MEMS Sensors for Industrial Automation: Megatrends and Sourcing Options Charles Chung, Ph.D. February, 2017

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1 MEMS Sensors for Industrial Automation: Megatrends and Sourcing Options Charles Chung, Ph.D. February, 2017

2 Overview About AMFitzgerald What are MEMS? Industrial Applications Technical & Business Macrotrends MEMS Sourcing Options Page 2

3 AMFitzgerald: Your Partner in MEMS Product Development Page 3

4 A complete supply chain from concept to production AMFitzgerald in-house Multi-disciplinary, expert engineering team Custom MEMS development from start to finish Strategic partners Design and process integration for volume production In-house prototype fabrication, easy transition to production partners Page 4

5 Our Focus: Specialty MEMS Applications %Revenue by Market: Page 5

6 What are MEMS? Page 6

7 MEMS is a powerful miniaturization technology Navigation unit (1995) Navigation unit (2015) Approx:150 mm x 150 mm x 150mm Advantages: Smaller Lighter Lower Cost Lower Power Consumption Page 7

8 MEMS enhances capabilities Micro Electro Mechanical Systems Page 8 Inkjet nozzles Gyroscope Infrared Imaging Magnetometer Accelerometer Microphone Temperature Optical fiber switch Pressure sensor Ultrasound Digital Light Projection

9 Manufacturing: Wireless Sensing, aka IIoT Page 9

10 Sensor Array for Robot Tactile Sensing Page 10

11 IoT: Sensors Everywhere Page 11

12 MEMS Macrotrends Page 12

13 MEMS Macrotrends: Integrated Functionality Sensors & Actuators c s - early 1990s Pressure Sensors, Accelerometers, Microphones, Digital Mirror Displays Sensors + Computation c s to early 2000 s Analog to Digital Conversion (and D2A) Calibration Compensation Sensors + Computation + Communication c. mid 2000 s to present Tire Pressure Monitoring Systems (TPMS) Smart Electric Meters Battery is largest, heaviest, most expensive, and the component most likely to fail. Next integrated function? Power: Very low power devices Energy Harvesting Smart Algorithms Freescale TPMS MPXY8300A Page 13 TPMS System Board with Battery

14 Market Macrotrends: Megaplatforms: Automobiles Automotive is commercial birthplace of MEMS >30 MEMS devices in each car Safety, Engine control, Chassis control, Infotainment ~100M cars sold per year (worldwide) Self driving cars will increase demand for MEMS devices Page 14

15 MEMS Gigaplatform: Smartphone Camera: Image Stabilization Gyroscope AutoFocus (development) Optical Zoom (development) Communication: Oscillators (emerging) RF Tuners (emerging) 2 Microphones -Voice input -Noise Cancellation Speakers (development) Navigation: Accelerometer Gyroscope Compass Altimeter (emerging) New Functions: Environmental Sensors Gas Sensors Humidity Air Particulate Breath Alcohol Carbon Monoxide ~1.2B Smartphone sold per year (worldwide) >5 MEMS devices per smart phone Page 15

16 MEMS Teraplatforms: Internet of Things? 1 Trillion sensors? Many challenges to implementation: monetization, security, interoperability, standards, reliability Page 16

17 MEMS Teraplatforms: Internet of Things? Power is a challenge Cannot run 1 trillion wires Cannot change 1 trillion batteries Page 17

18 Impact of Miniaturization on Power Draw Navigation unit (1995) Navigation unit (2015) Approx: 4mm x 4mm x 0.9mm Power Draw: 13mW 384x lower Approx:150 mm x 150 mm x 150mm Power Draw: ~5000 mw Page 18

19 Miniaturization and Power Draw: Humidity Sensor Adafruit AM2302 Power: 6250 microwatts Sensirion SHTW2 Power: 2 microwatts 3,125x lower Page 19

20 Zero Energy Sensor: CardioMEMS Pressure Sensor Page 20 AMFitzgerald 2016

21 Zero Energy Sensor: UMich Intraocular Pressure Sensor Page 21

22 MEMS Teraplatforms: Internet of Things? Major Business Challenge: Not a single large platform, but a collection of many small platforms Page 22

23 Major MEMS Markets by Volume Megaplatforms drive the MEMS industry today Automobiles Smartphones The MEMS industry develops for the Megaplatforms Individual IoT applications do not attract MEMS industry High Value/Low Volume markets are not being addressed Page 23 Biomedical High Performance Sensors Specialized Industrial Ex: Shipping Ex: Energy Ex: Advanced manufacturing Application Number Nuclear Power Plants (World) 447 Golf courses (World) 32,000 Bridges (US, 2014) 607,747 Industrial Robots (World, 2008) 1,300,000 Shipping Containers (World, 2012) 32,900,000 Automobiles (World, 2013) 1,015,000,000 Tablets (World, 2013) 1,430,000,000 Smartphones (World, 2013) 2,160,000,000 Applications Source Nuclear Power Plants (World) World Nuclear Association Recycling facilities (2015) The Economist Wineries (World, 2003) WineWeb Golf courses (World) November 2005 KPMG Golf Course Survey Industrial Robots (World, 2008) IEEE Spectrum Bridges (US, 2014) USDOT, Federal Highway Administration Shipping Containers (World, 2012) World Shipping Council Automobiles (World, 2013) Wikipedia Tablets (World, 2013) Statistica Smartphones (World, 2013) Statistica

24 Economics of MEMS Devices Job Fabrication e.g., Cars, T-Shirts, Robots Manufacture 1 item at a time Batch Fabrication e.g., Bulk Materials, Microprocessors, MEMS Unit of work is the silicon wafer, not individual microchip ~10,000 devices on a wafer The cost of each device is wafer cost/10,000 Page 24

25 High Value/Low Volume Applications Batch fabrication enables affordable Megaplatforms Batch fabrication creates challenges for volumes <1M/y Minimum orders are typically 100 wafers/year ~1M devices/year Minimum needed to maintain fabrication process Page 25

26 MEMS Sourcing Options Sensor Fabrication Development Development Cost Specification Process Time (Order of Magnitude) Off-the-Shelf MEMS Fixed Fixed None 0 Semi-Custom MEMS AMFitzgerald RocketMEMS Custom Fixed Months $ 100K+ Custom MEMS Custom Custom Years $ 1M+ Off-the-Shelf MEMS Fastest, lowest cost solution Most MEMS are developed for Megaplatforms May not meet requirements of specialized industrial applications Semi-custom MEMS Common model for microprocessors Reduced development cost and time by 10x Potentially good fit for specialized industrial applications Custom MEMS New functionality Novel IP Unique competitive advantages Requires: Development time Money People Page 26

27 How Does Semi-custom Work? Semi-custom devices start with an established, in-production process that makes the same kind of device, e.g. pressure sensors The cross section of the device is defined by the production process Production process development Expensive, time consuming, risky The lateral features defined by masks Lateral features are easier and less risky to change Top View Photo of a RocketMEMS Pressure Sensor Page 27/29 Side View

28 Semicustom approach Opportunities & Tradeoffs The semicustom approach can apply to many different types of devices Pressure sensors, accelerometers, flow sensors, DMDs, gas sensors, etc. Semicustom trades design flexibility for an order of magnitude reduction in development time and cost Page 28 Many industrial needs can be met by a semicustom approach Custom production process is usually needed for: Extremely high performance example: navigation grade accelerometers and gyros Extreme environments example: operation at 1000 atmospheres

29 Example: Semi-custom Pressure Sensors AMFitzgerald s RocketMEMS MEMS solutions for OEMs and system integrators ISO-certified foundries AMFitzgerald reference designs 1. Customer provides sensor specification 2. AMFitzgerald tailors sensor design to meet customer s spec 3. AMF manages and oversees MEMS fabrication 4. AMF tests every sensor. Only known good die are delivered 5. Customer receives sensors Variety of RocketMEMS Pressure Sensors Page 29

30 Semi-custom: Motion sensors Qualified foundry processes available for third party use Customer must provide the chip design Only useful for expert MEMS designers Some semi-custom motion sensor platforms: Source: CMP Facility Service Name Target Market Process Wafer size DALSA MIDIS Accelerometers Gyroscopes SOI with vacuum and pressure cavity 200 X-FAB XMB-10 XMS-10 Accelerometers Cavity SOI 150, 200 Tronics Corto Magelan Accelerometers CMOS cap, SOI wafer 200 Page 30

31 Scaling Up Production for Semicustom MEMS Semi-custom leverages a common manufacturing process Small lots can be grouped with other customers As production scales, use more of the wafer, or order entire wafers June 23, 2016

32 Summary MEMS sensors present a huge opportunity for industrial applications Sophisticated sensor & actuator functions Electronics system integration Wireless communications Very low power draw Megaplatforms drive the MEMS industry Semi-custom MEMS Approach Leverages technologies developed for the Megaplatforms Can meet the needs of many specialized industrial applications Charles Chung, Ph.D. ccc@amfitzgerald.com AM Fitzgerald 700 Airport Boulevard Suite 210 Burlingame, CA AMFitzgerald is a world leader in MEMS product development Page 32

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