Veronafiere ottobre Gli atti dei convegni e più di contenuti su

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1 Veronafiere ottobre 2016 Gli atti dei convegni e più di contenuti su

2 Multi-Sensing Platform for Smart Building Management project: research at the University of Brescia Elisabetta Comini, A. Bertuna, N. Kaur, N. Poli, D. Zappa, G. Sberveglieri A. Köck 1

3 Outline 1. Overview MSP-Project 2. Why CMOS- & 3D-Integration? 3. Achievements & Highlights 4. Research at UNIBS 5. Summary 6. Outlook: Nasys 2

4 1. OVERVIEW MSP-PROJECT Development of smart 3D-integrated multi-sensor systems enabling indoor and outdoor environmental monitoring! 3

5 Development of process & manufacturing chains enabling flexible plug-and-play 3D integration of sensors and devices on CMOS platform chips The concept is based on rigorous employment of Through-Silicon-Via (TSV) technology The fabrication approach is based on the multi-projectwafer (MPW) service This shall be the enabler for take-up of Key Emerging Technologies (KETs) in particular by SMEs Development of wireless communication for networks and handheld devices 4

6 Development of novel sensordevices based on nanotechnology as tool-box for 3D-system integration 5

7 Gas sensors and humidity sensor based on SnO 2, CuO, ZnO, WO 3, - Nanowires, Graphene & CNT Functionalization with (bi)metallic Nanoparticles AlGaN/GaN-based gas sensor for NO 2 Thin film bulk resonator (FBAR) particle sensor Visible light & thermopile-based infrared sensors SiC-based UV-A/B sensor Photovoltaic energy harvester with interdigitated back contact (IBC) structure Piezoelectric energy harvester based on ZnO-NWs and PVDF-films 6

8 Target Parameters Indoors CO, CO 2, VOCs, PM Outdoors NO 2, O 3, CO, PM 10, PM 2.5, UFPs 7

9 Air Quality Monitoring for Smart Building Management: 8

10 17 partners from 6 countries 18.5 M budget and ~ 1300 PMs effort 9

11 Realization of three specific 3D-integrated MSP demonstrator systems MSP Device for Smart Building Management MSP Device for Wearable Wristwatch Application MSP Device for Outdoor Environmental Monitoring Fig.2a: MSP for Smart Building Management. Fig.2b: MSP for Wearable Wristwatch. Fig.2c: MSP for Outdoor Environmental Monitoring. 10

12 2. WHY CMOS- & 3D-INTEGRATION? Many new and emerging applications! Air quality monitoring indoors Smart building management & smart homes Air quality monitoring outdoors Pollution monitoring and mapping (Apps!) Industrial process monitoring (Industry 4.0) Smart multi-sensor networks Consumer electronics Etc 11

13 New life style applications in wearables, smart phones, smart watches or smart rings 12

14 Forecast: Growth of environmental sensors is expected to increase from ~ 60 Mio. units in 2016 to more than ~ 350 Mio. units in 2020 Source: IHS Emerging Sensors in Handsets and Tablet reports,

15 Forecast: Wearables will grow at an annual rate of 35% over the next five years 14

16 Forecast: The smartwatch will be the leading product category annual rate of 41% over the next five years 15

17 New life style applications in wearables, smart phones, smart watches or smart rings CMOS- & 3D-Integration is key for consumer electronic applications! Small footprint Low power consumption Smart system integration Multi-sensing capability Multi-functionality 16

18 4. ACHIEVEMENTS & HIGHLIGHTS Sensor devices to be 3D-stacked on the platform chip 2 are fixed Full size 2 x 2 cm 2 is employed for demonstrator We have elaborated the big picture No.2! 17

19 4. ACHIEVEMENTS & HIGHLIGHTS 12 different sensor chips comprising a maximum of 53 (!) gas sensors will be integrated to the multi-sensor module Sensor types Kind of 3D stacking Label 3 gas sensor µhp array chips (MCL/AMS) TSV, Overmolded A 4 gas sensor µhp chips (APPS) Wirebonded B 1 gas sensor µhp (IMEC) Wirebonded, overmolded C 1 UV-A/B sensor (FHG-IISB) Wirebonded, overmolded D 1 IR sensor array chip (CCS ) TSV, Overmolded E 1 temperature sensor (AMS ) Flip Chip, Overmolded F 1 V-light (AMS ) TSV, Overmolded G 18

20 Research at UNIBS 19

21 MOX Chemical Sensors Metal-oxides represent a category of materials with diversified properties covering all aspects of material science and physics in areas including superconductivity and magnetism Metal oxides are already well established in the field of gas sensing Most common sensing mechanism: electrical resistance variation upon gas chemisorption Chemiresistors simple architecture and easy signal processing Measured gases are complex odor consisting in a mix of different analytes Gas sensors arrays or electronic olfaction systems 20

22 MOX chemical sensors Technological challenge: fabrication of materials with small crystallize size which maintained their stability over long term operation at high temperature A huge variety of devices have been developed mainly by an empirical approach and a lot of basic theoretical research and spectroscopy studies have been carried out to improve the well known 3S of a gas sensor Sensitivity, Selectivity and Stability Cost However, from a commercial pointof-view low costs and reduced power consumption are fundamental features. Power Consumption Stability Selectivity Sensitivity 21

23 Not-conventional Substrates Flexible: Plastics, even Paper (!) Advantages: Low cost & Power Flexible, easy to manage Innovative fabrication processes Disadvantages: Lowtemperature (<350 C ) Microfabrication: MEMS Membranes Advantages: Very Low Power Medium Temperature (<550 C) Silicon technology Disadvantages: Fragile and difficult to process High cost (manufacturing, processing, ) Cambridge CMOS Sensors 22

24 MEMS substrates (AMS) AMS Germany microhotplates, already used in commercial devices (thin & thick films). Low Power: 60mW for 400 C, 1/10th of our standard 2x2 mm alumina substrate! 23

25 NWs integrated on uhps Hotplates compatible with metal oxides! SnO 2 CuO ZnO WO 3 24

26 Response Screening Firstly we investigated the performance of CuO, SnO 2 and WO 3 NWs deposited on AMS (Germany) uhp towards fixed concentration of chemical C for NO C for O 3, Ethanol and Acetone RH=50%@20 C 25

27 Calibration Curves 26

28 Considerations Weeks of operation without breakdowns. CuO response towards NO 2 is negligible. Interesting WO 3 performance for ppb-level NO 2 detection, with a power consumption of only 25mW (200 C). Good ozone response of SnO 2 and WO 3. CuO is also sensitive. Poor selectivity between VOCs (Acetone and Ethanol). SnO 2 is the most sensitive material. Ideal candidates: SnO 2 for VOCs WO 3 for NO 2 CuO for O 3 27

29 5. SUMMARY & OUTLOOK All devices being stacked on to final demonstrator are fixed now Impressive progress in the development of sensor devices The CMOS platform chip 2 is in production Successful elaboration of process flow to overmolded devices including all post-processing steps A wireless system has been developed designed to achieve best-in-class performance at world s lowest power consumption! 28

30 Spin - off from University of Brescia Nano Sensor Systems s.r.l. Via Valotti, 9 Department of Information Engineering University of Brescia Brescia Italy President: Prof. Giorgio Sberveglieri Vice President Prof. Elisabetta Comini Other members: Dr. PhD Veronica Sberveglieri Dr. PhD Matteo Falasconi Eng. PhD Alessandro Dionisi Web site: starting next November

31 NASYS Mission Electronic Noses Food: direct screening of food spoilage Security: detection of explosive or toxic gases. Detection of hidden people. Environments : detection of gases in the ambient

32 Elisabetta Comini SMALL SESNSOR SYSTEM S3 S3 s Sensor Chamber Tabella 1 Sensor Operating Composition Description Temperature ( C) SnO2 - MoO2 RGTO sensor made of a blend of Tin and Molybdenum oxides ZnO Nanowire sensor made of Zinc oxide SnO2 Nanowire sensor made of Tin oxide SnO2 // Ag RGTO sensor made of Tin oxide catalyzed with silver ZnO Nanowire sensor made of Zinc oxide SnO2 - WO3 RGTO sensor made of a blend of Tin and Tungsten oxides. Small Sensor System Device

33 Why multiresponse (mrs) sensor? The independent transducers recognize better the different gas response. This mrs, a new class of device, are able to quantify individual marker components of gas mixture and to give a more reliable finger print. In principle they could give a more stable response, rejecting the unexpected interference gases, over the sensor array.

34 Expected Evolution of Chemical Sensors Reliability Non-selective conventional sensors Selective sensors via multivariable principles Extreme conditions: Humidity, temperature Chemical background Conventional EN- sensor array Improved stability Reducing costs and size Patterns detection (e.g. breath, odors) Cost (euro) Power (mw) Consumer Electronics with integrated sensors Wearable, Portable Sensor array Production of sensors on large scale Gas Application-Specific Integrated Circuits (electronic/photonic)