STIMESI. Stimulation Action on MEMS and SiP

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4 Scope Target audience? Teachers, professors Student Researcher Why? In the more than Moore era, there will be an increased demand for graduates with experience in more than one domain (discipline) imec restricted

5 MEMS Design requirements During the MEMS design process, one is confronted with many more design and simulation tools than is generally the case for IC design Multiple physics disciplines players tasks electrical mechanical thermal optical fluidic chemical imec restricted

6 MEMS Design requirements During the MEMS design process, one is confronted with many more design and simulation tools than is generally the case for IC design Multiple physics disciplines players tasks analog digital RF bio process reliability packaging testing imec restricted

7 MEMS Design requirements During the MEMS design process, one is confronted with many more design and simulation tools than is generally the case for IC design Multiple physics disciplines players tasks specialist/engineers of each domain customer assembly house testing partner imec restricted

8 MEMS Design requirements During the MEMS design process, one is confronted with many more design and simulation tools than is generally the case for IC design Multiple physics disciplines players tasks process development designkit-setup, DRC modelling (top-down) simulation, FEM/FEA failure analysis design (botom-up) drawing, layout, CAD programming, scripting, interfacing testing & measurements documenting imec restricted

9 MEMS design modes Concept + level of abstraction - Device Hand calculations mathematical simulations behavioral modelling FEM/FEA + 3DCAD Process Layout + DRC more important in MEMS imec restricted

10 MEMS design modes Concept + level of abstraction - Device Hand calculations mathematical simulations - behavioral modelling level of FEM/FEA specialisation + 3DCAD + Process Layout + DRC Co-design: - general tools are used at the abstract level. - specific tailored tools are used for the detailed level - many disciplines with each their favorite tool requires interfacing & collaboration imec restricted

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16 The fit within EUROPRACTICE EUROPRACTICE Design Tools? Stimulation IDESA EUROPRACTICE Design Kits Training Research Contest Homework Extention To MEMS EUROPRACTICE MPW Service Support Tronics Workshop MEMSCAP imec restricted

17 MPW After the course, participants are encouraged to do something with wat they learned HOW? Supply design kits and offer MPW Benefits proven technology acces for intitutes without fab cheaper less fuss, results in time, garantee Limitations process is fixed critical for product development not so critical for initial research not critical for teaching imec restricted

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26 Conclusion stands for STIMulation of MEMS All parts of the puzzle are available Knowledge by practice : Just do it! Join a course Join a MPW imec restricted

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