Heidelberg Instruments VPG200 Conversion software

Transcription

1 Heidelberg Instruments VPG200 Conversion software Retrieve your design to the data directory on the conversion-pc either in the user-pc /Windows environment or in the conversion-pc/linux environment using an internet based mechanism such as: Online storage: my.epfl.ch drive.switch.ch dropbox.com drive.google.com ewa.epfl.ch (epfl outlook) imp.epfl.ch (epfl horde) webmail.epfl.ch (epfl entry point) gmail.com Secure copy - scp winscp.net putty Network drive user-pc (ms windows) mounted from cmigepc Convert_V03_

2 Step 0 start application Get design using the user-pc /Windows environment with a webbrowser WindowsKey+R then type firefox, followed by <cr> WindowsKey+R then type iexplore, followed by <cr> Then save it to one of the dropboxes gdsii or cif that sit on the desktop. Get your design using the conversion-pc/linux environment with the command line or a webbrowser such as firefox, Then save it to the directory /home/convert/gdsii or /home/convert/cif For gdsii, use file extension gds, lowercase not uppercase GDS. NO SPECIAL CHARACTERS: other than underscore i.e. _ in the gdsii-filename. (That means: no dash -, no space, no period., ).

3 Step 0 start application conversion pc/linux pc: Start conversion application by using icon Or by typing app in a terminal / on the command line:

4 Overview Window when you begin: Click-path through progressively disclosed window: Check your exposure window!

5 Conversion user interface pops up Step 1- job name Start with a new job Change default job name job_00 to your favorite and unique name

6 Step 2 design format & data Conversion user interface is updated with frame containing your job name. As you complete fields in the form, new frames are progressively disclosed. Continue specifying the design data: Source File: Add

7 Step 2b design format & data Source File: Add This will open a popup Load GDSII Design or Load CIF Design or... Source File: pick up in directories named after extension. gdsii: located in /home/convert/gdsii cif: located in /home/convert/cif Confirm with open or double-click on the design.

8 Step 2c design cell & layers CIF Options pop up window opens: Top Cell: Select design's structure (often last in list, try automatic) Layer: Select in list of CIF-LayerNames found. GDSII Options pop up window opens: GDSII Structure: Select design's structure Layer: Select layer (tick box) and logical operations (OR/CUT/XOR) Attention to distinguish HIMT-Layer-Nr-0 and GDSII-Layer-Nr-0 In example HIMT: Layer Nr.1 reads data from GDSII-file Layer 50 When done, click Create Default

9 Step 3 view selected data Open a Viewer to review your selection: old school: Tk/Tcl Preview nu skool: OpenGL Viewer

10 Step 4 resolution / write head Select write lense: resolution write lense minimum structure width [nm] address grid [nm] stripe width [mm] number of stripes for width 100mm write speed [mm2/min] write time for 100mm x 100mm [min] High Speed 20mm Standard 5mm Advanced 2mm

11 Step 5 - mirroring Select justification tab Mirror at Y: Activate mirroring of the device: if you are writing a mask, and have not mirrored the design in the layout editor. Check your exposure window! Exposure Window x: y: size according to preview (step 3)? Borders within plate size and centered In case of inverted design edit each border using + some oversize or use add frame option ( step 6) Check Position Preview /HIMT Preview

12 Step 6 non-inverted vs inverted Select Expose options: clear = non-inverted (insides of layout polygon are written with laser) dark = inverted (outside of layout polygon are written with laser) Add Frame Active only with dark Add a clear frame oversizing exposure window

13 Step 7 launch then finish Complete task Design name (used in carrier exposure wizard) Conversion: offline Complete expose job Acknowledge end of conversion finish. Quit conversion software, continue on user-pc.

14 Recapitulation Expose options: clear = non-inverted (inside of layout polygon are written with laser) dark = inverted (outside of layout polygon are written with laser) Check your exposure window!