Shutdown & Startup Procedure for JEOL JSM-7600F FESEM

Transcription

1 Shutdown & Startup Procedure for JEOL JSM-7600F FESEM Shutdown Procedure 1. Ensure the Liquid Nitrogen Trap (LNT) as shown in Fig. 1 has no liquid nitrogen (LN2) & is at room temperature (not cold). If there is LN2, wait for it to dry until room temperature before proceeding to further step. Fig. 1: Liquid Nitrogen Trap 2. Ensure Exchange Position light is ON as shown in Fig Ensure Holder light is OFF, which mean there is no specimen inside the specimen chamber (See Fig. 2). 4. Ensure EVAC is ON and VENT light is OFF, which mean specimen exchange chamber is in vacuum (See Fig. 2). Fig. 2: Exchange Position, Holder Present, Evac or Exch Out & Vent or Exch In Status

2 5. Under the JEOL application program file menu, click Maintenance & select GUN/VAC. A Maintenance window will pop out (See Fig. 3). In this window, click GUN/VAC & click Shutdown. Wait for the Shutdown button to grey off before proceeding further. Fig. 3: GUN Startup/ Shutdown 6. Under the JEOL application program file menu, click File & select Exit to exit the JEOL application program. A JEOL application program login window will pop out. Click exit to close this window. 7. Shutdown the FESEM PC.

3 8. Switch OFF OPE SW (located in front of the operation console) as shown in Fig. 4. I lamp is lit meaning ON & O lamp is lit meaning OFF. Open the O cover, push & release the button to switch OFF. Ensure I is not lit & O is lit. Fig. 4: Operation Power Switch 9. Switch OFF the EYELA CCA-1111 water chiller by pressing Run/Stop labeled 1 once, followed by rocking the power switch labeled 2 to O position. (See Fig. 5) Fig. 5: EYELA CCA-1111 Water Chiller

4 10. Switch OFF the VAC SW (located in front of the operation console) as shown in Fig. 6. Open the O cover, push & release the button to switch OFF. Ensure I is not lit & O is lit. Wait for 10 minutes. Fig. 6: VAC Switch 11. Switch OFF the SIP POWER switch (located behind the operation console) as shown in Fig. 7. Fig. 7: SIP Power Switch

5 12. Locate the UPS-500E as shown in Fig. 8. Ensure both OPERATION & BACK UP are lit & the meter reads ~5kV when the METER kv/ua selector switch is at kv position. This step is extremely important!!!!!!!!!!! Fig. 8: UPS-500E 13. Switch OFF the MAIN SW (located in front of the operation console) as shown in Fig. 9. Open the O cover, push & release the button to switch OFF. Ensure I is not lit & O is lit. Fig. 9: MAIN Switch

6 14. Switch OFF the 3 black circuit breakers ELCB11 (1 st ), ELCB12 (2 nd ) & ELCB1 (last) in sequence as shown in Fig. 10, located behind the operation console. Fig. 10: ELCB1, ELCB11 & ELCB Turn OFF your in-house nitrogen gas supply to the FESEM. Do not adjust the regulator. 16. Switch OFF your in-house main power supply to the water chiller. 17. Switch OFF your in-house main power supply to the FESEM.

7 Startup Procedure 1. Locate the UPS-500E as shown in Fig. 11. Ensure OPERATION & BACKUP are still lit & the meter reads ~5kV when the METER kv/ua selector switch is at kv position. If the shutdown period is long (~5 days), backup indicator lamp may not lit as the battery is fully utilized. If it is, CALL US & STOP THE REST OF STEPS. Fig. 11: UPS-500E 2. Switch ON your in-house main power supply to the FESEM. 3. Switch ON your in-house main power supply to the water chiller. 4. Turn ON your in-house nitrogen gas supply to the FESEM. Do not adjust the regulator. 5. Switch ON the 3 black circuit breakers ELCB11 (1 st ), ELCB12 (2 nd ) & ELCB11 (last) in sequence as shown in Fig. 12, located behind the operation console. Fig. 12: ELCB1, ELCB11 & ELCB12

8 6. Switch ON the MAIN SW (located in front of the operation console) as shown in Fig. 13. Open the I cover, push & release the button to switch ON. Ensure I is lit & O is not lit. Fig. 13: MAIN Switch 7. Switch ON the SIP POWER switch (located behind the operation console) as shown in Fig. 14. Fig. 14: SIP Power Switch

9 8. Switch ON the VAC SW (located in front of the operation console) as shown in Fig. 15. Open the I cover, push & release the button to switch ON. Ensure I is lit & O is not lit. Fig. 15: VAC Switch 9. Switch ON the EYELA CCA-1111 water chiller by rocking the power switch labeled 2 to I position, followed by pressing Run/Stop labeled 1 once. (See Fig. 16) Fig. 16: EYELA CCA-1111 Water Chiller

10 10. Switch ON OPE SW (located in front of the operation console) as shown in Fig. 17. Open the O cover, push & release the button to switch ON. Ensure I is lit & O is not lit. Fig. 17: Operation Power Switch 11. Startup the FESEM PC. Under window login, click SEMUser & enter password SEMUser. 12. Double click on the FESEM program. A JEOL application program window login will pop out. Click Guest. 13. You will be prompt to calibrate the stage. Click execution & while executing, it will be in green. After execution, the green indicator will be grey. When grey, click close. 14. Click Exchange Position (See Fig. 18). 15. Under the JEOL application program file menu, click Maintenance & select GUN/VAC. A Maintenance window will pop out. In this window, ensure SIP-1 is <2.0E-007Pa & SIP-2 is <4.0E-006Pa (See Fig. 18). CALL US IF OUT OF SPEC. 16. Under the JEOL application program file menu, click Maintenance & select GUN/VAC. A Maintenance window will pop out (See Fig. 18). In this window, click GUN/VAC & click Startup. Wait for the Startup button to grey off before proceeding further. 17. After 2-3 hours, check specimen chamber vacuum located under SEM Monitor display (See Fig. 18). It must be <2.8E-4Pa before operation. If it is, you may fill up the LNT with LN2.

11 Fig. 18: Window Displays of SIP/Chamber Vacuum/Exchange Position/Gun Startup