Heidelberg Instruments VPG200 Conversion software "x-convert"

Transcription

1 Heidelberg Instruments VPG200 Conversion software "x-convert" design in layout editor format Convert_V10_ design cut in stripes Heidelberg internal format "lic"

2 Step 0 retrieve design data your-pc design.gds design.cif Retrieve your design to the data directory on the conversion-pc either in the user-pc /Windows environment or in the conversion-pc/linux environment conversion-pc data directory linux gdsii cif user-pc data directory windows gdsii cif

3 Step 0b retrieve design data Network drive user-pc (ms windows) mounted from \\sti1files\cmi-transfert No-go / forbidden: USB flash drives memory cards (SD-cards, etc. ) physical stuff from outside the cleanroom" Retrieve your design to the data directory on the conversion-pc using an internet based mechanism such as: ewa.epfl.ch (epfl outlook) imp.epfl.ch (epfl horde) webmail.epfl.ch (epfl entry point) gmail.com, live.com, & others Online storage: my.epfl.ch drive.switch.ch dropbox.com drive.google.com onedrive.live.com conversion-pc data directory linux gdsii cif Secure copy - scp winscp.net putty WARNING: data / jobs are archived / deleted after 30 days exception: design data referenced in job younger than 30 days.

4 Step 0c retrieve design data Get design using the user-pc /Windows environment with a webbrowser WindowsKey+R then type firefox, followed by <cr> WindowsKey+R then type iexplore, followed by <cr> Save it to one of the folders gdsii / cif that sit on the desktop. Get your design using the conversion-pc/linux environment with the command line or a webbrowser such as firefox, then save it to the directory /home/vec740/gdsii or /home/vec740/cif or /home/vec740/dxf or /home/vec740/gerber Prefix your design with your initials, i.e. John Doe s mask -> JDo_channel13.gds Do not create subdirectories within the gdsii/cif/etc. directories, /home/vec740/{mydirname}/{mygds} Do not make softlinks to design data residing outside of the gdsii/cif/etc. directories. (the software cannot always handle it)

5 Step 0d retrieve design data Only use alpha-numeric characters, and the underscore. (the software cannot handle the rest of the charset) characters for filename ok not ok a..z A..Z 0..9 _ -., ; : < >? * ( [alpha numeric underscore] space, dash, dot, period, comma, semicolon, colon, special characters Only use listed filename extensions (the software does not recognize others) filename extensions ok gds cif dxf gbr *.g* not ok GDS,gds2,gdsii,sf CIF DXF GBR, Gerber

6 Step 0c start conversion software conversion pc [ Linux pc is the leftmost screen] login: vec740, passwd: vec740 [ old style conversion was login: convert, passwd: convert ] Start conversion application a) by single mouse click on "x-convert" icon to start conversion application or b) by single mouse click on icon "Konsole (a terminal window) (or Chameleon-system-terminal-konsole) then type app in the terminal / on the command line (do not change directory from /home/vec740): old style

7 Overview Window when you begin: Click-path through progressively disclosed window:

8 Step 1- job name Conversion user interface pops up, click on white page or File Start with a new job Change default job name job_00 to "<your 3 initials><jobname>" e.g. John Doe -> jdo_crocodile_v2_lay28 (max 28 characters)

9 Step 2 design format & data Conversion user interface is updated with frame containing your job name. As you complete fields in the form, new frames are progressively disclosed. Continue specifying the design data: Source File: Add

10 Step 2b design format & data Source File: Add Opens a popup Load GDSII Design or Load CIF Design etc... Source File: picks up the file in The directories named after extension. gdsii: located in /home/vec740/gdsii cif: located in /home/vec740/cif Confirm with open or double-click on the design.

11 Step 2c design cell & layers "gds" GDSII Options pop up window opens: GDSII Structure: Select design's structure (top cell, leaf cell) Layer Nr: Select layer (tick box) and logical operations (OR/CUT/XOR) Attention to distinguish HIMT-Layer-Nr-0 and GDSII-Layer-Nr-0 In example HIMT: Layer Nr.1 reads data from GDSII-file Layer 50 When done, click Create Default

12 Step 2d design cell & layers "cif" CIF Options pop up window opens: Top Cell: Select design's structure (often last in list, try automatic) Layer: Select in list of CIF-LayerNames found. When done, click Create Default

13 Step 3 view selected data Open a Viewer to review your selection: old school: Tk/Tcl Preview nu skool: OpenGL Viewer

14 Select write lense: Step 4 resolution / write head write mode write head / write lense minimum structure width * [um] address grid [nm] pixel size [nm] stripe width [um] number of stripes for width 100mm write speed [mm 2 /min] write time for 100mm x 100mm [min] high speed 20mm tbd 4 tbd standard 10mm 1.0 tbd tbd 38 tbd advanced 4mm 0.6 tbd tbd 210 tbd * Minimum structure width in X/Y axis direction. For 45 directions, multiply by sqrt(2), i.e. 600nm->850nm (pitch 1.7um)

15 Select Justification tab Step 5 mirroring, windowing Expose Window x: y: values must be non-zero (0). Verify that size is reasonable comparable to preview (step 3) Borders Verify Upper/Lower/Right/Left are in boundaries of Platesize, & centered. In case of inverted design edit each border using + some oversize or use add frame option (step 6) Mirror at Y (mask parity): Activate mirroring of the device: if you are writing a mask, and have not mirrored the design in the layout editor (see illustration next slide). Automatic Centering: WARNING: may dis-align your mask with Other masks of your design Check relative positioning with Position Preview HIMT Preview

16 Step 5 mirroring (continued) mirror flip-> typical for TSA mask non-mirror flip-> typical for BSA mask and direct write laser

17 Step 6 non-inverted vs inverted Select Expose options tab: (mask polarity / mask tone) clear = non-inverted (insides of layout polygons are written with laser) dark = inverted (outsides of layout polygons are written with laser) clear vs dark: see illustration next slide Add Frame Active only with dark Add a clear frame oversizing exposure window (see illustration slide after next) CD Bias Check with the posted exposure parameters

18 Step 6 non-inverted vs inverted (ctd) non-inverted clear inverted dark

19 Step 6 add frame (continued) clear dark no frame dark with frame

20 Step 7a launch then finish Complete task Design name (used to reference design in exposure ) Conversion: offline Complete expose job

21 Complete expose job Step 7b launch then finish Wait for completion of conversion Acknowledge end of conversion Finish. If it it is as 100%, but the button says not yet Finish, then stripes are made, but conversion is not done. Quit conversion software, continue on user-pc.! Your conversion data is archived after four weeks (30 days)!

22 Step 8a cleanup JobDirManager Warning: Do this only after writing your Job and when you are sure that you no longer need the data! If you want to remove all your design and conversion data from the conversion pc, then follow these steps: start the job dir manager with Tools->JobDirManager Wait for the update (find all jobs).

23 Step 8b cleanup JobDirManager If you want to remove all your design and conversion data from the conversion pc, then follow these steps: (continued) Select the job name Select fields to be deleted: - convert job - source file - exposure job - target dir (lic files) Delete. All your IP has disappeared from the public domain!

24 Recapitulation Expose options: clear = non-inverted (inside of layout polygon are written with laser) dark = inverted (outside of layout polygon are written with laser)