FULLY ORGANIC INTEGRATED ARRAYS ON FLEXIBLE SUBSTRATES FOR X-RAY IMAGING

Transcription

1 Pawel E. Malinowski FULLY ORGANIC INTEGRATED ARRAYS ON FLEXIBLE SUBSTRATES FOR X-RAY IMAGING IISW Snowbird, 13 th June 2013

2 FLEXIBLE ORGANIC IMAGERS: MOTIVATION light-weight flexible robust compatible with x-ray scintillators 2

3 FLEXIBLE ORGANIC IMAGERS: MOTIVATION 3

4 FLEXIBLE ORGANIC IMAGERS: MOTIVATION organic photodetectors (OPD) integration of imagers imaging results 4

5 organic photodetectors (OPD) 5

6 PHOTODETECTOR MADE WITH MOLECULES C 60 fullerene SubPc (subphthalocyanine) 6

7 PHOTODETECTOR MADE WITH MOLECULES organic active layer acceptor (n-type) C 60 SubPc donor (p-type) C 60 fullerene SubPc (subphthalocyanine) 7

8 HIGH ABSORPTION OF ULTRATHIN LAYERS organic active layer 8

9 scintillators HIGH ABSORPTION OF ULTRATHIN LAYERS organic active layer 9

10 detector (0.1 µm) OPD SPECTRUM = SPECTRUM OF MOLECULES top contact organic active layer bottom contact glass substrate SubPc: 20 nm thick C 60 : 30 nm thick 10

11 detector (0.1 µm) FROM ORGANIC THIN FILMS TO PHOTODETECTORS top contact organic active layer bottom contact glass substrate Ag BCP 30 nm C nm SubPc MoO 3 Au semi-transparent cathode electron transport layer acceptor donor hole transport layer reflective anode 11

12 detector (0.1 µm) Acceptor Cathode Anode Donor ORGANIC PHOTODETECTOR IN ACTION top contact organic active layer bottom contact glass substrate

13 integration with organic ROIC on foil 13

14 foil (25 µm) PENTACENE-BASED OTFT ROIC readout (0.2 µm) bottom contact pentacene S/D gate dielectric gate metal planarization flexible foil 14

15 foil (25 µm) detector (0.1 µm) INTEGRATION OF OPD AND OTFT readout (0.2 µm) top contact organic active layer bottom contact edge cover layer pentacene S/D gate dielectric gate metal planarization flexible foil 15

16 foil (25 µm) detector (0.1 µm) INTEGRATION OF OPD AND OTFT readout (0.2 µm) 200 µm 30 µm 70 µm readout TFT top contact organic active layer bottom contact edge cover layer pentacene S/D photodetector area gate dielectric gate metal planarization flexible foil data/select lines 200 µm 16

17 foil (25 µm) detector (0.1 µm) ENCAPSULATION: PROTECTION AGAINST O 2 /H 2 O readout (0.2 µm) flex-bonding encapsulation top contact organic active layer bottom contact edge cover layer pentacene S/D gate dielectric gate metal planarization flexible foil encapsulation 17

18 foil (25 µm) readout (0.2 µm) detector (0.1 µm) READINESS FOR SCINTILLATOR INTEGRATION x-rays scintillator λ 550 nm top contact organic active layer bottom contact encapsulation edge cover layer pentacene S/D gate dielectric gate metal planarization flexible foil processing on foil flexibility light weight unbreakableness upscalability 18

19 imaging results 19

20 CLEAR SIGNAL UNDER ILLUMINATION 20

21 CLEAR SIGNAL UNDER ILLUMINATION 21

22 PHOTOCURRENT LINEAR FROM µw/cm 2 22

23 IMAGING WITH 1 MM PITCH IMAGER imager with shadow mask flexible fanout shadow mask 23

24 IMAGING WITH 1 MM PITCH IMAGER imager with shadow mask flexible fanout resulting image shadow mask 24

25 IMAGING WITH 200 µm PITCH IMAGER imager with shadow mask flexible fanout resulting image shadow mask 25

26 CONCLUSIONS OPD integrated with OTFT 32x32 px imagers on foil imaging with shadow masks 26

27 OUTLOOK more aggressive pitch larger array sizes x-ray visible 27

28