QUEST 3D RLCG Extraction Depending on Frequency. RF Structures Parasitic Extractor

Transcription

1 QUEST 3D RLCG Extraction Depending on Frequency RF Structures Parasitic Extractor

2 Introduction Type of Simulation Inputs / Outputs Graphical Interface Technology Process Layout Field Solver Output DOE Outputs Conclusion QUEST - RF Structures Parasitic Extractor - 2 -

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4 Dedicated to characterization and simulation of multi-ports structures (Transmission Lines and Inductance Loops) Based on a 3D Field Solver developed in LETI that solves Quasistatic Maxwell equation and a 3D process simulator Uses an advanced numerical method called Fictitious Domain Combination of surfacic and regular volumic grid Fast calculation and low memory needs High emphasis on automation and ease of use QUEST - RF Structures Parasitic Extractor - 4 -

5 Transmission Lines Multi-Ports QUEST - RF Structures Parasitic Extractor - 5 -

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7 Intuitive interfaces: Each icon represents a stage Building input files step by step Tooltips provide a quick help Delete the layer selected GUI based on Qt from Trolltech QUEST - RF Structures Parasitic Extractor - 7 -

8 The Technology Interface defines Mappings between GDSII number and Layer Names The connections between each layers The electrodes definition QUEST - RF Structures Parasitic Extractor - 8 -

9 The Process Interface defines The properties of materials The process layer thicknesses The process variables QUEST - RF Structures Parasitic Extractor - 9 -

10 The Layout Interface defines the layout file name (GDSII format) and the cell name QUEST - RF Structures Parasitic Extractor

11 Select your type of simulation Transmission Lines Multi-Ports (Inductor) The Frequency Interface defines: The variation type (Constant, List or Range) Frequency values QUEST - RF Structures Parasitic Extractor

12 The Electrodes Interface defines The electrode names The port numbers (Multi-Ports) The line numbers (Transmission Lines) QUEST - RF Structures Parasitic Extractor

13 The Grid Interface defines: The step of each grid line in the X/Y directions The number of slices for each dielectric layer in the Z direction The geometrical progression ratio AIR Z PMD3 PMD2 PMD1 SUBS Y X QUEST - RF Structures Parasitic Extractor

14 The Field Solver Interface defines The residue threshold for capacitance/ Inductance computations The maximum number of iterations for capacitance/inductance computations The box definition (computation windows) Y X QUEST - RF Structures Parasitic Extractor

15 The Simulation Parameters Interface defines Mode Parameters (optional) Used to improve the computations in Transmission Lines simulation Resistive Parameters Zo, the characteristic impedance Added Resistance, the resistance of the measurement equipment Base Of Domain (Grounded or Floating) QUEST - RF Structures Parasitic Extractor

16 The Output Interface defines The directory to store the results Which results are saved The results file names QUEST - RF Structures Parasitic Extractor

17 The Design Of Experiments Interface defines: The type of variation of each variable (Range, List, constant or Expression) The start and the stop value and the steps of each variable PMD2_THICK, RANGE, Linear, From 3 To 10, Steps 10 PMD2_THICK, LIST, MET2_THICK, RANGE, Linear, From 0.1 To 1, Steps 10 PMD2_THICK = MET2_THICK QUEST - RF Structures Parasitic Extractor

18 The Run Interface allows To start the simulation To stop the simulation To cancel the simulation To open the Session Window (log file) To visualize the current session number QUEST - RF Structures Parasitic Extractor

19 Database Name GDSII Name Session Number The file containing values of variables The S-Parameters file in a SPICE format The log file The SPICE file of the inductor model The TonyPlot 3D structure file The Q-Factor file in TonyPlot format The RLCG Parameters file in TonyPlot format The S-Parameters file in TonyPlot format The Y-Parameters file in TonyPlot format The Z-Parameters file in TonyPlot format QUEST - RF Structures Parasitic Extractor

20 The 3D interconnect structure is generated with previous layout and process description (dielectric layers hidden) Entire 3D structure Zoom on the 3D structure with the meshing QUEST - RF Structures Parasitic Extractor

21 The S-Y-Z-Parameters, Q factor and RLGC parameters can be plotted in TonyPlot Q factor file in TonyPlot format Q factor plotted in TonyPlot QUEST - RF Structures Parasitic Extractor

22 Frequency dependent SPICE model for the inductor Model schematic SPICE netlist QUEST - RF Structures Parasitic Extractor

23 Frequency independent SPICE model for the inductor Model schematic SPICE netlist QUEST - RF Structures Parasitic Extractor

24 Circuit with three bus lines to analyze the coupling effect W-Element SPICE file Results of Crosstalk-Induced delay simulation using W-Element SPICE model QUEST - RF Structures Parasitic Extractor

25 Use Analysis stage to write and run scripts. A script to load results, export them in a CSV format and create models. QUEST - RF Structures Parasitic Extractor

26 Load results in the Worksheet Use Optimizer to fit your models Compare your models to the simulation QUEST - RF Structures Parasitic Extractor

27 3D Field Solver User Friendly GUI Mode Batch Mode SUN 32/64-bits PC LINUX QUEST Outputs: TonyPlot SPICE simulators Worksheet Optimizer (models) Transmission Lines Multi-Ports QUEST - RF Structures Parasitic Extractor