High Precision Positioning and Motion Control on Silicon Photonics Alignment Applications Hevin Yu

Transcription

1 High Precision Positioning and Motion Control on Silicon Photonics Alignment Applications Hevin Yu SURUGA SEIKI Taiwan Branch / Senior manager

2 Agenda Applications and Market Trends on Silicon Photonics Why Silicon Photonics Alignment Solutions

3 Company Profile Corporate Name: SURUGA SEIKI CO., LTD. Headquarter: Shizuoka City, Japan Established: May, 1964 Global Sales Revenue:10 Billion JPY in FY16 Employees: Over 1,000 employees globally in FY16 Business Summary Development, Manufacture and Sale of Electric, Electronic, Communication and Industrial Machinery and Equipment Optical Equipment Parts for Industrial Machinery Core Technology: High Performance Precise Positioning Technology

4 Global Network Sales Branch Technical Center Production Xi an, Beijing Branch are under the construction. Shanghai Branch China Design Technical Center Shanghai Factory Wuhan Branch Shenzhen Branch Vietnam Factory Korea Shizuoka Headquarter Tokyo Branch Taiwan Branch Silicon Valley SURUGA Seiki Headquarter China Taiwan San Jose Shanghai Vietnam Korea

5 SURUGA Product Lineup Mechanical Parts Components Complex Units Solutions Fusion Equipment System Element Parts Mechanism Technology Unitization Combination technique Controller Application Development Precision optics Measurement technology System Integration Compound Technology Precise Ball Screw Slide Guide Cross Roller Guide R Guide Main components are produced 100% in-house Hi Accuracy Low Cost

6 High Precision Positioning Motorized Stages X-axis stages XY-axis stages Z-axis stages Linear system Move to one direction(to the X axis) type of stage. Motion guide has 3 types of linear ball guide, crossed roller guide and slide guide. Move to two directions(to the X and Y axis) type of stage. Move vertically(to the Z axis) type of stage. Horizontal Z axis means table surface goes up and down. Rotation stages 1-axis Goniometer stages 2-axis Goniometer stages Rotation system Rotary motion type There are type of 360 rotation and tiny angle rotation type Tilt around a stage surface space Perfect for angle control. There are two types of worm gear and ball screw. Biaxial combination. It is possible to control angle variously with 2 axes.

7 Silicon Photonics Applications

8 Applications and Market trends on Silicon Photonics

9 Applications and Market trends on Silicon Photonics

10 Why Integrated Photonics Telecom applications WDM introduces need for highly integrated optical circuits Datacom applications Increasing need for bandwidth between chips Single channel solutions will no longer fulfill requirements Need for densely integrated electronics + optics Embedded sensors Imagine millimeter size spectrometer with source included Embed in tissue (glucose sensing, structural health monitoring ) From: ICPlatform Course on Silicon Photonics, Xiamen 2017

11 Why Silicon Silicon is transparent for l>1.1um Silicon process technology is Mature Good for high volume manufacturing High refractive index contrast -> compact circuits Passive and active functionality Thermo-optic Carrier plasma dispersion Integration with other material: Ge, III-V, From: ICPlatform Course on Silicon Photonics, Xiamen 2017

12 New Solution, New Market Si photonics in existing markets If radical improvement in cost/power/space efficiency e.g. 10 transceivers on the same chip size, on-chip optical interconnects Or is new functionality e.g. enabler for >40Gbps line speed communication New solutions for novel markets Ubiquitous sensing smart city Implantable medical devices From: ICPlatform Course on Silicon Photonics, Xiamen 2017

13 Silicon Photonics Platform Graphics from GF, IBM, IME, GLOBALFUNDRIES

14 Fiber Coupling

15 Fiber coupling - Silicon 1. Grating coupled 2. Edge coupled Challenge: Fiber coupling to sub-micron waveguide From: Packaging and Integration Technologies for Silicon Photonics, SEMICON 2013

16 Grating Coupling example

17 Grating Coupling example

18 Edge Coupling example

19 Edge Coupling example

20 Alignment Solution

21 Fiber Array Rotations Fiber array tilt angles influence maximize optical coupling. Vertical fiber alignment stage is designed to support 6 axes of freedom with center rotations around the fiber array. This feature saves time by allowing small optimizations to be made without moving the fiber away from the chip. q Fiber Array Fiber Array Y Y Y Ty Stage Z X Z X Stage Tx Z Tz X

22 Motorized Vertical Type Fiber Alignment Stage Our vertical type fiber alignment stage provides 6axes of motion. General spec Sub-mm XYZ positioning with 70, 100mm or more XY and 30mm Z +/- 5 Tx, +/- 6 Tz, +/- 6 Ty Center of rotations around fiber array tip Chip stage Optional for rotation (360 ), Gonio (tilt +/- 6, 8 ), Linear XY (13~300mm), Linear Z (4~30mm)

23 Motorized Edge Type Fiber Alignment Stage Our edge type fiber alignment stage also provides multi axes of motion. General spec (ES-6701) <0.5um XYZ positioning with 50mm XZ and 10mm Y +/- 6 Tx, +/- 8 Tz, +/- 8 Ty Center of rotations around fiber array tip Optional for manual or motorized

24 Alignment Stage Module

25 System Configuration SURUGA combines Customized hardware stages (applications like vertical type fiber alignment, edge type fiber alignment, and electrical probes) Intelligent software to automate silicon photonic device testing The diagram below is a schematic representation of how SURUGA might integrate with your existing instruments.

26 Alignment software (IROHA) Easy Operation, Easy Control Main Function JOG (Stage drive with PC mouse operation) Automated Alignment Control (XY, XYZ, and XYZθz Alignment) Contact Sensing (Automatic control GAP each devices) Automated Face Alignment (Patent) (Automatic control parallelism each devices) External Equipment Control (GP-IB, Serial, IO) Profiling (Beam Profile Measurement and Result Display / Save) Input / Output Display / Save (Optical Power, Analog Display) Driving Program (Macro Sequences Free Writing Function)

27 High Resolution Stages New positioning stage for photonics application. X0576D-X X0576D-XYZ Stroke Resolution (Linear Scale) Unidirectional accuracy Positioning Repeatability Lost Motion 30mm 4.88nm 3μm ±10nm 20nm Pitching 20" Yawing 15" Rated Load 10kgf 5kgf(On Z axis) Max Speed 20mm/sec X0576D Series Linear Scale Feedback Precision Linear Guide and Ball Screw XYZ 3 axis type available.

28 Thanks for your listening Q & A