Public Public Slide 2 January Chips are everywhere Introducing ASML ASML s place in the industry

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1 Slide 2 Slide 3 Agenda Chips are everywhere Introducing ASML ASML s place in the industry Chips are everywhere Lithography, the driving force behind Moore s Law Faster, smaller, greener Real Estate Teun Wartenbergh Director World Wide Real Estate May 25 th 2016 It s hard to imagine a world without chips More than 200 billion ICs are made every year Slide IC units, in billions Slide 5 Slide In, 221 billion ICs were produced 30 for every man, woman and child on the planet. Introducing ASML Global semiconductor industry sales were $333 billion Data: WSTS 1

2 ASML makes the machines for making those chips Slide 7 Founded in 1984 as a spin-off from Philips Slide 8 A global presence 22 March 2016 Lithography is the critical tool for producing chips All of the world s top chip makers are our customers 2015 sales: 6.3 bln More than 14,600 employees (FTE) worldwide Source: ASML Q ,300 employees 8,800 employees 2,500 employees Over 70 sales and service offices located worldwide A global presence A market of 12 large ASML customers Slide 10 Slide 11 Slide 12 Wilton (CT) San Diego(CA) Korea Technology Partnership Award Preferred Quality Supplier Award Best In Value Award Top three with record 9.0 mark in VLSI s BEST Chip Making Equipment suppliers 2015 Company 2015 semi capex (est., $M) Samsung 13,000 TSMC Group 9,000 ASML s place in the industry Intel 7,200 SK Hynix 4,700 Globalfoundries 4,000 Micron Technology 3,800 Toshiba (incl. SanDisk) 3,095 Sony 1,991 Inotera Memories 1,836 United Microelectronics Group 1,800 SMIC Group 1,500 Chandler (AZ) Veldhoven Taiwan Source: Gartner, Q Infineon Technologies 896 2

3 Driving the semiconductor industry: Moore s Law Gordon Moore (1965): Number of transistors per chip doubles every year. Later adjusted to two years, the trend has held for more than four decades. Slide 13 Moore s Law makes chips cheaper $110 for 1 GB NAND Flash price 1 GB [$] Total Total Total Total Total Total Total Total Total $0.34 for 1 GB Total Total Est. Total ,1 Flash price per GB (in dollars) Slide 14 and more energy-efficient Computations per Kilowatt hour double every 1.5 years Computations per kwh laptops 1.E+16 SiCortex SC E+15 Dell Dimension E+14 Gateway P MHz 1.E+13 IBM PS/2E + Sun SS1000 Dell Optiplex GXI 1.E /25 and 486/33 Desktops 1.E+11 IBM PC 1.E+10 IBM PC-AT Cray 1 supercomputer IBM PC-XT 1.E+09 DEC PDP-11/20 1.E+08 SDS E+07 Commodore 64 Univac III (transistors) 1.E+06 1.E+05 Univac I Univac II 1.E+04 Regression results: 1.E+03 N = 76 EDVAC Adjusted R-squared = E+02 Eniac Comps/kWh = exp( x year ) Average doubling time (1946 to 2009) = 1.57 years 1.E+01 1.E Source: Jonathan Koomey, Lawrence Berkeley National Laboratory and Stanford University, 2009 Slide 15 Moore s Law means doing more with less Slide 16 Moore s Law means doing more with less Slide 17 Slide 18 Cray 1: The first supercomputer 8 megabytes of memory Weight of an elephant (5.5 tons) 150 kilowatt power supply (enough for 50 households) Freon cooling system $8.8 million ($30 million in today s dollars) The supercomputer in your pocket: a fraction of the materials, price, power consumption ASML Real Estate

4 Introduction to ASML Veldhoven Our locations in the Netherlands June 2015 Welcome to where the magic happens Confidential Confidential Slide 21 <Date> Slide ASML Motion in Oirschot Temporary offices at High Tech Campus in Eindhoven Building 21 Eindhoven Airport Main campus and off-campus buildings in Veldhoven employees ( ww) Our magic has two key ingredients: lab and fab Lab-fab and our relentless focus on innovation m² m² R&D engineers nationalities net office space cleanroom space Lab-fab and our relentless focus on innovation Slide 22 Slide 23 Slide 24 PAS 2500 (1987) L A B F A B 80s 1985 Our first lab-fab: Building 1 in Veldhoven Constructed between Nov 1984 Aug Our first machine was launched at SEMICON West. Multidisciplinary R&D environment of 5,000 engineers who design the lithography machines that enable Moore s Law Cleanroom environment where lithography machines are assembled, tested and adjusted with diligence and care 90s PAS 5500 () 0.90 x 1.47 x x 1.76 x kg Ballroom-type 38 m², 152 m³ 00s Office Building 3 Office Building 7 Office Building 8 ASML goes public. Production capacity of Cleanroom Building 1 doubles. Dubbed Corporate Technology Center, strong R&D focus. 20-floor office block houses 900 employees in a total area of 18,500 m². TWINSCAN is born. Office Building 2 Scattered departments are co-located. ASML climbs to 3rd position in world market thanks to the PAS5500 stepper. The campus is born: Cleanroom Building 4 New 9,000 m2 cleanroom and new high-speed wafer scanners help ASML to become 2nd largest litho vendor. Construction starts on Cleanroom Building 5, Office Building 6 Construction to add 10,000 m² of brand new cleanroom space Cleanroom 5B and gowning 5F open Cleanroom 5B connects the main cleanrooms 4 and 5. New cabins available for NXT production. 80s 1985 Our first lab-fab: Building 1 in Veldhoven Constructed between Nov 1984 Aug Our first machine was launched at SEMICON West. 90s 5500 kg 00s Office Building 3 Office Building 7 Office Building 8 ASML goes public. Production capacity of Cleanroom Building 1 doubles. Dubbed Corporate Technology Center, strong R&D focus. 20-floor office block houses 900 employees in a total area of 18,500 m². TWINSCAN is born. Office Building 2 Scattered departments are co-located. ASML climbs to 3rd position in world market thanks to the PAS5500 stepper. The campus is born: Cleanroom Building 4 New 9,000 m2 cleanroom and new high-speed wafer scanners help ASML to become 2nd largest litho vendor. Construction starts on Cleanroom Building 5, Office Building 6 Construction to add 10,000 m² of brand new cleanroom space Cleanroom 5B and gowning 5F open Cleanroom 5B connects the main cleanrooms 4 and 5. New cabins available for NXT production. 4

5 Lab-fab and our relentless focus on innovation 80s Slide 26 XT (2004) NXT () 2.02 x 4.50 x x 4.50 x kg kg m2, 264 m³ 95 m2, 475 m³ 335 m², 1841 m³ 90s 1985 Our first lab-fab: Building 1 in Veldhoven Constructed between Nov 1984 Aug Our first machine was launched at SEMICON West. 00s Office Building 3 Office Building 7 Office Building 8 ASML goes public. Production capacity of Cleanroom Building 1 doubles. Dubbed Corporate Technology Center, strong R&D focus. 20-floor office block houses 900 employees in a total area of 18,500 m². TWINSCAN is born. Office Building 2 Scattered departments are co-located. ASML climbs to 3rd position in world market thanks to the PAS5500 stepper. The campus is born: Cleanroom Building 4 Construction starts on Cleanroom Building 5, Office Building 6 Construction to add 10,000 m² of brand new cleanroom space s New 9,000 m2 cleanroom and new high-speed wafer scanners help ASML to become 2nd largest litho vendor. Cleanroom 5B connects the main cleanrooms 4 and 5. New cabins available for NXT production. 7 partners m³ steel (1000 people) concrete engineering hours The first factory and office space dedicated to EUV systems Cleanrooms in Wilton, San Diego expand for EUV 6,800 m² of space dedicated to EUV manufacturing: includes aorta, cabins and assembly Wilton has added 418 m² for EUV manufacturing and testing, while San Diego is retooling 4,650 m² for EUV manufacturing (ongoing) Conventional approach is sequential engineering Total cycle time 5-7 years Master planning 15 km With this (9,200 m2) cleanroom, ASML s total cleanroom space in Veldhoven now tops 50,000 m² Lab-fab also means machine and cleanroom are one Slide kg mechanical piping 2015 Cleanroom 5H opens Cleanroom 5C, gowning 5E and Office Building 6 open Building our new lab-fab needed a tailored approach thermal capacity 235 km kg self interest 53 megawatt electrical cabling 3.20 x 8.30 x Cleanroom 5D open Cleanroom 5B and gowning 5F open TRUST = competence x collaboration x flexibility (scope/schedule/cost) Confidential Slide 27 <Date> NXE (2011) June 2015 Our brand new EUV lab-fab will fuel the next decade Slide 25 Land Acquisition Zoning & Infra- Engineering & Budget Permits Tender & Contracting When machine design changes, the cleanroom has to change as well Slide 30 Every day, our engineers do R&D, testing, assembly The machine is the heart Realization And it needs cabinets, source, software It fully integrates with the building IN SPEC ON TIME IN BUDGET ASML s approach is concurrent engineering Total cycle time 3-4 years labor hours Master planning 35 scope changes Where it gets its utilities All in a cleanroom environment Land Acquisition Zoning & Infra Concurrent Engineering & Budget + scope change control Permits 150 m 83 m³/s 2 m³/s distribution panels air handling pump capacity different utilities sensors Contracting Row 1 Row 2 etc. 5

6 Integration into plenum and CUB (Central Utility Building) Slide 31 Slide 32 Slide 33 CUB Plenum directly above cleanroom ceiling The cleanroom has a 55-cm thick vibration-free concrete floor, weighing the amount of 1,000 Land Rover Discoveries Foundation for the super are 35m³ each m³ of concrete kg steel wire 1500 piles, each meters deep: 25 km piles in total 30 prefab concrete columns of 40 tons each (1.2m x 1.2m x 12m) Total steel mass amounts to kg: that s the Eiffel tower! The super can carry 3 office towers Tolerances of 1 millimeter Slide 34 Slide 35 Slide 36 Main distribution net (water, air) is integrated during shell construction due to its size and weight Air handling units, pumps, water distribution It s all about trust: collaboration, flexibility and competence sharing between partners are key to schedule, cost and scope management Total of 32 utilities are supplied to factory safely, efficiently and flexible to future kva 60 km 100 km 2 m³/s 83 m³/s cooling towers transformers power cable data cable cooling water make up air Waste water Pa 18 km 40x/hour data pre-vacuum & treatment cable tray air refreshed test protocols connections abatement 6500 Nm³/h 2,5 MW 53 MW 20 km 15km 4500 kw central compressors emergency power thermal capacity fire safety cabling mechanical piping heating Total of piles as base of an elevated floor (tolerance of 0.3 mm) Distribution of cabin utilities through floor, walls and ceiling Cleanroom totals m² (20 cabins and sub fab), each cabin and sub fab total 335 m² Strict cleanroom policy for gowning and cleaning Each cabin holds 77 HEPA (High Efficiency Particulate Air) filters 6

7 Slide 37 Every element is labeled and put in configuration control Pipes and utilities are flushed for 3 weeks before transfer (contamination control) Punch list contained 32 items for further improvement (a newly built house generally has 100!) 7