage (LGF with ES counter) can be used to inspect the condition of fixing of the rivet or bolt. The inspection of the parts press fitted is also the same way. Mitutoyo ES-P LINER GGE 7

$01µm) Reading Display unit is provided The Mitutoyo Laser Hologage is a high-end digital gaging system that employs diffracted laser beam interference to make highly accurate and repeatable$

8 Laser Hologage mm (0.01µm) Reading Display unit is provided The Mitutoyo Laser Hologage is a high-end digital gaging system that employs diffracted laser beam interference to make highly accurate and repeatable measurements. It features ultrafine diffraction gratings which are holographically recorded on the scale. The Laser Hologage is suitable for measuring ultrahigh precision parts, especially those in semiconductor and related industries (See page 39 for explanation on hologram.). FETURES Highly accurate measurement due to an ultra-high resolution of mm (0.01µm), which is close to the performance of laser interferometers. Excellent measuring stability the design is also highly resistant to unfavorable environmental conditions such as air movement and atmospheric pressure changes. High-precision linear ball bearings are used in the guide for extremely smooth movement and exceptional durability. display unit is provided. 146 (0.01µm type) 10 (Measuring range) Ø15h (Stem dia.) Connector for lifting cable 0.01mm type with R5 carbide point OPTIONL CCESSORIES Order No. 09C335 SPECIFICTIONS Order No. 100V (including the 120V display unit) 220V D D 240V E E 240V F F Resolution mm ( ") Range 10mm (.4") ccuracy (20 C) Repeatability (2σ) Ø 0.1µm 0.02µm Measuring force Upward ( ) 0.55N or less 0.1N Dust/Water protection level Contact point Stem diameter Bearing type Position-detection sensor Max. response speed Output signal Display Functions Data output Power supply Power consumption Operating environment Description Zero-set remote controller Stem fixture for Laser Hologage Refer to p Stem fixture for Laser Hologage Refer to p Spindle lifting cable for Laser Hologage Refer to p Laser Hologage stand Refer to p.17 Horizontal ( ) 0.45N or less Downward ( ) 0.35N or less Not specified 235 R5mm carbide (mounting threads: M2.5 (P = 0.45) X 5mm) Ø15mm High-precision linear ball bearing Laser-hologram measuring sensor 250mm/s 0.25µm pitch, 90 phase difference, two-phase sine wave 8-digit fluorescent tubes and a [-] sign E mm inch ZERO KH P.SET UNIT 1/ 2 I LOD Display Unit Zero-set, preset, halved reading, double reading (diameter display), BS/INC coordinate switching, counting direction switching, mm/inch conversion, linear error compensation, error alarm Via RS-232C interface (provided) V/ V C, 50/60Hz pprox. 30V 10 C to 30 C (20%RH to 80%RH, without condensation) Mass Laser Hologage: 0.2kg (excluding cable) Display unit: 2kg. Standard accessories Wrench for contact point (538610) 8

LGB Laser Hologage 0.0001mm (0.1µm) Reading Differential Square-wave Output These are extra-high accuracy gaging heads provided with resolution up to 0.0001mm. The compact dimensions allow easy installation to very tight spaces.

9 LGB Laser Hologage mm (0.1µm) Reading Differential Square-wave Output These are extra-high accuracy gaging heads provided with resolution up to mm. The compact dimensions allow easy installation to very tight spaces. The Laser Hologage employs a unique holography scale as the length standard, ensuring excellent measuring accuracy and repeatability (See page 39 for explanation on hologram.). The dedicated display unit (EF Counter) is optional. FETURES linear ball bearing in the spindle guide provides excellent durability for an extended service life. The mm reading type LGB linear gage ( ) comes with a clamping nut on the stem. OPTIONL CCESSORIES Order No. Description Extension cable (5m) for LGB Refer to p Extension cable (10m) for LGB Refer to p Extension cable (20m) for LGB Refer to p Rubber boot for LGB (spare) Refer to p Stem fixture for Laser Hologage Refer to p Stem fixture for Laser Hologage Refer to p Spindle lifting cable for Laser Hologage Refer to p Laser Hologage stand Refer to p (HIROSE) RM12BPG-6P (0.1µm type) 10 (Measuring range) Connecting cable (2m) Ø15h Stem dia L (thread) 5 (Measuring range) Connector for lifting cable 0.1µm type with R1.5 carbide point Ø9 18 Ø9 Ø Ø Clamping nut (No ) L=11.5~ SPECIFICTIONS Model No. LGB Laser Hologage* 1 Order No Resolution mm ( ) Range 5mm 10mm ccuracy (20 C) 0.8µm 0.2µm Measuring force Upward ( ) pprox. 0.65N or less 0.55N or less 0.1N Horizontal ( ) pprox. 0.6N or less 0.45N or less Downward ( ) pprox. 0.55N or less 0.35N or less Dust/Water protection level IP-54 Not Specified Contact point R1.5mm carbide (mounting threads: M2.5 (P = 0.45) X 5mm) Stem diameter Ø9.5mm Ø15mm Bearing type Linear ball bearing High-precision linear ball bearing Position-detection sensor Transmission-type photoelectric linear encoder Laser-hologram measurement sensor Max.Responnse Speed 380mm/sec 250mm/sec Output signal 0.4µm pitch, 90 phase difference, 0.25µm pitch, 90 phase difference, differential square wave differential square wave (RS-422 equivalent) (RS-422 equivalent)* 2 Cable length Power supply 2m +5V ± 5% (power-supply ripple 200 mv p-p max.) Power consumption 150m 200m Operating environment 10 C to 30 C (20%RH to 80%RH, without condensation) Mass 160g 200g (excluding cable) Compatible counter EF counter with mm resolution.[see page 21] Standard accessories Wrench for contact point (538610) Wrench for contact point (538610) Wrench for the nut (200168) Remarks with a clamping nut on the stem Low force type *1: Only one laser hologage may be connected to the EF counter. To connect two gages, use a (without C adapter) and an external power supply (12 to 24 VDC, 1 or greater). *2: The signal output uses a special pitch (intervals) of 0.25mm. The values are converted to mm resolution on the counter side. LINER GGE 9

LGF 0.0005/0.001mm Reading Differential Square-wave Output The LGF Linear Gages are Mitutoyo's new, low-cost type electronic gage heads designed to fit into very tight spaces.

10 LGF /0.001mm Reading Differential Square-wave Output The LGF Linear Gages are Mitutoyo's new, low-cost type electronic gage heads designed to fit into very tight spaces. Employing an improved structure for the spindle guide, the LGF is highly resistant to external shock and vibration / / /133 FETURES Excellent structure of protection against dust and water splash (IP-66) in harsh shop-floor environments. Output differential square wave signals for a wide range of applications. Use linear stroke bearings on the spindle movement for durability Thrust Stem with a clamping nut is optional. OPTIONL CCESSORIES Order No. Description Extension cable (5m) Refer to p Extension cable (10m) Refer to p Extension cable (20m) Refer to p mm rubber boot (spare) Refer to p mm rubber boot (spare) Refer to p mm rubber boot (spare) Refer to p.16 02DB680 Thrust stem set (for 10mm LGF model) Refer to p.29 02DB690 Thrust stem set (for 25mm/50mm LGF model) Refer to p.29 Clamping nut for thrust stem M9.5x Ø or longer (stroke) (screw top height) RM12BPG-6P (HIROSE) 17.3 Connecting cable 2m Ø Clamping nut for thrust stem M14x Ø15 26 or longer (screw top height) Ø15 Clamping nut for thrust stem M14x or longer (stroke) (screw top height) SPECIFICTIONS Order No Resolution 0.001mm mm 0.001mm mm 0.001mm mm Measuring range 10mm 25mm 50mm ccuracy (20 C) (1.5+L/50) µm (L=mm) Measuring force Upward ( ) 1.2N or less 4.6N or less 5.7N or less Horizontal ( ) 1.1N or less 4.3N or less 5.3N or less Downward ( ) 1.0N or less 4.0N or less 4.9N or less Dust/water protection* 2 IP-66 equivalent Contact point ø3mm carbide (mounting threads: M2.5 (P = 0.45) X 5mm) Stem diameter Ø8mm Ø15mm Bearing type Stroke ball bearing Position-detection method Transmission-type photoelectric linear encoder Response speed* mm/sec Output signal 90 phase difference, differential square wave (RS-422 equivalent); minimum edge intervals 500 ns for 1 µm model, 250 ns for 0.5 µm model Signal pitch 4µm 2µm 4µm 2µm 4µm 2µm Cable length 2m Power supply Supply voltage +5V (4.8V to 5.2V), ripple voltage 200mV p-p max. Power consumption Max. 120m Operating environment 0 C to 40 C (20%RH to 80%RH, without condensation) Mass 250g 290g 380g Standard accessories Wrench for contact point (538610) Wrench for contact point (210187) *1: n alarm signal is output when the spindleís movement speed reaches 1500mm/s. If a Mitutoyo counter is used, an error will be displayed. If the counter is not a Mitutoyo model, contact us regarding the use of alarm-signal output. When the LGF-150L is used, releasing the contact point after pushing it in may cause an overspeed error depending on the extent to which the contact point is pushed inward. *2: The IP value is a standard indicating the degree of protection against solid foreign matter and water. Note that the standard may not apply to certain types of liquids. 10

LGB 0.001mm Reading Differential Square-wave Output FETURES Extremely compact design. vailable with an outside diameter as small as 8mm.

542-222 542-222H 542-224 542-223 542-204 542-204H 542-244 542-262 542-262H 542-264 542-270 75 9 24.6 Ø9 18 7.3 Ø8 Ø9 0-0.009 82.7 (HIROSE) RM12BPG-6P 75 6.3 25.1 15.9 4.9 (thread) 30 L Ø9 20.

2 Ø7.9 Knurl Ø12 Ø9.5 Ø14 0-0.009 Clamping nut No.200365 L=11.5 to 13.0 60.1 (39.3) 10.5 9.2 ir inlet (pplicable air hose: ID Ø2.5) Ø8 0-0.009 542-230 4.9 9.6 5 21.2 15.4 23.9 Stroke 10.

542-204 542-204H 542-222 542-222H 542-224 542-230 542-223 Stem 8mm diameter, straight stem Order No.

45) X 5mm), 901312 Bearing type Position-detection method Response speed Output signal/signal pitch Cable length Power supply Power consumption Operating enviromment Required air-pressure range 9.

11 LGB 0.001mm Reading Differential Square-wave Output FETURES Extremely compact design. vailable with an outside diameter as small as 8mm. The small photoelectric linear encoder assures high precision over the entire stroke range. The ball bearings used in the spindle unit ensure superb durability H H H Ø Ø8 Ø (HIROSE) RM12BPG-6P (thread) 30 L Ø Ø9 0 Ø Ø14 Clamping nut No L=11.5 to 13.0 Connecting cable (2m) Ø L 4.9 (thread) * Connector dimensions are common to all models. Ø4.2 Ø7.9 Knurl Ø12 Ø9.5 Ø Clamping nut No L=11.5 to (39.3) ir inlet (pplicable air hose: ID Ø2.5) Ø Stroke 10.5mm or longer Ø Clamping nut (No ) L=11.5 to 13.0 pplicable air hose (ID Ø2.5) L Knurl Stroke 10.5mm or longer 113 Individual specifications Order No H H Stem 8mm diameter, straight stem Order No H Stem Common specifications Resolution Dust/water protection 0.001mm Contact point Ø3mm in carbide (mounting threads: M2.5 (P = 0.45) X 5mm), Bearing type Position-detection method Response speed Output signal/signal pitch Cable length Power supply Power consumption Operating enviromment Required air-pressure range 9.5mm diameter, straight stem with nut Measuring range 5mm (.2 ) 10mm (.4 ) ccuracy (20 C) 2 µm 1 µm 2 µm 1 µm 2 µm Measuring Upward ( ) pprox. 0.65N or less pprox. 0.8N or less pprox. 0.6N or less pprox. 0.8N or less force Horizontal ( ) pprox. 0.6N or less pprox. 0.75N or less pprox. 0.55N or less pprox. 0.75N or less Downward ( ) pprox. 0.55N or less pprox. 0.7N or less pprox. 0.5N or less pprox. 0.7N or less Mass 145g ( ) 145g 150g ( ) 150g ( H) 150g ( ) 165g ( ) 165g 160g ( ) 170g ( ) 170g ( H) 170g ( ) 170g ( ) ir-lifter mechanism Spindle becomes Spindle retreats None free when air when air is is supplied supplied IP-54 Stroke ball bearing Transmission-type photoelectric linear encoder 900mm/sec 4µm pitch, 90 phase difference, differential square wave (RS-422 equivalent) 2m Supply voltage: 4.8 to 5.3V, ripple voltage 200mV p-p max. 80m 0 C to 40 C (20%RH to 80%RH, without condensation) 0.3 to 0.4 MPa (3 to 4kg/cm 2 ) (Required only for models equipped with air lifters) LINER GGE 11

LGE 0.005mm Reading Differential Square-wave Output 542-601 542-602 The LGE Series Linear Gages are compact electronic gage heads designed to fit into very tight spaces.

Optional thrust stem and tightening nut facilitate setup of the LGE linear gage in holes of a plate or fixture. 128.9 15 5.7 76.3 6 55 34 10.5 (stroke) OPTIONL CCESSORIES Ø8 0.

1 17 105 6.5 27.6 55.1 34.6 13.8 3 Ø15 0-0.018 M14x0.5 26 (stroke) 18.9 8 19 0.6 (screw top height) 299.4 20 166.5 6.5 27.6 55.1 34.6 13.8 3 Ø15 0-0.018 44.9 M14x0.5 8 unit: mm 19 0.

5mm Thrust stem set (for 10mm LGE model) Refer to p.29 02DC740 Ø18mm Thrust stem set (for 25mm/50mm LGE model) Refer to p.29 RM12BPG 6P (HIROSE) Ø18 39 Connecting cable 2m 51.

12 LGE 0.005mm Reading Differential Square-wave Output The LGE Series Linear Gages are compact electronic gage heads designed to fit into very tight spaces. Employing linear ball bearings, the LGE is also highly durable for long life FETURES With a rubber boot for use in harsh environments. Optional thrust stem and tightening nut facilitate setup of the LGE linear gage in holes of a plate or fixture (stroke) OPTIONL CCESSORIES Ø8 0.6 (screw top height) M9.5x (at air supplied) (stroke) (screw top height) Ø M9.5x0.5 pplicable air hose (ID Ø2.5) Ø M14x (stroke) (screw top height) Ø M14x0.5 8 unit: mm (screw top height) Order No. Description mm rubber boot (spare) Refer to p mm rubber boot (spare) Refer to p mm rubber boot (spare) Refer to p.16 02DC730 Ø9.5mm Thrust stem set (for 10mm LGE model) Refer to p.29 02DC740 Ø18mm Thrust stem set (for 25mm/50mm LGE model) Refer to p.29 RM12BPG 6P (HIROSE) Ø18 39 Connecting cable 2m 51.5 (stroke) SPECIFICTIONS Order No Resolution 0.005mm (5µm) Measuring range 10mm (.4 ) 25mm (1 ) 50mm (2 ) ccuracy (20 C) 20µm 30µm Measuring Upward ( ) pprox. 1.2N or less pprox. 4.6N or less pprox. 5.7N or less force Horizontal ( ) pprox. 1.1N or less pprox. 4.3N or less pprox. 5.3N or less Downward ( ) pprox. 1.0N or less pprox. 4.0N or less pprox. 4.9N or less Dust/water protection* 1 IP-66 equivalent IP-54 equivalent IP-66 equivalent Contact point Ø3mm carbide (mounting threads: M2.5 (P = 0.45) X 5mm), Stem diameter Ø8mm Ø15mm Bearing type Position-detection method Response speed* 2 Output signal/signal pitch Output cable length Power supply Power consumption Operating environment Stroke ball bearing Capacitance-type incremental linear encoder Static: 1400mm/s Dynamic: 17.5mm/s 20µm pitch, 90 phase difference, differential square wave (RS-422 equivalent) 2m Supply voltage 5V (4.8V to 5.2V), ripple voltage 200mV p-p max. 100m 0 C to 40 C (20%RH to 80%RH, without condensation) Lifter mechanism None Built-in air lifter* 3 None Mass 200g 220g 250g 300g ccessories Wrench for contact point (538610) Wrench for contact point (210187) *1: The IP value given is for water. Note that the unit may not be able to maintain resistance to certain types of liquids. *2: Static - The maximum movement speed at which no overspeed error occurs. Dynamic - The maximum movement speed at which measurement by scanning is possible. *3: The air-supply pressure for is 0.3 to 0.4 MPa. The spindle moves forward (becomes free) when air is supplied. Use an air hose with an inside diameter of 2.5mm. 12

LGD 0.01mm/.0005 Reading Digimatic Code (SPC) Output 575-323/333 The LGD is an ultra-compact BS Linear Gage designed to fit into very tight spaces. It keeps track of its origin point once set.

Special linear ball bearings are used for the spindle guide to ensure a long service life.

13 LGD 0.01mm/.0005 Reading Digimatic Code (SPC) Output /333 The LGD is an ultra-compact BS Linear Gage designed to fit into very tight spaces. It keeps track of its origin point once set. FETURES The use of an absolute scale* in the sensor makes it possible to maintain the origin setting even when the power is switched off. Special linear ball bearings are used for the spindle guide to ensure a long service life. Optional thrust stem and tightening nut facilitate setup of the LGD linear gage in holes of a plate or fixture. *: See page 39 for an explanation of the absolute scale / / /331 OPTIONL CCESSORIES Order No. Description Spare rubber boot (for 10mm LGD model) Refer to p Spare rubber boot (for 25mm LGD model) Refer to p Spare rubber boot (for 50mm LGD model) Refer to p.16 02DC730 Ø9.5mm Thrust stem set (for 10mm LGD model) Refer to p.29 02DC740 Ø18mm Thrust stem set (for 25mm/50mm LGD model) Refer to p * Digimatic Power Supply Unit Refer to p.17 *: is left blank or an appropriate suffix ( or E) is inserted, depending on the C supply voltage (blank - 100V; - 120V; E - 240V) The dimensions of the LGD is the same as that of the LGE, as indicated on the page at left. The only differences are the shape and size of the connector at the end of the cable /331: Refer to /332: Refer to /333: Refer to /334: Refer to SPECIFICTIONS Order No Resolution 0.01mm mm mm mm.0005 Measuring range 10mm.4 10mm.4 25mm 1 50mm 2 ccuracy (20 C) 20µm µm µm µm.0012 Measuring force Upward ( ) pprox. 1.2N or less pprox. 4.6N or less pprox. 5.7N or less Horizontal ( ) pprox. 1.1N or less pprox. 4.3N or less pprox. 5.3N or less Downward ( ) pprox. 1.0N or less pprox. 4.0N or less pprox. 4.9N or less Dust/water protection* 1 IP-66 equivalent IP-54 equivalent IP-66 equivalent Contact point Ø3mm carbide (mounting threads: M2.5 (P = 0.45) X 5mm), Stem diameter Ø8mm Ø15mm Bearing type Position-detection method Response speed Output signal External input Output cable length Power supply Power consumption Operating environment Stroke ball bearing Capacitance-type absolute linear encoder Unlimited; measurement by scanning cannot be performed Digimatic output Origin-setting signal (absolute positional origin* 3 can be changed externally) *1:The IP value given is for water. Note that the unit may not be able to maintain resistance to certain types of liquids. *2:The air-supply pressure for and is 0.3 to 0.4 MPa. The spindle moves forward (becomes free) when air is supplied. Use an air hose with an inside diameter of 2.5mm. 2m Supply voltage 5V (4.5V to 5.5V), ripple voltage 200mV p-p max. 20m 0 C to 40 C (20%RH to 80%RH, without condensation) Lifter mechanism None Built-in air lifter* 2 None Mass 200g 220g 250g 300g Standard accessories Wrench for contact point (538610) Wrench for contact point (210187) LINER GGE 13

14 LGD-M 0.01mm/.0005 Reading Digimatic Code (SPC) Output This LGD-M ultra-compact BS linear gage maintains the origin once it is set. Metal bushings have replaced the ball bearings of the original LGD gage for higher cost-effectiveness FETURES The use of an absolute scale in the sensor makes it possible to maintain the origin setting even when the power is cut off. The spindle is supported at both ends, improving the accuracy to 15mm. ( ) OPTIONL CCESSORIES Order No. Description 02C376 Spare rubber boot Refer to p * Digimatic Power Supply Unit Refer to p or longer (stroke) *: is left blank or an appropriate suffix ( or E) is inserted, depending on the C supply voltage (blank - 100V; - 120V; E - 240V). Connecting cable 2m Ø (screw top height) SPECIFICTIONS Order No Resolution 0.01mm.0005 Measuring range 10mm.4 ccuracy (20 C) 15µm.0006 Measuring force Upward ( ) 2.0N or less Horizontal ( ) 1.8N or less Downward ( ) 1.6N or less Dust/water protection* IP-66 equivalent Contact point Ø3mm carbide (mounting threads: M2.5 (P = 0.45) X 5mm), Stem diameter Ø8mm Bearing type Slide-bearing type Position-detection method Capacitance-type absolute linear encoder Response speed Unlimited; measurement by scanning cannot be performed Output signal Digimatic output External input Origin-setting signal (absolute positional origin can be changed externally) Output cable length 2m Power supply Supply voltage: 5V (4.5V to 5.5V), Ripple voltage: 200mV p-p max. Power consumption 20m Operating environment 0 C to 40 C (20%RH to 80%RH, without condensation) Mass 182g Standard accessories Wrench for contact point (538610) *: The IP value given is for water. Note that the unit may not be able to maintain resistance to certain types of liquids. 14

LGS 0.01mm/.0005 Reading Digimatic Code (SPC) Output 100mm Stroke Linear Gage 0.001mm Reading Differential square-wave model 25.5 21.7 Connecting cable 2m 20 11.

15 LGS 0.01mm/.0005 Reading Digimatic Code (SPC) Output 100mm Stroke Linear Gage 0.001mm Reading Differential square-wave model Connecting cable 2m Note: Inch gage has a stem of 3/8" DI. (Tol. +0/-.001") and #4-48UNF threads for the contact point mount Ø Ø4.5, Ø8 depth OPTIONL CCESSORIES Order No. Description Spare rubber boot Refer to p ir drive unit (for and ) Refer to p ir drive unit (for and ) Refer to p.16 SPECIFICTIONS Order No Resolution 0.01mm.0005 Measuring range 12mm.5 Direction (UP) plus minus plus minus ccuracy (20 C) 0.02mm.001 Measuring Upward ( ) pprox. 1.96N or less force Horizontal ( ) pprox. 1.67N or less Dust/water protection* 1 Downward ( ) pprox. 1.47N or less Contact point Ø3mm carbide (mounting Ø5/32 (DI) steel (4-48UNF) threads: M2.5 (P = 0.45) X 5mm) Maximum response speed 1600mm/s; measurement by scanning cannot be performed Stem diameter Ø8mm Ø9.52mm (.375 ) Bearing type Slide-bearing type Position-detection method Capacitance-type incremental linear encoder Output signal Digimatic output Power supply DC5 to 10V (5m max.) Cable length 2m Operating environment 0 C to 40 C (20%RH to 80%RH, without condensation) Mass 170g (including cable) *1: The IP value given is for water. Note that the unit may not be able to maintain resistance to certain types of liquids. IP SPECIFICTIONS Connecting cable 2m 34 Ø Ø6 Order No Resolution 0.001mm Measuring range 100mm ccuracy (20 C) 3µm Measuring Upward ( ) pprox. 3.9N or less force Horizontal ( ) pprox. 2.7N or less Dust/water protection Downward ( ) 17 Not specified Contact point Ø3mm carbide (mounting threads: M2.5 (P = 0.45) X 5mm) Stem diameter 20mm Bearing type Ball-bearing type Position-detection Reflection-type photoelectric method linear encoder Response speed 400mm/sec. Output signal 4µm pitch, 90 phase difference, differential square wave (RS422 equivalent) Power supply +5V (120m ) LINER GGE 15

Special ccessories for Gage Head (See the Operational Guide (page 28 to 31) for mounting bracket, thrust stem and contact point) ir Drive Unit FETURES scends or descends the spindle of a Linear Gage

16 Special ccessories for Gage Head (See the Operational Guide (page 28 to 31) for mounting bracket, thrust stem and contact point) ir Drive Unit FETURES scends or descends the spindle of a Linear Gage by the supply and exhaust of air. Spindle descending speed can be adjusted by using the speed controller of the drive unit. utomatic measurement is possible by using a solenoid valve. 20 Ø12 Ø to 97 Speed controller LGF-110L (85.48) at air supply OFF 12 6 ø6 15* * 2 15 ø at air supply ON *1: Cylinder stroke *2: Contact point stroke 15 D B (cylinder stroke) LGF-125L / LGF-150L Speed controller at air supply OFF Ø E C (Measuring stroke) 7 15 Ø6 12 at air supply ON DE230 02DE250/02DE270 SPECIFICTIONS Order No DE230 02DE250 02DE270 Stroke 10mm.4 10mm 25mm 50mm pplicable gage model LGS LGF, LGE, LGD ir supply 0.49MPa 0.2 to 0.4MPa ir horse to be used Inner diameter : Ø2.5mm Mass 60g 150g 250g 300g B C D E 02DE (110.5) 02DE (159.5) Extension Signal Cables Spare Rubber Boots FETURES The distance between a Linear Gage and the Counter can be extended up to 20m by using these cables. Cannot be used for LGS, LGD models, and Laser Hologage. SPECIFICTIONS Order No m m m Cable length FETURES Protects the spindle of a Linear Gage from dust. Dedicated for the following models: LGB, LGD, LGE, and LGF. SPECIFICTIONS Order No mm LGB pplicable Linear Gage mm LGB/LGD/LGE/LGF 02C376 10mm LGD-M mm LGD/LGE/LGF mm LGD/LGE/LGF mm/inch LGS 16

Special ccessories for Gage Head (See the Operational Guide (page 28 to 31) for mounting bracket, thrust stem and contact point) Release with damper: 971753 Digimatic external power unit: 965275 *

17 Special ccessories for Gage Head (See the Operational Guide (page 28 to 31) for mounting bracket, thrust stem and contact point) Release with damper: Digimatic external power unit: * * : is left blank or an appropriate suffix ( or E) is inserted, depending on the C supply voltage (blank - 100V; - 120V; E - 240V). 12(stroke) 300 LGH-110 : 0 to 139mm LGH-1010 : 0 to 137mm 34 to 175 Max. measuring range Ø24 Return-speed adjustment knob Spindle-lift release for the laser hologage. sudden drop of the spindle is prevented by the return-speed adjustment knob. Mass: 50 g Power-supply unit for models LGD, LGD-M and LGS. Outer dimensions (W x D x H): 62 x 40 x 20 mm Sample application 1 Measuring stand: DP-1HS Ø15H7 for gage setting Ø (350) Sample application 1: Use it as an external power supply when connecting to other equipment (such as MUX-10 or DP-1HS) instead of the display unit. Sample application 2 Display unit Measuring stand for Laser Hologage used in high-precision measurements. Mass: 23 kg Sample application 2: Use it for setting the absolute origin when connecting an absolute-type LGD or LGD-M to a display unit other than the ES and EV counters. Clamping brackets See page 30 Interchangeable contact points See page 31 LINER GGE 17

18 Linear Gage and Counter Connections & Comparisons of Counter Functions KH ES EF EV SD counter counter counter counter counter Representative Code No pplicable gages mm Laser Hologage O mm Laser Hologage O O mm LGB O O mm LGF O O O O O 0.001mm LGF O O O O O O O 0.001mm LGB O O O O O O O 0.001/100mm Linear Gage O O O O O O O 0.005mm LGE O O O O O O O 0.01mm LGD/LGD-M O O O O O O 0.01mm LGS O O O O O O Functions Number of connectable gages Display O O O O O O O O O 1 1 O O 3 Zero set O O O O O O O O O 1 1 O O O Presetting O O O O O O O O O 1 1 O Direction switch O O O O O O O O O O O O GO/±NG indication O O O O O O 1 1 O O GO/±NG output O O O O O O O O O O 5-stage tolerance display O O O O 5-stage tolerance output O O O O O O Segment output O O Inch/mm switch O O O O O O O O O O O 4 O BS gage zero set* O O O BS/INC gage changeover O O O Peak hold O O O O O O Run out (TIR) measurement O O O O O O Double count O O O O O 5 Calculation function using constant Sum/difference calculation O O External zero set O O O O O O O External preset O O O O O O O O O O 3 External hold O O O O O O O O O O External tolerance set O O O O O O 3 External output off O O External peak-hold cancel O O O O O O Two coordinate systems switch O Inter-axial calculation function O O Output I/O output BCD output O O O O Limit output O O O O O O O O RS-232 output O O O O O O O Digimatic output O O O O O O O RS link O O O O O O (Maximum number of gages) (6) (6) (12) (12) (60) (60) Power-supply voltage error O O O O O O O O O O Overspeed error O O O O O O O Overflow error O O O O O O O O O O O O O Gage error O O O O O O O O O O O O System error O O O O Tolerance setting error O O O O O O O O O O Communication error O O O O O O *: The applicable gage type is LGD and LGD-M. 1: When an optional D-EV is connected. 2: Enabled by setting O via external presetting. 3: When an SD-D2 is connected. 4: Only for models that measure in inches. 5: Uses the calculation function using a constant. O 18

19 Explanation of functions Zero set Sets the displayed value to 0 at any position Preset Presets the displayed value at any value. Counting begins at the preset value Direction switch Selects the counting direction of (+) or (-), whichever is convenient with a given direction of spindle movement. / Reference surface Tolerance judgment indication/ output Sets two (or four) desired tolerances for three (or five) stages. Judgment results can be output to an external device. 3step (GO/±NG) Upper-limit tolerance NG GO Lower-limit tolerance +NG Limit1 Limit2 Limit3 Limit4 5step NG GO1 GO2 GO3 +NG Peak hold/tir measurement llows switching to the measurement mode for maximum value, minimum value, and run out value (maximum - minimum), in addition to the normal measurement mode. Segment output The function used to divide the specified range into 21 equal segments and output where the measured value falls among the 23 segments, including the segments before and after the divided segments. Inch/mm switch Selects mm or inch as the unit of display, and enables the automatic conversion of displayed values according to the selected unit. Double count Displays a value twice the actual count value. llows the direct reading of diameter for cylindrical objects. BS gage zero set Sets the absolute origin of an LGD gage from the counter side. Once set, the absolute origin will be maintained even during a power failure or when the counter is disconnected. BS/INC gage changeover Sets the absolute origin of an LGD gage from the counter side. Once set, the absolute origin will be maintained even during a power failure or when the counter is disconnected. Sum/difference calculation Enables measurement of thickness or step using two gages. MX MIN TIR (run-out) = Maximum - minimum External control Zero set, preset and display hold can be controlled from the I/O terminals. Shows the displacement of radius as that of diameter. I/O output For input/output of external control signals and tolerance judgment result to/from the PLCs or other external devices BCD output The displayed value can be output as one of I/O signal to a sequence, etc. Communication via RS-232C interface RS-232C allows communication with a personal computer. It allows not only the reading of measured values but also data transmission to the counter and remote operations, such as when changing various settings. Digimatic output Data can be output to various printers and statistical processing devices, such as DP-1HS and MUX-10, using Digimatic Code (SPC) output. RS link function maximum of six (EF) or ten (EV) counters can be connected for multi-point measurements using up to 60 channels. EF and EV counters can be available in the same network (in which case a total of six counters can be connected). Use dedicated RS-link connecting cable (1 m), (2 m) or 02DD950 (0.5 m). The maximum length of the RS-link connecting cable is 10 m for the entire system. Personal computer RS-232C cable First counter IN Last counter OUT IN OUT IN OUT RS-232C connector RS-232C connector RS-232C connector (Output example) GN01, CRLF GN02, CRLF GN03, CRLF GN04, CRLF GN05, CRLF GN06, CRLF GN07, CRLF GN08, CRLF Gage number Gage number Measured value LINER GGE 19

20 Code No. 02DD400 Model EV-I Serial No IN MDE IN JPN RS LINK OUT DC12-24V 200m +V -V ES counter ssembly Type Display Unit FETURES DIN compatible compact panel-mounting (96 x 48mm). It can be easily incorporated into each system instrument. For the gage with differential square-wave output. For the gage with Digimatic code output. Panel thickness: 1-3.2mm Two choices of data output: the BCD data output type ( ) and the tolerance judgment output type ( ) are available. 137 pprox OPTIONL CCESSORIES Order No. Description 02DB440 Output connector pulg (with cover) Refer to p.23 02DD930 Terminal block connection cable Refer to p * C daptor Refer to p.23 *: is determined by the power-supply voltage specified. Used in combination with 02DD of opening (panel maonting) GO/±NG judgement indicator ( only) 48 SPECIFICTIONS Order No pplicable input Differential square-wave Digimatic code (SPC) pplicable gage LGB (excluding mm resolution), LGF(0.001mm reading only), LGD, LGD-M, LGS LGE, 100mm LG No. of gage input 1 Resolution 0.001mm, 0.005mm, 0.01mm,.00005, mm, 0.001mm*,.0005, * (utomatically set depending on the gage.) Display 6-digit and a negative [-] sign LED (red) Function Preset Preset Preset Preset Limit setting BCD data output Limit setting BCD data output GO/±NG judgment mm/inch switch GO/±NG judgment mm/inch switch mm/inch switch +/- direction switch mm/inch switch +/- direction switch +/- direction switch +/- direction switch Output Limit signal (3 or 5-step) Measurement data Limit signal (3 or 5-step) Measurement data (open-collector) Normal signal Normal signal Normal signal Normal signal Refer to p.34 Refer to p.34 Refer to p.34 Refer to p.34 External control Preset Preset Preset Preset signal input Data hold Data hold Data hold Data hold Data output prohibit Data output prohibit Error display/output Power-supply voltage error, overflow error, gage error, system error, overspeed error ( and only), tolerance setting error ( and only). Maximum input frequency 750kHz (two-phase square wave) Power supply Operating environment Mass Standard accessories *: Will not be indicated when combined with an LG gage Terminal block (M3 screws); 12 to 24V DC, 500m (max.) (Through an external power supply) 0 C to 40 C (20%RH to 80%RH, without condensation) 400g Six washers for adjusting the mounting plate thickness 96 20

EF counter Multi-function Type FETURES DIN compatible Panel-mounting type and DIN size (144 x 72mm). It can be easily incorporated into each system instrument.

2 137 Showing the C adapter connection 72 3.1 Rubber foot (provided) Stand (provided) 10 11.2 27 5.1 137 138 138 +1 +0.5 The standard RS-232C interface allows easy communication with an external PC.

21 EF counter Multi-function Type FETURES DIN compatible Panel-mounting type and DIN size (144 x 72mm). It can be easily incorporated into each system instrument. This counter can be used on a desktop by mounting it on the supplied stand leg. Single-display type (with 1gage input channel) 144 Double-display type (with 2gage input channels) Showing the C adapter connection Rubber foot (provided) Stand (provided) The standard RS-232C interface allows easy communication with an external PC. The RS Link function permits multiple EF counters (6 units maximum) to be connected with daisy chain and data to be input/output from one channel of the terminal RS-232C interface. The maximum value, minimum value, and TIR (runout) measurements are possible. The 2-gage input type can perform 2-axis display and make addition or subtraction calculations between 2 gages. 68 OPTIONL CCESSORIES Order No. 02DB440 02DD950 Description of opening (panel mounting) Panel thickness: 1 to 3.2 mm Output connector pulg (with cover) SPC data output/rs link cable (0.5m) SPC data output/rs link cable (1m) SPC data output/rs link cable (2m) SPECIFICTIONS Order No. 100V (Order number suffix 120V denotes the C adaptor 220V D D D D type equipped.) 240V E E E E * * * * 1 pplicable input Differential square-wave pplicable gage LGB (excluding mm resolution),lgf, LGE, 100mm LG LGB (including mm resolution),lgf, LGE, 100mm LG, LGH with mm resolution* 2 Number of gage input (Single-display) (Double-display) (Single-display) (Double-display) Resolution (Depending on the linear mm, 0.001mm, 0.005mm, 0.01mm, mm, mm, 0.001mm, 0.005mm,0.01mm, gage type connected) ,.00005, ,.00005,.0005 Display 8-digit and a negative [-] sign LED (green) Function Zeroset, preset, limit setting (3 or 5-step), GO/±NG judgement, GO/±NG signal output, MX/MIN/TIR (runout) measurement, counting direction switching, double reading, mm/inch switching, sum/difference calculation of 2 gages ( , only), output mode selection Output I/O: Tolerance judgment output (3/5 stages), normal operation output RS-232C or Digimatic code (selectable): Various measurement data External Control I/O: Preset, Data hold and Error clear RS-232C: Displayed value output,mx/min/tir switching,zero set,peak value clear, preset value input, tolerance value input and error clear RS Link Up to six EF counters may be connected via one RS-232C port.(daisy chain) Error display/output Power-supply voltage error, overspeed error, overflow error, gage error, communication error, and tolerance setting error Maximum input frequency 1.25MHz (differential square-wave): Max counting Speed : 5MHz Power supply Via C adaptor (12-24V DC, 700m (max)) Operating environment 0 C to 40 C (20%RH to 80%RH, without condensation) Mass (main unit only) 760g 800g 760g 800g Standard accessories Stand leg (one piece), rubber feet (four pieces), washer for adjusting the mounting plate thickness when securing the plate (six pieces), DC plug (one piece), C adapter (excluding model X-1) *1: n C adapter is not required. *2: Only one LGH may be connected to one C adapter (provided as a standard accessory). To connect two gages, use a and a separate power supply (12 to 24V DC, 1 or greater). LINER GGE 21

range of output modes to choose from; I/O output for tolerance judgment and segment output, BCD data output and RS-232 output are available.

22 Code No.***-*** Model EV-16P MDE IN JPN EV counter for Multi-gage System Multi-function counter FETURES Up to six gages can be connected to one unit. ble to connect up to 10 EV counters to one personal computer using the RS link function to facilitate the configuration of a multi-point measurement system comprising a maximum of 60 gages. range of output modes to choose from; I/O output for tolerance judgment and segment output, BCD data output and RS-232 output are available. Peak-hold measurements are possible for maximum value, minimum value, runout (TIR), etc. ble to calculate a sum, average, maximum, minimum, maximum difference, etc., between gages connected to the same unit. OPTIONL CCESSORIES Order No. Description 02DB440 Output connector pulg (with cover) Refer to p.23 02DD400 D-EV Display Unit Refer to p.23 02DD950 SPC data output/rs link cable (0.5m) Refer to p SPC data output/rs link cable (1m) Refer to p SPC data output/rs link cable (2m) Refer to p.23 02DD930 Terminal block connection cable Refer to p * C daptor Refer to p.23 *: is determined according to the specified power-supply voltage. Used in combination with 02DD930. For the gage with differentialsquare-wave output IN RS LINK OUT F E D RS-232C Err. INPUT IO/BCD Code No.***-*** Interconnecting EV counters 5 4 LOD 87MODE 6 3 SEL. 21DT C B +V -V DC12-24V 700m For the gage with Digimatic Code output ffixing an EV counter SPECIFICTIONS Order No pplicable input Differential square-wave Digimatic Code (SPC) pplicable gage LGB (excluding mm resolution), LGF, LGE, 100mm LG LGD, LGD-M, LGS Number of gage input 6 6 Resolution (internal) mm, 0.001mm, 0.005mm, 0.01mm, 0.001mm* 1, 0.01mm, *, - no display capability ,.00005, Function GO/±NG judgment, GO/±NG signal output, MX/MIN/TIR (runout) measurement, counting direction switching, mm/inch switching, calculation of sum, average, maximum, minimum and maximum difference between specified axes, and output-mode selection Output I/O: Normal operation output and GO/±NG signal (three steps), measurement data (BCD code), or 21-stage segment output (selectable) RS-232C: Various measurement data External Control I/O: xis designation, preset, data hold, and error clear RS-232: Displayed value output command, MX/MIN/TIR switching and peak value clear, zero set, preset value input, tolerance value input, error clear, and command to output calculated value between specified axes RS Link Up to 10 EV counters may be connected via a single RS-232 port. (daisy chain) EV and EF counters can be mixed (in which case a total of six counters can be connected). Error display/output Power-supply voltage error, overspeed error, overflow error, gage error, communication error, and tolerance setting error Maximum input frequency 1.25MHz (differential square-wave): Max counting Speed : 5 MHz Power supply Operating temperature Terminal block (M3 screws), DC +12 to +24V, 700m (max.) 0 C to 40 C (20%RH to 80%RH, without condensation) Mass (main unit only) 910g 830g Standard accessories *: Will not be indicated when combined with an LG gage. Mounting feet (four pieces), brackets (four pieces), and mounting screws M4 x 8 (eight pieces) 22

Options for ES/EF/EV Counters D-EV Display Unit (02DD400) EV-1 48 44.4 Display unit for the EV counter.

ble to display each axis measurement value and, GO/NG judgment result, total GO/NG judgment result for all axes, setting details, and errors DIN compatible compact panel-mounting - cutout dimensions

23 Options for ES/EF/EV Counters D-EV Display Unit (02DD400) EV Display unit for the EV counter. Using this display allows various settings for the EV counter without a personal computer or other equipment. ble to display each axis measurement value and, GO/NG judgment result, total GO/NG judgment result for all axes, setting details, and errors DIN compatible compact panel-mounting - cutout dimensions x92 0 The required power supply is DC +12 to +24V, 200m at the terminal block. (C adapter 02DD930 and are available. See below.) (11) SPECIFICTIONS Number of connectable units Displayed digits One display unit allows external display and setting for one EV counter. It uses a single sign plus six digits (EV counter operates on eight-digit data internally but displays only the last six digits). Channel display (also for display of judgment result): 3 (three-color LED) LED display Measurement mode display (current, maximum, minimum, runout): 2 Status display: 1 (two-color) Operating switches 4 Switches and their functions Input/output Error display Power supply Operating temperature (humidity) range Channel switching, measurement mode switching (current value, maximum value, minimum value and runout), parameter setting, preset, and tolerance setting RS Link connectors: 1 in and 1 out. Overspeed, gage error and others. Terminal block (M3 screws), DC +12 to +24V, 200m 0 C to 40 C (20%RH to 80%RH, without condensation) I/O output connector (02DB440) This receptacle fits the I/O output plug of ES/EF/EV counters. Refer to the corresponding technical explanations (pages 34 and 35) for pin assignment. C output adapter Connected to the power supply terminal of ES/EV/D-EV counters. Use a 02DD930 together with an C adapter for the applicable line voltage. 02DB440 RS link cable 02DD930 Order No. Description 02DD930 Three-terminal section only for 100V C for 120V C CED for 220V C CEE for 240V C Used to interconnect EF/EV counters comprising a RS link. Same as the cable used for Digimatic code (SPC) output. Order No. Cable length 02DD m m m LINER GGE 23

24 SD Display Unit Low Cost Display for LGD/LGS The Digimatic Display Units offer a large LED display for LGD and LGS gages. FETURES The multi-function type Display Unit (SD-D2) comes with functions including zero setting, presetting,go/±ng judgment, GO/NG analog signal output, and counting direction switching. Can be zero set independently of the gage. Digimatic output function for connection with data processing units in the SPC system. Various equipment is available for configuring a multi-gage system. SPECIFICTIONS Digimatic Display Units SD-D1 OPTIONL CCESSORIES SD-D2 Order No. Description SPC cable for data output (1m) Refer to p SPC cable for data output (2m) Refer to p GO/NG signal output cable (2m) Refer to p * Digimatic Differense/Sa Unit Refer to p * Digimatic Multi Unit Refer to p * Digimatic Extension Unit Refer to p * Digimatic Mini-Processor DP-1HS Refer to p T Foot Switch Refer to p.24 *: The suffix in is determined by the power-supply voltage specified. Model No. SD-D1 SD-D2 Order No. 100V V V D D D D 240V E E E E pplicable input Digimatic code (SPC) output pplicable gage LGD, LGD-M, LGS Data input port 1 Resolution* 0.001mm, 0.01mm.00005,.0005, 0.001mm, 0.01mm.00005, , mm, 0.01mm 0.001mm, 0.01mm Display 7-digit green LED (Display digit height: 14.2mm) Functions Zero setting, SPC data output, Error alarm Zero Setting, Presetting, GO/±NG judgment, Calculation with constant value, GO/±NG output, Counting direction switching, Error alarm Output Digimatic code (SPC) output, GO/±NG Output Power supply 9V DC, 500m (via C adaptor) Operating temperature (humidity) range 0 C to 40 C/20%RH to 80%RH (without condensation) 200 (W) x 120 (D) x 66 (H) mm 236 (W) x 120 (D) x 66 (H) mm Mass 1.1kg 1.3kg * Depending on the gage connected. Note: The SD-D1 Display Unit can only be used with Digimatic gages which have /0.001mm or.0005 /0.01mm readout. Optional ccessories for SD Display Unit Foot Switch (937179T) Digimatic Cable No T ccepts external zero set and timing signals. SD-U1: Zero reset SD-M2:Zero reset Tolerance zone measurement trigger SD-E1: Tolerance zone measurement trigger Used to interconnect various SD series units and output the measured data from each unit to various Digimatic mini-processors. Order No. Cable Length 02DD m m m 24

25 Optional ccessories for SD Display Unit (1m) (2m) DP-1HS Digimatic Multi-Unit SD-M2 GO/NG lamp +B Mode GO/NG Cable User's system SD-D2 Display Unit Foot Switch -B Mode Digimatic Difference/Sum Unit Digimatic Multi-Unit [SD-M2] FETURES The Digimatic Multi-Unit receives measurement data from multiple (up to six) LGD or LGS gages. By connecting a multi-function type Digimatic Display Unit (SD-D2) to the Multi-Unit measurement from each gage can be displayed, and, max, min, and range measurements can be made for the connected gages. lso possible are GO/±NG judgments on the measurement data individually or collectively. Tolerance judgment and zero setting can be triggered using a foot switch (937179T). The back up memory stores the tolerance entered, after the power to the Multi-Unit is turned off. SPECIFICTIONS Order No (w/100v C adaptor) (w/120v C adaptor) D (w/220v C adaptor) E (w/ v C adaptor) Data input port 6 Functions Power supply Mass MX/MIN mesurement Range (MX-MIN) mesurement Zero-Setting Presetting GO/±NG judgment (Buzzer and LED) GO/±NG signal output Error alarm PC data output 9V DC, 500m (via C adaptor) 236(W) x 120(D) x 66(H) mm 1.3kg Digimatic Difference/Sum Unit [SD-U1] SPECIFICTIONS FETURES The Digimatic Difference/Sum Unit will add or subtract the measurements from two Digimatic gages and output results to a remote Display Unit or SPC data processor. Zero setting can be done at the Difference/Sum Unit or by external foot switch (937179T) and direct mesurements from a signal of connected gage can also be passed on without alterations. One connecting cable is provided for SPC data output. Order No (w/100v C adaptor) (w/120v C adaptor) D (w/220v C adaptor) E (w/ v C adaptor) Data input port 2 Calculation mode Functions Power supply Mass +B, -B,, B Zero Setting SPC data output 9V DC, 500m (via C adaptor) 76(W) x 120(D) x 66(H) mm 550g LINER GGE 25

Optional ccessories for SD Display Unit Digimatic Multi-Unit SD-M2 (4 units maximum) SD-E1 GO/NG lamp Foot Switch GO/NG Cable Digimatic Indicators and Linear Gages with SPC Data Output (24 Gages

be connected through the Extension Unit to configure a GO/ ±NG judgment system for multiple Digimatic gages (up to 24 gages). Max, min, and range measurements can be made for the connected gages.

26 Optional ccessories for SD Display Unit Digimatic Multi-Unit SD-M2 (4 units maximum) SD-E1 GO/NG lamp Foot Switch GO/NG Cable Digimatic Indicators and Linear Gages with SPC Data Output (24 Gages maximum) SD-D2 Display Unit User's system DP-1HS (1m) (2m) Digimatic Extension Unit [SD-E1] Digimatic Mini-Processor [DP-1HS] FETURES Up to four Multi-Units (shown on previous page) can be connected through the Extension Unit to configure a GO/ ±NG judgment system for multiple Digimatic gages (up to 24 gages). Max, min, and range measurements can be made for the connected gages. Tolerance judgment can be triggered using a foot switch (937179T). SPECIFICTIONS Order No (w/100v C adaptor) (w/120v C adaptor) D (w/220v C adaptor) E (w/ v C adaptor) Data input port Functions Power supply Mass No (allows the connection of up to four SD-M2s) MX/MIN mesurement Range (MX-MIN) mesurement GO/±NG judgment (Buzzer and LED) GO/±NG signal output SPC data output Error alarm 9V DC, 500m (via C adaptor) 236(W) x 120(D) x 66(H) mm 1.3 kg GO/NG Signal Output Cable Used to output to external devices the GO/NG judgment results from the SD-D2, Digimatic Multi-Unit and Digimatic Extension Unit. Cable length: 2m. See the corresponding technical explanation on page 37 for pin assignment. The DP-1HS Digimatic Mini-Processor is a powerful, yet inexpensive tool for implementing SPC. This compact unit is capable of many functions, including performing calculations for statistical analyses and x-r control charts, generating histograms and individual charts, as well as printing out and outputting measured data via an RS-232C port. SPECIFICTIONS Order No (w/100v C adaptor) (w/120v C adaptor) D (w/220v C adaptor) E (w/ v C adaptor) Data input port Data entry capacity Data output port Printer 1 channel for Mitutoyo Digimatic gage 1000 pieces of data via RS-232C interface 5X7-dot thermal dot matrix type Printed items Measurement data, lower limit, upper limit, out-oftolerance marks, number of data, max./min. value of data, range, mean value of data, standard deviation, number of defectives, fraction defective, process capability index, histogram, individual chart, x-r chart, mean value of subgroup, range of subgroup, number of subgroup, sample size, part number, date, time, name of operator Number of Characteristic 1 Sample size up to 10 Power supply 9V DC, 500m (via C adaptor/batteries) 180(W) x 160(D) x 80.5(H) mm Mass 500g 26

27 Operational Guide and Technical Data Before using the gage void installing the gage in the following locations: Where the gage will be exposed to direct sunlight, or where the ambient temperature may drop below 0 C or exceed 40 C. Where the relative humidity may drop below 20%RH or exceed 80%RH, or where a sudden change in temperature may cause condensation. Where the gage would be subject to corrosive gas, or where combustible materials are placed nearby. Where the gage is subject to air containing significant amounts of dust, salt or iron powder. Where the gage is subject to direct vibration or shock. Where the gage may come in contact with splashed water, oil or chemicals. (The gage system components are not designed for protection against water, oil or chemical protection, except for the gage unit.) Where electronic noise is likely to affect the gage. Noise-prevention measure Wiring the sensor cable in the same circuit as high-voltage lines or power lines may cause the gage to malfunction. Be sure to wire the sensor cable separately. Power supply to the gage If a generic switching regulator is used, provide grounding via the frame s ground terminal or ground terminal of the power supply. If a malfunction occurs due to superimposed noise on the power-supply line, use a DC-regulated power supply that incorporates an insulated transformer. Handling precautions This product is a precision measuring instrument. Do not drop or otherwise subject it to impact. The spindle (moving unit) of the gage head is connected to the main unit via a spring. Be careful not to pull the spindle in the extending direction or rotate it with force. Doing so may cause permanent distortion and damage to the spring. The gage is shipped with a standard contact point ( or for the inch version of the LGS) installed on the spindle. This contact point can be replaced with a different type according to the shape of workpiece. (See page 31.) When installing or removing the contact point, place the wrench provided on the catch in order to keep the spindle from rotating. Then grab the contact point with pliers to install or remove it. When grabbing the contact point with pliers, insert a piece of felt or other soft cloth to prevent the contact point from getting scratched. Do not set both ends of the stroke as the origin (zero). Dust/water protection The dust/water protective construction of all gage heads, excluding the LGH and 100mm LG gages, is equivalent to IP-66 or IP-54 (DIN40050/IEC529 standards). The preamplifiers and counters are not designed to provide dust or water protection. Install them in places where they will not come in direct contact with water or oil. When an extension cable is used, seal the preamplifier connection and connectors completely by making sure no portion is left exposed. IF the cable cover is broken, water or other liquids may enter the gage through the capillary effect, causing gage failure. When the cable cover is broken, repair it immediately. Handle the gage with due caution to make sure that the rubber boots will not be damaged by chipping, etc. If the rubber boots are damaged, the gage can no longer be protected from dust or water. When damage is found, repair or replace the boots immediately. The rubber material used for the boots and seals does not provide complete protection against coolants and chemicals, which are becoming increasingly complex in composition. If rubber parts are found to have deteriorated significantly, contact your nearest Mitutoyo office. The gage must not be disassembled, since it will break the seals of various components. Never attempt to disassemble the gage. Doing so will prevent the gage from functioning to its original specifications. LINER GGE 27

Operational Guide and Technical Data Installing the gage Precautions for installation Fasten the stem section onto the gage mount on the measuring instrument or secure it with a stand, etc.

Never fasten the gage by any section other than its stem. Mount the gage in such a way that it is perpendicular to the surface to be measured. If installed at an angle, measurement errors may occur.

28 Operational Guide and Technical Data Installing the gage Precautions for installation Fasten the stem section onto the gage mount on the measuring instrument or secure it with a stand, etc. Be careful not to overly tighten the stem. Doing so may cause problems in gage operation. Never fasten the gage by placing the tip of a screw directly against the stem. Never fasten the gage by any section other than its stem. Mount the gage in such a way that it is perpendicular to the surface to be measured. If installed at an angle, measurement errors may occur. Be careful not to exert force on the gage via the cables. Straight stem and stem with nut The stem is a part that supports the gage. There are two types of stems: the straight type and the one with a nut. The stem with nut can be mounted easily and ensures that the gage is fastened securely. The straight stem requires extra machining for split-clamping, etc. However, this type can be used in a range of applications and offers the advantage of allowing forward and backward adjustment to a certain degree. Be careful no to overly tighten the straight stem. Mounting with a thrust stem thrust stem is available as an option for the LGF, LGE and LGD gages (except for LGD-M). Installing a thrust stem on the stem allows direct mounting, just like the stem with nut, simply by drilling a hole in the flat plate. This eliminates the need for an extra stem-clamping mechanism. Thrust Stem for LGF 10mm Thrust Stem for LGE/LGD 10mm ( when using a thrust stem are shown on the next page.) 6 Stem with nut (9) 7.5 (4.5) 7.5 (4.5) 15 Straight stem See the next page for mounting brackets available for the two stem types. Examples of the straight-stem mount The recommended clamping torque is 0.4 to 0.5Nm (LGB- 0105L: 0.2 to 0.3Nm). Overly tightening the stem will prevent smooth movement of the spindle. Check the movement of spindle after clamping. Example How to use a thrust stem with the LGF gages 1. Screw the thrust stem into the stem of the gage. When installing the thrust stem, fix the special wrench on the flat area provided at the upper section of the stem, then hold the wrench in order to prevent force from being applied to the body of the gage. 2. Insert the gage into the mounting hole, then secure the gage by tightening the clamping nut. Use a separate wrench to tighten the clamping nut. How to use a thrust stem with the LGE/LGD gages 1. Screw the thrust stem into the stem section of the gage by hand. (pplication of screw lock is recommended to prevent the nut from coming loose.) 2. Insert the gage into the mounting hole, then tighten the clamping nut to secure the gage. In the case of an LGE/LGD gage (10mm), use the special wrench (200168) to tighten the nut. If it is a LGE/LGD gage (25/50mm), use a separate 21mm wrench. M4x0.7 Example 2 2 Ø8H ' Notch (90 angled against the tap) -' section Ø10h7 0 Ø4.5, Ø7.5 depth (9) 7.5 (4.5) Precautions - Exerting undue force between the gage body and stem may damage the gage. Hold the gage body to avoid exerting excessive force. - When inserting the gage into the mounting hole, exercise due caution so as not to have the bellows of the gage damaged by burrs along the hole, etc. 1 2 Ø10h Ø8h (9) -' section M4x0.7 28

29 Operational Guide and Technical Data when using a thrust stem Installing the gage LGF LGE/LGD Thrust stem 02DB681 Ø12 0 Ø (OD, thrust stem) 6 No Clamping nut M9.5x0.5 Clamping nut 02DB ~11.5 Ø Thrust stem/clamping nut 2 No Clamping nut M9.5x For 10mm LGF For 10mm LGE/LGD Thrust stem 02DB691 Ø24 Ø (OD, thrust stem) 6 Ø No thrust stem 82.6 (LGF 25mm) (LGF 50mm) 17 8 M18x1 5 Clamping nut 02DB692 Thrust stem/clamping nut 84.1(LGE/LGD 25mm) 124.9(LGE/LGD 50mm) ~ No Clamping nut Ø14 For 25/50mm LGF M18x1 Ø24 For 25/50mm LGE/LGD Specifications relating to use of the thrust stem Set No. 02DB680 02DB690 02DC730 02DC740 pplicable gage LGF 10mm LGF 25/50mm LGE/LGD 10mm LGE/LGD 25/50mm pplicable gage Code No , , , , , , , , , Part No. Thrust stem 02DB681 02DB Clamping Nat 02DB682 02DB Wrench 02DB683* 02DB693* * Gage mounting hole diameter Ø9.5mm Ø18mm Ø9.5mm Ø18mm Recommended plate thickness (mounting section) *: Not included in the set. It is an optional accessory. 6~10.5mm 10~12mm 5.5~11.5mm 10~12.5mm LINER GGE 29

30 B 2-K F H G C E I D J I I Operational Guide and Technical Data Installing the gage Mounting bracket for the gage head s shown below, a wide range of brackets is available for the Linear gages with stem diameters of 8mm or 9.5mm. Two types of brackets are available for the 15mm diameter stem type. For stem with nut nut-mount type linear gage can be installed without additional parts or machining. For the straight stem To mount a linear gage with an 8 mm diameter stem, use a 9.5 mm diameter stem bushing. B Ø9.5x15 Part No Ø9.5 B 11.5 C 20 D 30 E 35 F 7 G 16 H 12 I 1.75 J 40 K Ø4.5 D C F G H Part No Ø9.5 B 11.5 C 40 D 50 E I E F 18 G 15 H 20 I Ø Ø9.5x8.5 M 2-L F B K H G D C E I J B F D J E G C H 2-I B D Part No Ø9.5 B 11.5 C 60 D 5.5 C E 2-G F E 40 F 20 G Ø4.5 C 2-K D H G F E L Part No Ø9.5 B 11.5 C ø15 D 20 E 40 F 8.5 B J G 10 H 20 I 15 J 35 K Ø4.5 L 1.25 Part No Ø9.5 Ø9.5 B C D E F 5 7 G H 8 12 I J K L Ø3.4 Ø4.5 M M3x0.5 M3x0.5 K B I Part No Ø9.5 Ø9.5 B C D E F 3 5 G H I Ø3.4 Ø4.5 J M3x0.5 M3x0.5 M C B K Reference plane for mounting C2 25 Plane for bracket mounting 2-5.5, 9.5 depth For 15 mm diameter stem 37± M4x0.76 hex-bolt (for gage clamping) Ø15H7 (for gage mounting) Reference plane for mounting C ±0.2 Plane for bracket mounting M5x0.8, depth 10 M4x0.76 hex-bolt (for gage clamping) 45 Ø15H7 (for gage mounting) D C F G H 2-J Part No Ø9.5 Ø9.5 B C D E 4 6 F G H I J Ø3.4 Ø4.5 K M3x0.5 M3x0.5 E F 2-L H E G D J Part No Ø9.5 Ø9.5 B C D E F G H I J K L Ø3.4 Ø4.5 M M3x0.5 M3x0.5 Bracket (for top surface) Bracket B (for bottom surface)

31 Operational Guide and Technical Data Interchangeable contact point Interchangeable contact points for dial gages can be used with linear gages. Shown below are the representative models of interchangeable contact points. With all linear gages, the screw-hole specification for the interchangeable contact point is set at M2.5 (P = 0.45) x 5mm (all in mm), except for the inch versions of the LGS gages ( and ) which conform to the UNF thread specification (#4-48 UNF). Precautions when replacing contact point Place the provided key wrench on the catch (key wrenches are not provided for the LGS and 100mm stroke model) to prevent the spindle from rotating. Then, grab the contact point with pliers to install or remove it. When grabbing the contact point with pliers, insert a piece of felt or other soft cloth in order to prevent the contact point from getting scratched. The gage may be damaged if rotational force is exerted on the inside of the gage through the spindle. Exercise due caution and securely hold the spindle with the key wrench before replacing the contact point. Pay attention to the angle when installing a flat, knife edge, or blade type contact point, since such contact point needs to be perpendicular to the stem (gage-holding section). Ø3mm Ball Points Spherical Points 90 Conical Points (Carbide) Flat Points (Carbide) L L 9 8 Ø3 ØD Radius (SR) 90 Ø2 L Material Order No. 7.3 Carbide M2.5x #4-48UNF Steel M2.5x0.45 Plastic M2.5x #4-48UNF Ruby M2.5x * Carbide M2.5x0.45 Steel M2.5x Carbide M2.5x0.45 Ruby M2.5x Carbide M2.5x0.45 Ruby M2.5x Carbide M2.5x0.45 Ruby M2.5x0.45 * For waterproof dial indicators. Shell Type Points L D L SR Order No M2.5x #4-48UNF #4-48UNF Spherical Points (Carbide) ØD L 1.7 Radius (SR) D L SR Order No M2.5x M2.5x M2.5x Conical Points Order No M2.5x0.45 Knife Edge Point (Carbide) Ø Order No M2.5x0.45 Flat Points Order No M2.5x0.45 ØD Ød T L D d L Order No M2.5x M2.5x M2.5x0.45 Blade Points (Carbide) Ø5 R2.5 (.16") ( ): For inch type L Order No #4-48UNF M2.5x M2.5x #4-48UNF M2.5x #4-48UNF M2.5x M2.5x #4-48UNF Ø5 Ø5 5 L L L Order No M2.5x #4-48UNF 90 Conical Points L Order No M2.5x #4-48UNF Ø5 Order No M2.5x #4-48UNF ØD L D L Order No M2.5x #4-48UNF #4-48UNF D T W Order No M2.5x M2.5x M2.5x0.45 Roller Points Ø Order No M2.5x #4-48UNF LINER GGE 31

32 Operational Guide and Technical Data Gage Output Specifications (differential square wave) mm LGB mm LGF 0.001mm LGB/LGF LGE Output signal 90 phase difference, differential square wave (RS-422 equivalent) Signal pitch 0.4µm 2µm 4µm 20µm Minimum edge interval 250nsec. 250nsec. 500nsec. 4µsec. Output signal level line driver output, SN75158 or equivalent (conform to RS-422) Connector RM12BPG-6P (manufactured by Hirose) pplicable receptacle RM12BRD-6S (manufactured by Hirose) Recommended receiver Differential input, line receiver, SN75182 or equivalent (conform to RS-422) Gage cable length 2 m; directly connected to the gage Maximum extension cable length 20m (extension cables of 5, 10 and 20m in length are available) larm output* 1 special signal (see the chart below) is output when an alarm detection occurs Power supply* to 5.2V (80m) 4.8 to 5.2V (120m) *1: With an LGF gage, a seventh signal line may be provided to output the error alarm. (Factory option). *2: Power supply ripple voltage 200mV p-p max. LGB: 4.8 to 5.2V (80m) LGB: 4.8 to 5.2V (120m) 4.8 to 5.2V (100m) Pin assignment Timing chart (occurrence of gage alarm) Pin No. Signal 1 +5 (gage power supply) 2 Ø 3 ØB 4 Ø 5 GND 6 ØB LGF, 1µm LGB Ø Ø ØB Recommended processing circuit for received waveform RM128RD-6S p p GND k k p 10p 20k 8 B 9 10k 100p 10p This constant generates the UP/DOWN pulse length. SN75182 DOWN PULSE UP PULSE ØB 0.1µm LGB Ø Ø Edge interval* *Varies depending on the gage. 1µm LGB, 1µm LGF: 0.5µsec 0.5µm LGF: 0.25µsec B UP PULSE ØB ØB Edge interval = 0.25µsec DOWN PULSE Timing chart (normal) LGE Ø Ø Ø Ø ØB ØB ØB ØB 4.0µsec 0.5µsec 0.5 to 2msec max. 9.6µsec 90 1µm* 1µm 1µm 1µm (5µm)* (5µm) (5µm) (5µm) *Varies depending on the gage. (ex. 0.1µm, 0.5µm). gage alarm occurs in the following cases: The spindle has moved at a speed exceeding the maximum response speed. Noise that may result in a counting error has been detected. The internal sensor does not function due to a gage failure. 32

33 Operational Guide and Technical Data Gage Output Specifications (Digimatic Code) 1) pplicable receptacle Sumitomo 3M: V Low-Proheader Model: XX or equivalent 5) Data format 2) Pin assignments and signals d1 d2 d3 d4 d5 d6 d7 d8 d9 d10 d11 d12 d13 CMOS 1 2 Gage plug 9 10 Pin No. Signal I/O LGD LGD-M LGS 1 GND Signal ground 2 DT Output Measurement data-output terminal 3 CK Output Synchronized clock-output terminal * 1 4 N.C. Not used 5 REQ Input Input terminal for data transmission request from external device * 1 6 ORIG Input Input terminal for absolute-origin External setting signal zero set * 1 7 N.C. Not used External hold * 1 8 N.C. Not used 3) I/O electrical specifications Output terminal format: CK, DT Nch open drain Maximum output current: 400 µ max. (when Vol = 0.4 V) Output withstand voltage: -0.3 V to 7 V Input terminal format: REQ, ORIG Pull-up CMOS input Internal power supply voltage: Vdd = 1.35 to 1.65 V Pull-up resistance: R1 = 10 to 100 KΩ H level input voltage: VIH = 1.1 V min.: L level input voltage: VIL = 0.3 V max. GGE side CK, DT REQ, ORIG Vdd R1 Vcc R1 R recommended I/F for external device C e.g. Vcc=5V R1, R2=22KΩ±10% C=330pF ±20% Tr External device receptacle * V Power supply terminal (+5 V ± 10%)* 2 * 1 10 GND(F.G.) Frame ground *1: LGD uses unique a specification. ll others use the common Digimatic output specification (10-pin, square). *2: Current consumption of LGD: Idd = 20 m max. 4) Recommended receiving circuit HC14,etc. Tr= NPN open collector or Nch open drain (2SC2855, etc.) H level output voltage: VOL = 0.2 V max., (IOL = 10 m. etc.) H level leak current: IIK = 2 µ max., (at VOH = 5.5 V) Note: Since the power supply voltages are different between the gage side and the external device side, be sure to use an open collector or open drain circuit. Do not use CMOS output or the like. REQ CK DT LL "F" t5 t1 t2 t3 ORIG bsolute origin setting Sign (+: 0, -: 8) t4 t10 Measured value Decimal point (0-5) e.g t11 t8 active Unit (mm: 0, inch: 1) Data is output as 13-digit (52-bit) based on 4bits = 1digit. Data is output in the order from d1 to d13. Each digit is output in the order from LSB to MSB. Measured data is output in the order from MSD to LSD. The sign, measured data, decimal position and unit are output by BCD based on positive logic (0 = L, 1 = H). 6) Timing chart SDP standard (for reference only) Symbol min. max. *t1 0µs 2sec t2 15µs t3 100µs t4 100µs t5 0µs *t6 *t7 *t8 LGD Completed Symbol min. max. *t1 30µs 95ms t2 15µs t3 100µs t4 100µs t5 0µs *t6 100µs *t7 100µs *t8 30ms Symbol min. max. *t10 1.5s *t11 4s LGS Note 1: The specifications indicated by an asterisk (*) are applicable only to LGD. ll other Digimatic output specifications are common to all models. Note 2: Read data only when CK is at the L level. Note 3: Do not input REQ signal (fixed at H ) while the absolute origin is being set (during t11). Note 4: If t5, t6 and t7 are satisfied and REQ is continuously input, an output is obtained from LGD at intervals of approximately 95ms. Note 5: Start inputting ORIG and REQ after two or three seconds have elapsed (the estimated time required for internal circuit/sensor to stabilize) following power-on. t6 t7 Symbol min. max. *t1 160µs 85ms t2 150µs 180µs t3 150µs 180µs t4 300µs 330µs t5 0µs *t6 100µs *t7 100µs *t8 LINER GGE 33

34 Operational Guide and Technical Data Counter Output Specifications (I/O Output) 1) Used receptacle: (made by 3M) or equivalent 2) pplicable plugs: VE (3M: plug) (3M: cover) DX40M-36P (Hirose: plug) DX30M-36-CV (Hirose: cover) (The following is available as a optional accessory: 02DB440 (with cover)) 3) pplicable cables: WG #24~#30 4) Pin assignments (1) Refer to the following table: Receptacle ( by 3M or equivalent) 5) I/O circuits 1. Output circuits (NOM, BCD data, SIGN, REDY) Based on open-collector transistor output. To counter TD62583 or equivalent 0.01µF COM 2. Input circuits (PSET, HOLD, INH) Input is enabled when L. To counter +5V 0.01µF 1kΩ Input current I: Max. 5m I External device (sample circuit) -5V 74HC14 or equivalent 5kΩ Maximum output voltage: 24V Output current: max. 10m Output saturated voltage: max. 0.7V External device Sample circuit Use a non-voltage output such as an open collector output or relay output. Output saturated voltage: less than 0.7V Display ES counter (limit output type) ES counter (BCD output type) EF Counter unit , , , -060, -061, -062 Pin No. Signal name I/O Description Signal name I/O Description Signal name I/O Description 1 COM 2 COM Common terminal for input/output circuits (connected to internal GND) 3 L1 O -axis tolerance judgment 1x10 0 O L1 O -axis tolerance judgment output BCD output output 4 L2 O Outputs L only at terminal 2x10 0 O Selectable between L2 O Outputs L only at terminal 5 L3 O used for judgment. 4x10 0 O positive and negative L3 O used for judgment. Upon occurrence of an error Upon occurrence of an error 6 L4 O L1, L5 = L 8x10 0 O logic. L4 O L1, L5 = L 7 L5 O L2, L3 and L4 = H 1x10 1 O L5 O L2, L3 and L4 = H 8 Not used 2x10 1 O 9 4x10 1 O Not used 10 NOM O Outputs L when 8x10 1 O NOM O Outputs L when counting is enabled. counting is enabled 11 Not used 1x10 2 O BL1 O B-axis tolerance judgment output 12 2x10 2 O BL2 O Outputs L only at terminal 13 4x10 2 O BL3 O used for judgment. 14 8x10 2 O BL4 O Upon occurrence of an error BL1, BL5 = L 15 1x10 3 O BL5 O BL2, BL3 and BL4 = H 16 2x10 3 O : : : : : Not used : : : : : 26 8x10 5 O 27 Not used (connected to 28 internal GND) Not used SIGN O Interrupts data output. 32 NOM O Outputs L when counting is enabled. 33 REDY O Outputs L when BCD data is enabled 34 HOLD I Holds displayed data.* 2, * 3 HOLD I Holds data, Error clear* 4 35 P.SET I Displays preset value stored in internal memory.* 1 P I Execute preset to -axis.* 4 36 I Not used INH I Terminates data output. PB I Execute preset to B-axis. *1: With an ES counter, P.SET input is also used as the signal to enable counting when the power is switched on. *2: With an EF counter, HOLD input is also used as the signal to enable counting when the power is switched on. *3: With an ES counter, HOLD is used as the data-output request command when data output is executed in the command mode. *4: It is also used as the signal to clear the peak value being held when peak-hold measurement is performed (input Hold and P simultaneously). 34

35 Operational Guide and Technical Data Counter Output Specifications (I/O Output) 4) Pin assignments (2) With an EV counter a range of outputs can be obtained, as shown below, by switching between different output modes. Tolerance output Segment output BCD output Pin No. I/O Name Description (usage) Name Description (usage) Name Description (usage) 1 COM Common terminal for input/output COM Common terminal for input/output circuits COM Common terminal for input/output circuits 2 COM circuits (connected to internal GND) COM (connected to internal GND) COM (connected to internal GND) 3 O CEL1_-NG -OVER -Range exceeded 1x10 0 Performs BCD output using the Tolerance-judgment output 4 O CEL1_GO -L10 2x10 0 specified channel. terminal (1CH) Performs divided output 5 O CEL1_+NG -L9 (± 10) using the specified 4x O CEL1_NOM Outputs L when counting is enabled. -L8 channel and range. 8x O CEL2_-NG -L7 1x10 1 Tolerance-judgment output 8 O CEL2_GO terminal (2CH) -L6 2x O CEL2_+NG -L5 4x O CEL2_-NOM Outputs L when counting is enabled. -L4 8x O CEL3_-NG -L3 1x10 2 Tolerance-judgment output 12 O CEL3_GO -L2 2x10 2 terminal (3CH) 13 O CEL3_+NG -L1 4x O CEL3_NOM Outputs L when counting is enabled. L0 8x O CEL4_-NG Tolerance-judgment output +L1 1x10 3 terminal (4CH) : : : : 24 O CEL6_GO Tolerance-judgment output +L10 2x O CEL6_+NG terminal (6CH) +OVER +Range exceeded 4x O CEL6_NOM Outputs L when counting NOM Outputs L when counting 8x10 5 is enabled. is enabled. 27 O EXTEND Outputs L while RS command EXTEND Outputs L while RS command SIGN Sign (+ H or - L ) of counter value is being executed. is being executed. 28 I REDY Data-confirmation signal REDY Data-confirmation signal REDY Data confirmation signal 29 O STRT Head CEL identification signal STRT Head CEL identification signal STRT Head CEL identification signal 30 O NORML Normal signal NORML Normal signal NORML Normal signal 31 I P.SET Preset P.SET Preset P.SET Preset 32 I OUTCEL Sets the output CEL OUTCEL Sets the output CEL OUTCEL Sets output CEL. 33 I SET1 CEL specification or segment SET1 CEL specification or SET1 CEL specification or 34 I SET2 range data SET2 segment range data SET2 segment-range data 35 I SET3 SET3 SET3 36 I HOLD Hold-peak clear, Error clear HOLD Hold-peak clear, Error clear HOLD Hold-peak clear, Error clear * In addition to the measured value of each gage, CEL accepts a specified peak-hold value as well as the sum, average, maximum, minimum and difference between gages. ll such data is output as shown above. 5) Timing charts (examples of gage specifications with differential square-wave outputs) Tolerance output timing [ES counter, limit output] Tolerance-judgment result output time [EF counter] Interval mode [ES counter, BCD output] Tolerance judgement time Upper limit value Lower limit value MX 20ms L1 MX 20ms L5 Upper limit value Lower limit value L1 L5 MX.30ms MX.30ms Outputs data continuously, according to the counterís internal timing. MIN 30ms MIN 30ms HOLD MX 4ms REDY DT 3~30ms MX 10us Data latch Command mode [ES counter, BCD output] Outputs data via synchronous control by HOLD and REDY. REDY DT 14~16ms 4~6ms Interval mode (all CEL output) [EV counter] Continuously outputs data of all CELs (specified by SEL1 through 3), according to the counterís internal timing. STRT 5ms - 6ms 1.6ms - 2ms 30ms - 35ms REDY Tolerance judgment, segment, BCD data CEL1 CEL2 CEL3 CEL4 CEL5 CEL6 Command mode (individual CEL output) [EV counter] Outputs data of individual CEL (specified by SEL 1 through 3) via synchronous control by HOLD and REDY. *: The figures in ( ) are output values in highspeed mode, respectively. HOLD Min. 40ms (Min. 15ms) Data latch for 10 µs only for EV-16P Max. 40ms (Max. 15ms) 12ms - 15ms (1.6ms - 2ms) REDY Tolerance judgment, segment, BCD data Min. 15ms Note: When using the counter in high speed mode or all CELs output, use the device having 1 ms or less input response time. LINER GGE 35

36 Operational Guide and Technical Data (Counter Output) Counter Output Specifications (RS-232C) The EF and EV counters are each equipped with a RS-232C output as standard, and are thus able to send and receive data to/from a personal computer. By using the RS-Link function (see page 19), data from a multiple gage system can be managed using one personal computer. 1) Receptacle used D-Sub 9-pin (male) Threads specified in inches 2) pplicable plug D-Sub 9-pin (female) Threads specified in inches 3) Communication specifications (conforming with EI RS-232C) 4) Pin assignments Home position DTE (terminal definition) Use a cross cable to connect to a personal computer. Communication mode Half-duplex, nonprocedural Data-transfer speed 4800, 9600, 19200bps Bit configuration Start bit: 1 Data bit: 7, 8, SCII, upper case Parity bit: None, even, odd Stop bit: 2 Communication conditions Set using parameters. Pin No. Signal I/O Description (usage) 1 N.C. Not used 2 RXD IN Receive data 3 TXD OUT Transmit data 4 DTR OUT Data terminal ready 5 GND Ground 6 DSR IN Data set ready 7 RTS OUT Transmission request 8 CTS IN Enable transmission 9 N.C. Disable connection 5) Command format Corresponding output EF counter Operation EV counter G**CRLF G#**, CRLF Outputs [displayed value] to the RS-232C. CN**CRLF CH**CRLF Switches display to [current value]. CX**CRLF CH**CRLF Switches display to [maximum value]. CM**CRLF CH**CRLF Switches display to [minimum value]. CW**CRLF CH**CRLF Switches display to [TIR (runout)]. CR**CRLF CH**CRLF Zero set CL**CRLF CH**CRLF Clears the peak value. CP**, CRLF CH**CRLF Inputs the preset value. CD**, CRLF CH**CRLF Inputs tolerance S1. Inputs the lower limit of tolerance. CE**, CRLF CH***CRLF Inputs tolerance S2. CF**, CRLF CH**CRLF Inputs tolerance S3. CG**, CRLF CH**CRLF Inputs tolerance S4. Inputs the upper limit of tolerance. CS**CRLF CH**CRLF Cancels error./cancels stand by for count status. CK**CRLF CH**, $CRLF($=0 or 1) Verifies the hold status. CT\\CRLF CH\\, CRLF Outputs [Calculated value] to RS-232C. 1: [**] indicates the channel number of gage between 01 and 99 (00 for all channels). 2: [#] indicates the type of data [N: current value, X: maximum value, M: minimum value, W: TIR (runout)]. 3: CRLF means CR (carriage return) and LF (line feed). 4: Inputs preset values and tolerance setting values as a single digit plus eight numerical digits without including a decimal point. 5: When setting tolerances, use CD and CG in this order for three-stage tolerances and CD, CE, CF and CG, in that order, for five-stage tolerances (EF counter). 6: When setting tolerances, use CD and CG, in this order (EV counter). 7: ll channels cannot be specified when requesting the data of calculated value or confirming the hold status. Note 1:The RS-232C communication function is temporarily suspended during key operation (while setting parameters, preset values or tolerances). Commands and data output will be executed when the system returns to counting-enabled status. Note 2:To cancel the counting standby status, use CS00CRLF (specification for all channels). 36

37 Operational Guide and Technical Data (Counter Output) Counter Output Specifications (Digimatic Code (SPC)) The EF counter and SD display unit are equipped with Digimatic code (SPC) output as standard, and can therefore be connected to various external devices offered by Mitutoyo for use with micrometers and calipers. (External connection of the EF counter is limited to the DP-1HS only.) 2 Data format Data consisits of 13 digits (d1 thru d13); each digit consists of 4 bits. Data output to a linked data processor or other peripheral is effected via pin No. 2 from d1 to d13 in bit serial; from the LSB (2 0 ) to the MSB(2 3 ) for each digit. 1 Connector pin assignment Pin No. Signal I/O Description 1 GND Signal Ground 2* 1 DT O Measurement Data 3* 1 CK O Clock for data transmission 5* 2 REQ I Request data transmission 4,6 9 N.C. No connection 10 GND Signal ground * 1 : Open collector: 35V, 50m max. (SD only) * 2 : C-MOS: Pull-up to VDD (5V) d1 d2 d3 ll "F" (1111) d4 d5 MSD Sign +: 0 (0000) : 8 (0001) d6 d7 d8 d9 d10 d11 d12 d13 Measurement Decimal point X. X. X. X. X. X. LSD 2 (0100) 3 (1100) 4 (0010) 5 (1010) Unit mm: 0 (0000) inch: 1 (1000) 3 Timing chart Open collector output REQ CK T1 T2 T3 T51 T52 DT * t1 t2 t3 *: This time varies according to the connected measuring tool. 15µs t1 250µs 150µs t2 250µs 150µs t3 450µs [GO/NG judgment output] The SD-D2, Digimatic Multi-Unit and Digimatic Extension Unit are able to output the result of tolerance judgment (GO/NG). 1) pplicable plug: TC by Hoshi Electric or equivalent 2) pplicable cable (2m): special accessory (see page 26) 3) Output/input electrical specifications Output Open collector output: 35V, 50m (max.) Input Non-polarized contact signal Pull-up type, CMOS input (internal voltage 5V) 4) Pin assignments and signal names MOdel SD-D2 Multi-Unit, Extension Unit Pin no. I/O Signal Description I/O Signal Description GND GND GND GND O ERROR H upon occurrence of an O TIMING L upon completion of GO/NG error judgment 3* O +NG/-NG Identification of +NG and -NG O ERROR H upon occurrence of an error 1 4* O GO L when GO O GO/NG GO: "L", NG: "H" 5 N.C. I TRG GO/NG judgment is executed upon the input of L. *: GO/NG is determined by the following combinations: Pin No. GO +NG -NG 3* H H L 4* L H H *: The transistor turns off when H is output. The transistor turns on when L is output. LINER GGE 37

38 Operational Guide and Technical Data Interconnection table for Linear Gage 1) mm or mm resolution Types Laser Hologage p.8 KH Counter (comes with gage head) p.8 Laser Hologage , p.9 EF Counter for mm resolution gage , *1 p.21 LGB p.9 2) mm or 0.001mm resolution Types LGF , , p.10 EF Counter , p.21 LGF , , p.10 ES Counter for differential Squar-wave input , p.20 LGB , etc p.11 EV Counter for multi gages p mm stroke LG p.15 D-EV Display 02DD400 p.23 LGE , , , ) 0.01mm resolution Types p.12 EV Counter for multi gages p.22 LGD , , , , , , p.13 ES Counter for Digimatic code input , p.20 LGD-M , p.14 Digimatic Power Unit *2 p.17 LGS , , , p.15 SD Counter , , , p.24 *1: To connect two Laser Hologages to a dual-axis input-type EF counter, use a Since the does not come with an C adapter, provide a separate power supply (DC 12 to 24V, 12V). *2: n external Digimatic power unit is required when connecting an LGD/LGD-M with an SD counter and using the absolute-value function. 38

Operational Guide and Technical Data What is a hologram? 1. Using the wavelength of light as the scale Grids of 0.5µm in pitch are used as scale grids in hologram analysis.

39 Operational Guide and Technical Data What is a hologram? 1. Using the wavelength of light as the scale Grids of 0.5µm in pitch are used as scale grids in hologram analysis. These grids are much finer than the conventional lithographic grids used in reduction-exposure systems (only 1/ 15th to 1/200th the thickness of lithography grids). Hologram technology is essential to achieving high-resolution in measuring scales. When two parallel laser light beams (a) and (b) intersect each other, as shown in Figure, three-dimensional light interference is created at the intersection, and bands of interference are generated. The pitch of these bands is roughly the same as the wavelength of the light source. This pitch is set precisely at 0.5 µm with Mitutoyo s hologram scales. In other words, the recording of interference bands produces a scale of very fine pitch. (a) Figure (b) 0.5µm Underground factory 4. Leading-edge technologies and facilities supporting super-high accuracy The laser holoscales and all other scales used in Mitutoyo s linear gages are products of comprehensive development capabilities in the fields of optics, electronics and mechanical design. nd it is at our state-of-the-art production facilities where these precision instruments are crafted. To further its leading-edge technologies in precision instrument development a capability fostered through 60 years of experience Mitutoyo maintains a laboratory located eleven meters underground at its Kiyohara factory in Tochigi Prefecture, the only production factory dedicated for linear scales in Japan. t this underground laboratory, fluctuations in temperature and humidity, as well as the effects of outside vibration, are kept to an absolute minimum. This provides us with a superior environment for the development of precision instruments. 2. length-measurement system employing diffraction The mechanism of light diffraction is used to detect scale displacement as a change in the phase of light. Since the amount of phase change is equivalent to the hologram s grid pitch, an accurate length-measurement system can be created to detect scale displacement at a 0.5µm pitch. When two parallel laser light beams (a) and (b) intersect each other, as shown in Figure, three-dimensional light interference is created at the intersection, and bands of interference are generated. The pitch of these bands is roughly the same as the wavelength of the light source. This pitch is set precisely at 0.5 µm with Mitutoyo s hologram 1/4P scales. In other words, the recording of interference bands produces a scale of very fine pitch. Figure B (a) 1P Light beam (b) Light beam (b') Light beam (a) 3. Detection using perfect sine-wave signals Displacement is detected via the interference of diffracted light, in the form of bright-to-dark signals with a pitch equal to onehalf that of the hologram grid (0.25mm). Since it is difficult with current technology to directly read the phase change in light, two diffracted light beams are caused to interfere with each other in order to generate bright-to-dark signals, as shown in Figure C. The signals are divided into 25 segments in order to measure displacements at 0.01µm resolution. To identify the direction of scale displacement, two light receptors (a) and (b) are installed by which one signal light is detected as a signal having a relative 90-degree phase difference from the other. 1/4P (b) Scale What is the absolute positional origin? The absolute positional origin refers to the origin (zero point) that is maintained even when the power is switched off. The LGD series gages are equipped with an absolute scale (BS scale) that allows the setting of absolute positional origin. Therefore, when the power is turned on again, the contact point s position is always output correctly, according to the previously set origin. This eliminates the need for a master adjustment each time the power is turned on, thus contributing greatly to automated measurements. The absolute positional scale uses three internal scales of different wavelengths in order to register an absolute address on the scale. Coarse scale (CO) CO MED Medium scale (MED) Fine scale (FIN) One period: mm Resolution: 3.36 mm One period: 26.88mm Resolution: 0.21mm Figure C FIN One period: 1.68mm Resolution: 0.01mm LINER GGE 39

40 Specifications are subject to change without notice. Mitutoyo Corporation 20-1, Sakado 1-chome, Takatsu-ku, Kawasaki-shi, Kanagawa , Japan Phone (044) Fax (044) Printed in Japan (2) CPR

Linear Gage. Dimension sensors offering superb durability and environmental resistance, suitable for in-line measurements.

Linear Gage. Dimension sensors offering superb durability and environmental resistance, suitable for in-line measurements. Sensor Systems Linear Gage Catalog No. E4174-542/572/575 Dimension sensors offering superb durability and environmental resistance, suitable for in-line measurements. Features 1. range of models available