MEMS Pro v5.1 Layout Tutorial Physical Design Mask complexity

Transcription

1 MEMS Pro v5.1 Layout Tutorial 1 Physical Design Mask complexity MEMS masks are complex with curvilinear geometries Verification of manufacturing design rules is important Automatic generation of mask layout is needed 2 1

2 Layout Editor Features Fully hierarchical, cell-based design. - Unlimited number of layers, cells, and levels of hierarchy. File Formats Default: TDB Import/Export: GDSII & CIF Import: DXF Optional: DXF files can be exported through a DXF -GDSII converter 3 MEMS Capabilities Compatible with curves and non-manhattan shapes Library with standard MEMS components Foundry design kits 3D modeler Cross-section Viewer MEMS macros Curve generator Design verification tools 4 2

3 Launching MEMS Pro v5.1 Launch L-Edit from Start> MEMS Pro v5.1> L-Edit Menu Bar Drawing Toolbar Editing Toolbar Standard Toolbar 3D Model Toolbar Locator Layer Palette Layout Area MEMS Pro Toolbar Mouse Button Bar Status Bar Command Line 5 Customizing Design Environment Toolbars can be shown or hidden using View > Toolbars. - Select desired toolbars by checking the boxes. Toolbars can be rearranged by dragging on the tabs. The function of a button pops up when the mouse pointer is placed over it. 6 3

4 Setup Design Technology Go to Setup > Design Technology name: MUMPS V 4.1 Technology units: Microns L-Edit internal unit Precision of internal calculations Conversion factor: 1 internal unit = 1/1000 microns 7 Setup Design Grid Select the Grid tab Locator units: Locator unit = 1000 internal unit (= 1 micron) Locator bar displays location of mouse pointer Grid display: Size of major grid = 10 locator unit Size of minor grid = 1 locator unit Mouse grid: Grid for mouse click = 1 locator unit 8 4

5 Layers Setup Go to Setup > Layers First few layers (Grid Layer to Error Layer) are Special Layers for L-Edit system objects The rest are custom layout layers Layers can be added, deleted, copied, renamed, or rearranged Layer properties Electrical properties: capacitance, resistivity GDSII & CIF parameters Layers can be derived from other layers Boolean operations, grow, shrink, etc. Color rendering is also controlled here. 9 Layer Palette The Layer palette (left side of the screen) displays layer names and color icons The Mouse button functions on layer palette icons are: Left: select active layer Middle: hide/show layer Right: hide/show/lock/unlock individual or all layers Layer Name Color Icons 10 5

6 Information Toolbars The Mouse toolbar: displays functions of mouse buttons Left: left mouse button Center: middle button Right: right mouse button Mouse functions depend on Location of mouse in the application Current mode (drawing, editing, zooming, etc.) Status Bar Status bar displays context-sensitive information about items in the interface 11 Selection Drawing Toolbar port instance box polygons wires circular objects rulers BPR commands Button short cuts to drawing commands: Selection: for selecting objects Drawing objects: box, polygon, circle, pie wedge, torus, port, ruler, instance To draw objects Activate the window of the cell you want to draw in Select the layer you want to draw on by clicking on the icon in the layer palette Select the shape you want to draw Click/drag inside the drawing area (depending on shape) Right click to end polygons 12 6

7 Hands on Example of Drawing 13 Layout Object Shapes Polygons: rectangles, 90-degree, 45-degree, all-angle Wires: 90-degree, 45-degree, all-angle Standard curves: circles, tori, pie wedges Special curves: splines, ellipses, spirals, sinusoids, hyperbola, parabola, etc. 14 7

8 Hands on Example of Editting 15 Editing Toolbar Duplicate Nibble/slice Edit object Flip/rotate Merge/group To edit an object Select the object using the selection tool, or right click Selected objects will usually display different colors/outlines Select the editing button To move an object Drag with middle mouse button To stretch an object Drag the edge with middle mouse button To modify object parameters Edit > Object(s), or Ctrl + E Move by 16 8

9 Basic Layout Features Duplicate Nibble/slice Edit object Flip/rotate Merge/group Rotate (all-angle), flip, slice (all-angle), merge Boolean operations All-angle approximation Rectangular & polar arrays Move by 17 Viewing Transformations View > Zoom, or View > Pan Keyboard shortcuts: Home Zoom out to entire cell + Zoom in - Zoom out W Zoom to selected object Pan left Pan right Pan up Pan down Spacebar Redraw 18 9

10 MEMS Pro Toolbar Library 3D Tools Easy MEMS Curves Tools Edit BC Tags Help 19 Parameterized Component Library Accelerates MEMS design using standard components: Active elements: comb drives, motor Passive elements: springs, bearings Test structures Resonator elements Thermal elements Optical elements Fluidic elements Library is customizable 20 10

11 Test Structures Material property parameters determine accuracy of simulations Standard test structures for characterizing material properties: 21 Hands on Example of Generating a component 22 11

12 Creating a New Cell We will create a new cell Goto Cell > New Type in new cell name: test A blank window opens up, this is the layout area for drawing/editing layout 2-D Axes Micron grid Origin: indicated by a cross 23 Instancing Components Go to Library > Library Palette Common MEMS components can be instanced into design 24 12

13 Library Palette Details Click on Show Details Displays geometric parameters of the selected component that can be modified Select the first element (linear comb) 25 Inserting Components You can Enter parameters in the pop-up window For this example, Use default Click OK Click on the layout area to insert component 26 13

14 Library Components Close the Library Palette Window Press the Home key to zoom out to the whole layout 27 Design Hierarchy The hierarchy of the design can be viewed Go to View > Design navigator Design Navigator Lists all the cells contained in the file, and their hierarchical structure Goto View > Design Navigator Click on the + or boxes to expand/collapse the tree 28 14

15 3D Modeler Generates 3D models from layout & process definition Graphical representation of fabrication process Created from geometrical description of fabrication steps Supports standard foundries and customized processes 29 MEMS Pro Toolbar 3D Tools Edit Process Definition Import or edit process definition for creating 3D model View 3D Model Create or display 3D model Delete 3D Model Export 3D Model Export 3D model for ANSYS simulation (*.SAT, *.ANF, *.IGS or *.MAC) 30 15

16 Edit Process Definition Descriptions of processing steps Currently supported commands: Wafer Deposit Etch Mechanical Polish Wafer bonding Implant Diffusion Electroplating Grow 31 Process Command Wafer Creates a substrate Required first step Parameters Mask Name: layer name to be used Thickness Target: (same as mask name) If no substrate layer is drawn, program uses 110% of MBB of layout area 32 16

17 Process Command Deposit Deposits a new layer of material Parameters Deposit Type: conformal, snowfall, fill Face: Top, bottom, both Layer Name: layer name to be used Thickness Target: (same as mask name) Conformal thickness thickness thickness Snowfall thickness thickness Fill thickness 33 Process Command Etch Etches patterns on deposited layer(s) Parameters Etch Type: surface, bulk, sacrificial Face: top, bottom, both Mask Name: layer name to be used Depth: depth of etch Etch Mask: inside or outside Drawn mask Drawn mask Etch removes: layer(s) to be etched 34 17

18 Dry Etch Command Option Etch Type Wet Anisotropic Wet Isotropic Sacrificial: removes everything on the specified layer; no associated masks 35 Process Command Mechanical Polish Truncates specified depth/thickness from wafer Parameters Face: Top, bottom Depth or Thickness No masks involved depth thickness 36 18

19 Process Command Diffuse Diffuses a specific material into another Parameters Distance Source Target No mask involved Distance Target 37 Process Command WaferBonding Attaching two wafers together to form one new wafer Parameters Top Wafer Bottom Wafer Distance Distance 38 19

20 Process Command Grow Growing one material from within another Parameters Thickness Depth Undercut Source Target 39 Process Command Implant Implanting one material into another Parameters Depth Undercut Source Target 40 20

21 Hands on Example of Generating a 3D Model 41 Generate 3D Model Go to Tools> 3D Tools> Edit Process Definition on the main L- Edit tool bar Click on Import and browse to C:Progam Files> SoftMEMS> MEMS Pro v5.1> MEMSTech> polymumps>polymumps_i.mpd This loads the standard Poly-MUMPs process from Cronos- with some steps remove to run faster Use polymumps.mpd when you want all process steps to be present Check the Display Step by Step check box Click OK to end the dialog 42 21

22 Generate 3D Model Step-by-step creation of 3D model can be generated Go to Tools> 3D Tools > View 3D Model Click on Regenerate in the dialog. The 3D Model will appear in a new Window Click on > to go to next step, or >> to skip to the end 43 Viewing 3D Model Layer palette now displays 3D layers Each layer can be shown/hidden Right click on icon and deselect Rotate/Zoom using 3D Model Toolbar Keyboard shortcut: Ctrl + mouse buttons 44 22

23 3D Models Easy user interface for viewing: rotating, zooming, panning, etc. Show/hide certain layers to reveal hidden details Cut-out views to see the interior Can be saved as BMP or JPG 45 Hands on Example of Generating a Cross section 46 23

24 Cross Section View To display all layers Right click any of the color palette icons, and select Show All Click to generate cross-section view of 3D model Specify cross-section line in pop-up window Click Horizontal Click OK 47 Cross Section View Zoom/pan using 3D toolbar buttons Rotation functions & preset views are disabled Zoom: +, - Window zoom: press z, then drag the mouse across the region to view Fit window: Home key Pan:,,, Can be saved as BMP or JPG files 48 24

25 Another 3D Example Go to File > Open on the main tool bar Browse to C:Progam Files/SoftMEMS/MEMSv5.1/Examples/3DModel/PolyMUMPS/LinRes/LinRes.tdb This loads the standard Poly-MUMPs process from Cronos Go to 3D Tools on the MEMS Pro Tool bar and select View 3D Model 49 Exporting 3D Models 3D models can be exported for FE analysis ANF: ANSYS specific SAT: standard format MAC: APDL with boundary conditions Use Tools> 3D Tools> Export 3D Model from main tool bar 50 25

26 Resonator Example Library components can be combined to form whole structures 51 MEMS Pro Toolbar Easy MEMS Plate Release Adds holes and dimples to design to help with wet release. Polar Array Creates polar arrays 52 26

27 Special Layout Features Area calculation (single or multiple objects) Resistance calculation Block place and route Parameterized device generator resistors, inductors, capacitors, MOSFET 53 UPI User Programmable Interface UPI provides tools for Automation of commonly performed tasks Extending layout command and function set User-programmable C-language macros Raw C-code (.C) Compiled (.DLL) IP Protection Example UPI application: Gray-scale mask for 3D lenses 54 27

28 Design Verifications Tools Design verification tools for MEMS Compatible with curves and non-manhattan (all-angle) shapes Tools Design Rule Checker (DRC) Netlist Extractor Layout vs. Schematics (LVS) 55 Design Rule Checker Checks for Manufacturability Mixed MEMS and IC design rules Standard and user-configurable design rule sets Minimum width Exact width Spacing Overlap Others Full-chip or selected regions Imports Dracula rules set DRC Error Navigator: 56 28

29 Netlist Extractor Extraction of netlist from layout for Spice simulation Recognizes active and passive components, as well as non-standard and compound devices subcircuit recognition descriptions : definitions of standard and non-standard devices extract definition file : layer interconnectivity Spice Netlist 57 Layout vs. Schematics Comparison between Spice models generated by Netlist Extractor and Schematic Editor Parameter comparison with user-specified tolerance to verify layouts 58 29

30 Design Kits All setup information can be loaded from standard or custom design kits Unit/grid setting Layers setup 3D process information DRC rules 59 30